CN111307877A - External force triggered electromagnetic oscillation wireless self-powered gas sensor and preparation method thereof - Google Patents
External force triggered electromagnetic oscillation wireless self-powered gas sensor and preparation method thereof Download PDFInfo
- Publication number
- CN111307877A CN111307877A CN201911273836.8A CN201911273836A CN111307877A CN 111307877 A CN111307877 A CN 111307877A CN 201911273836 A CN201911273836 A CN 201911273836A CN 111307877 A CN111307877 A CN 111307877A
- Authority
- CN
- China
- Prior art keywords
- gas
- friction layer
- polymer film
- external force
- sensitive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
- G01N27/126—Composition of the body, e.g. the composition of its sensitive layer comprising organic polymers
Abstract
The invention provides an external force triggering electromagnetic oscillation wireless self-powered gas sensor and a preparation method thereof, wherein the sensor comprises a gas testing cavity, a first friction layer, a second friction layer, an interdigital electrode, a gas-sensitive material, a gas inlet, a gas outlet and a lead, and the sensor has the advantages that: external mechanical energy collected outside the gas-sensitive test cavity can be wirelessly transmitted to a gas-sensitive detection interface in a spaced mode to form periodic alternating potential difference at two ends of the interdigital electrode, and the potential difference drives current carriers in the gas-sensitive film to form alternating current. The energy collecting component is independent of a gas-sensitive testing environment, and energy is wirelessly transmitted in a spaced mode by adopting an electromagnetic oscillation effect to drive the sensor to work, so that the testing stability, the configuration flexibility and the individual mobility of the self-powered sensor are greatly improved.
Description
Technical Field
The invention relates to the field of energy collection technology, micro-electro-mechanical systems (MEMS) and electronic polymer sensitive materials, in particular to an external force triggered electromagnetic oscillation wireless self-powered gas sensor and a preparation method thereof.
Background
With the rapid development of safety and scientific technology, the detection of toxic gases has been expanded from the industry to the medical field, artificial intelligence and daily life. The identification of Volatile Organic Compounds (VOCs) is now of great interest to researchers, as pollution monitoring and early non-invasive disease diagnosis are an important research area. Generally, volatile organic compounds are a wide variety of chemical compound gases that are released from liquid/solid forms and are harmful to human health when inhaled at high concentrations. In addition, VOCs are widely distributed and widely available. In most cities in China, VOCs discharged artificially are far higher than natural sources, and mainly come from fixed source combustion, automobile tail gas road traffic, solvent product use and industrial production processes. This puts new demands on the atmospheric environment monitoring network formed by the gas sensors.
Therefore, the development of sensor technology for toxic and harmful gases is urgent. Currently, all sensors developed and produced currently are supplied with energy through battery or wired power transmission, and personnel are required to regularly replace the battery and maintain a power grid to ensure continuous operation of the network, so that not only is the economic cost increased, but also the mobility and the environmental adaptability of the sensor network nodes are greatly reduced. Secondly, in order to detect and distinguish mixed VOCs gas, the gas sensors are often combined into an array to improve the selectivity of the sensors, so that the energy consumption of the whole node is very high, and the requirement of long-term operation of the sensor node cannot be met only by depending on battery power supply. If the battery life is desired to be longer, the system needs to be powered down or otherwise powered down. If the energy collection technology is utilized, the wireless sensing node can acquire energy when the energy is consumed, and the long-term effective use of the wireless sensing node is realized by means of the energy management and energy transfer technology, so that the problem of energy supply of the wireless sensing node is fundamentally solved.
In order to solve the problems that the traditional gas sensor is short in service life, high in power consumption, and needs an external power supply for power supply, the invention provides an energy collection-transmission mechanism and method completely based on a polymer material, and any metal electrode and circuit connection are not needed, so that the structure and the integration process of a device are simplified, the compatibility of an energy module and the sensor is further improved, and the defects of the current research are overcome. In addition, the existing self-driven gas sensor needs an external energy source to directly act on the device, namely, the spatial range of energy collection can be limited to the position of the sensor, and environmental energy outside the position of the device cannot be collected, so that the application range and the space utilization rate of the self-driven gas sensor are weakened to a great extent. The invention provides a wireless energy transmission self-driven sensitive mechanism and a wireless energy transmission self-driven sensitive model, and provides an environment energy collection, wireless energy transmission and spontaneous active detection integrated detection system which can be driven simultaneously only by external mechanical motion, and can work independently without external power supply. The energy collected by the energy supply part can be wirelessly transmitted to the gas-sensitive detection interface at intervals, so that the environmental applicability and the individual mobility of the sensor are improved.
