CN107044891A - Capacitance pressure transducer, based on ionic membrane - Google Patents
Capacitance pressure transducer, based on ionic membrane Download PDFInfo
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- CN107044891A CN107044891A CN201610762096.4A CN201610762096A CN107044891A CN 107044891 A CN107044891 A CN 107044891A CN 201610762096 A CN201610762096 A CN 201610762096A CN 107044891 A CN107044891 A CN 107044891A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
Abstract
The present invention discloses diaphragm pressure sensor, and this sensor includes one or more electrode contact sensing materials；The capacitance variations of sensor deformation-sensor, it is measurable sensor, between two electrodes or a sensor the sensor that is applied to of electrode and electrode, between the surface of such as skin is formed, the material of sensing can be for example including Ionic Liquids Ionic compound ion material.
Description
Cross reference to related application
This application requires the preferential of the U.S. Provisional Patent Application No. 62/211,630 proposed for 28th to August in 2015
Power, entire contents are incorporated herein by reference.
The research or the statement of development supported on federal government
Present invention governmental support, the National Science Foundation's awards issued by state natural sciences fund
ECCS1307831 and IIP-1451056.There are some rights in government in the present invention.
Background technology
Technical field
The present invention relates to the sensing device in pressure sensing field, especially for applying in Medical Devices, wearable device
With the pressure sensing in similar flexible thin film sensor.
Prior art
Pressure sensor based on encapsulation drop is it is well known that such as in condenser types of the US 9,170,166 based on drop
Disclosed in pressure sensor.In that patent, electrolyte drop is placed in by the electrode surface of hydrophobic modification.
The content of the invention
The present invention is diaphragm pressure sensor, and device is identical, and includes its making and use method.Example sensing of the present invention
Device, which includes wherein definition structure chamber, structure, includes segmentation chamber and the top layer film of external environment condition.Top layer film is included towards chamber
First conducting film surface.The sensor is additionally included in one layer of sensing material in chamber, this layer of sensing material contact first
The conductive surface of individual film.Sensing material optionally solid, liquid or a kind of composite.The sensing material bag in various cases
The compound water congealing gel matrix such as ionic material is included, and as the ionic liquid of tricyano methyl 1- ethyl-3-methylimidazoles.
In some cases, the superiors of the sensor of this example also include the first conductive layer and at least part of first
Conductive layer, conductive surface is provided for first film.The first conductive layer in further case includes, such as tin indium oxide or stone
Black alkene.In other cases, the first conductive layer is provided in conductive surface has electrode pattern at least partially, such as to provide in layer
In a pair of electrodes.
The sensor of this example in some cases, structure enter a step bag include ︰ intermediate layers be added to top figure layer, in
There is defined the size of chamber for interbed.In these cases, some chambers further comprise bottom, intermediate layer is in top layer
Between bottom.In some these cases, bottom further comprises across chamber, and its conductive surface is led towards first film
Ammeter face.In these cases, bottom layer further comprises the second conductive layer, the second conductive layer at least a portion it is conductive there is provided
The conductive surface of bottom.Include second film of bottom in more cases, bottom is between segmentation chamber and external environment condition
Structure.
Another example sensor of the present invention is by up of three layers：Basalis, sensing element (including ionic material) and
The conductive material layer of sensing contact material layer.Some electrically conductive materials carry electrode pattern in these cases, form two electricity exhausted
The part of edge provides two single top layer electrodes.In other cases, conductive material layer is in the material of basalis and sensing
The bed of material, or sensing element are between the material layer of basalis and conduction.
But another example sensor of the present invention is included：One layer of conductive material, and the conductive material layer of contact
Sensing element (include ionic material).Sensing element includes multiple carrying out figure layer by ionic material in some cases
Conductor wire, and in these cases, conductor wire includes conductive fabric.In other cases, sensing element includes coated ion
The conductive strips of material.
Another example sensor of the present invention includes flexible structure, chamber defined in it, two faces of chamber both sides
The opposition on opposite respectively has about the same surface area, and centre separately forms chamber by intermediate layer, at least one surface conductance.This
The also included chamber of sensor of individual example, wherein sensing material (including ionic material) are the sensing materials for contacting conductive surface.
These cases some ionic materials include liquid, and these cases some sensors also using spud pile knot
Structure, surface, which are modified, to be used for keeping position of the sensing material in chamber.Further, some cases include the conductive layer of chamber both sides
It is separated, and there is electrode pattern electrode pattern.
