KR20160095295A - Conductive film with a protective coating layer and method for manufacturing of the same - Google Patents

Conductive film with a protective coating layer and method for manufacturing of the same Download PDF

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Publication number
KR20160095295A
KR20160095295A KR1020150016261A KR20150016261A KR20160095295A KR 20160095295 A KR20160095295 A KR 20160095295A KR 1020150016261 A KR1020150016261 A KR 1020150016261A KR 20150016261 A KR20150016261 A KR 20150016261A KR 20160095295 A KR20160095295 A KR 20160095295A
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South Korea
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protective coating
conductive film
coating layer
transparent conductive
solution
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KR1020150016261A
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Korean (ko)
Inventor
신권우
장덕진
최윤수
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전자부품연구원
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Publication of KR20160095295A publication Critical patent/KR20160095295A/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B5/00—Non-insulated conductors or conductive bodies characterised by their form
    • H01B5/14—Non-insulated conductors or conductive bodies characterised by their form comprising conductive layers or films on insulating-supports
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/02—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of metals or alloys

Abstract

The present invention relates to a transparent conductive film with a protective coating layer and a manufacturing method thereof, forming a protective coating layer including a polymer resin and a carbon nanotube on top of a thin film including a silver nanowire to suppress an occurrence of static electricity of the transparent conductive film. As such, the present invention is able to prevent a current carrying defect, a short-circuit defect, and a dielectric behavior.

Description

FIELD OF THE INVENTION [0001] The present invention relates to a transparent conductive film having a protective coating layer and a method for manufacturing the transparent conductive film.

The present invention relates to a transparent conductive film, and more particularly, to a transparent conductive film in which a protective coating layer including a polymer resin and a carbon nanotube is formed on a thin film including silver nanowires, and a method for manufacturing the transparent conductive film.

The transparent conductive film including the silver nano wire is a thin film having conductivity by forming a conductive thin film by forming a network structure of a wire or a tube type nanostructure. Such a conductive thin film is widely used in various fields such as a transparent electrode, a surface heating element, an electrostatic charge controlling and absorbing agent, an electromagnetic wave turning film, a heat dissipation material, a transistor, and a sensor.

The silver nano wire is a nano particle having a length of 10 to 30 탆 and a width of 15 to 30 nm and having a very high termination ratio and is electrically connected to each other by physical contact, which is disadvantageous to static electricity. Therefore, there is a problem that the conduction failure of the pattern, the short circuit failure, etc. may occur due to the pattern width of the silver nano wire transparent conductive film and the pattern interval due to the static electricity.

Particularly, in the method of forming a pattern, a silver nano wire coating solution containing a photosensitive resin is coated without directly etching the silver nano wire transparent conductive film, and a pattern is formed in a non-etching manner by locally forming a conductivity difference by an ultraviolet ray exposure and cleaning process In some cases, since the silver nano wire exists in the insulating region, there is a problem that the insulating property is damaged in the insulating region due to the static electricity, and short-circuit failure between the patterns occurs.

Korean Registered Patent No. 10-1468496 (Apr. 14, 2014)

SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a transparent conductive film having a protective coating layer formed thereon to prevent static electricity from occurring in the transparent conductive film, thereby preventing defective energization, short-

According to an aspect of the present invention, there is provided a transparent conductive film comprising: a substrate; A thin film including a silver nanowire formed on a substrate; And a protective coating layer comprising a polymer resin and a carbon nanotube formed on the thin film.

The transparent conductive film according to the present invention can be characterized in that the polymer resin is polyurethane, polyacrylate, polyacrylic acid or polyvinyl alcohol.

The transparent conductive film according to the present invention can be characterized in that the surface resistance of the protective coating layer itself is 10 6 to 10 9 Ω / sq.

The transparent conductive film according to the present invention may be characterized in that the protective coating layer further comprises a corrosion inhibitor.

The transparent conductive film according to the present invention may be characterized in that the thickness of the protective coating layer is 0.001 to 100 mu m.

