KR101814563B1 - Heater and insulator assembly for vacuum effusion cell - Google Patents

Heater and insulator assembly for vacuum effusion cell Download PDF

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Publication number
KR101814563B1
KR101814563B1 KR1020150095138A KR20150095138A KR101814563B1 KR 101814563 B1 KR101814563 B1 KR 101814563B1 KR 1020150095138 A KR1020150095138 A KR 1020150095138A KR 20150095138 A KR20150095138 A KR 20150095138A KR 101814563 B1 KR101814563 B1 KR 101814563B1
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KR
South Korea
Prior art keywords
insulator
heater
portions
bending
insertion slot
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Application number
KR1020150095138A
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Korean (ko)
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KR20170004582A (en
Inventor
황도원
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(주)알파플러스
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Priority to KR1020150095138A priority Critical patent/KR101814563B1/en
Publication of KR20170004582A publication Critical patent/KR20170004582A/en
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Publication of KR101814563B1 publication Critical patent/KR101814563B1/en

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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/40—Heating elements having the shape of rods or tubes
    • H05B3/54—Heating elements having the shape of rods or tubes flexible
    • H05B3/56—Heating cables
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/02—Details
    • H05B3/06—Heater elements structurally combined with coupling elements or holders
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H05B3/16—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor the conductor being mounted on an insulating base
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/40—Heating elements having the shape of rods or tubes
    • H05B3/54—Heating elements having the shape of rods or tubes flexible
    • H05B3/56—Heating cables
    • H05B3/565—Heating cables flat cables
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/78—Heating arrangements specially adapted for immersion heating

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  • Resistance Heating (AREA)

Abstract

It is a technical object of the present invention to provide a heater and an insulator assembly for a vacuum evaporation source which can shorten the assembling time. To this end, the heater and the insulator assembly for a vacuum evaporation source of the present invention include a heat wire having a plurality of bent portions; And at least one insulator having respective insertion slots into which the respective bends are inserted.

Description

Heater and insulator assembly for vacuum evacuation source {

The present invention relates to a vacuum evaporation source used for forming a thin film on a wafer or a substrate.

Generally, a vacuum evaporation source is a device for evaporating a thin film forming material in order to form a predetermined thin film on a substrate disposed in a chamber of a high vacuum, and a thin film made of a specific material is formed on the wafer surface in a semiconductor manufacturing process , And is used to form a thin film of a desired substance on the surface of a glass substrate or the like in a manufacturing process of a large flat panel display device.

FIG. 1 is a partially cutaway cross-sectional view schematically showing a conventional vacuum evaporation source, and FIG. 2 is a perspective view illustrating a heater insulation module used in the vacuum evaporation source of FIG.

As shown in FIG. 1, the conventional vacuum evaporation source 10 includes a case 11, a crucible 12 provided in an inner space of the case and containing a thin film forming material, and a crucible A heater and an insulator assembly 13 for heating the crucible to evaporate the thin film forming material, and a heat reflector 14 for supporting the heater and insulator assembly and reflecting the heat of the heater and insulator assembly to the crucible. Particularly, the heater and insulator assembly 13 includes a heat wire 13a and an insulator 13b having a plurality of insertion holes H formed in the size of the diameter of the heat wire, as shown in Fig. 2, The process of bending the first insulator 13a after being inserted into the first inserting hole H1 of the insulator 13b and then being inserted into the second inserting hole H2 of the insulator 13b and then being bent is repeatedly assembled.

However, since the conventional heater and insulator assembly 13 for a vacuum evaporation source 10 must be repeatedly inserted into the insertion hole H of the insulator 13b for bending the heat wire 13a for assembly thereof, There is a problem that it is difficult and takes a long time to assemble.

In addition, if the diameter of the heat line 13a is increased to 1 mm or more, there is a problem that it is difficult to insert and bend each inserting hole H of the insulator 13b.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a heater and an insulator assembly for a vacuum evaporation source which are easy to assemble and can shorten the assembling time.

It is another object of the present invention to provide a heater and insulator assembly for a vacuum evaporation source which can be used for a hot wire having a relatively large diameter or thickness.

