KR101980965B1 - Self-powered Ion Channel Sensor - Google Patents

Self-powered Ion Channel Sensor Download PDF

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KR101980965B1
KR101980965B1 KR1020170067094A KR20170067094A KR101980965B1 KR 101980965 B1 KR101980965 B1 KR 101980965B1 KR 1020170067094 A KR1020170067094 A KR 1020170067094A KR 20170067094 A KR20170067094 A KR 20170067094A KR 101980965 B1 KR101980965 B1 KR 101980965B1
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film
piezoelectric
electrode
membrane
disposed
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KR1020170067094A
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Korean (ko)
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KR20180130899A (en
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한창수
전경용
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고려대학교 산학협력단
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Priority to PCT/KR2018/006107 priority patent/WO2018221941A2/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/483Physical analysis of biological material
    • G01N33/487Physical analysis of biological material of liquid biological material
    • G01N33/48707Physical analysis of biological material of liquid biological material by electrical means
    • G01N33/48721Investigating individual macromolecules, e.g. by translocation through nanopores
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/28Electrolytic cell components
    • G01N27/30Electrodes, e.g. test electrodes; Half-cells
    • G01N27/333Ion-selective electrodes or membranes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/483Physical analysis of biological material
    • G01N33/487Physical analysis of biological material of liquid biological material

Abstract

A self-powered ion channel sensor according to an embodiment of the present invention includes: a lower storage unit including a lower storage space for storing an electrolyte; An upper storage portion including an upper storage space for storing the electrolyte; A membrane disposed between the lower reservoir and the upper reservoir and including a plurality of through holes; A lower electrode disposed on a lower surface of the lower storage part; An upper electrode disposed on an upper surface of the upper storage unit; A piezoelectric film disposed on the upper electrode; And a piezoelectric electrode disposed on the piezoelectric film.

Description

[0001] Self-powered Ion Channel Sensor [0002]

The present invention relates to an ion channel pressure sensor, and more particularly, to a self-powered ion channel sensor having a piezoelectric film.

Ion channels are an indispensable means to maintain life in all living cells. Ion channels continuously transport ions through cell membranes. The main function of ion channels is indispensable in sensory organs in order to maintain homeostasis.

Basically, when a receptor is stimulated and activated from various environmental forces, such as heat, light, smell, sound, and pressure, the ion channel provides an electrical signal generated by ion motion through the cell membrane to the nerve do.

So far, several research groups have reported on the performance of a natural-inspired artificial ion channel sensor. Among them, there is almost no pressure sensing using an ion channel system. In the biological field, it is known that mechanotransduction corresponds to mechanical stimuli in mechanosensory receptors that change in cell membrane potential. In mechanosensory receptors, stimulation may be a deflection of the hair-cell stereocilia in the cochlea.

In particular, stretch-activated ion channels have been used in pressure-detectable configurations that exist in microbes, yeast, and plants, although the exact mechanism is not yet known. Lt; / RTI >

Most studies for pressure sensing are limited to silicon and polymer-based devices. These devices may include a transistor, pressure sensing, capacitive sensing, piezoelectric sensing, piezoresistive, and optical sensing.

These systems combine with I / O areas that cause unstable electrical properties, low selectivity, high operating power, and a static sense. For example, the main concern of piezoelectric sensors is due to the high internal resistance, and is influenced by the input impedance of the readout electrical circuit and the low sensitivity to temperature and static forces.

In the case of capacitive sensors, noise has a disadvantage associated with electric field interaction, and the fringe effect, which leads to the demand of a particular electronic circuit, must be eliminated.

Biological ion channel systems that sense external stimuli are basically composed of receptors and nanopores. The hybrid design of ion channels is evolving effectively. The receptors are mechanically triggered by external stimuli, and the nanopores electrochemically perform the function of providing a path for ion transport. And the two elements are separated from each other. Ion channels have the following important properties. First, ion channels are encouraging in the sense that they require little or no energy to operate them. Second, highly selective recognition of substrates with high receptivity is provided. Also, a direct signal is obtained from the ion transport through the membrane in accordance with an electrochemical gradient without additional amplification system or electronic circuitry. Ion channels transport ions at very high rates (for> 10 6 s -1 ions and for ~ 10 9 s -1 water) in nanoscale or microscale dimensions, without worrying about energy consumption. Thus, ion channels can be used as sensors in monitoring physical parameters including acceleration, temperature, sound waves, fluid engineering, and also pressure.

Many functional features can deliver short response times, low power consumption, dynamic spatial resolution, flexibility, and intergration on a variety of soft and hard surfaces.

Ecological ion channels generated by external stimuli are very important units for maintaining the life of nature.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a highly sensitive and highly selective ion channel pressure sensor which is driven by its own power without an external power source.