A method for preparing a transparent conductive film according to the present invention includes: preparing a carbon nanotube solution by adding a carbon nanotube to a solvent to produce a carbon nanotube solution; Preparing a protective coating solution by mixing a carbon nanotube solution with a polymer resin to prepare a protective coating solution; And a coating step of coating a protective coating solution on the thin film containing silver nanowires to form a protective coating layer.

The method of producing a transparent conductive film according to the present invention may further include an addition step of adding a corrosion inhibitor before the coating step.

The method for preparing a transparent conductive film according to the present invention is characterized in that the protective coating solution contains 0.1 to 5 wt% of a polymer resin, 0.001 to 0.5 wt% of carbon nanotubes, 0.01 to 1 wt% of a surfactant, and 0.0001 to 0.01 wt% of a corrosion inhibitor can do.

Since the transparent conductive film according to the present invention has a structure in which a protective coating layer including a polymer resin and a carbon nanotube is formed on a thin film containing silver nanowires, the generation of static electricity in the transparent conductive film is suppressed to prevent the poor conduction, do.

1 is a view for explaining a transparent conductive film in which a protective coating layer of the present invention is formed.
Fig. 2 is a flowchart showing the production process of the transparent conductive film of the present invention.
3 is a flow chart according to an example of a method of manufacturing the transparent conductive film of the present invention.
4 is a flow chart according to another example of a method of manufacturing the transparent conductive film of the present invention.

In the following description, only parts necessary for understanding the embodiments of the present invention will be described, and the description of other parts will be omitted so as not to obscure the gist of the present invention.

The terms and words used in the present specification and claims should not be construed as limited to ordinary or dictionary meanings and the inventor is not limited to the meaning of the terms in order to describe his invention in the best way. It should be interpreted as meaning and concept consistent with the technical idea of the present invention. Therefore, the embodiments described in the present specification and the configurations shown in the drawings are merely preferred embodiments of the present invention, and are not intended to represent all of the technical ideas of the present invention, so that various equivalents And variations are possible.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

The transparent conductive film according to the present invention will now be described. 1 is a cross-sectional view of a transparent conductive film having a protective coating layer formed thereon.

Referring to FIG. 1, the transparent conductive film includes a substrate 10, a thin film 20 formed on the substrate 10, and a protective coating 30 formed on the thin film 20.

Here, the substrate 10 may be made of a transparent material having light transmittance. For example, as the material of the substrate 10, any one of glass, quartz, transparent plastic substrate, and transparent polymer film may be used. It is not limited thereto.

The thin film 20 is a thin film containing silver nanowires and has electrical conductivity and may or may not have a pattern formed thereon. The pattern of the thin film 20 may be formed by etching or not etching.

The sheet resistance of the thin film 20 may be 0.1 to 1000 OMEGA / sq and the light transmittance may be 50% or more.

The silver nano wire is a material forming a conductive network and may be electrically connected to each other to be coated on the substrate 10 and included in the thin film 20. The thin film 20 may be a silver nano wire having a length of 10 to 30 mu m and a width of 15 to 30 nm.

The protective coating layer 30 may include a polymer resin and a carbon nanotube.

The sheet resistance of the protective coating layer 30 itself is 10 < 6 > 10 9 Ω / sq and the light transmittance may be 80% or more.

The thickness of the protective coating layer 30 may be 0.001 to 100 탆. Depending on the thickness of the protective coating layer 30, the surface resistance of the surface of the transparent conductive film on which the protective coating layer is formed may vary. In the case where the protective coating layer 30 is thinly formed to a thickness of less than several tens of nanometers, a part of the silver nano wire is exposed on the protective coating layer 30 to form the protective coating layer 30, and the surface resistance of the surface can be maintained at the sheet resistance of the thin film 20 When the protective coating layer 30 is thickly formed, the sheet resistance of the surface of the transparent conductive film on which the protective coating layer is formed may increase.

The protective coating layer 30 is electrically connected directly to the thin film 20 formed at the lower portion and has no characteristic as a composite conductive film. If the sheet resistance of the thin film 20 is 1000 Ω / sq or less, the sheet resistance of the protective coating layer 30 10 6 so that the thin film 20 and the protective coating layer 30 form a resistance difference of 1000 times or more.