A kind of sample method of the present invention, which includes providing, to be included forming first conducting surface on a conducting surface, and the second layer is to allow
Ionic material is invested on this conducting surface, forms sensing layer.In various cases formed sensing material include with by light-initiated
The polymer ions liquid incorporating material of polymerization, ionic liquid is such as such as 1- ethyl-3-methylimidazole tricyano methyl.Sensing
Material can also include the material of the loose structure of dipping ionic liquid.These porous structure materials can include micro-structural polymerization
Thing matrix, hollow sponge, fabric or paper.
There is a kind of sky for including a basalis, there is that an intermediate layer is formed above in various embodiments in case
Chamber.At least a portion surface to shop in this structure.Certain methods Hai Bao Kuo ︰ in these cases form one in intermediate layer
Top layer, some quilting materials also include conductive layer, and this second flexible conductive layer is in face of first conductive layer.
Brief description of the drawings
Fig. 1 is an example sectional view according to sensor of the invention case.
Fig. 2 is Fig. 1 bottom view.
Fig. 3 is that, according to the present invention, another exemplary case shows the sectional view of deformation-sensor.
Fig. 4 is the electrical schematic diagram of various embodiments of the present invention.
Fig. 5 is a kind of a kind of sensor of formation, according to the method flow diagram of the example of the case of the present invention.
Fig. 6-9 is the sectional view that four sensors embody the present invention according to further example.
Figure 10 is the top figure layer of Fig. 9 bottom view.
Figure 11-16 is the sectional view for six more multisensors that the present invention embodies according to further example.
Embodiment
The present invention discloses extremely sensitive, soft diaphragm pressure sensor.Sensor of the invention includes ionic material
With one or more electrodes, and the pressure applied as sensor deformation response, the capacitance variations of sensor are measurable biographies
Between sensor, two electrodes or single sensor electrode and electrode formation sensor application between surface.The present invention's
Sensor offer is extremely sensitive to be used, for example, in various emerging wearable and healthy Application in Sensing.In the case of the present invention
Sensor mechanism response may be up to 500Hz, the response time be less than 1 millisecond, than other known flexible capacitance type sensor ring
Between seasonable soon at least ten times.It is further noted that the pressure sensor of the present invention also shows good mechanical stability and machinery
Response.In some cases, the material in sensor is inherently transparent.
Fig. 1 and Fig. 2 respectively illustrate section and the bottom view of example sensor 100 of the present invention, and Fig. 2 is Fig. 1 by 1-1 lines
The interface of interception.The sensor 100 includes the chamber 110 defined in it of structure 105.And the case general shape shown in Fig. 2 is just
Square, structure of the invention is easy to as circle or other shapes, including in order to meet the customized shape of body part
Shape.The example diameter of circular sensor 100 is at 1 millimeter to 6 millimeters, in the range of such as 2 millimeters, 3 millimeters, 4 millimeters and 5 millimeters, but
These diameters can also be more than or less than according to application scenario.These identical length are also applied for square and rectangular sensor
The length on 100 side.110 chambers or comprising one or more blow vents 115, are fully sealed as shown in figure 1, still can also realize
From external environment condition.115 blow vents can be improved in some cases in sensitivity, but annular seal space 110 may for it is some especially
Using, under water, implant, or in a humid environment.Other sensors wall is opened to outside, or
Lack chamber to side, it is described in detail below.
A kind of flexible and electrically insulating material that structure 105 includes the first film 120 composition is placed in chamber 110 and the knot of external environment condition
105 between structure.The material can be with optical clear (optional).The identical material of the film of structure 105 and 120 formation in various cases
Material.The material construction structure 105 and (or) film 120 of example include glass, pass through chemical vapor deposition SiO2, polymer,
Avatrel, BCB PPA (benzocyclobutene), silicon rubber (PDMS), polyimides, plastics, SU-8 glue, poly-methyl methacrylate
Ester and double faced adhesive tape.The scope of the film thickness of example 120 is from 75 μm to 175 μm, such as 100 μm, 125 μm and 150 μm, but can be with
Side scope is adjusted according to various embodiment demands so that film is thinner or thicker.
120 films also include conductive surface 125 facing to 110 chambers.Conductive surface 125 may be implemented in a variety of ways, for example, lead to
Cross to offe telex and lead active surface or flexible and conductive material, the indium tin oxide (ITO) of such as film forms a side form 120
In face of 110 layers of chamber.Include polyaniline in eigenstate in film 220, the active material for example, surface of 220 films can be adulterated by proton
Different oxidation state are realized conductive.Fig. 1 conductive surfaces 125 in this example, on the contrary, by providing size (such as Fig. 2 beyond 110 chambers
Shown in a dashed rectangle) conductive layer 130 made electrical contact with outside the chamber of (not shown) 110 is provided.Conductive layer in other cases
130 be same chamber 110, such as when prolonging the global formation of structure 105.Conductive layer 130 can be optically transparent (optional).