It is an object of the present invention to provide an ion channel pressure sensor having both a rapid reaction characteristic and a slow reaction characteristic.

A self-powered ion channel sensor according to an embodiment of the present invention includes: a lower storage unit including a lower storage space for storing an electrolyte; An upper storage portion including an upper storage space for storing the electrolyte; A membrane disposed between the lower reservoir and the upper reservoir and including a plurality of through holes; A lower electrode disposed on a lower surface of the lower storage part; An upper electrode disposed on an upper surface of the upper storage unit; A piezoelectric film disposed on the upper electrode; And a piezoelectric electrode disposed on the piezoelectric film.

According to an embodiment of the present invention, the piezoelectric thin film may further include a first voltmeter measuring a voltage between the upper electrode and the lower electrode according to the deformation of the piezoelectric film.

According to an embodiment of the present invention, the piezoelectric film may further include a second voltmeter measuring a voltage between the piezoelectric electrode and the lower electrode or a voltage between the piezoelectric electrode and the upper electrode in accordance with deformation of the piezoelectric film.

In one embodiment of the present invention, the piezoelectric film may include a polarized polyvinylidene fluoride (PVDF), a polyvinylidene fluoride-hexafluoropropylene (PVDF-HFP), or a polyvinylidenefluoride-trifluoroethylene (PVDF-TrFe) Or the like.

In one embodiment of the present invention, the piezoelectric electrode may be a Ti / Au thin film.

In one embodiment of the present invention, the upper electrode may be a carbon-coated aluminum film.

In one embodiment of the present invention, the lower electrode may be a carbon-coated aluminum film.

In one embodiment of the present invention, the electrolyte may be polyaniline (PANi).

In one embodiment of the present invention, the upper storage portion may be a silicon tape or a carbon tape.

In one embodiment of the present invention, the upper storage portion may have the same structure and shape as the lower storage portion.

In one embodiment of the present invention, the membrane may be polycarbonate track etched (PCTE).

In one embodiment of the present invention, the diameter of the through-hole of the membrane is 10 nm to 1 μm, the density of the through-hole of the membrane is 2 × 10 7 pores / cm 2 to 6 × 10 8 pores / cm 2 , Lt; RTI ID = 0.0 > 20 < / RTI >

A self-powered ion channel sensor according to an embodiment of the present invention includes: a lower electrode; A lower storage film disposed on the lower electrode and including a plurality of lower storage spaces for storing the electrolyte; A membrane disposed on the lower storage film and having a plurality of nanopores; An upper storage film disposed on the membrane and having a plurality of upper storage spaces for storing the electrolyte; A plurality of upper electrode patterns disposed on the upper storage film; A piezoelectric film disposed on the upper electrode pattern; And a piezoelectric electrode pattern disposed on the piezoelectric film. The lower storage space, the upper storage space, the upper electrode pattern, and the piezoelectric electrode pattern are vertically aligned with each other.

According to an embodiment of the present invention, the apparatus may further include a first voltmeter for measuring a voltage between the upper electrode pattern and the lower electrode in accordance with deformation of the piezoelectric film.

In one embodiment of the present invention, the piezoelectric film further includes a second voltmeter for measuring a voltage between the piezoelectric electrode pattern and the lower electrode or a voltage between the piezoelectric electrode pattern and the upper electrode pattern in accordance with deformation of the piezoelectric film .

In one embodiment of the present invention, the piezoelectric film may include a polarized polyvinylidene fluoride (PVDF), a polyvinylidene fluoride-hexafluoropropylene (PVDF-HFP), or a polyvinylidenefluoride-trifluoroethylene (PVDF-TrFe) Lt; / RTI >

In one embodiment of the present invention, the piezoelectric electrode pattern may be a Ti / Au thin film.

In one embodiment of the present invention, the upper electrode pattern may be an aluminum film coated with carbon.

In one embodiment of the present invention, the lower electrode may be a carbon-coated aluminum film.

In one embodiment of the present invention, the electrolyte may be polyaniline (PANi).

In one embodiment of the present invention, the upper storage film may be a silicon tape or a carbon tape.

In one embodiment of the present invention, the upper storage film may have the same structure and shape as the lower storage film.

In one embodiment of the present invention, the membrane may be polycarbonate track etched (PCTE).

In one embodiment of the present invention, the diameter of the nano pores of the membrane is 10 nm to 1 μm, the density of the nano pores of the membrane is 2 × 10 7 pores / cm 2 to 6 × 10 8 pores / cm 2 , The thickness may be between 6 [mu] m and 20 [mu] m.

The ion channel sensor according to the embodiments of the present invention can sense a wide range of pressure with low power by including receptors and electrolytes of various materials, and further, the first and second electrolytes The ion channel sensor may be provided in a patch and a wearable manner. In addition, the ion channel sensor can implement a self-powered ion channel sensor by attaching a piezoelectric film on the electrolyte packaging. Accordingly, the ion channel sensor can be implemented with its own power, small size, and light weight.