In order to achieve the above object, a heater and an insulator assembly for a vacuum evaporation source according to an embodiment of the present invention include: a heat wire having a plurality of bent portions; And at least one insulator having respective insertion slots into which the respective bends are inserted, wherein each of the bends is a bent portion in the heat line, each of the insertion slots being inserted with each of the bends, Wherein the plurality of bent portions include a plurality of upper bent portions forming an upper portion of the heat line; And a plurality of lower bends forming a lower portion of the hot wire, wherein the at least one insulator comprises: an upper insulator having respective first insertion slots into which the respective upper bends are inserted; And a lower insulator having a respective second insertion slot into which the respective lower bending portion is inserted, wherein each of the upper bending portion and each of the lower bending portions are disposed alternately with each other, Each of the second insertion slots being offset from the other to receive the respective upper bend and each of the lower bends such that the upper bend and the respective lower bend are offset from each other and the plurality of upper bends include first and second upper bends, Wherein the plurality of lower bending portions include first and second lower bending portions, the first lower bending portion lies between the first and second upper bending portions, and between the first and second lower bending portions, 2 upper bending portion, one end of the first upper bending portion is connected to one end of the first lower bending portion by a straight connecting portion, and the straight connecting portion is connected to the one end of the first upper bending portion, Wherein the vacuum evaporation source heater and insulator assembly are supported on the left side of one of the first insert slots and the second insert slot of one of the plurality of second insert slots, Wherein the insulating pedestal has a ring shape.

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For example, the hot wire may have a wire shape whose cross section is circular.

As another example, the hot wire may have a band shape whose cross section is rectangular.

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As described above, the heater and the insulator assembly for the vacuum evaporation source according to the embodiment of the present invention can have the following effects.

According to the embodiment of the present invention, since each bending portion of the hot wire is inserted into each inserting slot of the insulator, even if the hot wire is bent a plurality of times, each bending portion is inserted So that the assembly is easy and the assembly time can be shortened. Further, it can be used for a relatively large diameter or thickness hot wire which is difficult to bend because it does not need to be assembled by bending the heat wire several times.

According to an embodiment of the present invention, each of the upper bend portions and the respective lower bend portions are disposed alternately with each other, and each of the first insertion slots and each of the second insertion slots is located offset from each other, The straight connecting portion connecting one end of the upper bent portion of one of the plurality of upper bent portions and one end of the lower bent portion of any one of the plurality of lower bent portions The linear connection portion can be supported laterally on one side of the first insertion slot and on one side of the second insertion slot as the first insertion slot and the second insertion slot are formed to be offset from each other, It is possible to prevent deformation.

Further, according to the embodiment of the present invention, since the width of each insertion slot is larger than the diameter or thickness of the heat line, it is easy to assemble and even if the volume of the heat line is increased due to thermal expansion during heating, Since the length of each insertion slot is larger than the width of each bending portion, the thermal expansion of the insertion slot can be suppressed by pressing the end of the insertion slot, so that the original shape can be maintained without being bent.

1 is a partially cut-away sectional view schematically showing a conventional vacuum evaporation source.
Fig. 2 is a perspective view showing the heater and the insulator assembly for the vacuum evaporation source of Fig. 1;
3 is a perspective view schematically illustrating a heater and an insulator assembly for a vacuum evaporation source according to an embodiment of the present invention.
FIG. 4 is an exploded perspective view illustrating a process of assembling the heater and the insulator assembly for the vacuum evaporation source of FIG. 3;
5 is a perspective view schematically illustrating a heater and an insulator assembly for a vacuum evaporation source according to another embodiment of the present invention.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings, which will be readily apparent to those skilled in the art to which the present invention pertains. The present invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein.

FIG. 3 is a perspective view schematically showing a heater and an insulator assembly for a vacuum evaporation source according to an embodiment of the present invention, and FIG. 4 is an exploded perspective view illustrating a process of assembling the heater and the insulator assembly for the vacuum evaporation source of FIG.

The vacuum evaporation source heater and insulator assembly 100 according to an embodiment of the present invention includes a heat ray 110 and at least one insulator 120, as shown in FIGS. Hereinafter, each component will be described in detail with continued reference to Figs. 3 and 4. Fig.

The heating wire 110 has a plurality of bends 111 or 112 as shown in Figs. For example, as shown in FIGS. 3 and 4, the plurality of bending portions 111 or 112 may include a plurality of upper bending portions 111 forming the upper portion of the hot wire 110, And a plurality of lower bending portions 112 forming a lower portion.

