KR20020057040A - Method for manufacturing orgarnic electroluminescent display - Google Patents
Method for manufacturing orgarnic electroluminescent display Download PDFInfo
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- KR20020057040A KR20020057040A KR1020000087272A KR20000087272A KR20020057040A KR 20020057040 A KR20020057040 A KR 20020057040A KR 1020000087272 A KR1020000087272 A KR 1020000087272A KR 20000087272 A KR20000087272 A KR 20000087272A KR 20020057040 A KR20020057040 A KR 20020057040A
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- layer
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- organic
- vapor deposition
- light emitting
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- 238000000034 method Methods 0.000 title claims abstract description 24
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 11
- 238000000926 separation method Methods 0.000 claims abstract description 17
- 239000003566 sealing material Substances 0.000 claims abstract description 15
- 239000012044 organic layer Substances 0.000 claims abstract description 12
- 238000000151 deposition Methods 0.000 claims description 28
- 230000008021 deposition Effects 0.000 claims description 22
- 238000007789 sealing Methods 0.000 claims description 17
- 239000011368 organic material Substances 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 4
- 238000001771 vacuum deposition Methods 0.000 claims description 4
- 229910010272 inorganic material Inorganic materials 0.000 claims description 2
- 239000011147 inorganic material Substances 0.000 claims description 2
- 229920000642 polymer Polymers 0.000 claims description 2
- 239000010410 layer Substances 0.000 abstract description 35
- 239000000758 substrate Substances 0.000 abstract description 5
- 239000011521 glass Substances 0.000 abstract description 4
- 229920002120 photoresistant polymer Polymers 0.000 abstract description 4
- 206010027146 Melanoderma Diseases 0.000 abstract description 2
- 238000007740 vapor deposition Methods 0.000 abstract 7
- 238000009413 insulation Methods 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 230000032258 transport Effects 0.000 description 4
- 230000005525 hole transport Effects 0.000 description 3
- 230000008034 disappearance Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/02—Details
- H05B33/04—Sealing arrangements, e.g. against humidity
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/122—Pixel-defining structures or layers, e.g. banks
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/17—Passive-matrix OLED displays
- H10K59/173—Passive-matrix OLED displays comprising banks or shadow masks
Abstract
Description
본 발명은 유기전계발광 디스플레이의 제조방법에 관한 것으로서, 보다 상세하게는 실링물질의 증착방향을 다각화하거나 또는 증착원을 회전시켜 실링물질을 증착시키는 유기전계발광 디스플레이의 제조방법에 관한 것이다.The present invention relates to a method of manufacturing an organic light emitting display, and more particularly, to a method of manufacturing an organic light emitting display for depositing a sealing material by diversifying a deposition direction of a sealing material or rotating a deposition source.
유기전계발광 디스플레이는 유기물의 자체발광에 의해 컬러화상을 구현하는초경박형 표시장치로서, 그 구조가 간단하면서 광효율이 높다는 점에서 차세대의 유망 디스플레이 장치로서 주목되고 있다.The organic light emitting display is an ultra-thin display device that realizes a color image by self-emission of an organic material, and has been attracting attention as a promising display device of the next generation in view of its simple structure and high light efficiency.
유기전계발광 디스플레이의 간략한 동작원리는 애노드와 캐소드 사이에 전계가 형성되면 양 전극사이에 존재하는 유기층이 발광하게 되어 디스플레이 장치로 동작하게 된다.Brief operation principle of the organic light emitting display is that when an electric field is formed between the anode and the cathode, the organic layer existing between both electrodes emits light to operate as a display device.
이러한 유기유기전계발광 디스플레이는 그 제조공정에 있어서, 포토레지스트를 사용하여 애노드, 절연막 및 캐소드분리벽을 형성하는 전공정과, 금속마스크를 사용하여 유기물층과 캐소드를 진공증착법을 통해 형성하는 후공정으로 크게 둘로 나눌 수 있다.The organic organic light emitting display is a preliminary step of forming an anode, an insulating film, and a cathode separation wall using a photoresist, and a post process of forming an organic material layer and a cathode by a vacuum deposition method using a metal mask. It can be divided into two.