Disclosure of Invention
In view of the above drawbacks of the prior art, an object of the present invention is to provide an external force triggered electromagnetic oscillation wireless self-powered gas sensor and a manufacturing method thereof, wherein the external force is only used to drive energy collection and wireless energy transmission simultaneously for self-powered wireless gas detection, so as to realize an "environmental energy collection-wireless energy transmission-active spontaneous detection" integrated functional module, thereby meeting the requirements of long-term stable energy supply and self-powered environmental monitoring of numerous, widely distributed and flexibly located sensor nodes. The first friction layer 1 and the second friction layer 2 are used as energy collecting-transmitting units (dielectric layers) and slide under the push of external air flow or mechanical motion, and external mechanical energy is converted into time-varying electric displacement field energy and transmitted outwards. The gas sensitive structure is used for wirelessly collecting time-varying electric displacement field energy and converting the time-varying electric displacement field energy into induction current. The chemical specific reaction is converted into an electrical signal at the energy conversion interface to achieve real-time spontaneous active detection of gas species and concentration.
In order to achieve the purpose, the technical scheme of the invention is as follows:
an external force triggering electromagnetic oscillation wireless self-powered gas sensor comprises an energy collecting part and a gas detecting part,
the energy collecting part comprises a first friction layer 1 and a second friction layer 2 which have the same size with the cross section of a gas testing cavity 3, the first friction layer 1 and the second friction layer 2 are positioned outside the gas testing cavity 3, the second friction layer 2 completely covers the outer surface of the gas testing cavity 3, the first friction layer 1 is positioned above the second friction layer 2, the first friction layer 1 is of a grating structure and is made of a negative friction material, the second friction layer 2 is made of a positive friction material, a grating of the first friction layer 1 is parallel to an electrode of an interdigital electrode 4, the characteristic parameters of the grating are the same as those of the interdigital electrode 4, the first friction layer 1 and the second friction layer 2 are used as energy collecting and converting units, the first friction layer 1 slides back and forth left and right under the driving of an external force, the second friction layer 2 is fixed, the first friction layer 1 slides under the external force and changes the energy of an electromagnetic field when the first friction layer 1 radiates the external force, the surface of the first friction layer 1 is provided with a, the surface of the second friction layer 2 is provided with a second polymer film; the electron-obtaining capacity of the first polymer film is stronger than that of the second polymer film, the contact of the first polymer film and the second polymer film can charge negative charges on the surface of the first polymer film, and the surface of the second polymer film can charge positive charges;
the gas detection part comprises a cuboid gas test cavity 3, interdigital electrodes 4 are arranged in the gas test cavity 3, and gas-sensitive materials are filled between the interdigital electrodes 4; the gas sensitive materials on the two sides of the interdigital electrode 4 are not communicated; the interdigital electrode 4 is led out through a lead wire and used for detecting an electric signal output by a sensor; the interdigital electrode is used for wirelessly collecting time-varying electromagnetic oscillation energy radiated by external force triggering outside the test cavity, and realizing self-driven detection of the type and concentration of the gas to be detected; and the two sides of the gas testing cavity 3 are provided with a gas inlet 5 and a gas outlet 6, and the gas inlet 5 and the gas outlet 6 are respectively connected with a gas inlet pipe and a gas outlet pipe and used for quantitatively leading in and discharging gas to be tested.
Preferably, the gas-sensitive material between the interdigital electrodes 4 is an organic polymer, or a metal oxide, or an inorganic material sensitive to the target gas.
Preferably, the gas sensitive material is a composite film composed of one or more different materials selected from polyaniline, polyethylene oxide, polyethylene imine, sodium polystyrene sulfonate, polyaniline, polyimide, chitosan and graphene oxide.
Preferably, the first polymer film material of the first friction layer 1 is selected from teflon or polyvinyl fluoride or polyvinyl chloride or polyimide, and the film thickness is in the range of 10-50 micrometers.
Preferably, the second polymeric film material of the second friction layer 2 is selected from nylon or polyurethane or magnesium fluoride, with a film thickness in the range of 10-50 microns.