1 is a conceptual diagram illustrating a biological somatic sensory organ.
2 is a conceptual diagram illustrating an artificial ion channel sensor according to an embodiment of the present invention.
FIG. 3A is an exploded perspective view of the ion channel sensor of FIG. 2. FIG.
FIGS. 3B, 3C, 3C and 3D are cross-sectional views of the ion channel sensor of FIG. 3A.
FIG. 4A shows a time-dependent waveform of a slow adaptive voltage signal V SA according to an external pressure according to an embodiment of the present invention.
FIG. 4B shows a time-dependent waveform of a quick adaptive voltage signal V FA according to an external pressure according to an embodiment of the present invention.
4C shows the maximum value of the slow adaptive voltage signal V SA according to the pressure difference and the maximum value and the negative maximum value of the amount of the fast adaptive voltage signal V FA , respectively.
FIG. 5A is a graph illustrating a frequency dependency of an external pressure signal of a quick adaptive voltage signal (V FA ) according to an embodiment of the present invention.
FIG. 5B shows the calculated Q factor and line width obtained by converting the fast adaptation voltage signal V FA of FIG. 5A into a frequency space.
6A shows a slow adaptive voltage signal (V SA ) measured in a state where an ion channel sensor according to an embodiment of the present invention is attached to a human's cuff.
FIG. 6B shows a fast adaptive voltage signal V FA and a slow adaptive voltage signal V SA measured in a state where the ion channel sensor according to an embodiment of the present invention is attached to a human's cuff before / after movement.
6C is a result of enlarging the slow adaptive voltage signal V SA .
6D is a result of enlarging the fast adaptation voltage signal V FA .
FIG. 6E shows the radial artery augmentation index before and after exercise (AI r = P 2 / P 1 ), radial diastolic augmentation (DAI = P 3 / P 1 ) And the round trip time (T r ) of the wave.
7A is a plan view showing an ion channel sensor array according to another embodiment of the present invention.
7B is a cross-sectional view taken along the line A-A 'in FIG. 7A.

According to one embodiment of the present invention, such an ion channel is simulated to provide an ion channel sensor with high selectivity and resolution.

The ion channel pressure sensor according to embodiments of the present invention includes a nano pore membrane, a plurality of nano channel parts (through holes) functioning as an ion channel passing through the nano pore membrane and providing a path of an electrolyte, An electrolyte disposed on both sides, and a storage unit for packaging the electrolyte. Further, a piezoelectric film for applying a voltage to one of the two surfaces of the ion channel is disposed, and the piezoelectric film provides self-power.

According to an embodiment of the present invention, the ion channel sensor may be configured to measure the external pressure, that is, the ion channel sensor according to the movement of the ions constituting the electrolytes on both sides of the ion channel by various environmental forces such as touch, bending, The degree of pressure is sensed by the change of the voltage value.

According to one embodiment of the present invention, the ion channel sensor element basically consists of two components: a pressure receiver, and a nanopore, which regulates ion movement. Therefore, a wide variety of ion channel sensors can be manufactured depending on the type and function of the receptor and nanopore.

According to an embodiment of the present invention, the ion channel sensor includes a nano-porous membrane, a nano-channel portion through which the electrolyte flows through the nano-porous membrane, a receptor for sensing pressure, and an electrolyte containing ions. As a result, the ion channel sensor can be reversible, sensitive and selective to the pressure change by its own power by the piezoelectric film.

In one embodiment of the present invention, the material contained in the electrolyte includes a general liquid, a sol-gel, and a solid having conductivity, which can control various regions of the pressure sensing range. Here, the general liquid, sol-gel, and solid-phase materials include an aqueous solution containing ionic ions such as sodium, potassium, lithium, magnesium, and the like and a liquid metal. The sol-gel phase includes a conductive polymer, Agarose, gelatin, and the like). The solid phase includes carbon nanotubes, fibers, and graphene, which can change the resistance of a solid depending on the pressure.

The ion channel sensor according to an embodiment of the present invention includes upper and lower portions of the nano pore member lane and includes first and second electrolyte portions. Silicon and carbon double-sided adhesive tapes may be disposed on the upper and lower surfaces of the first and second electrolyte portions as materials for packaging the electrolyte.

According to one embodiment of the present invention, we propose an ion channel pressure sensor comprising a receptor and a nanopore membrane. The ion channel pressure sensor may have a laminated structure having a receiver (or support) of a polymer material, an electrolyte, and a nano pore membrane. The ion channel pressure sensor can provide high sensitivity, responsiveness, selectivity, and dynamic characteristics. The sensitivity of the ion channel pressure sensor can achieve a value of ~ 5.6 kPa < -1 > level. The reaction time can be recorded at ~ 11 ms level at a frequency of 1 Hz. Stability was confirmed by the current signal for over 10,000 cycles of loading-unloading. No change in sensitivity was found in the wet test. In addition, a patchable ion channel pressure sensor successfully detected human blood pressure pulses.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. The following examples and results are provided so that the disclosure of the present invention will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. Also, for convenience of explanation, the components may be exaggerated or reduced in size.