The protective coating layer 30 may serve to maintain and improve the characteristics of the thin film 20. [

The polymer resin may be polyurethane, polyacrylate, polyacrylic acid, polyvinyl alcohol, but is not limited thereto. The polymer resin may be dissolved or dispersed in water or alcohol.

Carbon nanotubes include, but are not limited to, single-wall carbon nanotubes or multi-wall carbon nanotubes. The carbon nanotubes included in the protective coating layer 30 can prevent a charging phenomenon due to static electricity that may be generated in the transparent conductive film, thereby preventing defects in the transparent conductive film due to static electricity.

The protective coating layer 30 may further comprise a corrosion inhibitor. The corrosion inhibitor may be selected from the group consisting of benzotriazole, tolytriazole, butyl benzyl triazole, dithiothiadiazole, alkyl dithiothiadiazole, alkylthiols 3,4-thiadiazole, 2-mercaptopyrimidine, 2-mercaptobenzoxazole, 5-amino-1,3, 5-amino-1,3,4-thiadiazole-2-thiol, benzothiazole, 2-aminopyrimidine, 5,6- But are not limited to, 5,6-dimethylbenzimidazole and 2-mercaptobenzimidazole.

A method for manufacturing a transparent conductive film in which the protective coating layer 30 according to the present invention is formed will be described with reference to FIGS. 1 and 2. FIG. 2 is a flowchart illustrating a method of manufacturing a transparent conductive film having a protective coating layer according to an embodiment of the present invention.

Referring to FIGS. 1 and 2, a substrate 10 is first prepared.

Next, a thin film forming composition including a silver nano wire is coated on a substrate 20 and then heat treated (dried) to form a thin film 20 including a silver nano wire.

Then, a protective coating solution containing a polymer resin and a carbon nanotube is coated on the thin film 20 and then heat-treated to form a protective coating layer 30. The method of forming the protective coating layer 30 will be described in detail with reference to FIGS. 3 and 4 below.

3 is a flowchart illustrating an example of a method of manufacturing a transparent conductive film having a protective coating layer of the present invention.

Referring to FIG. 3, a method of manufacturing a transparent conductive film according to an exemplary embodiment includes a step (S10) of preparing a carbon nanotube solution by adding a carbon nanotube to a solvent to produce a carbon nanotube solution, (S20) of preparing a protective coating solution to prepare a protective coating solution, and a coating step (S30) of coating a protective coating solution on a thin film containing silver nanowires to form a protective coating layer.

The carbon nanotube solution preparation step (S10) disperses the carbon nanotubes in water or alcohol as a solvent, and the sheet resistance of the protective coating layer can be controlled according to the content of the carbon nanotubes. The solvent may also be water, or alcohol, as well as polar organic solvents such as dimethyformamide and N-methyl-2-pyrrolidone, but not limited thereto.

The surfactant may be added to the carbon nanotube solution preparation step (S10). The surfactant may be a cationic, anionic, nonionic, or amphoteric surfactant.

On the other hand, the carbon nanotubes are included in the protective coating layer as a conductive material, so that the surface resistance of the protective coating layer itself can be set to a level of 10 6 to 10 9 Ω / sq.

The protective coating solution preparation step (S20) may be carried out by mixing the polymeric resin with the carbon nanotube solution at a predetermined ratio, and then adding an organic solvent such as ethanol, isopropyl alcohol or dimethylformamide thereto.

Then, the protective coating solution is coated on the thin film including the silver nanowire to form a protective coating layer.

The protective coating solution may contain 0.1 to 5% by weight of a polymer resin, 0.001 to 0.5% by weight of carbon nanotubes, 0.01 to 1% by weight of a surfactant, and 0.0001 to 0.01% by weight of a corrosion inhibitor.

The protective coating solution may be coated on the thin film by methods such as spray coating, spin coating, dip coating, casting, slow die coating, slit die coating, micro gravure coating, and the like.

4 is a flowchart illustrating another example of a transparent conductive film in which a protective coating layer is formed according to the present invention.