한편, 이들 각 층을 대기의 산소나 수분으로부터 차단시키는 실링(Sealing)공정을 행하는데, 이때, 실링공정 중에는 전공정과 유기물 및 캐소드층을 진공증착 한 후 그 위에 고분자물질 및 기타 유기물과 무기물층을 진공증착법을 통하여 원하는 실링이 이루어지게 하는 방법이 있다.On the other hand, a sealing process is performed in which each of these layers is blocked from oxygen or moisture in the air. During the sealing process, the pre-process, the organic material and the cathode layer are vacuum-deposited, and thereafter, the polymer material, other organic material and inorganic material layer are formed thereon. There is a method to achieve the desired sealing through the vacuum deposition method.
그러나, 상기와 같은 종래의 실링공정에 있어서, 전공정을 통하여 형성되는 캐소드분리벽은 윗면이 넓고 아랫면이 좁은 역삼각형 구조로 되어 있다. 따라서, 그 하부에는 실링하기 이전에 접촉하고 있던 수분이나 산소가 계속 존재하고 있는 상태로 실링이 이루어지므로, 흑점이 나타나는 현상이 있으며, 또한 디스플레이의 수명을 단축시키는 결과를 초래하게 된다는 문제점이 있다.However, in the conventional sealing process as described above, the cathode separation wall formed through the previous process has an inverted triangular structure with a wide top surface and a narrow bottom surface. Therefore, since the sealing is made in a state in which water or oxygen which has been in contact with the seal before the sealing continues to exist, there is a phenomenon in which black spots appear and a problem of shortening the life of the display is caused.
이에 본 발명의 목적은 캐소드분리벽의 역삼각형 구조를 감안하여 증착원의증착방향을 다각화하여 캐소드분리벽의 하부에까지 실링물질이 미칠 수 있도록 하는 유기전계발광 디스플레이의 제조방법을 제공함에 있다.Accordingly, an object of the present invention is to provide a method of manufacturing an organic light emitting display that allows the sealing material to extend down the cathode separation wall by diversifying the deposition direction of the deposition source in consideration of the inverted triangle structure of the cathode separation wall.
도 1은 본 발명에 따른 증착방향과 증착원의 회전을 통해 실링된 유기전계발광 디스플레이의 단면도.1 is a cross-sectional view of an organic electroluminescent display sealed through the deposition direction and the rotation of the deposition source according to the present invention.
도 2는 본 발명에 따른 증착방향과 증착원의 회전을 통한 실링법의 원리.2 is a principle of the sealing method through the deposition direction and the rotation of the deposition source according to the present invention.
<도면의 주요부분에 대한 부호의 설명><Description of the symbols for the main parts of the drawings>
11: 유리기판13: 애노드11: glass substrate 13: anode
15: 캐소드분리벽17: 유기층15: cathode separation wall 17: organic layer
19: 캐소드21: 실링층19: cathode 21: sealing layer
23: 증착원23: deposition source
상기 본 발명의 목적을 달성하기 위한 본 발명에 따른 유기전계발광 디스플레이의 제조방법은 유기전계발광 디스플레이의 애노드, 유기층, 캐소드 및 캐소드분리벽을 포함한 내부구조를 보호하기 위하여 수행하는 실링공정에 있어서, 실링물질을 증착시키는 증착원의 증착방향을 수직축과 임의의 각도를 가지고 이동시켜 실링물질을 증착시키는 것을 특징으로 한다.In the manufacturing method of the organic light emitting display according to the present invention for achieving the object of the present invention in the sealing process performed to protect the internal structure including the anode, the organic layer, the cathode and the cathode separation wall of the organic light emitting display, The deposition direction of the deposition source for depositing the sealing material is characterized by depositing the sealing material by moving at a certain angle with the vertical axis.