Preferably, the gratings of the first friction layer 1 are parallel to the electrodes of the interdigital electrodes 4, and their following characteristic parameters are the same: the length of whole grating is A, the width of whole grating is B, the width of each lattice light-transmitting part of grating is C, the grating period is D, the duty cycle is 0.5, the length of whole interdigital electrode is E, the width of whole interdigital electrode is F, the two interdigital electrodes are transversely farthest apart from each other and are G, the interdigital electrode period is H, then A equals E, B equals F, C equals G, D equals H.
Preferably, the test chamber is comprised of acrylic plates.
In order to achieve the purpose, the invention also provides a preparation method of the external force triggered electromagnetic oscillation wireless self-powered gas sensor, which adopts one of spin coating, spray coating, drop coating, sol-gel, self-assembly and chemical vapor deposition and combines a stripping process to deposit a gas-sensitive material between gaps of the interdigital electrodes to form a gas-sensitive structure.
Preferably, the preparation method comprises the following steps:
step 1: cleaning the first polymer film and the second polymer film by using a chemical reagent and drying;
step 2: the polymer film is used as a contact electrification layer, the first polymer film and the second polymer film are jointly used as friction electrification materials, and friction electrification charges are generated in the contact process, wherein the electron obtaining capacity of the first polymer film is higher than that of the second polymer film, so that the contact of the first polymer film and the second polymer film can carry negative charges on the surface of the first polymer film and carry positive charges on the surface of the second polymer film;
and step 3: laser cutting the first polymer film into a grating structure as a first friction layer 1; laser cutting the second polymer film into a rectangular pattern, and attaching the rectangular pattern to the outer surface of the top of the gas test cavity to form a second friction layer 2;
and 4, step 4: depositing a gas-sensitive material between gaps of the interdigital electrodes by adopting one of methods of spin coating, spray coating, drop coating, sol-gel, self-assembly and chemical vapor deposition and combining a stripping process to form a gas-sensitive structure;
and 5: cutting an organic glass plate by using a laser cutting machine, assembling the organic glass plate into a gas testing cavity, respectively punching holes on the left side and the right side of the gas testing cavity to serve as a gas inlet and a gas outlet, wherein a gas-sensitive structure is arranged at the bottom in the testing cavity, and a gas-sensitive material is filled between electrodes of interdigital electrodes to form a self-driven gas sensor;
step 6: and leading out the interdigital electrode to a test port of a current test instrument through a lead.
Compared with the prior art, the invention has the beneficial effects that: the traditional self-driven gas sensor needs an external energy source to directly act on a device, namely, the spatial range of energy collection can be limited at the position of the sensor, and environmental energy outside the position of the device cannot be collected, so that the application range and the space utilization rate of the self-driven gas sensor are weakened to a great extent. The invention provides an external force triggering electromagnetic oscillation self-driving sensitive mechanism and a model, and discloses an environment energy collection-wireless energy transmission-spontaneous active detection integrated detection system which can be driven simultaneously by external mechanical motion, and can work independently without external power supply. The energy collected by the energy supply part can be wirelessly transmitted to the gas-sensitive detection interface at intervals, so that the environmental applicability and the individual mobility of the sensor are improved. In addition, the energy collection-transmission mechanism and method based on the polymer material do not need any metal electrode and line connection, thereby simplifying the structure and the integration process of the device and further improving the compatibility of the energy module and the sensor array.
Drawings
Fig. 1 is a schematic structural diagram of an external force triggered electromagnetic oscillation wireless self-powered gas sensor according to the present invention.
Fig. 2 and 3 are diagrams of a conduction mechanism. In which the first friction layer 1 slides to the left in fig. 2 and the first friction layer 1 slides to the right in fig. 3.
FIG. 4 shows the gas-sensitive mechanism of ammonia gas environment.
Fig. 5 is an ambient gas sensitive mechanism for nitrogen dioxide.
Fig. 6 is an equivalent circuit diagram of the present invention.
The gas sensor comprises a first friction layer 1, a second friction layer 2, a gas testing cavity 3, an interdigital electrode 4, a gas inlet 5, a gas outlet 6, an acrylic plate 7 and a gas sensitive material 8.
Detailed Description
The embodiments of the present invention are described below with reference to specific embodiments, and other advantages and effects of the present invention will be easily understood by those skilled in the art from the disclosure of the present specification. The invention is capable of other and different embodiments and of being practiced or of being carried out in various ways, and its several details are capable of modification in various respects, all without departing from the spirit and scope of the present invention.
