KR20240031949A - 반도체 가공용 보호 시트 및 반도체 장치의 제조 방법 - Google Patents

반도체 가공용 보호 시트 및 반도체 장치의 제조 방법 Download PDF

Info

Publication number
KR20240031949A
KR20240031949A KR1020237040010A KR20237040010A KR20240031949A KR 20240031949 A KR20240031949 A KR 20240031949A KR 1020237040010 A KR1020237040010 A KR 1020237040010A KR 20237040010 A KR20237040010 A KR 20237040010A KR 20240031949 A KR20240031949 A KR 20240031949A
Authority
KR
South Korea
Prior art keywords
wafer
adhesive layer
semiconductor processing
protective sheet
meth
Prior art date
Application number
KR1020237040010A
Other languages
English (en)
Korean (ko)
Inventor
카즈유키 타무라
Original Assignee
린텍 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 린텍 가부시키가이샤 filed Critical 린텍 가부시키가이샤
Publication of KR20240031949A publication Critical patent/KR20240031949A/ko

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J201/00—Adhesives based on unspecified macromolecular compounds
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00—Adhesives in the form of films or foils
    • C09J7/30—Adhesives in the form of films or foils characterised by the adhesive composition
    • C09J7/38—Pressure-sensitive adhesives [PSA]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2203/00—Applications of adhesives in processes or use of adhesives in the form of films or foils
    • C09J2203/326—Applications of adhesives in processes or use of adhesives in the form of films or foils for bonding electronic components such as wafers, chips or semiconductors
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2301/00—Additional features of adhesives in the form of films or foils
    • C09J2301/30—Additional features of adhesives in the form of films or foils characterized by the chemical, physicochemical or physical properties of the adhesive or the carrier
    • C09J2301/312—Additional features of adhesives in the form of films or foils characterized by the chemical, physicochemical or physical properties of the adhesive or the carrier parameters being the characterizing feature
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
    • H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
    • H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L2221/68327—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1020237040010A 2021-07-06 2022-03-25 반도체 가공용 보호 시트 및 반도체 장치의 제조 방법 KR20240031949A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021112207 2021-07-06
JPJP-P-2021-112207 2021-07-06
PCT/JP2022/014415 WO2023281859A1 (ja) 2021-07-06 2022-03-25 半導体加工用保護シートおよび半導体装置の製造方法

Publications (1)

Publication Number Publication Date
KR20240031949A true KR20240031949A (ko) 2024-03-08

Family

ID=84801687

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020237040010A KR20240031949A (ko) 2021-07-06 2022-03-25 반도체 가공용 보호 시트 및 반도체 장치의 제조 방법

Country Status (5)

Country Link
JP (1) JPWO2023281859A1 (ja)
KR (1) KR20240031949A (ja)
CN (1) CN117413350A (ja)
TW (1) TW202303742A (ja)
WO (1) WO2023281859A1 (ja)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015156389A1 (ja) 2014-04-11 2015-10-15 リンテック株式会社 バックグラインドテープ用基材、及びバックグラインドテープ
JP2015183008A (ja) 2014-03-20 2015-10-22 リンテック株式会社 粘着シート

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4014283B2 (ja) * 1998-03-20 2007-11-28 リンテック株式会社 帯電防止性粘着シート
JP5534896B2 (ja) * 2010-03-30 2014-07-02 古河電気工業株式会社 帯電防止性半導体加工用粘着テープ
JP5603279B2 (ja) * 2011-03-30 2014-10-08 古河電気工業株式会社 放射線硬化性半導体加工用粘着テープ
SG11202012961SA (en) * 2018-06-26 2021-01-28 Lintec Corp Semiconductor processing adhesive tape and method of manufacturing semiconductor device
JP7319134B2 (ja) * 2019-08-01 2023-08-01 リンテック株式会社 半導体素子の製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015183008A (ja) 2014-03-20 2015-10-22 リンテック株式会社 粘着シート
WO2015156389A1 (ja) 2014-04-11 2015-10-15 リンテック株式会社 バックグラインドテープ用基材、及びバックグラインドテープ

Also Published As

Publication number Publication date
JPWO2023281859A1 (ja) 2023-01-12
CN117413350A (zh) 2024-01-16
TW202303742A (zh) 2023-01-16
WO2023281859A1 (ja) 2023-01-12

Similar Documents

Publication Publication Date Title
KR102357444B1 (ko) 점착 시트
CN109743881B (zh) 半导体加工用粘着胶带以及半导体装置的制造方法
KR102365799B1 (ko) 반도체 가공용 점착 테이프, 및 반도체 장치의 제조 방법
KR102632032B1 (ko) 반도체 가공용 점착 테이프 및 반도체 장치의 제조 방법
KR102603367B1 (ko) 반도체 가공용 점착 테이프 및 반도체 장치의 제조 방법
CN108377659B (zh) 半导体加工用胶粘带、以及半导体装置的制造方法
JP7488678B2 (ja) 半導体加工用保護シートおよび半導体装置の製造方法
JP7381448B2 (ja) 粘着テープおよび半導体装置の製造方法
TWI744468B (zh) 半導體加工用黏著帶以及半導體裝置的製造方法
KR20240031949A (ko) 반도체 가공용 보호 시트 및 반도체 장치의 제조 방법
KR20240031948A (ko) 반도체 가공용 보호 시트 및 반도체 장치의 제조 방법
CN113471129A (zh) 半导体加工用保护片及半导体装置的制造方法
KR20240031951A (ko) 반도체 가공용 보호 시트 및 반도체 장치의 제조 방법
KR20240031950A (ko) 반도체 가공용 보호 시트 및 반도체 장치의 제조 방법
KR20230160228A (ko) 반도체 가공용 점착 테이프 및 반도체 장치의 제조방법
KR20230159373A (ko) 반도체 가공용 점착 테이프 및 반도체 장치의 제조방법
KR20230159372A (ko) 반도체 가공용 점착 테이프 및 반도체 장치의 제조방법
KR20230163358A (ko) 반도체 가공용 점착 테이프 및 반도체 장치의 제조방법
KR20240097723A (ko) 워크 가공용 보호 시트 및 워크 개편화물의 제조 방법