KR20070004598A - 배기가스 처리방법 및 배기가스 처리장치 - Google Patents
배기가스 처리방법 및 배기가스 처리장치 Download PDFInfo
- Publication number
- KR20070004598A KR20070004598A KR1020067015216A KR20067015216A KR20070004598A KR 20070004598 A KR20070004598 A KR 20070004598A KR 1020067015216 A KR1020067015216 A KR 1020067015216A KR 20067015216 A KR20067015216 A KR 20067015216A KR 20070004598 A KR20070004598 A KR 20070004598A
- Authority
- KR
- South Korea
- Prior art keywords
- exhaust gas
- gas
- reaction
- exhaust
- plasma
- Prior art date
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
- B01D53/68—Halogens or halogen compounds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
- B01J19/088—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/0873—Materials to be treated
- B01J2219/0881—Two or more materials
- B01J2219/0883—Gas-gas
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/0873—Materials to be treated
- B01J2219/0892—Materials to be treated involving catalytically active material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/0894—Processes carried out in the presence of a plasma
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- General Health & Medical Sciences (AREA)
- Organic Chemistry (AREA)
- Biomedical Technology (AREA)
- Environmental & Geological Engineering (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Treating Waste Gases (AREA)
Abstract
Description
Claims (11)
- 유해금속가스, 금속수산화물가스, 및 할로겐 화합물 가스로 이루어지는 군에서 선택되는 적어도 하나의 유해가스성분을 포함하는 배기가스를 처리하는 배기가스처리방법에서, 상기 배기가스의 적어도 일부를 여기상태로 하고, 칼슘화합물을 포함하는 반응제거제와 감압하에서 반응시키는 것을 특징으로 하는 배기가스 처리방법.
- 청구항1에 있어서, 상기 배기가스는, 산소의 존재하에서 상기 반응제거제와 반응하게 하는 배기가스 처리방법.
- 청구항1에 있어서, 상기 배기가스는, 점성류로서 반응제거제와 반응하게 하는 배기가스 처리방법.
- 청구항1에 있어서, 상기 배기가스의 적어도 일부는, 플라즈마, 및/또는 자외광에 의해 여기상태가 되는 배기가스 처리방법.
- 청구항1에 있어서, 상기 배기가스에는, 크세논 및/또는 클립톤이 포함되어 있는 배기가스 처리방법.
- 청구항1에 있어서, 상기 반응제거제가 산화 칼슘 및/또는 수산화칼슘을 포함하는 배기가스 처리방법.
- 청구항1에 있어서, 상기 유해가스성분은, 그 산화물이 고체인 원소의 수산화물, 또는 할로겐화물인 배기가스 처리방법.
- 유기금속가스, 금속수소화물가스, 및 할로겐화물가스로 이루어지는 군에서 선택되는 적어도 하나의 유해가스의 유해가스성분을 포함하는 배기가스를 처리하는 배기가스 처리장치에서, 상기 배기가스를 감압하는 제1 배기펌프, 상기 배기가스를 감압하는 제2 배기 펌프, 상기 제1 배기펌스와 상기 제2 배기펌프 사이에 설치되며, 배기가스를 여기상태로 하는 여기부, 및 상기 여기부로부터 배출되는 배기가스중의 유해가스성분과 반응하여, 상기 유해가스성분을 제거하는 반응제거제를 포함하는 반응제거부를 갖는 것을 특징으로 하는 배기가스처리장치.
- 청구항8에 있어서, 상기 여기부에는 산소를 공급하는 산소공급부가 설치되어 있는 배기가스처리장치.
- 청구항8에 있어서, 상기 여기부가 플라즈마 장치 및/또는 자외광 조사장치로 이루어지는 배기가스처리장치.