이하, 본 발명에 따른 유기전계발광 디스플레이의 제조방법을 첨부한 도면에 의하여 상세히 설명한다.Hereinafter, a method of manufacturing an organic light emitting display according to the present invention will be described in detail with reference to the accompanying drawings.
도 1은 본 발명에 따른 유기전계발광 디스플레이의 구조를 나타내는 단면도이다.1 is a cross-sectional view showing the structure of an organic light emitting display according to the present invention.
본 발명에 따른 유기전계발광 디스플레이의 제조방법은, 도 2에 도시된 바와 같이, 먼저 투명성 절연기판, 예를들어, 유리기판(11)상에 애노드(13)를 형성한다. 상기 애노드(13)상에는 절연막을 형성하기 위하여 상기 애노드(13)를 포함하는 전체면에 절연막형성층,즉, 포토레지스트층(도시되지 않음)을 적층하고 나서 절연막형성을 위한 패턴을 갖는 절연막마스크(도시되지 않음)를 사용하여 상기 절연막형성층을 자외선(UV)노광하여 절연막을 형성한다.In the method for manufacturing an organic light emitting display according to the present invention, as shown in FIG. 2, first, an anode 13 is formed on a transparent insulating substrate, for example, a glass substrate 11. An insulating film mask having a pattern for forming an insulating film after laminating an insulating film forming layer, that is, a photoresist layer (not shown), on the entire surface including the anode 13 to form an insulating film on the anode 13 The insulating film forming layer is exposed to ultraviolet (UV) light to form an insulating film.
그리고, 유기전계발광 액정표시장치의 캐소드분리벽(15)을 형성하기 위해 상기 유리기판(11)상에 캐소드분리벽(15)을 형성하기 위한 캐소드분리벽 형성층, 즉,포토레지스트층(도시되지 않음)을 적층하고 나서 상기 캐소드분리벽 형성층에 대해 캐소드분리벽 형상으로 패터닝된 마스크를 사용하여 자외선(UV)노광하여 캐소드분리벽을 형성한다.In addition, a cathode separation wall forming layer for forming the cathode separation wall 15 on the glass substrate 11 to form the cathode separation wall 15 of the organic light emitting liquid crystal display device, that is, a photoresist layer (not shown) Layer) and then exposed to ultraviolet (UV) light using a mask patterned in the shape of a cathode separation wall with respect to the cathode separation wall forming layer to form a cathode separation wall.
그 다음, 상기 애노드(13)상에 유기층(17)을 증착하고, 상기 유기층(17)상부에 캐소드(19) 형성을 위한 금속층을 증착한다. 이어, 상기 캐소드 형성을 위한 금속층을 마스크를 이용하여 소정부분을 패터닝하여 캐소드(19)를 형성한 후, 상기 패터닝된 캐소드(19)를 마스크로 이용하여 유기층(17)을 패터닝한다.Next, an organic layer 17 is deposited on the anode 13, and a metal layer for forming a cathode 19 is deposited on the organic layer 17. Subsequently, the cathode 19 is formed by patterning a predetermined portion of the metal layer for forming the cathode using a mask, and then the organic layer 17 is patterned using the patterned cathode 19 as a mask.
이때, 상기 유기층(17)은 빛을 발광하도록 정공수송층, 유기발광층 및 전자수송층으로 구성되어 있다.At this time, the organic layer 17 is composed of a hole transport layer, an organic light emitting layer and an electron transport layer to emit light.
즉, 유기전계발광 액정표시장치는 애노드(13), 정공수송층, 유기발광층, 전자수송층 및 캐소드(19)가 순차적으로 적층되어있는 구조을 지닌다.That is, the organic light emitting display device has a structure in which the anode 13, the hole transport layer, the organic light emitting layer, the electron transport layer, and the cathode 19 are sequentially stacked.