The development of low-power artificial sensors inspired by human mechanoreceptors is crucial for restoring sensory functions that are damaged or worsened by human aging and disability. The skin sensory organs produce a receptor potential through a mechanoreceptor to a variety of external stimuli, which is transmitted to the brain via the axons. In this case, the brain can differentiate between external stimulus types through two typical action potentials, slow adaptation (SA) and fast adaptation (FA).

In accordance with one embodiment of the present invention, we propose a self powered artificial ion channel sensor imitated by the SA and FA actions of human skin machinery receptors. The sensor can provide a fast adaptive voltage signal (V FA ) and a slow adaptive voltage signal (V SA ) corresponding to FA and SA, respectively, for external stimuli, comprising a piezoelectric film, electrolyte, nanopore membrane and electrode .

The fast adaptive voltage signal (V FA ) and the slow adaptive voltage signal (V SA ) are signals corresponding to SA and FA, and can analyze various types of contact and pressure through an effective analysis. The fast adaptive voltage signal (V FA ) and the slow adaptive voltage signal (V SA ) show distinct sensing characteristics for different textures and number braille. We can precisely measure human blood pressure measurements through a fast adaptive voltage signal (V FA ) and a slow adaptive voltage signal (V SA ). In addition, the sensing behavior that slides holding the tumbler can be effectively analyzed by a combination of a fast adaptive voltage signal (V FA ) and a slow adaptive voltage signal (V SA ).

Numerous research groups ultimately tried to imitate the functions of natural skin through a variety of methods. Specifically, the development of a device capable of differentiating from various stimuli is an important part of applying a tactile sensor. The scope of this sensor applies not only to humanoid robots but also to wearable health monitoring devices. Most of the previous studies on touch or pressure sensors have included silicon and polymer-based devices (including trans- ducers, piezoelectric, piezoresistive, and capacitive sensing). However, these systems can give very narrow or misleading information compared to complex but distinct biological signal systems. It can also be coupled between the input and output regions to represent unstable electrical characteristics and high operating power.

According to an embodiment of the present invention, a self-drive mass sensor that exhibits a highly differential and complementary sensing function in comparison with the limitations of existing touch or pressure sensors is reported. Conventional touch or pressure sensors are difficult to distinguish complex situations, but the sensors of the present invention can distinguish complex situations.

1 is a conceptual diagram illustrating a biological somatic sensory organ.

Referring to FIG. 1, a sensory function processed through the skin within the somesthesi of the human body is achieved by the operation of four representative sensory mechanoreceptors. This system is generally divided into two FA and two SA machine receivers. They are created with a combination of large acceptance field size and small acceptance field size. Specifically, the Merkel disk (MD) and the Ruffini cylinder (RC) included as SA receptors are reactive as long as stimulation exists. Conversely, Meissner corpuscle (MC) and Pacinian corpuscle (PC), which are included as FA receptors, respond only at the beginning and end of stimulation.

2 is a conceptual diagram illustrating an artificial ion channel sensor according to an embodiment of the present invention.

FIG. 3A is an exploded perspective view of the ion channel sensor of FIG. 2. FIG.

FIGS. 3B, 3C, 3C and 3D are cross-sectional views of the ion channel sensor of FIG. 3A.

Referring to FIGS. 2 and 3, a structure of an artificial ion channel sensor simulating the functions of SA and FA will be described. The self-powered ion channel sensor (100) includes: a lower storage part (110) including a lower storage space (112) for storing an electrolyte; An upper storage part (120) including an upper storage space (122) for storing the electrolyte; A membrane (130) disposed between the lower storage part (110) and the upper storage part (120) and including a plurality of through holes; A lower electrode 140 disposed on a lower surface of the lower storage part; An upper electrode 150 disposed on an upper surface of the upper storage unit 120; A piezoelectric film 170 disposed on the upper electrode; And a piezoelectric electrode 180 disposed on the piezoelectric film.

The fast adaptation voltage signal V FA of the self-powered ion channel sensor 100 is a signal between the piezoelectric electrode 180 and the lower electrode 140 or a signal between the piezoelectric electrode 180 and the upper electrode 150. [ Lt; / RTI > The slow adaptive voltage signal V SA is given as a signal between the upper electrode 150 and the lower electrode 140. The first voltmeter 182 measures a slow adaptive voltage signal V SA between the upper electrode 150 and the lower electrode 140 in accordance with the deformation of the piezoelectric film. The second voltmeter 184 may be configured to generate a quick adaptive voltage signal V FA between the piezoelectric electrode 180 and the lower electrode 140 or a fast adaptive voltage signal V FA between the piezoelectric electrode 180 and the upper electrode 140, And measures the quick adaptive voltage signal (V FA ) between the electrodes (150).