As shown in figure 1, the external force triggered electromagnetic oscillation wireless self-powered gas sensor structurally comprises an energy collecting part and a gas detecting part,
the energy collecting part comprises a first friction layer 1 and a second friction layer 2 which have the same size with the cross section of the gas testing cavity 3, the first friction layer 1 and the second friction layer 2 are positioned outside the gas testing cavity 3, the second friction layer 2 completely covers the outer surface of the gas testing cavity 3, the first friction layer 1 is positioned above the second friction layer 2, the first friction layer 1 is of a grating structure and is made of a negative friction material, the second friction layer 2 is made of a positive friction material, a grating of the first friction layer 1 is parallel to an electrode of the interdigital electrode 4, and the following characteristic parameters of the first friction layer 1 and the second friction layer are the same: the length of whole grating is A, the width of whole grating is B, the width of each lattice light-transmitting part of grating is C, the grating period is D, the duty cycle is 0.5, the length of whole interdigital electrode is E, the width of whole interdigital electrode is F, the two interdigital electrodes are transversely farthest apart from each other and are G, the interdigital electrode period is H, then A equals E, B equals F, C equals G, D equals H. The first friction layer 1 and the second friction layer 2 are used as energy collecting and converting units, the first friction layer 1 slides back and forth left and right under the driving of external force, the second friction layer 2 is fixed and does not move, the first friction layer 1 slides under the action of the external force and radiates outwards to change electromagnetic field energy, a first polymer film is arranged on the surface of the first friction layer 1, and a second polymer film is arranged on the surface of the second friction layer 2; the electron-obtaining capacity of the first polymer film is stronger than that of the second polymer film, the contact of the first polymer film and the second polymer film can charge negative charges on the surface of the first polymer film, and the surface of the second polymer film can charge positive charges;
the gas detection part comprises a cuboid gas test cavity 3, interdigital electrodes 4 are arranged in the gas test cavity 3, and gas-sensitive materials are filled between the interdigital electrodes 4; the gas sensitive materials on the two sides of the interdigital electrode 4 are not communicated; the interdigital electrode 4 is led out through a lead wire and used for detecting an electric signal output by a sensor; the interdigital electrode is used for wirelessly collecting time-varying electromagnetic oscillation energy radiated by external force triggering outside the test cavity, and realizing self-driven detection of the type and concentration of the gas to be detected; and the two sides of the gas testing cavity 3 are provided with a gas inlet 5 and a gas outlet 6, and the gas inlet 5 and the gas outlet 6 are respectively connected with a gas inlet pipe and a gas outlet pipe and used for quantitatively leading in and discharging gas to be tested.
The friction layer 1 and the friction layer 2 are arranged outside the gas testing cavity, so that the friction motion cannot interfere the flow field of the testing cavity and the gas molecule adsorption/desorption, and the stability of gas detection is ensured to the maximum extent.
The distance between the energy collection part and the gas detection part of the sensor can be adjusted as required within the maximum sensing distance, so that the spatial range and the variety of energy collection are expanded, and the environmental applicability and the individual mobility of the sensor are greatly improved.
Specifically, the gas-sensitive material between the interdigital electrodes 4 is an organic polymer, or a metal oxide, or an inorganic material that is sensitive to the target gas.
Specifically, the gas sensitive material is a composite film composed of one or more than two different materials of polyaniline, polyethylene oxide, polyethylene imine, sodium polystyrene sulfonate, polyaniline, polyimide, chitosan and graphene oxide.
Specifically, the first polymer film material of the first friction layer 1 is selected from teflon, polyvinyl fluoride, polyvinyl chloride or polyimide, and the film thickness is in the range of 10-50 micrometers.
In particular, the second polymeric film material of the second friction layer 2 is selected from nylon or polyurethane or magnesium fluoride, and the film thickness is in the range of 10-50 microns.
Specifically, the grating of the first friction layer 1 is parallel to the electrodes of the interdigital electrode 4, and the following characteristic parameters are the same: the length of whole grating is A, the width of whole grating is B, the width of each lattice light-transmitting part of grating is C, the grating period is D, the duty cycle is 0.5, the length of whole interdigital electrode is E, the width of whole interdigital electrode is F, the two interdigital electrodes are transversely farthest apart from each other and are G, the interdigital electrode period is H, then A equals E, B equals F, C equals G, D equals H. Specifically, the test chamber is composed of an acrylic plate.