In particular, each upper bend 111 and each lower bend 112 may be placed alternately with each other. For example, as shown in Fig. 3, a plurality of upper bending portions 111 include first and second upper bending portions 111a and 111b, and a plurality of lower bending portions 112 include first and second upper bending portions 111a and 111b. The first lower bending portion 112a is located between the first and second upper bending portions 111a and 111b and the first and second lower bending portions 112a and 112b are located between the first and second upper bending portions 111a and 111b, And the second upper bent portion 111b may be placed between the lower bent portions 112a and 112b.

Further, the heat ray 110 may have a wire shape whose cross section is circular.

The at least one insulator 120 is made of ceramic or the like and insulates the heat ray 110 insulatively. As shown in Fig. 3, each of the inserting bodies 120 has a plurality of insertion slots (S). Accordingly, since each bent portion 111 or 112 of the heat line 110 is inserted into each insertion slot S of the insulator 120, as shown in FIG. 4, the heat line 110 is bent a plurality of times The bending portion 111 or 112 can be inserted into each insertion slot S at once.

For example, one or more insulators 120 may include a top insulator 121 and a bottom insulator 122, as shown in Figs. 3 and 4. The upper insulator 121 may have a respective first insertion slot S1 into which the respective upper bend 111 is inserted and the lower insulator 122 may have a first inserting slot S1 into which each lower bend 112 is inserted And may have a second insertion slot S2.

3 and 4, when the respective upper bending portions 111 and the respective lower bending portions 112 are disposed alternately with each other, each of the first insertion slots S1 and each of the second bending portions 112, 2 insertion slots S2 are offset from each other so as to accommodate the respective upper bend portions 111 and the respective lower bend portions 112 in a mutually offset manner. 3, one end of one of the upper bent portions 111a of the plurality of upper bent portions 111 and one of the lower bent portions 112a of the plurality of lower bent portions 112, Since the linear connection portion 113 connecting the ends of the first insertion slot S1 is inserted together into one first insertion slot S1 and the second insertion slot S2, (See S1) and one side of the second insertion slot (see S2), thereby preventing the left and right deformation of the heat ray 110. [

More specifically, as shown in FIG. 3, the plurality of upper bent portions 111 include first and second upper bent portions 111a and 111b, and the plurality of lower bent portions 112 include first and second upper bent portions 111a and 111b. And a second lower bending portion 112a and a second lower bending portion 112b. The first lower bending portion 112a is located between the first and second upper bending portions 111a and 111b, When the second upper bent portion 111b is placed between the bent portions 112a and 112b, one end of the first upper bent portion 111a is connected to the one end of the first lower bent portion 112a by the straight connecting portion 113 Lt; / RTI > Therefore, the straight connecting portion 113 is connected to one of the first insertion slots S1 (see S1) and the second insertion slot S2 (see S2) of the plurality of second insertion slots S2 The straight connecting portion 113 can be supported laterally on one side of the first insertion slot S1 and on the one side of the second insertion slot S2 so as to prevent the left and right deformation of the heat ray 110 .

The width W1 of each insertion slot S is larger than the sectional diameter D of the heat line 110 and the width W of each insertion slot S Can be made larger than the width G1 of each bending portion 111 or 112 by taking into consideration the coefficient of thermal expansion of the hot wire 110. [

The width W1 of each of the insertion slots S is larger than the diameter D of the heat line 110 so that the portion of the insulator 120 where the insertion slot S is formed even when the heat line 110 is thermally expanded The length L1 of each insertion slot S is made larger than the width G1 of each of the bending portions 111 or 112 by an amount corresponding to the thermal expansion coefficient of the hot wire 110, 110 may be constrained and fixed in the longitudinal direction of the insertion slot S after thermal expansion.

In addition, the heater and insulator assembly 100 for a vacuum evaporation source according to an embodiment of the present invention may further include an insulating pedestal 130 for supporting a plurality of lower bent portions 112 thereunder. For example, the insulating pedestal 130 may be made of ceramics or the like.

Hereinafter, a heater and an insulator assembly 200 for a vacuum evaporation source according to another embodiment of the present invention will be described with reference to FIG.

5 is a perspective view schematically illustrating a heater and an insulator assembly for a vacuum evaporation source according to another embodiment of the present invention.