The lower storage unit 110 may be a silicon-based film (or tape) or a conductive carbon tape. The lower storage part 110 is a plate having a predetermined thickness and can be deformed by external pressure. The lower storage part 110 includes a lower storage space 112, and the lower storage space 112 may be formed by punching a film-like lower storage part. The thickness of the film of the lower storage part 110 may be several tens of micrometers to several hundreds of micrometers. The lower storage space 112 may be filled with an electrolyte 160. An adhesive layer may be disposed on the upper surface and the lower surface of the lower storage part 110, respectively.

The upper storage portion 120 may have the same structure, shape, and material as the lower storage portion. The upper storage unit 120 may be a silicon-based film or a carbon film. The upper storage part 120 is in the form of a plate having a constant thickness and can be deformed by external pressure. The upper storage part 120 includes an upper storage space 122 and the upper storage space 122 may be formed by punching a film-like upper storage part 160. The film thickness of the upper storage portion 120 may be several tens of micrometers to several hundreds of micrometers. The cross-sectional area of the upper storage space 122 may be several cm 2 or less. The upper storage space 122 may be filled with an electrolyte 160. An adhesive layer may be disposed on the upper surface and the lower surface of the upper storage portion, respectively. The upper storage space may be vertically aligned with the lower storage space.

 The electrolyte 160 may comprise a common liquid, sol-gel, or solid phase material having conductivity. Here, the general liquid, sol-gel, or solid-phase material includes an aqueous solution containing ions such as sodium (Na), potassium (K), lithium (Li), and magnesium . The sol-gel material includes a conductive polymer, an ionic gel such as a biological gel material (ararose, gelatin). Solid-state materials may include carbon nanotubes, fibers, graphene, and the like, and may have materials that can change the resistance value of a solid depending on the pressure. Specifically, the electrolyte 160 may include a solution of a polyaniline (PANi), a potassium chloride KCl (1M) solution, or an ionic liquid (1-ethyl-3-methylimidazolium ethyl sulfate) .

Specifically, a polyaniline (PANi) solution is prepared as follows. 0.286 g (1.25 mmol) of ammonium persulfate (AP) is dissolved in 1 mL of distilled water to prepare an ammonium sulfate solution. The aniline solution is prepared by mixing 0.921 mL (1 mmol) phytic acid, 0.458 mL (5 mmol) aniline, and 2 mL DI water. The ammonium sulfate solution and the aniline solution are then cooled and mixed in the refrigerator for 4 hours. As a result, the polyaniline solution is obtained with partial gelation.

The membrane 130 may include a plurality of through holes or a plurality of nanopores having a predetermined thickness. The membrane 130 may be polycarbonate track etched (PCTE). The density of the through holes of the membrane 130 is 2 x 10 7 / cm 2 to 6 x 10 8 / cm 2 , and the thickness of the membrane 130 is 6 to 20 μm . The through hole may provide a passage for the electrolyte in the upper storage space 122 and the electrolyte in the lower storage space 122.

The lower electrode 140 is disposed on the lower surface of the lower storage part 110 and may be in the form of a film. The lower electrode 140 may be a carbon-coated aluminum film. The carbon layer of the lower electrode may be disposed so as to be in contact with the electrolyte stored in the lower storage part 110. The lower electrode 140 may seal the lower surface of the lower storage part. The lower electrode may be electrically grounded. The thickness of the lower electrode 140 may be several .mu.m to several tens .mu.m.

The upper electrode 150 is disposed on the upper surface of the upper storage part 120, and may be in the form of a film. The upper electrode 150 may be an aluminum film coated with carbon. The carbon layer of the upper electrode 150 may be arranged to be in contact with the electrolyte stored in the upper reservoir. The upper electrode 150 may seal the upper surface of the upper storage part. The upper electrode 150 is flexible and can be deformed by external pressure. The upper electrode 150 may be electrically floated. The thickness of the upper electrode 150 may be several .mu.m to several tens .mu.m.

The piezoelectric film 170 may be polarized polyvinylidene fluoride (PVDF), polyvinylidene fluoride-hexafluoropropylene (PVDF-HFP), or polyvinylidenefluoride-trifluoroethylene (PVDF-TrFe) The film 170 may be deformed by external pressure to cause a potential difference between both surfaces of the piezoelectric film 170. The piezoelectric film 170 deformed by the external pressure is applied to the piezoelectric electrode 180 and the lower electrode 140 The piezoelectric film deformed by the external pressure may cause a potential difference between the upper electrode 150 and the lower electrode 140 or a potential difference between the piezoelectric electrode 180 and the upper electrode 150. [ The thickness of the piezoelectric film may be from several tens of μm to several hundreds of micrometers. Preferably, the thickness of the piezoelectric film may be 80 μm.