Referring to FIG. 4, a method of manufacturing a transparent conductive film according to another embodiment includes a step (S10) of preparing a carbon nanotube solution by adding a carbon nanotube to a solvent to produce a carbon nanotube solution, (S20) of preparing a protective coating solution to prepare a protective coating solution, and a coating step (S30) of coating a protective coating solution on a thin film containing silver nanowires to form a protective coating layer.

The method of manufacturing a transparent conductive film according to another embodiment may further include a step (S25) of adding a corrosion inhibitor to add a corrosion inhibitor to the carbon nanotube solution or the protective coating solution before the coating step (S30) (S10) or after the protective coating solution preparation step (S20). FIG. 4 shows an example of adding a corrosion inhibitor to the protective coating solution prepared in the protective coating solution preparation step (S20).

When a corrosion inhibitor is added, adhesion of the protective coating layer to the thin film and environmental stability can be improved.

 In order to determine the antistatic performance of the transparent conductive film according to the present invention, experiments according to Example 1 and Comparative Example 1 were carried out.

Whether a protective coating layer is formed Voltage Example 1 O 0.1kV or less Comparative Example 1 X 15 kV

[Example 1]

0.5% by weight of single-walled carbon nanotubes and 1% by weight of sodium benzenesulfonate were added to water as a solvent, followed by ultrasonic dispersion to prepare a carbon natto tube solution. The dispersed carbon nanotube solution was centrifuged to remove the precipitate. 0.5 g of a polyurethane water dispersion having a concentration of 30% by weight was mixed with a carbon nanotube solution at a ratio of 1 g to prepare a protective coating solution. To the protective coating solution, 1.5 g of water, 3 g of ethanol, 3 g of isopropyl alcohol and 1 g of dimethyfformamide were added, and 0.001% by weight of benzotriazole was added. The protective coating solution was applied to a PET substrate and coated with a spin coating method to form a protective coating layer. Coated and dried at 130 DEG C for 10 minutes. In order to test the antistatic effect due to the protective coating layer, the protective coating film of the transparent conductive film according to Example 1 was repeatedly peeled off by peeling off the protective film.

[Comparative Example 1]

Comparative Example 1 is a PET substrate on which no protective coating layer is formed as shown in Table 1. The release-type protective film was attached to the thin film of the transparent conductive film of Comparative Example 1, and peeled off and then repeated ten times.

As a result of measurement of Example 1, in order to measure the sheet resistance of the protective coating layer itself, the substrate 10 without the conductive thin film 20 was subjected to spin coating by bar coating to evaluate its characteristics. The sheet resistivity of the protective coated substrate was 2 x 10 7 Ω / sq, the transmittance was 90.4%, and the haze was 0.57%.

In addition, when a release protective film was attached to a PET substrate and peeled off, a large voltage of 0.1 kV or less was measured.

On the other hand, in Comparative Example 1, a high voltage of 15 kV or more was measured when a release protection film was applied to a PET substrate and then peeled off.

Therefore, in Example 1 in which the protective coating layer is formed, low voltage is generated, so that the protective coating layer has antistatic performance.

Table 2 shows the results of experiments conducted in Example 2 and Comparative Example 2 in order to determine the defective conduction in accordance with the generation of static electricity and the change in pattern resistance of the transparent conductive film according to the present invention.

Whether a protective coating layer is formed Whether static electricity is generated Whether the pattern resistance changes Poor power supply Example 2 O X 61kΩ at 62kΩ X Comparative Example 2 X O Impossible to measure at 62kΩ O

[Example 2]

0.5% by weight of single-walled carbon nanotubes and 1% by weight of sodium benzenesulfonate were added to water as a solvent, followed by ultrasonic dispersion to prepare a carbon natto tube solution. The dispersed carbon nanotube solution was centrifuged to remove the precipitate. 0.5 g of a polyurethane water dispersion having a concentration of 30% by weight was mixed with a carbon nanotube solution at a ratio of 1 g to prepare a protective coating solution. To the protective coating solution, 1.5 g of water, 3 g of ethanol, 3 g of isopropyl alcohol and 1 g of dimethyfformamide were added, and 0.001% by weight of benzotriazole was added. The protective coating solution was coated by spin coating on a substrate formed with a pattern of bar shape and having a length of 50 mm, a width of 50 탆, and a gap between patterns of 20 탆, which had silver nano wires, by spin coating to form a protective coating layer . Coated and dried at 130 DEG C for 10 minutes. The protective coating film of the transparent conductive film according to Example 2 was laminated to the protective coating layer and then peeled off.

