KR20130128612A - Ceramic heater using insulating tube - Google Patents

Ceramic heater using insulating tube Download PDF

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Publication number
KR20130128612A
KR20130128612A KR1020120052445A KR20120052445A KR20130128612A KR 20130128612 A KR20130128612 A KR 20130128612A KR 1020120052445 A KR1020120052445 A KR 1020120052445A KR 20120052445 A KR20120052445 A KR 20120052445A KR 20130128612 A KR20130128612 A KR 20130128612A
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KR
South Korea
Prior art keywords
insulating tube
ceramic heater
hot wire
insulating
plate
Prior art date
Application number
KR1020120052445A
Other languages
Korean (ko)
Inventor
김응천
Original Assignee
(주)엠에스아이코리아
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Publication date
Application filed by (주)엠에스아이코리아 filed Critical (주)엠에스아이코리아
Priority to KR1020120052445A priority Critical patent/KR20130128612A/en
Publication of KR20130128612A publication Critical patent/KR20130128612A/en

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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/0033—Heating devices using lamps
    • H05B3/0038—Heating devices using lamps for industrial applications
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
    • H05B3/14—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
    • H05B3/141—Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
    • H05B3/22—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible
    • H05B3/28—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/40—Heating elements having the shape of rods or tubes
    • H05B3/54—Heating elements having the shape of rods or tubes flexible
    • H05B3/56—Heating cables
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/002—Heaters using a particular layout for the resistive material or resistive elements
    • H05B2203/004—Heaters using a particular layout for the resistive material or resistive elements using zigzag layout

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Resistance Heating (AREA)

Abstract

The present invention relates to a ceramic heater for a display device manufacturing process and, more specifically, to a ceramic heater using an insulating tube which can maintain high air cleanliness and can perform stable ultra high heating above 400, by preventing damage of an insulating plate and dust generation due to high temperature by changing the shape and arrangement structure of a conventional ceramic insulating plate, during a display device manufacturing process, and can increase stability of the heater and can improve total insulation efficiency and strength compared to the conventional insulating plate by using the insulating tube processed by compression molding method. To achieve the purpose, the ceramic heater using an insulating tube of the present invention includes: a metallic case having an accommodation space in the inside; a hot wire part where a hot wire is formed in zigzags; a first column insulating tube pulling in the front and the end of the hot wire part by both ends opened; and a second column insulating tube which is wider than the first column insulating tube and has both ends opened, and pulls in two adjacent hot wires at the same time in the stopped part of the hot wire part where the first column insulating tube is not inserted. The ceramic heater further can include a finishing insulating tube in which one end is opened and pulls in the bending part of the hot wire part. The case is installed to be combined with an upper plate and a lower plate, and further includes an insulating tube for a gap maintenance part pulling in an up/down gap maintenance part formed vertically in the case.

Description

Ceramic Heater Using Insulating Tube {Ceramic Heater Using Insulating Tube}

The present invention relates to a ceramic heater for a display device manufacturing process, and more particularly, in the display device manufacturing process, by changing the shape and arrangement of the general ceramic insulating plate to prevent breakage and dust generation of the insulating plate due to high temperature, It maintains air cleanliness and enables stable ultra-high temperature heating above 400 ℃, and by using insulation tube processed by compression mold forming method, insulation can improve overall insulation efficiency and strength and increase heater stability compared to general insulation plate structure. It relates to a ceramic heater using a tube.

In general, a flat panel display device such as an LCD, a TFT, and an OLED is mainly used a photolithography process for forming a thin film and a wiring pattern on a substrate, and a heater is required in the baking process. Moreover, in the flat panel display manufacturing process, the heater for heating a display glass is needed in the film-forming process of a display thin film, an etching process, the baking process of a resist film, etc.

At this time, in order to implement a high temperature heater used in the manufacturing process of the display device, Ni-Cr or Ni-Fe heating wire is installed in the STS pipe and filled with MgO particles to be used as a pipe type, or between heating ceramics (Mo, Ni , Ni-Cr, Ti, Ni-Fe, etc.) were inserted and used at high temperature and high pressure. However, the high temperature heater implemented in the above manner could be used only in a small size or low-capacity semiconductor, and could not be applied for a large capacity, a large area, and an ultra high temperature. In the case of a heater in which a hot wire is inserted into a plate-shaped ceramic insulating plate, particles such as dust may be generated or thermally deformed at a high temperature heating, and when a crack occurs in the ceramic insulator, it reacts with moisture in the air to react with ammonia gas. There was a side that is not suitable for the display manufacturing process that should produce the result without minute error in a clean environment. In addition, compression molding is impossible due to the size of the insulating plate when processing, so the strength of the material is weak and brittle, so that there is a problem that damage occurs even when a small impact is carried when transporting or installing the heater.

The present invention has been made to solve the above problems, an object of the present invention in the manufacturing process of the display device, by changing the shape and arrangement of the general ceramic insulating plate to prevent breakage and dust generation of the insulating plate due to high temperature In addition, the present invention provides a ceramic heater using an insulation tube that maintains high air cleanliness and enables stable ultra high temperature heating of 400 ° C or higher.

Another object of the present invention is to provide a ceramic heater using an insulating tube that can improve the overall insulation efficiency and strength and increase the stability of the heater compared to the general insulating plate structure by using the insulating tube processed by the compression mold molding method.