The piezoelectric electrode 180 is disposed so as to cover the exposed upper surface of the piezoelectric film 170. The piezoelectric electrode, the piezoelectric film, and the upper electrode may operate as a capacitor having a potential difference. The piezoelectric electrode 180 may be a Ti / Au thin film. The Ti layer may function as a buffer layer for forming a piezoelectric electrode.

The support 144 may be disposed on the lower surface of the lower electrode. The support portion may be a flexible plastic film. The supporting part 144 may be a protective film for protecting the lower electrode 140.

The piezoelectric film 170 may be a receptor that is deformed by external mechanical stimulation. The deformation of the piezoelectric film 170 and the upper storage portion 120 may cause a potential difference to the piezoelectric film 170 and cause ion motion across the membrane.

When the pressure or external stimulus is removed, the piezoelectric film 170 and the upper reservoir 120 are restored to their original shape, and at the same time, the ions flow reversely across the membrane and cause restoration to an initial voltage value can do.

FIG. 4A shows a time-dependent waveform of a slow adaptive voltage signal V SA according to an external pressure according to an embodiment of the present invention.

FIG. 4B shows a time-dependent waveform of a quick adaptive voltage signal V FA according to an external pressure according to an embodiment of the present invention.

4C shows the maximum value of the slow adaptive voltage signal V SA according to the pressure difference and the maximum value and the negative maximum value of the amount of the fast adaptive voltage signal V FA , respectively.

Referring to FIG. 4, the sensitivity of the ion channel sensor 100 is represented by the slope? V /? P of the curve. Where? P represents the change in applied pressure and? V represents the change in voltage. The sheet resistance of the piezoelectric electrode 180 was ~ 4 Ω / □.

The slow adaptive voltage signal (V SA ) maintains a substantially constant static signal from the beginning to the end of the applied pressure. The sensitivity of the slow response voltage signal (V SA ) is -2.1 x 10 -1 kPa -1 at 1 Hz. And, in the absence of external pressure, the slow response voltage signal V SA has an offset resting potential of 670 mV.

The fast adaptive voltage signal (V FA ) shows a positive peak signal and a negative peak signal, and the sensitivity of the fast adaptive voltage signal (V FA ) is 3.8 x 10 < -1 > for positive and negative peak signals, It was 3.49 x 10 -1 kPa -1. The fast adaptive voltage signal V FA appears as a signal only at the moment of external stimulus application and at the moment of removal. The fast adaptive voltage signal (V FA ) is two hundred times greater than the slow response voltage signal (V SA ) with offsets of several hundreds of mV.

FIG. 5A is a graph illustrating a frequency dependency of an external pressure signal of a quick adaptive voltage signal (V FA ) according to an embodiment of the present invention.

FIG. 5B shows the calculated Q factor and line width obtained by converting the fast adaptation voltage signal V FA of FIG. 5A into a frequency space.

5A and 5B, as the frequency of the external pressure signal increases, the Q factor of the fast adaptation voltage signal V FA increases and the line width decreases.

6A shows a slow adaptive voltage signal (V SA ) measured in a state where an ion channel sensor according to an embodiment of the present invention is attached to a human's cuff.

FIG. 6B shows a fast adaptive voltage signal V FA and a slow adaptive voltage signal V SA measured in a state where the ion channel sensor according to an embodiment of the present invention is attached to a human's cuff before / after movement.

6C is a result of enlarging the slow adaptive voltage signal V SA .

6D is a result of enlarging the fast adaptation voltage signal V FA .

FIG. 6E shows the radial artery augmentation index before and after exercise (AI r = P 2 / P 1 ), radial diastolic augmentation (DAI = P 3 / P 1 ) And the round trip time (T r ) of the wave.

Referring to Figures 6A-6E, the ion channel sensor 100 was attached to the wrist to measure the pulse of the radial artery. The slow adaptive voltage signal (V SA ) represents the pulse of the radial artery and shows a repetitive pulse between the systolic and the diastolic.

The slow adaptive voltage signal V SA represents the three pulse waveforms P 1 , P 2 and P 3 and the round trip time Tr of the reflected wave around the hand.

A slow adaptive voltage signal (V SA ) and a fast adaptive voltage signal (V FA ) were measured before and after exercise. In the slow adaptive voltage signal V SA and the fast adaptive voltage signal V FA the deviations P 1 , P 2 and P 3 between the rest and the exercise (ΔP 1 , ΔP 2 and ΔP 3 ) Is displayed.