Conductive layer 130 other example materials, which can be provided, includes metal such as gold, aluminium, copper, silver, and etc., and its conjunction
The conductive metal such as gold, liquid metal mercury, gallium alloy and, nanostructured (such as monoatomic layer conductor, nanotube, nano particle
And nano wire) and non-metallic particle (such as carbon black, graphene, CNT, the zinc oxide nanowire of carbon fullerene, indium oxide, germanium
Silicon, GaAs etc.), and the conductive compound ITO of film an example.Some organic conductive materials also are adapted for, such as poly-
(3,4-ethylenedioxythiophene), poly styrene sulfonate (PEDOT:PSS), polyaniline (PANI) and poly (3-
Hexylthiophene-2,5-diyl) (P3HT) conducting polymer).The combination of these materials can also be used.
Sensor 100 further comprises one layer of intracavitary of sensing material 135110 and is physically and electrically contacting conductivity meter facial mask
120125.Sensing material 135 needs highly conductive, produces interface capacitance, and possesses enough mechanical strengths, to ensure structure
Stability.Sensing material 135 can also select to be optically transparent.Therefore, sensing material 135 be included in some cases be from
Sub- material.Herein, ion conductors can be provided by solid, liquid or composite being defined as with ionic material.Ionic liquid is
A form of a kind of ionic material and the salt defined herein as liquid condition.Ionic liquid is the aqueous solution for being different from salt.Salt
The aqueous solution be also example in liquid ionic material.Ionomer is a kind of ionic material, may reside in liquid or solid
One example of body phase.Ionomer is defined as polymer, and covalent bond and ionic bond are included in the structure of its molecule.Ion
Polymer can be organic or inorganic.
Another solid ion material is all the composite of ion, is the matrix material with internal air strike, by ion
There is example electric conductivity after material process.Some polymeric materials are solidifying including polymer such as polyethylene glycol (PEG) by organic material
Glue, difluoro polyvinylidene fluoride (PVDF), poly (vinylidenefluoride-hexafluoropropylene) (gather inclined fluorine
Ethene-hexafluoropropene) and Nafion compositions.Another suitable host material is the hydrogel absorbed such as agar gel.It is this
It is tricyano methyl 1- ethyl-3-methylimidazole ionic liquids that ion composite, which is used for example liquid, can be in some cases
In there is provided 18mS cm-1Electrical conductivity.This ionic liquid is because negligible vapour pressure is suitable for current application.
Include the material of loose structure, such as micro-structural polymer using other suitable host materials in ion composite
Matrix, hollow sponge, textile and paper.In some cases, such as can be by capillarity by ionic liquid with fabric and paper
It is coated in surface.Foam and paper can be with dipping ionic materials.Polymer gel can be fabricated to a kind of foam in itself.In some cases
In example, the polymer of ion can form fabric by Static Spinning.Common fabric (e.g., cotton, nylon etc.) also can lotion from
Sub- material.
In operation, pressure, which is applied to sensor 100, deforms structure 105, film 120 and sensing material 135.The He of film 120
The measurement of conductive surface 125,135 and the capacitance sensor 100 of the interface deformation influence between sensing material 135.More specifically
Ground says, electric double layer (EDL) interface capacitance of sensor forms connecing for place and sensing material 135 and conducting surface 125 in word invention
Touch interface.So conductive surface 125 and make the accumulative electric double layer for having a nanometer distance in the surface of ion sensor material 135.This pair of electricity
Layer can produce the unit-area capacitance of superelevation.It can be provided up to 5.4 μ F/cm by the use of ionic material as sensing material 1352Unit
Area capacitance, is between all solid state capacitance sensor of known highest.Therefore, yield 3.1nF kPa are embodied-1Superelevation mechanical capacitance
Sensitivity, it is more three orders of magnitude greater than transmission solid state sensor.
Further comprise that the second layer 140 is generally parallel to film 120 further embodying structure 105, the second layer 140 is covered
110, chamber also includes film 140 with the second layer in some these cases.When chamber 110 is capped by this way, 110 chambers can be with
It is considered as to be fully sealed or opened by a blow vent 115 into external environment condition.In various cases, the structure second layer
140120 membrane material identicals are formed.The second layer 140 selects also to include conductive surface 145 in face of 110 chambers.As conductive surface 125,
By the surface activated or flexible and conductive material, such as those suitable conductive surfaces 125 110 chamber shapes can be faced in the second layer 140
Into one layer of conductive surface 145.In further case, below, discuss that the second layer 140 does not include conductive surface 145 and is used as the
Two electrodes, on the contrary, being unitarily formed two electrode layers at one (see Figure 11).