[Comparative Example 2]

As shown in Table 2, Comparative Example 2 is a thin film having no protective coating layer and containing silver nano wire patterned in the same shape. In order to generate static electricity, a release protection film was adhered to the thin film of the transparent conductive film according to Comparative Example 2, and the film was repeated ten times in such a manner as to be separated.

In Example 2, the initial pattern resistance value was 62 k.OMEGA. In order to generate static electricity, the release protection film was attached and peeled 10 times, and the resistance at both ends of the pattern was measured to be 61 k.OMEGA .. [ It can be seen that the static electricity is not formed largely by the contact of the mold protective film and the pattern resistance is not greatly changed.

On the other hand, in Comparative Example 2, the initial pattern resistance value was 62 k.OMEGA .. In order to generate static electricity, when the release protection film was attached and detached 10 times and the resistance of both ends of the pattern was measured, Respectively.

Therefore, in Comparative Example 2, a defective conduction occurred in the pattern due to static electricity. In the transparent conductive film formed with the protective coating layer of Example 2, static electricity was not largely generated, and the pattern resistance value was maintained, have.

 Further, in order to determine the short-circuit defect according to the pattern resistance and the inter-pattern resistance of the transparent conductive film according to the present invention, experiments according to Example 3 and Comparative Example 3 were performed.

Whether a protective coating layer is formed Whether the pattern resistance changes Whether resistance changes between patterns Whether the short circuit is bad or not Example 3 O X X X Comparative Example 3 X X 5kΩ at 20MΩ or higher O

[Example 3]

0.5% by weight of single-walled carbon nanotubes and 1% by weight of sodium benzenesulfonate were added to water as a solvent, followed by ultrasonic dispersion to prepare a carbon natto tube solution. The dispersed carbon nanotube solution was centrifuged to remove the precipitate. 0.5 g of a polyurethane water dispersion having a concentration of 30% by weight was mixed with a carbon nanotube solution at a ratio of 1 g to prepare a protective coating solution. To the protective coating solution, 1.5 g of water, 3 g of ethanol, 3 g of isopropyl alcohol and 1 g of dimethyfformamide were added, and 0.001% by weight of benzotriazole was added. The silver nano wire thin film is formed by coating a silver nano wire coating liquid containing ultraviolet photosensitive resin on the PET substrate without etching and forming a bar-shaped pattern by forming electric conductivity difference in a local region of the conductive film by a method of ultraviolet ray exposure and cleaning Respectively. The bar-shaped pattern has a length of 100 mm, a width of 200 m, and a pattern interval of 100 m. The protective coating solution was coated on the patterned thin film by a spin coating method and dried to form a protective coating layer. The protective coating film of the transparent conductive film according to Example 3 was laminated to the protective coating layer and peeled off.

[Comparative Example 3]

 The silver nano wire thin film is formed by coating a silver nano wire coating liquid containing ultraviolet photosensitive resin on the PET substrate without etching and forming a bar-shaped pattern by forming electric conductivity difference in a local region of the conductive film by a method of ultraviolet ray exposure and cleaning Respectively. That is, the transparent conductive film according to Comparative Example 3 is a transparent conductive film before the protective coating layer is formed in Example 3. The release-type protective film was attached to the thin film of the transparent conductive film according to Comparative Example 3 and was repeated 10 times in a manner of releasing.

The transparent conductive film before the formation of the protective coating layer in Example 3, that is, the transparent conductive film according to Comparative Example 3, had an ultraviolet-exposed portion that became an insulating region and had a sheet resistance of 10 6 Ω / sq or more, Was measured as a sheet resistance of 74? / Sq as a conductive region. The resistance at both ends of the initial pattern was 41 kΩ and the inter-pattern resistance was more than 20 MΩ.