A typical signal of the radial artery represents three pulse waveforms (P 1 , P 2 and P 3 ). The pulse rate per minute increases from 62 before exercise to 77 bits / minute after exercise. Comparing the values of radial artery increase index (AIr) and radial diastolic increase (DAI) before and after exercise, the slow adaptive voltage signal (V SA ) decreases by 14.8 and 8.3% respectively and the fast adaptive voltage signal (V FA ) 54 and 0%.

For exercise conditions, the systolic and pulse pressure decreases. The round trip time Tr also decreases from 320 ms to 198 ms after the exercise and decreases from 320 to 132 ms for the fast adaptation voltage signal V FA for the slow adaptive voltage signal V SA .

Compared to conventional arterial blood pressure measurements that are sensed with a single signal, the complementary signals of the slow adaptive voltage signal (V SA ) and the fast adaptive voltage signal (V FA ) can more accurately monitor the blood pressure.

7A is a plan view showing an ion channel sensor array according to another embodiment of the present invention.

7B is a cross-sectional view taken along the line A-A 'in FIG. 7A.

7A and 7B, the self-powered ion channel sensors 200 may be arranged in an array in the form of a matrix. The self-powered ion channel sensor (200) includes a lower electrode (140); A lower storage film (110) disposed on the lower electrode and including a plurality of lower storage spaces (112) for storing an electrolyte; A membrane (130) disposed on the lower storage film and having a plurality of nanopores (132); An upper storage film (120) disposed on the membrane and having a plurality of upper storage spaces (122) for storing the electrolyte; A plurality of upper electrode patterns (250) disposed on the upper storage film; A piezoelectric film 170 disposed on the upper electrode pattern; And a piezoelectric electrode pattern 280 disposed on the piezoelectric film. The lower storage space 112, the upper storage space 122, the upper electrode pattern 250, and the piezoelectric electrode pattern 280 may be vertically aligned with each other.

The quick adaptive voltage signal V FA of the self-powered ion channel sensor 200 is a signal between the piezoelectric electrode pattern 280 and the lower electrode 140 or a signal between the piezoelectric electrode pattern 280 and the upper electrode pattern 280. [ Lt; RTI ID = 0.0 > 150 < / RTI > The slow adaptive voltage signal V SA is given as a signal between the upper electrode pattern 250 and the lower electrode 140. The first voltmeter 182 measures a slow adaptive voltage signal V SA between the upper electrode pattern 250 and the lower electrode 140 according to the deformation of the piezoelectric film. The second voltmeter 184 is formed by applying a quick adaptive voltage signal V FA between the piezoelectric electrode pattern 280 and the lower electrode 140 or a fast adaptive voltage signal V FA between the piezoelectric electrode pattern 280 and the piezoelectric electrode pattern 280 according to the deformation of the piezoelectric film 150. And measures a quick adaptive voltage signal (V FA ) between the upper electrode patterns (250).

The first voltmeter 182 can measure the voltage between the upper electrode pattern and the lower electrode according to the deformation of the piezoelectric film.

The second voltmeter 184 can measure the voltage between the piezoelectric electrode pattern and the lower electrode or the voltage between the piezoelectric electrode pattern and the upper electrode pattern according to the deformation of the piezoelectric film.

The piezoelectric film 170 may be a polarized polyvinylidene fluoride (PVDF), a polyvinylidene fluoride-hexafluoropropylene (PVDF-HFP), or a polyvinylidenefluoride-trifluoroethylene (PVDF-TrFe) film.

The piezoelectric electrode pattern 280 may be a Ti / Au thin film. The upper electrode pattern 250 may be a carbon-coated aluminum film. The lower electrode 140 may be a carbon-coated aluminum film. The electrolyte may be polyaniline (PANi). The upper storage film 120 may be a silicon tape or a carbon tape. The upper storage film 120 may have the same material, structure and shape as the lower storage film 110. The membrane 130 may be polycarbonate track etched (PCTE). The diameter of the nano pores of the membrane is 10 nm to 1 μm, the density of the nano pores of the membrane is 2 × 10 7 pores / cm 2 to 6 × 10 8 pores / cm 2 , and the thickness of the membrane is 6 μm to 20 μm .

The support 144 may be disposed on the lower surface of the lower electrode. The support portion may be a flexible plastic film. The supporting part 144 may be a protective film for protecting the lower electrode 140.

While the invention has been shown and described with reference to certain preferred embodiments thereof, it will be understood by those skilled in the art that various changes and modifications may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. And all of the various forms of embodiments that can be practiced without departing from the spirit of the invention.