Size second of electrical contact (not shown) of offer beyond 110 chambers is provided in Fig. 1 example conductive surface 145
Conductive layer 150 outside 110 chambers.Conductive layer 150 in other cases is that conductive layer can be more than chamber size, also may be used with 110
With less than chamber size.As structure is integrally formed 105, conductive surface 125 is also applied for., can be conductor wire in these cases
Extended to by blow vent 115 outside 110 chambers, realize that electricity is turned on.In including the second layer 140 these cases, sensing material 135
Do not make the second layer 140, contact or the sensor of conductive surface 145100 are in deformation state, when external pressure is sufficiently large,
The deformation of sensor is just enough to contact to upper lower film surface greatly.
In some cases, the second layer 140 is harder than film 120, such as by thicker or by a different, rigidity
Stronger material composition.In further case, sensing material 135 is on second film 140, rather than on film 120, sensing
Shown in Fig. 3 of device 300.Fig. 3 also illustrate that exceeds threshold value, film 120, and (optional) whole machine of sensor 100 according to external loading
Tool is deformed, and is then come in contact between sensing material 135 and the conductive surface on opposite 125.Formed by electric double layer (EDL) contact
Interface capacitance can be detected electronically.As external load rises, contact area increase, this adds increased EDL electric capacity.
At a given temperature, the electric capacity and contact area are proportional relationships.According to Gouy-Chapman-Stern models, this electrochemistry
Interface can simply be modeled as the element of electric capacity, and therefore, the setting of whole equipment can be considered as EDL (CEDL) can power transformation
Container series connection customization electric capacity and fixed value resistance element.Equivalent circuit diagram shown in Fig. 4.
In some cases, the sensor 100, including the Middle spacer layer of the second layer 140, and segmentation two membranes.
In these cases, intermediate layer 155 includes defining the size of 110 chambers, and the thickness of intermediate layer 155 defines the thickness of chamber 110.It is middle
Layer 155, or two films 120 and the second layer 140, can make identical material or different materials.
Polyethylene terephthalate's film strips that 100 example sensors can include two 75 μ m-thicks have 100nm thick ito layer.
Between the intermediate layer 110 of offer that separates.Two ITO layers define chamber 110 and are embodied with 4 mm dias, 30 μm of spacing height herein.
The characteristics of this structure embodies be pressure sensitiveness be in the range of less than 8kPa be 1.5nF/kPa.Another example sensing
The identical structure snd size of device, its 1 mm dia chamber 110, pressure-sensitivity is 0.018nF/kPa.The chamber of sensor 100 possesses
Less diameter 110, but with bigger detection range (up to 750kPa), and 6 millimeters of Sensing chamber diameter can be detected
Relatively low pressure limit be 1kPa-13kPa.In addition, dynamic range can also adjust sensor by adjusting the chamber 110 of height
Minimum pressure threshold scope.The dynamic range for the sample that high 170 μm of such as chamber is 11kPa-18kPa, 75 μm of high stress dynamics
For 1kPa-13kPa.Briefly, the sensitivity of sensor 100 and dynamic range can be adjusted according to application scenario.
Fig. 5 is the representation of the present invention of example manufacture method 500 of flow chart.Bottom is provided in 510 1 steps.It is any
Suitably structural material is above-mentioned can routinely form bottom layer.In some cases, the material of structure is well in advance.
Bottom is about 1 millimeter to 20 millimeters thicks in various cases, although do not limit this scope.In these cases, bottom is suitable
Deposited with material, deposition can pass through sputtering, chemical vapor deposition, the methods such as coating, silk-screen printing that spin formation pattern.
Make primer conductive in optional step 520, such as by activating surface or deposition conductive layer, as
ITO, the bottom figure layer of side.It can intend being less than or same chamber with area coverage, size is prolonged or area is more than need with patterned conductive layer
The chamber for the size to be covered, and can further pattern in these cases.Conductive layer can form any suitable material,
It is above-mentioned photoetching corrosion to be carried out after such as depositing by traditional mode technology.In 520 these cases of step are not included,
Later another conductive surface was provided in method 500.
Step 530 forms an intermediate layer with aperture on substrate.In these cases, step 530 can pass through cutting
Obtain, be attached on substrate.Cutting can be by mould cutting or laser cutting etc..In these cases, the sensor includes one
Blow vent, the surface of piece can include a groove.To once make multiple sensors, multiple holes can be generated in this layer.
The bottom provided in these cases in 510 steps is enough surface areas to accommodate multiple sensors and conductive layer.