여기서, 정공수송층은 애노드(13)로부터 정공을 유기발광층으로 수송하고 유기발광층으로 이동되는 전자의 소멸을 방지한다. 그리고, 유기발광층은 캐소드(19)에서 공급되는 전자와 애노드(13)에서 공급되는 정공이 결합하여 빛을 내는 유기막층으로서, 발광하는 색에 따라 다양한 종류의 물질이 사용되고 발광물질의 종류가 양자효율을 결정한다. 또한, 전자수송층은 캐소드(19)로부터 공급되는 전자를 유기발광층에 공급하고 유기발광층으로부터 이동하는 정공의 소멸을 방지한다.Here, the hole transport layer transports holes from the anode 13 to the organic light emitting layer and prevents the disappearance of electrons that are transferred to the organic light emitting layer. The organic light emitting layer is an organic layer in which electrons supplied from the cathode 19 and holes supplied from the anode 13 combine to emit light, and various kinds of materials are used according to the color of light emitted, and the type of light emitting material is quantum efficiency. Determine. In addition, the electron transport layer supplies electrons supplied from the cathode 19 to the organic light emitting layer and prevents the disappearance of holes moving from the organic light emitting layer.
이때, 애노드(13)는 정공을 공급해주는 역할을 하는 전극으로서 유기발광층에서 발광된 빛을 투과시킬 수 있는 ITO와 같이 일함수가 높은 금속을 이용하며, 반면에, 캐소드(19)는 전자를 공급해주는 역할을 하는 전극으로서 일함수가 낮고전기전도도가 높은 알루미늄이나 은과 같은 금속을 이용한다.In this case, the anode 13 uses a metal having a high work function, such as ITO, which can transmit light emitted from the organic light emitting layer as an electrode for supplying holes, while the cathode 19 supplies electrons. It is an electrode that plays a role of using a metal such as aluminum or silver with a low work function and high electrical conductivity.
마지막 공정단계로서 본 발명에 의한 진공증착방법으로 실링을 행하여 유기전계발광 디스플레이를 완성한다.As a final process step, sealing is performed by the vacuum deposition method according to the present invention to complete the organic light emitting display.
여기서, 본 발명에 따른 유기전계발광 디스플레이의 제조방법의 원리는 도 2에 도시된 바와 같이 증착원(23)의 증착방향을 다각화하는 것이다.Here, the principle of the manufacturing method of the organic light emitting display according to the present invention is to diversify the deposition direction of the deposition source 23, as shown in FIG.
종래의 유기전계발광 디스플레이의 실링공정에서 유기물층과 캐소드분리벽(15) 사이에 수분 및 산소층이 존재하게끔 하는 문제점의 가장 큰 원인은 고분자와 같은 유기물들을 실링물질로써 증착시킬 때 그 증착원의 위치가 고정되어 있기 때문이다. 따라서, 실링물질이 유기전계발광 디스플레이의 패널을 향해 수직방향으로 증착되어 유기층(17)과 캐소드분리벽(15) 사이까지 미치지 못하는 것이다.In the sealing process of the conventional organic light emitting display, the biggest cause of the problem of the presence of the moisture and oxygen layers between the organic material layer and the cathode separation wall 15 is the location of the deposition source when depositing organic materials such as polymers as the sealing material. Because is fixed. Therefore, the sealing material is deposited vertically toward the panel of the organic light emitting display, so that the sealing material does not reach between the organic layer 17 and the cathode separation wall 15.
따라서, 본 발명은 유기전계발광 디스플레이의 실링층(23)을 형성하는 경우, 도 2에 도시된 바와 같이, 예를 들어, 증착원(23)을 수직축으로부터 임의의 각을 가지고 회전시켜 증착물질을 증착시키는 것과 같이 증착원을 종래와 같이 고정시키지 않고 이동성을 부여하여 실링층 형성시 실링물질의 증착방향을 다각화하는 것이다.Therefore, in the present invention, when forming the sealing layer 23 of the organic light emitting display, as illustrated in FIG. 2, for example, the deposition source 23 is rotated at an angle from the vertical axis to deposit the deposition material. It is to diversify the deposition direction of the sealing material when forming the sealing layer by providing mobility without fixing the deposition source as in the prior art as in the deposition.