100: self-powered ion channel sensor (100)
110: Lower storage part
120: upper storage unit
130: Membrane
140: lower electrode
150: upper electrode
170: Piezoelectric film
180: piezoelectric electrode

Claims (24)

A lower storage portion including a lower storage space for storing the electrolyte;
An upper storage portion including an upper storage space for storing the electrolyte;
A membrane disposed between the lower reservoir and the upper reservoir and including a plurality of through holes;
A lower electrode disposed on a lower surface of the lower storage part;
An upper electrode disposed on an upper surface of the upper storage unit;
A piezoelectric film disposed on the upper electrode; And
And a piezoelectric electrode disposed on the piezoelectric film,
A first voltmeter for measuring a voltage between the upper electrode and the lower electrode according to deformation of the piezoelectric film; And
And a second voltmeter for measuring a voltage between the piezoelectric electrode and the lower electrode or a voltage between the piezoelectric electrode and the upper electrode in accordance with deformation of the piezoelectric film,
The first voltmeter measures a slow adaptive voltage signal (V SA ) that maintains a substantially constant static signal from the beginning to the end of the applied pressure,
Wherein the second voltmeter measures a fast adaptation voltage signal (V FA ) that is indicative of a signal only when an external stimulus is applied and when it is removed.
delete delete The method according to claim 1,
Characterized in that the piezoelectric film is a polarized polyvinylidene fluoride (PVDF), a polyvinylidene fluoride-hexafluoropropylene (PVDF-HFP) or a polyvinylidenefluoride-trifluoroethylene (PVDF-TrFe) Channel sensor.
The method according to claim 1,
Wherein the piezoelectric electrode is a Ti / Au thin film.
The method according to claim 1,
Wherein the upper electrode is a carbon-coated aluminum film.
The method according to claim 1,
Wherein the lower electrode is a carbon-coated aluminum film.
The method according to claim 1,
Wherein the electrolyte is a polyaniline (PANi).
The method according to claim 1,
Wherein the upper storage portion is a silicon tape or a carbon tape.
The method according to claim 1,
Wherein the upper storage unit has the same structure and shape as the lower storage unit.
The method according to claim 1,
Characterized in that the membrane is a polycarbonate track etched (PCTE).
12. The method of claim 11,
The diameter of the through-hole of the membrane is 10 nm to 1 μm,
The density of the through-holes of the membrane is 2 x 10 7 pores / cm 2 to 6 x 10 8 pores / cm 2 ,
Wherein the thickness of the membrane is between 6 and 20 [mu] m.
A lower electrode;
A lower storage film disposed on the lower electrode and including a plurality of lower storage spaces for storing the electrolyte;
A membrane disposed on the lower storage film and having a plurality of nanopores;
An upper storage film disposed on the membrane and having a plurality of upper storage spaces for storing the electrolyte;
A plurality of upper electrode patterns disposed on the upper storage film;
A piezoelectric film disposed on the upper electrode pattern; And
And a piezoelectric electrode pattern disposed on the piezoelectric film,
Wherein the lower storage space, the upper storage space, the upper electrode pattern, and the piezoelectric electrode pattern are vertically aligned with each other,
A first voltmeter for measuring a voltage between the upper electrode pattern and the lower electrode according to deformation of the piezoelectric film; And
And a second voltmeter for measuring a voltage between the piezoelectric electrode pattern and the lower electrode or a voltage between the piezoelectric electrode pattern and the upper electrode pattern in accordance with deformation of the piezoelectric film,
The first voltmeter measures a slow adaptive voltage signal (V SA ) that maintains a substantially constant static signal from the beginning to the end of the applied pressure,
Wherein the second voltmeter measures a fast adaptation voltage signal (V FA ) that is indicative of a signal only when an external stimulus is applied and when it is removed.
delete delete 14. The method of claim 13,
Characterized in that the piezoelectric film is a polarized polyvinylidene fluoride (PVDF), a polyvinylidene fluoride-hexafluoropropylene (PVDF-HFP) or a polyvinylidenefluoride-trifluoroethylene (PVDF-TrFe) Channel sensor.
14. The method of claim 13,
Wherein the piezoelectric electrode pattern is a Ti / Au thin film.
14. The method of claim 13,
Wherein the upper electrode pattern is an aluminum film coated with carbon.
14. The method of claim 13,
Wherein the lower electrode is a carbon-coated aluminum film.
14. The method of claim 13,
Wherein the electrolyte is a polyaniline (PANi).
14. The method of claim 13,
Wherein the upper storage film is a silicon tape or a carbon tape.
14. The method of claim 13,
Wherein the upper storage film has the same structure and shape as the lower storage film.
14. The method of claim 13,
Characterized in that the membrane is a polycarbonate track etched (PCTE).
14. The method of claim 13,
The diameter of the nano-pores of the membrane is 10 nm to 1 μm,
The density of the nanopores of the membrane is 2 x 10 7 pores / cm 2 to 6 x 10 8 pores / cm 2 ,
Wherein the thickness of the membrane is between 6 and 20 [mu] m.
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