KR20100108983A - 코어-쉘 구조 복합나노입자를 감지물질로 이용한 박막형 고활성 가스센서 및 그 제조방법 - Google Patents
코어-쉘 구조 복합나노입자를 감지물질로 이용한 박막형 고활성 가스센서 및 그 제조방법 Download PDFInfo
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- KR20100108983A KR20100108983A KR1020090027331A KR20090027331A KR20100108983A KR 20100108983 A KR20100108983 A KR 20100108983A KR 1020090027331 A KR1020090027331 A KR 1020090027331A KR 20090027331 A KR20090027331 A KR 20090027331A KR 20100108983 A KR20100108983 A KR 20100108983A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
- G01N27/127—Composition of the body, e.g. the composition of its sensitive layer comprising nanoparticles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
- B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
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- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
Description
Claims (5)
- 금속나노입자 코어와, 상기 코어의 표면을 감싸는 금속산화물나노입자 쉘층으로 이루어진 코어-쉘 구조 복합나노입자를 감지물질로서 이용된 것을 특징으로 하는 박막형 고활성 가스센서.
- 제1항에 있어서, 상기 코어는 전기전도도가 우수하고 산화하기 어려운 금속나노입자로 이루어진 것을 특징으로 하는 박막형 고활성 가스센서.
- 제1항에 있어서, 상기 쉘층은 반도체 특성을 가지는 반도체 금속산화물나노입자로 이루어진 것을 특징으로 하는 박막형 고활성 가스센서.
- 금속나노입자 코어와, 상기 코어의 표면을 감싸는 금속산화물나노입자 쉘층으로 이루어진 복합나노입자를 전극회로기판 상에 도포하는 공정을 포함하여 이루어지는 것을 특징으로 하는 박막형 고활성 가스센서의 제조방법.
- 제4항에 있어서, 상기 복합나노입자를 드롭코팅법, 딥코팅법, 스핀코팅법, 잉크젯 프린틴법 중 선택된 1종의 방법에 의해 상기 전극회로기판 상에 도포하여 박막을 형성하는 것을 특징으로 하는 박막형 고활성 가스센서의 제조방법.
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020090027331A KR101074917B1 (ko) | 2009-03-31 | 2009-03-31 | 코어-쉘 구조 복합나노입자를 감지물질로 이용한 박막형 고활성 가스센서 및 그 제조방법 |
JP2012503305A JP5442844B2 (ja) | 2009-03-31 | 2009-07-21 | コア−シェル構造の複合ナノ粒子をセンサ材料として用いた薄膜型高活性ガスセンサーおよびその製造方法 |
PCT/KR2009/004016 WO2010114198A1 (en) | 2009-03-31 | 2009-07-21 | Thin-film high-activity gas sensor using core-shell structured composite nanoparticles as sensing material and method of manufacturing the same |
US12/988,198 US20120009089A1 (en) | 2009-03-31 | 2009-07-21 | Thin-film high-activity gas sensor using core-shell structured composite nanoparticles as sensing material and method of manufacturing the same |
EP09842735A EP2263077A4 (en) | 2009-03-31 | 2009-07-21 | HIGH-ACTIVE THIN FILM GAS SENSOR WITH CORE-SLEEVE STRUCTURED COMPOSITE OPTIONS AS SCALING MATERIAL AND METHOD FOR THE PRODUCTION THEREOF |
Applications Claiming Priority (1)
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KR1020090027331A KR101074917B1 (ko) | 2009-03-31 | 2009-03-31 | 코어-쉘 구조 복합나노입자를 감지물질로 이용한 박막형 고활성 가스센서 및 그 제조방법 |
Publications (2)
Publication Number | Publication Date |
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KR20100108983A true KR20100108983A (ko) | 2010-10-08 |
KR101074917B1 KR101074917B1 (ko) | 2011-10-18 |
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KR1020090027331A KR101074917B1 (ko) | 2009-03-31 | 2009-03-31 | 코어-쉘 구조 복합나노입자를 감지물질로 이용한 박막형 고활성 가스센서 및 그 제조방법 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20120009089A1 (ko) |
EP (1) | EP2263077A4 (ko) |
JP (1) | JP5442844B2 (ko) |
KR (1) | KR101074917B1 (ko) |
WO (1) | WO2010114198A1 (ko) |
Cited By (4)
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WO2014021530A1 (ko) * | 2012-08-02 | 2014-02-06 | 인하대학교산학협력단 | 코어-쉘 나노 구조체를 포함하는 센서, 및 이의 제조 방법 |