5, the vacuum evaporation source heater and insulator assembly 200 according to another embodiment of the present invention is the same as the one embodiment of the present invention except for the shape of the heat ray 210, The description will be focused mainly on the shape of the heat line 210. FIG.

The hot wire 210 may have a band shape (in other words, a strip shape) having a rectangular cross section.

In this case, the width W2 of each insertion slot S is greater than the thickness T of the heat line 210, and the length L1 of each insertion slot S is greater than the width G2 of each bend And may be as large as the thermal expansion coefficient of the heat line 210.

Therefore, since the width W2 of each insertion slot S is larger than the thickness T of the heat line 210, even if the band-shaped heat line 210 is thermally expanded, there is no damage to the insulator 110, The length L2 of the insertion slot S of the heat sink 210 is made larger than the width G2 of each of the bent portions 211 or 212 by an amount corresponding to the thermal expansion coefficient of the heat line 210, And can be fixed and fixed in the longitudinal direction of the slot S.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, Of the right.

100, 200: Heater and insulator assembly for vacuum evacuation source
110: heat line 111: a plurality of upper bent portions
111a: first upper bent portion 111b: second upper bent portion
112: a plurality of lower bending portions 112a: a first lower bending portion
112b: second lower bent portion 113: linear connecting portion
120: one or more insulators 121: upper insulator
122: lower insulator S: plural insertion slots
S1: a plurality of first insertion slots S2: a plurality of second insertion slots
W1, W2: width of insertion slot L1, L2: length of insertion slot
D: Diameter of outer ear wire T: Thickness of band type wire
G1, G2: Breadth width

Claims (7)

As a vacuum evaporator source heater and insulator assembly,
A hot wire having a plurality of bent portions; And
And at least one insulator having respective insertion slots into which the respective bends are inserted,
Each of the bent portions
A portion bent in the hot line,
Each of the insertion slots
Wherein each of the bending portions is inserted thereinto, wherein each of the bending portions is bent at one time,
Wherein the plurality of bending portions
A plurality of upper bent portions forming an upper portion of the hot wire; And
And a plurality of lower bent portions forming a lower portion of the hot wire,
Wherein the at least one insulator comprises:
An upper insulator having a respective first insertion slot into which the respective upper bend portion is inserted; And
And a lower insulator having a respective second insertion slot into which the respective lower bend portion is inserted,
Wherein each of the upper bend and each of the lower bend are alternately positioned,
Each of the first insertion slot and each of the second insertion slots being offset from each other to accommodate the respective upper bending portions and the respective lower bending portions so as to be offset from each other,
The plurality of upper bent portions
And first and second upper bends,
Wherein the plurality of lower bent portions
And first and second lower bends,
The first lower bend portion being located between the first and second upper bending portions,
The second upper bending portion being located between the first and second lower bending portions,
One end of the first upper bending portion is connected to one end of the first lower bending portion by a straight connecting portion,
The straight connection portion is supported on the left side of one of the plurality of first insertion slots and on the right side of the second insertion slot of one of the plurality of second insertion slots,
The heater and the insulator assembly for the vacuum evaporation source may include:
And an insulating pedestal supporting the plurality of lower bending parts
Further comprising:
The insulating pedestal has a ring shape
Heater and insulator assembly for vacuum evacuation sources. delete delete delete The method of claim 1,
The heat ray has a wire shape whose cross section is circular
Heater and insulator assembly for vacuum evacuation sources. The method of claim 1,
The heat ray has a band shape whose cross section is a quadrangle
Heater and insulator assembly for vacuum evacuation sources. delete
KR1020150095138A 2015-07-03 2015-07-03 Heater and insulator assembly for vacuum effusion cell KR101814563B1 (en)

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KR1020150095138A KR101814563B1 (en) 2015-07-03 2015-07-03 Heater and insulator assembly for vacuum effusion cell

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Application Number Priority Date Filing Date Title
KR1020150095138A KR101814563B1 (en) 2015-07-03 2015-07-03 Heater and insulator assembly for vacuum effusion cell

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KR20170004582A KR20170004582A (en) 2017-01-11
KR101814563B1 true KR101814563B1 (en) 2018-01-03

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Publication number Priority date Publication date Assignee Title
KR102157476B1 (en) * 2018-02-14 2020-09-21 (주)알파플러스 Heater and insulator assembly for vacuum effusion cell

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