Method 500 further comprises, after step 530, and a kind of pass is formed in the intermediate layer bottom layer of the internal orifice dimension of a step 540
Feel material.Sensing material can form any of above suitable material.Some specific examples are provided below：In the cavity of formation
The ionic conduction liquid of photopolymerization is inside put, then illumination in-situ polymerization, form ion sensor material.
The preparation method for specifically describing sensing material.By example in polyethyleneglycol diacrylate prepolymer solution
(PEGDA, Mw=575g mol-1) monomer, the 2- hydroxy-2-methyls propiophenone (HOMPP) and a kind of ion of light trigger (PI)
Liquid is mixed and applied and invests in aperture, then by material exposure (such as ultraviolet radiation), and material carries out photopolymerization reaction, is formed
Ion composite aquogel.This UV-crosslinked gel-type vehicle is can to form the microstructure of high spatial resolution (submicron order).
Gel polymeric network can be irradiated by ultraviolet (for example, in 365nm, 12mW/cm-2) 20 seconds, so as to excite HOMPP to generate
The mixture for making polymeric acrylate end and ionic liquid of free radical is polymerize.It therefore, it can to form a flexibility and saturating
Bright ionic conductive polymer.
The interface electric attribute of ion composite membrane depends on including factor (that is, the base of the mixing ratio of hydrogel composite material
Body material ions liquid ratio is wherein) and size film layer.The relative quantity of ionic liquid determines whole conductivity, similarly directly
Influence the EDL electric capacity at interface.In addition, EDL electric capacity can generation be influenceed by thickness difference.
The EDL electric capacity of this ion composite changes and changed with the frequency of electric signal.Such as ionic liquid ratio
During 25wt%, as the increase of frequency is from 20 hertz to 1 kilo hertz, unit-area capacitance declines from 3.4 μ F/cm-2To 0.2 μ F/cm-2.Comparatively speaking, ionic liquid ratio 67%, electric capacity only reduces 57%, from 6.1 μ F/cm-2To 2.6 μ F/cm-2.In addition,
Identical driving frequency can cause interface capacitance bright in the case of 20 hertz, to change the ratio of ionic liquid from 25% to 67wt%
It is aobvious to increase from 3.4 μ F centimetre-2To 6.1 μ F centimetre-2。
In general, higher ionic liquid ratio causes bigger interface capacitance, and sensitivity sensitivity is higher.However, from
The mistake of sub- liquid also results in that modulus of elasticity is too low at high proportion, and membrane structure mechanical structure is unstable.Therefore, used in some cases
The 50% of a kind of hydrogel compound ion liquid ratio；This ratio produces mechanical strength, the electrical conductivity of an appropriate balance
With EDL electric capacity, specifically, this ratio possesses 5.4 μ F/cm of of a relatively high EDL electric capacity in the case of 20 hertz-2.And
And possess stable modulus of elasticity (2.72MPa-2)。
Compared to mixed proportion is played, influence of the thickness to electric capacity is relatively small.At 20 hertz, change film thickness from 10 μm to
100 μm, electric capacity increase by 5.7%.
Method 500 in further case, method 500 also includes being formed on the intermediate layer of an optional step 550
Top figure layer.As discussing that further sensor lacks this layer in some cases, remains on intracavitary below,
And this step is omitted in these examples.In the case, it can provide suitable as an opening and closing including the top figure layer of step 550
Material, be such as used to bottom and/or intermediate layer, and be added to aperture in the intermediate layer of cavity formation enclosing the centre of sensing material
Layer material is identical.In some cases, 550 steps, which are also an option that comprising before, adds topmost one layer of intermediate layer, so conductive
Top figure layer side of the surface in face of sensitive material on die cavity forms conductive surface.Conductive surface can form the step
520, the method that conductive film is deposited such as by activating surface or in the figure layer of top., can not be with including step 520 in these cases
It is changed to include being formed the top figure layer side on conductive surface as a part for step 550.
Some steps of processing method can be combined or rearrange.For example, bottom layer and intermediate layer can be one
The profiled sheeting of shaping (such as by molding or being embossed).Hereafter, sensing material, which can be formed, forms step 540 in these caves.
Formed in step 520 and 550 conductive layer can using flexible electrode material such as graphene, CNT and
PEDOT:PSS is further improvement interface capacitance.Especially, PET film can be as the bottom of step 510 and can scribbling graphene
In 520 step.This equipment based on graphene can be shown than using the more preferable capacitances of ITO.