The embodiment also provides a preparation method of the external force triggered electromagnetic oscillation wireless self-powered gas sensor, which is characterized in that a gas sensitive material is deposited between gaps of the interdigital electrodes by adopting one of spin coating, spray coating, drop coating, sol-gel, self-assembly and chemical vapor deposition and combining a stripping process to form a gas sensitive structure.
Specifically, the preparation method comprises the following steps:
step 1: cleaning the first polymer film and the second polymer film by using a chemical reagent and drying;
step 2: the polymer film is used as a contact electrification layer, the first polymer film and the second polymer film are jointly used as friction electrification materials, and friction electrification charges are generated in the contact process, wherein the electron obtaining capacity of the first polymer film is higher than that of the second polymer film, so that the contact of the first polymer film and the second polymer film can carry negative charges on the surface of the first polymer film and carry positive charges on the surface of the second polymer film;
and step 3: laser cutting the first polymer film into a grating structure as a first friction layer 1; laser cutting the second polymer film into a rectangular pattern, and attaching the rectangular pattern to the outer surface of the top of the gas test cavity to form a second friction layer 2;
and 4, step 4: depositing a gas-sensitive material between gaps of the interdigital electrodes by adopting one of methods of spin coating, spray coating, drop coating, sol-gel, self-assembly and chemical vapor deposition and combining a stripping process to form a gas-sensitive structure;
and 5: cutting an organic glass plate by using a laser cutting machine, assembling the organic glass plate into a gas testing cavity, respectively punching holes on the left side and the right side of the gas testing cavity to serve as a gas inlet and a gas outlet, wherein a gas-sensitive structure is arranged at the bottom in the testing cavity, and a gas-sensitive material is filled between electrodes of interdigital electrodes to form a self-driven gas sensor;
step 6: and leading out the interdigital electrode to a test port of a current test instrument through a lead.
The power generation principle of the gas sensor is shown in fig. 2. The first friction layer 1 made of PTFE material and the second friction layer 2 made of Nylon material are used as energy collection-transmission modules, and the same amount of polarized charges with different signs are formed on the PTFE and the Nylon in the contact electrification process, and the polarized charges slide back under the action of external force and change electromagnetic oscillation energy (displacement current) to the outside when outputting space. Initially, the position of the raster line of PTFE overlaps the position of the first interdigitated electrode (IDE). Since PTFE is more triboelectrically negative than Nylon, triboelectric charges occur between the two surfaces, which results in positive charges being induced on the first IDE corresponding to the negative charges on the PTFE surface. In this state, there is no charge between the two electrodes due to electrostatic equilibrium. As the PTFE layer begins to slide to the left, the friction layer gradually moves from the overlapping position in the first IDE to the overlapping position in the second IDE. In this case, a potential drop is generated and positive charge and sliding motion from the first IDE to the second IDE are driven, thereby generating a transient current in the external load. Once the PTFE layer and the second IDE reached a fully overlapping position, all positive charges were transferred to the electrode while another electrostatic equilibrium was achieved. This is a unit step of the sliding. As the PTFE continues to slide left through another step to the first IDE, positive charge will be electrostatically attracted back to the first IDE, thereby creating a reverse current in the circuit. Thus, the power generation cycle is completed. If the PTFE is driven to slide to the right, the reverse process occurs, as shown in FIG. 3.
The gas detection mechanism of the present invention is shown in fig. 4 and 5. FIG. 4 shows a reducing gas NH3For example, external mechanical energy is converted into time-varying electromagnetic oscillation energy through the polarized dielectric layer and transmitted to the interdigital electrode coated with the gas-sensitive material in an air-spaced manner. Due to the fact that the size and the moving speed of the device are fixed, the potential difference between two ends of the interdigital electrode of the device is kept unchanged. And the carrier concentration in the gas sensitive material will be modulated with the gas adsorption process. Therefore, the external mechanical motion modulates the chemical specificity reaction process on the surface of the gas sensitive structure into an output signal, and realizes the self-driven detection of the type and the concentration of the gas to be detected. When the device structure is in dry air, oxygen molecules adsorb and deprive free electrons in the sensitive film to form oxygen ions, and the process reduces the carrier concentration of the gas sensitive film so as to reduce induced current. Then, NH3The induction of the electron-sensitive layer provides electrons to the sensitive film, and the carrier concentration of the gas-sensitive film is improved, so that the induction current is increased.
