KR20000070592A - 유체공급장치 - Google Patents
유체공급장치 Download PDFInfo
- Publication number
- KR20000070592A KR20000070592A KR1019997006839A KR19997006839A KR20000070592A KR 20000070592 A KR20000070592 A KR 20000070592A KR 1019997006839 A KR1019997006839 A KR 1019997006839A KR 19997006839 A KR19997006839 A KR 19997006839A KR 20000070592 A KR20000070592 A KR 20000070592A
- Authority
- KR
- South Korea
- Prior art keywords
- fluid
- pressure
- flow controller
- valve
- flow rate
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7722—Line condition change responsive valves
- Y10T137/7758—Pilot or servo controlled
- Y10T137/7759—Responsive to change in rate of fluid flow
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7722—Line condition change responsive valves
- Y10T137/7758—Pilot or servo controlled
- Y10T137/7761—Electrically actuated valve
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Flow Control (AREA)
- Magnetically Actuated Valves (AREA)
- Control Of Non-Electrical Variables (AREA)
Abstract
Description
고속변환밸브의 폐쇄 | |
질량유량제어기 | 제어밸브를 연다 --> 2차측 압력증가 --> 유체의 잔류발생 |
압력유동제어기 | 제어밸브를 닫는다 --> 2차측 압력감소 --> 유체의 잔류없음 |
Claims (5)
- 유체의 유량을 제어하는 압력유동제어기(C)와, 압력유동제어기(C)의 2차측 유체통로(L)를 개폐하는 유체변환밸브(D)와, 압력유동제어기(C)와 유체변환밸브(D)의 작동을 제어하는 유체공급제어장치(B)로 구성되고, 또 상기 압력유동제어기(C)를 오리피스(5)와, 제어밸브(1)와 오리피스(5) 사이에 설치된 압력검출기(3)와, 압력검출기(3)의 검출압(P1)으로부터 유량 Qc=KP1(단, K는 정수)으로서 연산된 유량신호(Qc)와 유량지령신호(Qs)와의 차를 제어신호(Qy)로서 상기 제어밸브(1)의 구동부(2)로 출력하는 연산제어장치(6)로 형성하는 것과 함께, 상기 제어밸브(1)의 개폐에 의해 오리피스(5)의 상류측 압력(P1)을 조정하고, 오리피스(5)의 하류측 유량을 제어하는 구성으로 한 것을 특징으로 하는 유체공급장치.
- 제1항에 있어서, 오리피스(5)의 상류측 압력(P1)을 하류측 압력(P2)의 약 2배 이상으로 유지한 상태에서 제어밸브(1)를 개폐제어하도록 한 것을 특징으로 하는 유체공급장치.
- 제1항 또는 제2항에 있어서, 압력유동제어기(C)를 병렬로 설치한 복수의 압력유동제어기(C1),(Cn)로 하는 것과 함께, 각 압력유동제어기(C1)의 2차측에 설치된 유체변환밸브(D1),(Dn)의 출구측을 각각 연이어 통하게 유체사용부하(E)로 접속하고, 또 각 압력유동제어기(C1),(Cn)의 1차측으로 다른 종류의 유체를 공급하도록 한 것을 특징으로 하는 유체공급장치.
- 제1항 내지 제3항 중 어느 한 항에 있어서, 유체변환밸브(D)를 전동식 고속작동형 유체변환밸브로 한 것을 특징으로 하는 유체공급장치.
- 제4항에 있어서, 전동식의 고속작동형 유체변환밸브를 솔레노이드 구동식 고속작동형 유체변환밸브로 한 것을 특징으로 하는 유체공급장치.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP996198A JPH11212653A (ja) | 1998-01-21 | 1998-01-21 | 流体供給装置 |
JP98-9961 | 1998-01-21 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20000070592A true KR20000070592A (ko) | 2000-11-25 |
KR100327878B1 KR100327878B1 (ko) | 2002-03-09 |
Family
ID=11734549
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019997006839A KR100327878B1 (ko) | 1998-01-21 | 1999-01-11 | 유체공급장치 |
Country Status (8)
Country | Link |
---|---|
US (1) | US6178995B1 (ko) |
EP (1) | EP0969342B1 (ko) |
JP (1) | JPH11212653A (ko) |
KR (1) | KR100327878B1 (ko) |
CN (1) | CN1127004C (ko) |
DE (1) | DE69928047T2 (ko) |
TW (1) | TW385380B (ko) |
WO (1) | WO1999038057A1 (ko) |
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JP3522544B2 (ja) * | 1998-08-24 | 2004-04-26 | 忠弘 大見 | 流体可変型流量制御装置 |
JP3626874B2 (ja) * | 1999-04-16 | 2005-03-09 | 忠弘 大見 | 並列分流型の流体供給装置 |
US6210482B1 (en) * | 1999-04-22 | 2001-04-03 | Fujikin Incorporated | Apparatus for feeding gases for use in semiconductor manufacturing |
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JP3554509B2 (ja) * | 1999-08-10 | 2004-08-18 | 忠弘 大見 | 圧力式流量制御装置における流量異常検知方法 |
JP2002143751A (ja) * | 2000-10-17 | 2002-05-21 | L'air Liquide Sa Pour L'etude & L'exploitation Des Procede S Georges Claude | 処理液分配装置及び方法 |
US6631334B2 (en) * | 2000-12-26 | 2003-10-07 | Mks Instruments, Inc. | Pressure-based mass flow controller system |
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-
1998
- 1998-01-21 JP JP996198A patent/JPH11212653A/ja active Pending
-
1999
- 1999-01-11 WO PCT/JP1999/000062 patent/WO1999038057A1/ja active IP Right Grant
- 1999-01-11 CN CN99800002A patent/CN1127004C/zh not_active Expired - Lifetime
- 1999-01-11 US US09/355,872 patent/US6178995B1/en not_active Expired - Lifetime
- 1999-01-11 EP EP99900168A patent/EP0969342B1/en not_active Expired - Lifetime
- 1999-01-11 KR KR1019997006839A patent/KR100327878B1/ko not_active IP Right Cessation
- 1999-01-11 DE DE1999628047 patent/DE69928047T2/de not_active Expired - Fee Related
- 1999-01-21 TW TW88100902A patent/TW385380B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
DE69928047T2 (de) | 2006-07-13 |
EP0969342B1 (en) | 2005-11-02 |
KR100327878B1 (ko) | 2002-03-09 |
US6178995B1 (en) | 2001-01-30 |
EP0969342A4 (en) | 2004-05-19 |
TW385380B (en) | 2000-03-21 |
WO1999038057A1 (fr) | 1999-07-29 |
JPH11212653A (ja) | 1999-08-06 |
CN1127004C (zh) | 2003-11-05 |
CN1255981A (zh) | 2000-06-07 |
DE69928047D1 (de) | 2005-12-08 |
EP0969342A1 (en) | 2000-01-05 |
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