The sectional view of Fig. 6-9 shown in further case.Fig. 6 illustrates that two sensing materials 135 can be wrapped optionally
Containing domed shape, sensing material 135 need not be with the identical size of chamber 110.In the case of 500 methods, it can justify in the formation of step 540
Top.Although the example of dome in figure 6 is to touch top figure layer, dome is less than the thickness of chamber in other cases.Fig. 6's
Embodiment may also be used for explanation, shown in some cases, the position of the sensing and conductive material that can be reversed in the structure.
In Fig. 6, for example, dome is by liquid metal such as mercury.
One layer of sensing material is formed in embodiment combination dome identical material layer shown in Fig. 7.Embodiment shown in Fig. 8
The material of sensing is illustrated, can be in multiple pillars in some cases, taper is spherical, waits various forms being formed within the walls
One array, such as square or regular hexagon array.This kind of array can be similar to Fig. 7 with binder course sensing material.
Fig. 9 and 10, shows respectively, the top figure layer 905 of the sectional view of sensor 900 and inside bottom view and its surface.
This is embodied in conductive layer 910 (being similar to Fig. 1 layers 150) pattern, and patterns in this example, forms a set of parallel lines staggeredly
Or electrode broach 920.In drawing, two 920 pairs of independent cross broach provide two electrodes on one layer of electrode.Broach 920
Bigger sensitiveness can be provided in some cases.
Figure 11 shows that another example sensor embodies the sectional view of the present invention.Material is sensed in Figure 11 sensor 1100
Material includes drop 1110, such as ionic liquid or salting liquid.As Fig. 9 of sensor 900 and 10, sensor 1100 only includes a conduction
Layer 1120 but 1120 points of that layer is that two electrically insulative portions 1130,1140 provide two electrodes, come on this point of further illustrating
Wen Suozuo the second electrode lays can be chosen in all previously described cases, because single figure layer can provide two electrodes.This
Being embodied in conductive layer 1130 has electrode pattern, to provide electric insulation gap 1150.The He of 1110 drop contact part 1130,1140
1150。
1100 sensors can select also to include the civilian post that guide pile 1160 keeps drop 1110.Guide pile in this example
1160 include the material of structure, the projection of square-section and extension perpendicular to drawing plane.Guide pile 1130 is optional to be crossed over
The whole width of chamber 110.500 in method, or two steps 510 and 550 can be used as into including forming positioning of anchor stake 1160
A part for figure layer at the top and bottom of shape.Still guide pile 1160 is not the protrusion of physics but passed through in other cases
Chemical modification surface is formed.
Figure 12 shows another example sensor sectional view for embodying the present invention.Figure 12 sensor 1200 includes opening
One side chamber 110.The depth of 110 chambers is more than 135 sensing material thickness, the depth of 110 chambers and the sensing of thickness in other cases
Material 135 is then roughly the same.
Figure 13 shows another example sensor sectional view for embodying the present invention.Sensor 1300 is only conductive by one layer
1,330 3 layers of collection composition of material layer of material layer 1310, basalis 1320, and sensing.The conductive material layer in the case of explanation
1310 are clipped between basalis 1320 and sensing element 1330.In 500 method, this structure can be by omitting step
530 people and 550, for example.Sensing element 1330 can be in 1320 basalises and conductive material layer in other cases
Between 1310.Basalis 1320 can include any suitable material in embodiment said structure layer.
1300 sensors in some cases can apply to conductive surface.The sensing element 1,330 1 of 1300 sensors
Side contact conductive surface formation closure sensing circuit.According to Fig. 4, two electrodes are respectively the electricity of sensor 1300 in this example
Pole 1330 and measured conductor surface.Therefore, 1300 sensors can apply to the surface of metal and conducting polymer, and tool
The skin and its hetero-organization of conductive human and animal.Contact between sensing element 1330 and the surface that it is depended on
Area can change under external force.
Figure 14 shows another sectional view for embodying example sensor of the present invention.1400 sensors are analogous to sensor
100 Fig. 1 and 2's embodies the sensing material 135 being fully filled with except chamber 110 herein.Some sensing materials in these cases
Material 135 includes the composite of ion, and a kind of material of loose structure is used as matrix material, such as micro-structural polymer matrix, sky
Heart sponge, fabric or paper.
The two extra example Sensor Implementations of display of Figure 15 and 16.1500 and 1600 be the sectional view of the present invention.
Flexible conductive layer 1510,1610 provides an electrode and does structural support at top and/or bottom instead of structural material.Sensing
Material 1520,1620, conductive layer 1510,1610 is opposite side conductive layer.
The sensing material 1520 that Figure 15 embodies, including multiple plated film conductor wires 1530 coated by ionic material 1540.
1530 can be fabric in some cases.1530 also can directly be formed by Static Spinning.Load applied to sensor 1500 will be formed
Malformation, changes the contact area between 1510 and 1540, this will be finally translated into capacitance variations.