FIG. 5 shows the oxidizing gas NO2For example, when the device structure is in dry air, oxygen molecules adsorb and deprive free electrons in the sensitive film to form oxygen ions, and the process reduces the carrier concentration of the gas-sensitive film, thereby reducing induced current. Then, NO2Will further capture electrons of the sensitive film, reduce the carrier concentration of the gas-sensitive film, and thusThe magnitude of the induced current is reduced in one step. Therefore, the output current of the gas sensitive structure will change with the change of the concentration of the gas to be measured. Therefore, the concentration of the gas to be measured in the environment can be reversely deduced by detecting the electrical parameters output by the sensor.
The equivalent circuit of the gas detection mechanism of the present invention is shown in fig. 6. The energy collection part comprises a grating structure first friction layer 1 with the same size as the cross section of the gas test cavity and a second friction layer 2 completely covering the upper outer surface of the test cavity, and is equivalent to a generator for supplying energy to the gas sensitive structure; the gas-sensitive material is deposited in a gas-sensitive structure formed among gaps of the interdigital electrodes and is equivalent to a gas-sensitive resistor; the concentration of the gas to be measured in the environment can be reversely deduced by measuring the output current of the gas-sensitive resistor.
Compared with the traditional self-powered gas sensor, the self-powered gas sensor has the advantages that the energy collection units (the PTFE first friction layer 1 and the Nylon second friction layer 2 are arranged outside the gas test cavity, as shown in figure 1, so that the friction motion cannot interfere with the flow field of the test cavity and the absorption/desorption of gas molecules, and the stability of gas detection is ensured to the maximum extent.
The size of the gas sensor array based on wireless power transmission of the present embodiment is 4cm × 8cm × 5 cm.
The foregoing embodiments are merely illustrative of the principles and utilities of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which can be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.
Claims (9)
1. The utility model provides an external force triggers wireless self-power gas sensor of electromagnetic oscillation which characterized in that: comprises an energy collecting part and a gas detecting part;
the energy collection part comprises a first friction layer (1) and a second friction layer (2) which have the same size with the cross section of the gas test cavity (3), the first friction layer (1) and the second friction layer (2) are positioned outside the gas test cavity (3), the second friction layer (2) completely covers the outer surface of the gas test cavity (3), the first friction layer (1) is positioned above the second friction layer (2), the first friction layer (1) is of a grating structure and is made of a negative friction material, the second friction layer (2) is made of a positive friction material, a grating of the first friction layer (1) is parallel to an electrode of the interdigital electrode (4) and has the same characteristic parameters, the first friction layer (1) and the second friction layer (2) are used as energy collection and conversion units, the first friction layer (1) slides back and forth under the driving of an external force, the second friction layer (2) is fixed, the first friction layer (1) slides under the external force and radiates energy electromagnetic field which changes time to change, the surface of the first friction layer (1) is provided with a first polymer film, and the surface of the second friction layer (2) is provided with a second polymer film; the electron-obtaining capacity of the first polymer film is stronger than that of the second polymer film, the contact of the first polymer film and the second polymer film can charge negative charges on the surface of the first polymer film, and the surface of the second polymer film can charge positive charges;
the gas detection part comprises a cuboid gas test cavity (3), interdigital electrodes (4) are arranged in the gas test cavity (3), and gas-sensitive materials are filled between the interdigital electrodes (4); the gas sensitive materials on the two sides of the interdigital electrode (4) are not communicated; the interdigital electrode (4) is led out through a lead wire and is used for detecting an electric signal output by the sensor; the interdigital electrode is used for wirelessly collecting time-varying electromagnetic oscillation energy radiated by external force triggering outside the test cavity, and realizing self-driven detection of the type and concentration of the gas to be detected; and the two sides of the gas testing cavity (3) are provided with a gas inlet (5) and a gas outlet (6), and the gas inlet (5) and the gas outlet (6) are respectively connected with a gas inlet pipe and a gas outlet pipe and used for quantitatively leading in and discharging gas to be tested.
2. An external force triggered electromagnetic oscillation wireless self-powered gas sensor as claimed in claim 1, wherein: the gas-sensitive material between the interdigital electrodes (4) is an organic polymer, or a metal oxide, or an inorganic material which is sensitive to the target gas.
3. An external force triggered electromagnetic oscillation wireless self-powered gas sensor as claimed in claim 2, wherein: the gas-sensitive material is a composite film formed by one or more than two different materials of polyaniline, polyethylene oxide, polyethyleneimine, sodium polystyrene sulfonate, polyaniline, polyimide, chitosan and graphene oxide.