- 청구항8에 있어서, 상기 반응제거제가 산화 칼슘 및/또는 수산화 칼슘인 배기가스 처리장치.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004020975 | 2004-01-29 | ||
JPJP-P-2004-00020975 | 2004-01-29 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20070004598A true KR20070004598A (ko) | 2007-01-09 |
KR100836094B1 KR100836094B1 (ko) | 2008-06-09 |
Family
ID=34823772
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020067015216A KR100836094B1 (ko) | 2004-01-29 | 2005-01-25 | 배기가스 처리방법 및 배기가스 처리장치 |
Country Status (7)
Country | Link |
---|---|
US (1) | US20070160512A1 (ko) |
EP (1) | EP1716912A4 (ko) |
JP (1) | JP4895612B2 (ko) |
KR (1) | KR100836094B1 (ko) |
CN (1) | CN1913956A (ko) |
TW (1) | TWI361102B (ko) |
WO (1) | WO2005072852A1 (ko) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4890444B2 (ja) * | 2005-03-30 | 2012-03-07 | 宇部マテリアルズ株式会社 | カルシウム及び/又はマグネシウムを含む多孔質粒子からなる粒状物 |
GB0520468D0 (en) * | 2005-10-07 | 2005-11-16 | Boc Group Plc | Fluorine abatement |
JP4699919B2 (ja) * | 2006-03-07 | 2011-06-15 | 大陽日酸株式会社 | 排ガス処理方法および処理装置 |
KR101383996B1 (ko) * | 2006-06-02 | 2014-04-10 | 고쿠리츠 다이가쿠 호진 도호쿠 다이가쿠 | 다공질 산화칼슘 입상물 및 다공질 수산화칼슘 입상물 |
GB0724717D0 (en) * | 2007-12-19 | 2008-01-30 | Edwards Ltd | Method of treating a gas stream |
CN102183029A (zh) * | 2011-03-07 | 2011-09-14 | 北京赛必达生物技术有限公司 | 一种环形等离子体炬尾气处理炉 |
KR101243610B1 (ko) * | 2011-03-25 | 2013-03-14 | (주)에센트론 | 달걀껍질을 이용한 침강성 탄산칼슘의 제조방법 |
DE102011015723B4 (de) * | 2011-03-31 | 2019-09-26 | Dräger Safety AG & Co. KGaA | Sorbierendes Granulat, Verwendung und Verfahren zur Verfestigung eines sorbierenden Granulats |
CN102380292A (zh) * | 2011-09-05 | 2012-03-21 | 协鑫光电科技(张家港)有限公司 | 尾气的处理方法和装置 |
US20130341178A1 (en) * | 2012-06-21 | 2013-12-26 | Air Products And Chemicals Inc. | Method and Apparatus for Removing Contaminants from Nitrogen Trifluoride |
JP6368458B2 (ja) | 2013-05-24 | 2018-08-01 | 株式会社荏原製作所 | 除害機能付真空ポンプ |
JP6441660B2 (ja) * | 2014-03-17 | 2018-12-19 | 株式会社荏原製作所 | 除害機能付真空ポンプ |
CN104835878A (zh) * | 2015-04-30 | 2015-08-12 | 广东汉能薄膜太阳能有限公司 | 用于薄膜太阳能电池的尾气处理***及尾气处理方法 |
WO2018216446A1 (ja) * | 2017-05-24 | 2018-11-29 | カンケンテクノ株式会社 | 排ガスの減圧除害装置 |
KR20190141204A (ko) * | 2017-05-29 | 2019-12-23 | 칸켄 테크노 가부시키가이샤 | 배기 가스의 감압 제해 방법 및 그 장치 |
WO2019180772A1 (ja) * | 2018-03-19 | 2019-09-26 | カンケンテクノ株式会社 | 排ガスの減圧除害方法及びその装置 |
CN111422839A (zh) * | 2020-04-24 | 2020-07-17 | 苏州星烁纳米科技有限公司 | 一种惰性气体处理装置及制作方法 |
CN113648806B (zh) * | 2021-08-11 | 2023-09-22 | 上海协微环境科技有限公司 | 一种半导体制程废气中氟化物的净化装置 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04200617A (ja) * | 1990-11-30 | 1992-07-21 | Mitsui Toatsu Chem Inc | 排ガス処理方式 |
JPH04265113A (ja) * | 1991-02-20 | 1992-09-21 | Mitsui Toatsu Chem Inc | フッ素系ガスの処理法 |
DE4319118A1 (de) * | 1993-06-09 | 1994-12-15 | Breitbarth Friedrich Wilhelm D | Verfahren und Vorrichtung zur Entsorgung von Fluorkohlenstoffen und anderen fluorhaltigen Verbindungen |
JP3626961B2 (ja) * | 1993-09-13 | 2005-03-09 | 独立行政法人産業技術総合研究所 | 高周波誘導熱プラズマ装置 |
US5750823A (en) * | 1995-07-10 | 1998-05-12 | R.F. Environmental Systems, Inc. | Process and device for destruction of halohydrocarbons |
US6187072B1 (en) * | 1995-09-25 | 2001-02-13 | Applied Materials, Inc. | Method and apparatus for reducing perfluorocompound gases from substrate processing equipment emissions |
JP2985762B2 (ja) * | 1996-03-18 | 1999-12-06 | 日本電気株式会社 | 排気ガスの処理方法及び処理装置 |
JPH09299740A (ja) * | 1996-05-14 | 1997-11-25 | Akira Mizuno | 放電プラズマによるガス処理方法 |
JP3713333B2 (ja) * | 1996-07-04 | 2005-11-09 | 同和鉱業株式会社 | 弗化炭素類の分解法 |
FR2751565B1 (fr) * | 1996-07-26 | 1998-09-04 | Air Liquide | Procede et installation de traitement de gaz perfluores et hydrofluorocarbones en vue de leur destruction |