KR20160014134A (ko) * | 2014-07-28 | 2016-02-11 | 전북대학교산학협력단 | 반도체 가스센서용 금속/반도체 코어-쉘구조의 나노입자 혼합형 가스감지물질 및 이를 이용한 반도체 가스센서 |
KR20160045188A (ko) * | 2014-10-16 | 2016-04-27 | 전북대학교산학협력단 | 반도체 가스센서용 p-형 반도체 피복 복합나노입자 가스감지물질 |
KR20210054202A (ko) * | 2019-11-05 | 2021-05-13 | 전북대학교산학협력단 | Pd합금/산화물반도체 코어-쉘구조의 복합나노입자 수소가스 감지물질 및 이를 이용한 수소가스 감지용 반도체식 가스센서 |
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EP2518475B1 (en) * | 2011-04-29 | 2016-04-20 | OSRAM Opto Semiconductors GmbH | Optical gas sensing device |
JP5189705B1 (ja) * | 2012-09-25 | 2013-04-24 | 田中貴金属工業株式会社 | センサー電極及びその製造方法、並びに、電極形成用の金属ペースト |
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JPH11258192A (ja) * | 1998-03-10 | 1999-09-24 | Fis Kk | 半導体ガスセンサ |
DE60144014D1 (de) * | 2001-07-19 | 2011-03-24 | Max Planck Gesellschaft | Chemische Sensoren aus Nanopartikel-Dendrimer-Komposit-Materialen |
JP4423127B2 (ja) * | 2004-07-26 | 2010-03-03 | 新コスモス電機株式会社 | 半導体式ガス検知素子 |
JP2007071866A (ja) | 2005-08-10 | 2007-03-22 | Tokyo Univ Of Science | ガスセンサ用薄膜、ガスセンサ用素子体およびガスセンサ用素子体の製造方法 |
TWI307646B (en) * | 2005-12-06 | 2009-03-21 | Lg Chemical Ltd | Core-shell type nanoparticles and method for preparing the same |
CN101873992B (zh) * | 2006-02-07 | 2013-11-06 | 哈佛大学校长及研究员协会 | 碳纳米管的气相官能化 |
WO2008098137A2 (en) * | 2007-02-07 | 2008-08-14 | Zettacore, Inc. | Liquid composite compositions using non-volatile liquids and nanoparticles and uses thereof |
JP4958088B2 (ja) * | 2007-12-28 | 2012-06-20 | 独立行政法人産業技術総合研究所 | 酸化セリウム厚膜を用いたガスセンサ素子及びその製造方法 |
JP5010541B2 (ja) * | 2008-06-10 | 2012-08-29 | 国立大学法人神戸大学 | 基板型ガス検知素子およびガス感応層の構成粒子の製造方法 |
JP2010091486A (ja) * | 2008-10-10 | 2010-04-22 | Sumitomo Electric Ind Ltd | ガスセンサおよびその製造方法 |
-
2009
- 2009-03-31 KR KR1020090027331A patent/KR101074917B1/ko active IP Right Grant
- 2009-07-21 EP EP09842735A patent/EP2263077A4/en not_active Withdrawn
- 2009-07-21 WO PCT/KR2009/004016 patent/WO2010114198A1/en active Application Filing
- 2009-07-21 US US12/988,198 patent/US20120009089A1/en not_active Abandoned
- 2009-07-21 JP JP2012503305A patent/JP5442844B2/ja not_active Expired - Fee Related
Cited By (5)
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WO2014021530A1 (ko) * | 2012-08-02 | 2014-02-06 | 인하대학교산학협력단 | 코어-쉘 나노 구조체를 포함하는 센서, 및 이의 제조 방법 |
US9772301B2 (en) | 2012-08-02 | 2017-09-26 | Inha-Industry Partnership Institute | Method for producing a sensor including a core-shell nanostructure |
KR20160014134A (ko) * | 2014-07-28 | 2016-02-11 | 전북대학교산학협력단 | 반도체 가스센서용 금속/반도체 코어-쉘구조의 나노입자 혼합형 가스감지물질 및 이를 이용한 반도체 가스센서 |
KR20160045188A (ko) * | 2014-10-16 | 2016-04-27 | 전북대학교산학협력단 | 반도체 가스센서용 p-형 반도체 피복 복합나노입자 가스감지물질 |
KR20210054202A (ko) * | 2019-11-05 | 2021-05-13 | 전북대학교산학협력단 | Pd합금/산화물반도체 코어-쉘구조의 복합나노입자 수소가스 감지물질 및 이를 이용한 수소가스 감지용 반도체식 가스센서 |
Also Published As
Publication number | Publication date |
---|---|
KR101074917B1 (ko) | 2011-10-18 |
EP2263077A4 (en) | 2011-06-29 |
JP2012522242A (ja) | 2012-09-20 |
JP5442844B2 (ja) | 2014-03-12 |
US20120009089A1 (en) | 2012-01-12 |
WO2010114198A1 (en) | 2010-10-07 |
EP2263077A1 (en) | 2010-12-22 |
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