4. An external force triggered electromagnetic oscillation wireless self-powered gas sensor as claimed in claim 1, wherein: the first polymer film material of the first friction layer (1) is selected from Teflon or polyvinyl fluoride or polyvinyl chloride or polyimide, and the film thickness ranges from 10 to 50 microns.
5. An external force triggered electromagnetic oscillation wireless self-powered gas sensor as claimed in claim 1, wherein: the second polymer film material of the second friction layer (2) is selected from nylon or polyurethane or magnesium fluoride, and the film thickness is 10-50 microns.
6. An external force triggered electromagnetic oscillation wireless self-powered gas sensor as claimed in claim 1, wherein: the grating of the first friction layer (1) is parallel to the electrodes of the interdigital electrodes (4), and the following characteristic parameters are the same: the length of whole grating is A, the width of whole grating is B, the width of each lattice light-transmitting part of grating is C, the grating period is D, the duty cycle is 0.5, the length of whole interdigital electrode is E, the width of whole interdigital electrode is F, the two interdigital electrodes are transversely farthest apart from each other and are G, the interdigital electrode period is H, then A equals E, B equals F, C equals G, D equals H.
7. An external force triggered electromagnetic oscillation wireless self-powered gas sensor as claimed in claim 1, wherein: the test chamber consists of an acrylic plate.
8. The method for preparing an external force triggered electromagnetic oscillation wireless self-powered gas sensor as claimed in any one of claims 1 to 7, wherein the method comprises the following steps: and depositing the gas-sensitive material between the gaps of the interdigital electrodes by adopting one of methods of spin coating, spray coating, drop coating, sol-gel, self-assembly and chemical vapor deposition and combining a stripping process to form a gas-sensitive structure.
9. The method for preparing the external force triggered electromagnetic oscillation wireless self-powered gas sensor according to claim 8, characterized by comprising the following steps:
step 1: cleaning the first polymer film and the second polymer film by using a chemical reagent and drying;
step 2: the polymer film is used as a contact electrification layer, the first polymer film and the second polymer film are jointly used as friction electrification materials, and friction electrification charges are generated in the contact process, wherein the electron obtaining capacity of the first polymer film is higher than that of the second polymer film, so that the contact of the first polymer film and the second polymer film can carry negative charges on the surface of the first polymer film and carry positive charges on the surface of the second polymer film;
and step 3: laser cutting the first polymer film into a grating structure as a first friction layer (1); laser cutting the second polymer film into a rectangular pattern, and attaching the rectangular pattern to the outer surface of the top of the gas test cavity to form a second friction layer (2);
and 4, step 4: depositing a gas-sensitive material between gaps of the interdigital electrodes by adopting one of methods of spin coating, spray coating, drop coating, sol-gel, self-assembly and chemical vapor deposition and combining a stripping process to form a gas-sensitive structure;
and 5: cutting an organic glass plate by using a laser cutting machine, assembling the organic glass plate into a gas testing cavity, respectively punching holes on the left side and the right side of the gas testing cavity to serve as a gas inlet and a gas outlet, wherein a gas-sensitive structure is arranged at the bottom in the testing cavity, and a gas-sensitive material is filled between electrodes of interdigital electrodes to form a self-driven gas sensor;
step 6: and leading out the interdigital electrode to a test port of a current test instrument through a lead.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911273836.8A CN111307877A (en) | 2019-12-12 | 2019-12-12 | External force triggered electromagnetic oscillation wireless self-powered gas sensor and preparation method thereof |
| US17/120,239 US11802859B2 (en) | 2019-12-12 | 2020-12-13 | Wireless self-powered gas sensor based on electromagnetic oscillations triggered by external forces and fabrication method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911273836.8A CN111307877A (en) | 2019-12-12 | 2019-12-12 | External force triggered electromagnetic oscillation wireless self-powered gas sensor and preparation method thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111307877A true CN111307877A (en) | 2020-06-19 |
Family
ID=71148658