 In the experiment according to Example 3, the transparent conductive film after the protective coating had a pattern resistance of 42 k? And a inter-pattern resistance of 20 M? After the protective coating layer was formed, a release protection film was applied and removed ten times in order to generate static electricity in the transparent conductive film. As a result of the experiment, the resistance was maintained at a pattern resistance value of 40 kΩ and the insulation property was maintained at a pattern resistance of 20 MΩ or more.

The pattern resistance of the transparent conductive film before generating static electricity in Comparative Example 3 was 40 kV, and the inter-pattern resistance of the transparent conductive film was more than 20 MΩ, showing an insulating property exceeding the measurement limit. In order to generate static electricity, the mold-protecting film was adhered to the transparent conductive film according to Comparative Example 3 and repeatedly carried out ten times. As a result, the pattern resistance was maintained at a similar level of 42kΩ, but the resistance between patterns decreased to 5kV and the insulation characteristics were reduced.

Accordingly, in Example 3, the inter-pattern resistance value is maintained, and in the case of Comparative Example 3, the inter-pattern resistance value is decreased to decrease the insulating property. In the absence of the protective coating layer, It can be seen that the conductive film can prevent short-circuit failure.

As described above in detail, the transparent conductive film in which the protective coating layer including the polymer resin and the carbon nanotube is formed on the thin film including the silver nanowire and the manufacturing method thereof has the antistatic function for suppressing the generation of static electricity in the transparent conductive film, Defective and short-circuit defects can be prevented.

It should be noted that the embodiments disclosed in the drawings are merely examples of specific examples for the purpose of understanding, and are not intended to limit the scope of the present invention. It will be apparent to those skilled in the art that other modifications based on the technical idea of the present invention are possible in addition to the embodiments disclosed herein.

10.. Substrate 20.. .pellicle
30. The protective coating layer

Claims (8)

Board;
A thin film including silver nano wires formed on the substrate; And
A protective coating layer comprising a polymer resin and carbon nanotubes formed on the thin film;
And a transparent conductive film. The method according to claim 1,
Wherein the polymer resin is polyurethane, polyacrylate, polyacrylic acid or polyvinyl alcohol. The method according to claim 1,
Wherein the protective coating layer has a surface resistance of 10 6 to 10 9 Ω / sq. The method according to claim 1,
Wherein the protective coating layer further comprises a corrosion inhibitor. The method according to claim 1,
Wherein the protective coating layer has a thickness of 0.001 to 100 mu m. Preparing a carbon nanotube solution by adding a carbon nanotube to a solvent to produce a carbon nanotube solution;
Preparing a protective coating solution by mixing the carbon nanotube solution with a polymer resin to prepare a protective coating solution;
A coating step of coating the protective coating solution on a thin film containing silver nanowires to form a protective coating layer;
Wherein the transparent conductive film is a transparent conductive film. The method according to claim 6,
Adding a corrosion inhibitor to the carbon nanotube solution or the protective coating solution prior to the coating step;
Further comprising a step of forming a transparent conductive film on the transparent conductive film. The method according to claim 6,
Wherein the protective coating solution comprises 0.1 to 5 wt% of a polymer resin, 0.001 to 0.5 wt% of carbon nanotubes, 0.01 to 1 wt% of a surfactant, and 0.0001 to 0.01 wt% of a corrosion inhibitor .
KR1020150016261A 2015-02-02 2015-02-02 Conductive film with a protective coating layer and method for manufacturing of the same KR20160095295A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210059835A (en) * 2019-11-15 2021-05-26 한국전자기술연구원 Heat insulating film and heat insulating substrate comprising the same

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101468496B1 (en) 2013-07-25 2014-12-04 전자부품연구원 Coating solution having conductive nano material and coated conductive film

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101468496B1 (en) 2013-07-25 2014-12-04 전자부품연구원 Coating solution having conductive nano material and coated conductive film

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210059835A (en) * 2019-11-15 2021-05-26 한국전자기술연구원 Heat insulating film and heat insulating substrate comprising the same

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