Sensing material 1620, Figure 16 embodiment include conductive tape or other thin conductive substrates 1630 coat one side or
The material 1640 of two-sided painting ion.Figure 16 also illustrates that flexible conductive layer 1510,1610 can include itself in various embodiments
One coarse surface, sensing contact material 1520,1620 is with the bigger surface area of offer.Load applied to sensor 1600
Malformation will be made.The contact area of coating 1640 and conductive layer 1610 changes, so as to be converted into capacitance variations.
Present invention additionally comprises consumer electronics device as described above, i.e. intelligent watch, augmented reality glasses and customization finger tip
Touch sensor is installed, each including one or more sensors.Important for such man-machine interface sets
Include flexibility to be adapted on bending and deformable body surface and be adjusted with the contact scope for target in terms of meter
The ability of interior appropriate sensitivity.For example, in 20 × 10 × 0.2mm3Overall dimensions lower sensor possess and 3.1nF kPa-1
Sensitivity and 1kPa-5kPa between detection range.The device is integrated into can detect on an intelligent watch
The blood pressure waveform of Radial artery.Equally, sensor may be mounted at is sensed on augmented reality glasses.In addition, with 2 × 3 gusts
In the finger tip formula sensor of the pixel of row, it is already used to differentiate surface texture in 2.3 millimeters of a spatial resolutions, for example
Read such as braille letters.
In addition, sensor of the invention provides unprecedented high capacity (10 μ F cm-2Magnitude) and equipment sensitivity
(up to 3.1nF kPa-1), which increase the signal to noise ratio of device, enable them to show good in the case where doing noise circumstance, for example,
For detecting ambient pressure variations in water or moist.
Used term " device " is intended to refer to 112 (f) in this application, its as just the restriction to attachment,
It is not term not to be contained in the limitation to whole claim, claim " device " then should be understood to exclude at 112 (f)
Outside.Wherein used term " top " and " bottom ", and " first " and " second " are only distinguished from each other not as any mark
Same layer.
Above-described embodiment is only the description of the invention.Persons skilled in the art depend on the embodiment of the present invention and attached
The improvement of modification, method and structure made by the record of figure is it will be apparent that these changes and improvement belong to the present invention
The scope protected.Therefore it should be understood that specification and drawings are not limitations of the present invention, the present invention is not exposed to implementation
The limitation of scheme described in example.
Claims (35)
1. a kind of sensor, Bao Han ︰
Inside has the structure of particular chamber, including the top layer being arranged between chamber and structural outer environment, and top layer includes leading
First film of the ammeter facing to chamber；With the solid sensing element in chamber, the conductive surface of sensing material and the first film connects
Touch.
2. sensor as claimed in claim 1, wherein top layer also include the first conductive layer, at least partly the first conductive layer is provided
For the conductive surface of the first film.
3. sensor as claimed in claim 2, wherein the first conductive layer also includes tin indium oxide.
4. sensor as claimed in claim 2, wherein the first conductive layer also includes graphene.
5. sensor as claimed in claim 2, the first conductive layer that wherein at least part provides conductive surface is patterning.
6. sensor as claimed in claim 1, wherein the structure also includes an intermediate layer being connected with top layer, it is described in
Interbed includes the aperture of the chamber.
7. sensor as claimed in claim 6, wherein the structure also includes bottom, the intermediate layer is in top layer and bottom
Between.
8. sensor as claimed in claim 7, wherein bottom are also included across chamber, its conductive surface the first film of direction
Conductive surface.
9. sensor as claimed in claim 8, wherein bottom also include the second conductive layer, at least one of second conductive layer
Conductive surface is provided for bottom.
10. sensor as claimed in claim 7, wherein bottom are additionally provided with the second film, the second film is located at the chamber and described
Between the external environment condition of structure.
11. sensor as claimed in claim 1, wherein the sensing material is patterning.
12. sensor as claimed in claim 1, wherein the sensing material is ionic material.
13. sensor as claimed in claim 12, wherein the ionic material includes hydrogel matrix and ionic liquid group
Into mixture.
14. sensor as claimed in claim 13, wherein the ionic liquid includes 1- ethyl-3-methylimidazole tricyano first
Base.
15. a kind of sensor, be by
A kind of three layers of hypothallus;
Sensing element including ionic material;With
The conductive material layer composition being connected with sensing element.
16. sensor as claimed in claim 15, wherein the portion of pattern two electric insulations of formation of the conductive material layer
Point.
17. sensor as claimed in claim 15, wherein the conductive material layer be in hypothallus and sensing element it
Between.