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911273836.8A Pending CN111307877A (en) | 2019-12-12 | 2019-12-12 | External force triggered electromagnetic oscillation wireless self-powered gas sensor and preparation method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111307877A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1917351A (en) * | 2006-09-01 | 2007-02-21 | 重庆大学 | Self-powered sensor |
| CN101042363A (en) * | 2007-04-27 | 2007-09-26 | 电子科技大学 | polyaniline nanometer oxidate compound film micro-gas sensors array and method for making same |
| CN106153690A (en) * | 2016-07-28 | 2016-11-23 | 电子科技大学 | A kind of self energizing sensor for alcohol detection and preparation method thereof |
| WO2018221941A2 (en) * | 2017-05-30 | 2018-12-06 | 고려대학교 산학협력단 | Self-powered ion channel sensor |
| CN109540997A (en) * | 2018-11-29 | 2019-03-29 | 电子科技大学 | Self energizing automobile exhaust sensor array based on displacement current and preparation method thereof |
| CN109884128A (en) * | 2019-03-19 | 2019-06-14 | 西安邮电大学 | A kind of preparation method based on laser ablation plane interdigital electrode gas sensor |
-
2019
- 2019-12-12 CN CN201911273836.8A patent/CN111307877A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1917351A (en) * | 2006-09-01 | 2007-02-21 | 重庆大学 | Self-powered sensor |
| CN101042363A (en) * | 2007-04-27 | 2007-09-26 | 电子科技大学 | polyaniline nanometer oxidate compound film micro-gas sensors array and method for making same |
| CN106153690A (en) * | 2016-07-28 | 2016-11-23 | 电子科技大学 | A kind of self energizing sensor for alcohol detection and preparation method thereof |
| WO2018221941A2 (en) * | 2017-05-30 | 2018-12-06 | 고려대학교 산학협력단 | Self-powered ion channel sensor |
| CN109540997A (en) * | 2018-11-29 | 2019-03-29 | 电子科技大学 | Self energizing automobile exhaust sensor array based on displacement current and preparation method thereof |
| CN109884128A (en) * | 2019-03-19 | 2019-06-14 | 西安邮电大学 | A kind of preparation method based on laser ablation plane interdigital electrode gas sensor |
Non-Patent Citations (1)
| Title |
|---|
| 谢法彪: "基于摩擦电原理的自供能电阻式气体传感器研究", 《中国优秀硕士学位论文全文数据库信息科技辑》 * |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109540997B (en) | Self-powered automobile exhaust sensor array based on displacement current and preparation method thereof | |
| CN109540998B (en) | Gas sensor array based on wireless power transmission and preparation method thereof | |
| Liu et al. | Promoting smart cities into the 5G era with multi-field Internet of Things (IoT) applications powered with advanced mechanical energy harvesters | |
| Huang et al. | Emerging materials for water-enabled electricity generation | |
| Zhong et al. | A self-powered flexibly-arranged gas monitoring system with evaporating rainwater as fuel for building atmosphere big data | |
| CN106018498B (en) | It is a kind of for self energizing sensor of automobile emission gas analyzer and preparation method thereof | |
| Bai et al. | Two dimensional woven nanogenerator | |
| Gai et al. | A self‐powered wearable sensor for continuous wireless sweat monitoring | |
| CN111307878A (en) | Wireless self-powered gas sensor array and preparation method thereof | |
| CN107238652B (en) | Self-powered gas sensor based on asymmetric electrostatic shielding effect and preparation method thereof | |
| Chen et al. | MEG actualized by high-valent metal carrier transport | |
| CN109164140B (en) | Flexible respiration sensor driven by human respiration and preparation method thereof | |
| CN108872318B (en) | Self-powered respiration sensor based on bionic nasal cavity structure and preparation method thereof | |
| CN102683573A (en) | Nano generator, nano generator set and self-powered system comprising nano generator or nano generator set | |
| Su et al. | Maxwell displacement current induced wireless self-powered gas sensor array | |
| CN111624240A (en) | Sensing/transduction coupling self-driven gas sensor and preparation method thereof | |
| CN111407281B (en) | Breathing self-driven micro airflow sensor based on lever principle and preparation method thereof | |
| Liu et al. | Hydrocapacitor for harvesting and storing energy from water movement | |
| Bonastre et al. | In-line monitoring of chemical-analysis processes using Wireless Sensor Networks | |
| CN104748769B (en) | A kind of sensor and method for sensing based on electrostatic induction | |
| CN109540999B (en) | Wireless passive self-powered atmospheric environment sensor array and preparation method thereof | |
| CN111307877A (en) | External force triggered electromagnetic oscillation wireless self-powered gas sensor and preparation method thereof | |
| Khandelwal et al. | Triboelectric nanogenerators as power sources for chemical sensors and biosensors | |
| CN109567808B (en) | Self-powered respiratory gas sensor array and preparation method thereof | |
| US11802859B2 (en) | Wireless self-powered gas sensor based on electromagnetic oscillations triggered by external forces and fabrication method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20200619 |