이로 인하여 실링물질을 역삼각형 모양의 캐소드분리벽(15)의 하부에 까지 미치게 하여 실링층(23)내 수분과 산소를 머금을 수 있는 빈 공간을 제거하는 것이다.As a result, the sealing material extends to the lower portion of the cathode separation wall 15 having an inverted triangle shape, thereby removing an empty space capable of containing water and oxygen in the sealing layer 23.
상기의 실시예는 본 발명을 이에 한정하려는 의도는 아니며, 본 발명에 일형태을 예시하는 것이며, 기타 본 발명의 요지를 벗어나지 않는 범위내에서 다양하게 변경하여 실시할 수 있다.The above embodiments are not intended to limit the present invention thereto, and one embodiment is exemplified in the present invention, and other various modifications can be made without departing from the scope of the present invention.
이상에서 설명한 바와 같이 본 발명에 따른 유기전계발광 디스플레이는 다음과 같은 효과가 있다.As described above, the organic light emitting display according to the present invention has the following effects.
본 발명에 있어서는 증착원의 증착방향을 다각화하여 실링물질이 캐소드 하부에까지 미치게함으로써, 디스플레이의 흑점현상을 줄이고 그 결과 화질이 개선되고 디스플레이의 수명을 향상시키게 된다.In the present invention, the deposition direction of the evaporation source is diversified so that the sealing material extends to the lower portion of the cathode, thereby reducing the black spot phenomenon of the display, thereby improving the image quality and improving the life of the display.
Claims (2)
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| Application Number | Priority Date | Filing Date | Title |
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| KR1020000087272A KR20020057040A (en) | 2000-12-30 | 2000-12-30 | Method for manufacturing orgarnic electroluminescent display |
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| Application Number | Priority Date | Filing Date | Title |
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| KR1020000087272A KR20020057040A (en) | 2000-12-30 | 2000-12-30 | Method for manufacturing orgarnic electroluminescent display |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20030017095A (en) * | 2001-08-23 | 2003-03-03 | 씨엘디 주식회사 | Organic Electroluminescent Device and Method of Making the Same |
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|---|---|---|---|---|
| JPH0822891A (en) * | 1994-07-06 | 1996-01-23 | Matsushita Electric Ind Co Ltd | Organic electroluminescent element and its manufacture |
| JPH08144051A (en) * | 1994-11-21 | 1996-06-04 | Matsushita Electric Ind Co Ltd | Formation of thin film using laser abrasion and laser abrasion device |
| KR970052179A (en) * | 1995-12-26 | 1997-07-29 | 이우복 | Electron Beam Evaporation Thin Film Manufacturing Equipment |
| JPH11195485A (en) * | 1997-12-27 | 1999-07-21 | Tdk Corp | Manufacturing device for organic element and its manufacture |
| JP2000208256A (en) * | 1999-01-13 | 2000-07-28 | Tdk Corp | Apparatus and method for manufacturing organic electroluminescent display |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0822891A (en) * | 1994-07-06 | 1996-01-23 | Matsushita Electric Ind Co Ltd | Organic electroluminescent element and its manufacture |
| JPH08144051A (en) * | 1994-11-21 | 1996-06-04 | Matsushita Electric Ind Co Ltd | Formation of thin film using laser abrasion and laser abrasion device |
| KR970052179A (en) * | 1995-12-26 | 1997-07-29 | 이우복 | Electron Beam Evaporation Thin Film Manufacturing Equipment |
| JPH11195485A (en) * | 1997-12-27 | 1999-07-21 | Tdk Corp | Manufacturing device for organic element and its manufacture |
| JP2000208256A (en) * | 1999-01-13 | 2000-07-28 | Tdk Corp | Apparatus and method for manufacturing organic electroluminescent display |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| KR20030017095A (en) * | 2001-08-23 | 2003-03-03 | 씨엘디 주식회사 | Organic Electroluminescent Device and Method of Making the Same |
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