18. a kind of sensor, Shi You ︰
Conductive material layer;With
Sensing element composition comprising ionic material, the sensing element is connected with conductive material layer.
19. sensor as claimed in claim 18, wherein the sensing element includes multiply by the coated plating of ionic material
Film conductor wire.
20. sensor as claimed in claim 19, wherein the plated film conductor wire includes fabric.
21. sensor as claimed in claim 19, wherein sensing element include coated tape, the coating on belt include from
Sub- material.
22. one kind includes：
There is provided first side for the bottom of conductive surface and
The method of the sensing material formed on conductive surface, the sensing material includes ionic material.
23. method as claimed in claim 22, wherein provide first side includes for the bottom of conductive surface：In flexibility
The method that the material layer of conduction is formed in material layer.
24. method as claimed in claim 22, is additionally included in method of the bottom formation with aperture intermediate layer, the aperture is at least
Partially electronically conductive surface exposes the part to form chamber.
25. method as claimed in claim 24, is additionally included in the method that top layer is formed on intermediate layer.
26. form the method for the method of top layer on the intermediate layer as claimed in claim 25, in addition to：In the second flexible material
Conductive surface is formed on first side of layer to form top layer, then connects top layer with intermediate layer, the such second flexible material
First side of the bed of material is relative with the side of top layer first.
27. method as claimed in claim 22, in addition to the method for forming sensing material, including prepolymer and ionic liquid
After mixing and prepolymer photo-crosslinking.
28. method as claimed in claim 22, wherein the ionic liquid includes the cyanogen nail root of 1- ethyl-3-methylimidazoles three.
29. method as claimed in claim 22, wherein also including with ionic liquid dipping porous structure material formation sensing material
The method of material.
30. method as claimed in claim 29, wherein the porous structure material include micro-structural polymer matrix, it is hollow
Sponge, fabric or paper.
31. a kind of sensor , Bao Kuo ︰
Flexible structure with particular chamber, the chamber is surrounded by two relative surfaces, and the two surfaces have identical
Surface area, and the height at intervals of chamber between them, one of surface is conductive；
Inside in chamber is sensing material, and the sensing material is connected comprising ionic material and with conductive surface.
32. sensor as claimed in claim 31, wherein the ionic material also includes liquid.
33. also including guide pile in sensor as claimed in claim 32, chamber, the guide pile is used in lock chamber room
Sensing material.
34. conductive layer, the conductive surface of conductive layer and two are additionally provided with sensor as claimed in claim 32, its middle chamber
One of individual relative surface is connected.
35. sensor as claimed in claim 34, wherein the conductive layer is patterning, so that existing in chamber makes two
The gap of conductive layer mutually insulated, this causes conductive layer to include the structure of two mutually insulateds.
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6212956B1 (en) * | 1998-12-23 | 2001-04-10 | Agilent Technologies, Inc. | High output capacitative gas/liquid detector |
| CN101421692A (en) * | 2006-02-10 | 2009-04-29 | 美利肯公司 | Flexible capacitive sensor |
| CN101598529A (en) * | 2008-05-19 | 2009-12-09 | 香港理工大学 | The method for preparing fabric strain sensors |
| US20140174189A1 (en) * | 2012-12-14 | 2014-06-26 | The Regents Of The University Of California | Droplet-based capacitive pressure sensor |
| WO2015089491A1 (en) * | 2013-12-14 | 2015-06-18 | The Regents Of The University Of California | Liquid column-based capacitive sensors |
-
2016
- 2016-08-28 CN CN201610762096.4A patent/CN107044891A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6212956B1 (en) * | 1998-12-23 | 2001-04-10 | Agilent Technologies, Inc. | High output capacitative gas/liquid detector |
| CN101421692A (en) * | 2006-02-10 | 2009-04-29 | 美利肯公司 | Flexible capacitive sensor |
| CN101598529A (en) * | 2008-05-19 | 2009-12-09 | 香港理工大学 | The method for preparing fabric strain sensors |
| US20140174189A1 (en) * | 2012-12-14 | 2014-06-26 | The Regents Of The University Of California | Droplet-based capacitive pressure sensor |
| US20160116357A1 (en) * | 2012-12-14 | 2016-04-28 | The Regents Of The University Of California | Droplet-based capacitive pressure sensor |
| WO2015089491A1 (en) * | 2013-12-14 | 2015-06-18 | The Regents Of The University Of California | Liquid column-based capacitive sensors |
Non-Patent Citations (1)
| Title |
|---|
| BAOQING NIE ETC.: "Flexible Transparent Iontronic Film for Interfacial Capacitive Pressure Sensing", 《ADVANCED MATERIALS》 * |
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