KR102561376B1 - 웨이퍼의 가공 방법 및 웨이퍼의 가공에 사용하는 보조구 - Google Patents
웨이퍼의 가공 방법 및 웨이퍼의 가공에 사용하는 보조구 Download PDFInfo
- Publication number
- KR102561376B1 KR102561376B1 KR1020180080368A KR20180080368A KR102561376B1 KR 102561376 B1 KR102561376 B1 KR 102561376B1 KR 1020180080368 A KR1020180080368 A KR 1020180080368A KR 20180080368 A KR20180080368 A KR 20180080368A KR 102561376 B1 KR102561376 B1 KR 102561376B1
- Authority
- KR
- South Korea
- Prior art keywords
- wafer
- opening
- assisting tool
- chuck table
- frame
- Prior art date
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67132—Apparatus for placing on an insulating substrate, e.g. tape
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68327—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Laser Beam Processing (AREA)
- Dicing (AREA)
- Micromachines (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017143565A JP6935257B2 (ja) | 2017-07-25 | 2017-07-25 | ウエーハの加工方法及びウエーハの加工に用いる補助具 |
JPJP-P-2017-143565 | 2017-07-25 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20190011675A KR20190011675A (ko) | 2019-02-07 |
KR102561376B1 true KR102561376B1 (ko) | 2023-07-28 |
Family
ID=65167886
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020180080368A KR102561376B1 (ko) | 2017-07-25 | 2018-07-11 | 웨이퍼의 가공 방법 및 웨이퍼의 가공에 사용하는 보조구 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP6935257B2 (zh) |
KR (1) | KR102561376B1 (zh) |
CN (1) | CN109300843B (zh) |
TW (1) | TWI761558B (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113732525A (zh) * | 2021-09-03 | 2021-12-03 | 湖北三维半导体集成创新中心有限责任公司 | 一种晶圆的切割方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010073884A (ja) * | 2008-09-18 | 2010-04-02 | Fujitsu Microelectronics Ltd | 半導体ウェーハ用治具及び半導体装置の製造方法 |
JP2010141061A (ja) | 2008-12-10 | 2010-06-24 | Sumco Techxiv株式会社 | エピタキシャルウェーハの製造方法に用いる冶具 |
JP2011228565A (ja) | 2010-04-22 | 2011-11-10 | Disco Abrasive Syst Ltd | ウェーハの分割方法 |
JP2013041908A (ja) * | 2011-08-12 | 2013-02-28 | Disco Abrasive Syst Ltd | 光デバイスウェーハの分割方法 |
JP2016149533A (ja) | 2015-02-12 | 2016-08-18 | 漢民科技股▲分▼有限公司 | ウェハーホルダー |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR19990030006U (ko) * | 1997-12-29 | 1999-07-26 | 구본준 | 웨이퍼 홀더 |
JP3408805B2 (ja) | 2000-09-13 | 2003-05-19 | 浜松ホトニクス株式会社 | 切断起点領域形成方法及び加工対象物切断方法 |
JP2004273895A (ja) * | 2003-03-11 | 2004-09-30 | Disco Abrasive Syst Ltd | 半導体ウエーハの分割方法 |
JP5074719B2 (ja) * | 2006-07-14 | 2012-11-14 | 東京応化工業株式会社 | ウエハを薄くする方法及びサポートプレート |
JP5294358B2 (ja) * | 2012-01-06 | 2013-09-18 | 古河電気工業株式会社 | ウエハ加工用テープ及びこれを使用した半導体装置の製造方法 |
JP2013152995A (ja) * | 2012-01-24 | 2013-08-08 | Disco Abrasive Syst Ltd | ウエーハの加工方法 |
JP6075970B2 (ja) * | 2012-05-23 | 2017-02-08 | 株式会社ディスコ | ウェーハの分割方法 |
JP6360411B2 (ja) * | 2014-10-09 | 2018-07-18 | 株式会社ディスコ | ウエーハの加工方法 |
JP2016147342A (ja) * | 2015-02-12 | 2016-08-18 | 株式会社ディスコ | 加工装置のチャックテーブル |
-
2017
- 2017-07-25 JP JP2017143565A patent/JP6935257B2/ja active Active
-
2018
- 2018-07-11 KR KR1020180080368A patent/KR102561376B1/ko active IP Right Grant
- 2018-07-20 CN CN201810800995.8A patent/CN109300843B/zh active Active
- 2018-07-20 TW TW107125156A patent/TWI761558B/zh active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010073884A (ja) * | 2008-09-18 | 2010-04-02 | Fujitsu Microelectronics Ltd | 半導体ウェーハ用治具及び半導体装置の製造方法 |
JP2010141061A (ja) | 2008-12-10 | 2010-06-24 | Sumco Techxiv株式会社 | エピタキシャルウェーハの製造方法に用いる冶具 |
JP2011228565A (ja) | 2010-04-22 | 2011-11-10 | Disco Abrasive Syst Ltd | ウェーハの分割方法 |
JP2013041908A (ja) * | 2011-08-12 | 2013-02-28 | Disco Abrasive Syst Ltd | 光デバイスウェーハの分割方法 |
JP2016149533A (ja) | 2015-02-12 | 2016-08-18 | 漢民科技股▲分▼有限公司 | ウェハーホルダー |
Also Published As
Publication number | Publication date |
---|---|
JP6935257B2 (ja) | 2021-09-15 |
JP2019029368A (ja) | 2019-02-21 |
CN109300843B (zh) | 2024-03-01 |
TW201909336A (zh) | 2019-03-01 |
KR20190011675A (ko) | 2019-02-07 |
CN109300843A (zh) | 2019-02-01 |
TWI761558B (zh) | 2022-04-21 |
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