FR2757082B1 (fr) * | 1996-12-13 | 1999-01-15 | Air Liquide | Procede d'epuration d'un gaz plasmagene et installation pour la mise en oeuvre d'un tel procede |
US6649082B2 (en) * | 2000-05-26 | 2003-11-18 | Showa Denko K.K. | Harm-removing agent and method for rendering halogen-containing gas harmless and uses thereof |
JP4558176B2 (ja) * | 2000-11-17 | 2010-10-06 | 三菱電機株式会社 | ハロゲン含有ガス処理方法及び処理装置 |
JP4652860B2 (ja) * | 2004-04-27 | 2011-03-16 | 大陽日酸株式会社 | クリプトン又はキセノンの回収方法 |
US7368000B2 (en) * | 2004-12-22 | 2008-05-06 | The Boc Group Plc | Treatment of effluent gases |
-
2005
- 2005-01-25 WO PCT/JP2005/000897 patent/WO2005072852A1/ja not_active Application Discontinuation
- 2005-01-25 KR KR1020067015216A patent/KR100836094B1/ko active IP Right Grant
- 2005-01-25 EP EP05704075A patent/EP1716912A4/en not_active Withdrawn
- 2005-01-25 CN CNA2005800033610A patent/CN1913956A/zh active Pending
- 2005-01-25 JP JP2005517440A patent/JP4895612B2/ja active Active
- 2005-01-25 US US10/587,266 patent/US20070160512A1/en not_active Abandoned
- 2005-01-27 TW TW094102435A patent/TWI361102B/zh active
Also Published As
Publication number | Publication date |
---|---|
US20070160512A1 (en) | 2007-07-12 |
JP4895612B2 (ja) | 2012-03-14 |
TWI361102B (en) | 2012-04-01 |
CN1913956A (zh) | 2007-02-14 |
EP1716912A1 (en) | 2006-11-02 |
TW200529919A (en) | 2005-09-16 |
WO2005072852A1 (ja) | 2005-08-11 |
JPWO2005072852A1 (ja) | 2007-07-26 |
EP1716912A4 (en) | 2008-02-06 |
KR100836094B1 (ko) | 2008-06-09 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR100836094B1 (ko) | 배기가스 처리방법 및 배기가스 처리장치 | |
TW510819B (en) | Method and apparatus for treating a waste gas containing fluorine-containing compounds | |
EP1732669B1 (en) | Method and apparatus for treating gas containing fluorine-containing compounds | |
US11058984B2 (en) | Method for treating sulfur hexafluoride using radiation and apparatus for collecting and treating by-products | |
US20140079617A1 (en) | Apparatus for treating a gas stream | |
JP4699919B2 (ja) | 排ガス処理方法および処理装置 | |
JP5221842B2 (ja) | 排ガス処理方法 | |
KR100815594B1 (ko) | 배기가스처리제, 배기가스 처리방법 및 배기가스 처리장치 | |
JP2010058009A (ja) | 三フッ化窒素分解処理方法および三フッ化窒素分解処理装置 | |
WO2005077496A1 (en) | Method and apparatus for treating gas containing fluorine-containing compounds | |
Tsai et al. | Effects of additives on the selectivity of byproducts and dry removal of fluorine for abating tetrafluoromethane in a discharge reactor | |
JP3650588B2 (ja) | パーフルオロコンパウンドのリサイクル利用方法 | |
JP2006225219A (ja) | フッ素回収方法 | |
WO2024100066A1 (en) | Method for processing contaminated carbonaceous material | |
JP2000157830A (ja) | 排ガス処理方法および処理装置 | |
JPH08318122A (ja) | フロン分解排ガスの処理方法 | |
KR101557637B1 (ko) | 전자빔을 이용한 육불화황 처리장치 | |
JP2013066855A (ja) | 六フッ化硫黄分解処理装置及び方法 | |
KR101026458B1 (ko) | 공정 가스 처리 방법 및 처리 장치 | |
JP5498752B2 (ja) | 排ガス処理方法及び排ガス処理装置 | |
JP2008155070A (ja) | ハロゲン化合物の分解処理方法及び装置 | |
JP2004241472A (ja) | ガス処理装置、ガス処理方法および半導体装置の製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E90F | Notification of reason for final refusal | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 20130524 Year of fee payment: 6 |
|
FPAY | Annual fee payment |
Payment date: 20140523 Year of fee payment: 7 |
|
FPAY | Annual fee payment |
Payment date: 20150526 Year of fee payment: 8 |
|
FPAY | Annual fee payment |
Payment date: 20160520 Year of fee payment: 9 |
|
FPAY | Annual fee payment |
Payment date: 20170526 Year of fee payment: 10 |
|
FPAY | Annual fee payment |
Payment date: 20180529 Year of fee payment: 11 |