According to the ceramic heater using the insulating tube according to the present invention for achieving the above object, a metal case having an accommodation space therein; A hot wire portion in which the hot wire is zigzag; A first row insulating tube having both ends open to lead the front end and the end of the hot wire part; It is characterized in that it comprises a two-row insulating tube that is wider than the one-row insulating tube and both ends are open, and simultaneously inserts two adjacent heating wires at the discontinuity portion of the heating wire portion in which the first-row insulating tube is not inserted.

Here, one end may further include a finishing insulating tube for introducing the bent portion of the hot wire portion, the case is installed by combining the upper plate and the lower plate, the upper and lower interval maintaining portion formed vertically inside the case Provided is a ceramic heater using an insulation tube that can further include an insulation tube for a gap maintaining portion.

According to the present invention as described above, in order to prevent breakage and dust generation of the insulation plate due to the high temperature in the manufacturing process of the display device, high air cleanliness is maintained and stable ultra-high temperature heating of 400 ℃ or more is possible to increase the process efficiency have. Compared with the general insulation plate structure, the overall insulation efficiency and strength are improved, and the stability of the heater is increased, so the electrical risk is reduced, and the working environment can be expected to be improved by blocking dust generation during the production and maintenance of the heater. have.

1 is a perspective view showing a coupling form of a hot wire part and an insulating tube in a ceramic heater using an insulating tube according to an embodiment of the present invention.
Figure 2 is a plan view showing a coupling form of the hot wire portion and the insulating tube in a ceramic heater using an insulating tube according to an embodiment of the present invention.
3 is an exploded perspective view of a ceramic heater using an insulating tube according to an embodiment of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will now be described in detail with reference to the accompanying drawings. It is to be noted that like elements in the drawings are denoted by the same reference numerals whenever possible.

1 is a perspective view showing a coupling form of a heating wire and an insulating tube in a ceramic heater using an insulating tube according to an embodiment of the present invention, Figure 2 is a ceramic heater using an insulating tube according to an embodiment of the present invention It is a top view which shows the coupling form of a hot wire part and an insulation tube.

1 and 2, the ceramic heater for a display device manufacturing process according to the basic embodiment of the present invention has a structure including a hot wire portion 10 and an insulating tube 20. The heating wire 10 is formed in a zigzag heating wire 11 in order to increase the efficiency and thermal uniformity of the heating, each insulating tube 20 is installed to surround each portion of the heating wire 10 to function as an insulator. To perform. In general, when the ceramic heater is heated at a high temperature, particles such as dust are generated, which is a factor that may act as a pollution source in a display device manufacturing process in which a clean environment is essential. Therefore, by housing all of the hot wire portion 10 and its insulating structure in the case 30, it is possible to prevent the particles from being carried out. For this reason, the ceramic heater according to the present invention also basically adopts a structure accommodated inside the metal case 30. The case 30 is mainly manufactured using a material such as stainless steel (SUS) having excellent heat resistance, and is preferably divided into two parts, an upper plate 31 and a lower plate 32. The detailed structure of the case 30 will be described in detail with reference to FIG. 3.

In general, the heating wire 11 mainly uses a Kantal wire suitable for high temperature, and the diameter of the wire is selected to be suitable for the intended use and the required amount of power. The heating wire 11 is very hot while emitting electrical energy as thermal energy. It will rise to a high temperature. Since it is a heat generating structure using electricity, in the structure of the ceramic heater according to the present invention, a method in which a plurality of insulating tubes 20 are provided outside of the heating wire unit 10 is used. 2 O 3 , BN, AlN, ZrO 2 , BeO, MgO, Y 2 O 3 , SiO 2, etc., while strong in electrical insulation, can withstand a high temperature above 400 ℃ process heat generated from the heating wire (10) It is manufactured in the shape of a tube by selecting a ceramic material to conduct it evenly. Combination structure of the basic heating wire 10 and the insulating tube 20 is that the heating wire (11) penetrates the center of the insulating tube (20) in such a way that both ends are opened so that the beads can be continuously installed in order as the threads are threaded. to be. For reference, although the specific shape of the heating wire 11 is not reflected in the drawings, it is generally made in the form of a coil.

At this time, since the heating wire portion 10 of the ceramic heater according to the present invention is formed in a zigzag, only the first row insulating tube 21 for introducing one row of heating wires 11 at a time stops from the tip of the heating wire portion 10. Up to pushing the insulating tube 20 is not practically easy. When pushing the insulation tube 20 forcibly, breakage or deformation of the heating wire 11 or the insulation tube 20 at the bent portion 12 where the direction of the heating wire 11 is reversed from the heating wire portion 10. Since this can occur, the present invention includes a two-row insulating tube 22 formed with a wide width so that the two-row heating wires 11 can be introduced at a time. In other words, the first row insulation tube 21 allows the both ends of the hot wire portion 10 to be drawn in, and the second row insulation tube 22 is wider than the first row insulation tube 21. The first row insulation tube 21 is installed so as to be able to simultaneously pull in two rows of hot wires 11 positioned side by side at the middle of the hot wire portion 10, which is a position where it is difficult to insert. Accordingly, there is no need to go through a hard insertion process using only one row of insulating tubes 21 to wrap the heating wires 10 with the insulating tube 20. In the middle part, the bent part 12 of the heating wire 10 is formed. It is possible to directly insert the second row insulating tube (22). Of course, since it is not impossible to insert all the heating wires 10 into the single-row insulating tube 21, the single-row insulating tube through a variety of methods, such as varying the molding method of the insulating tube 20, or modify the insertion method The arrangement ratio of the 21 and the second row insulation tube 22 may be adjusted.

In addition, the ceramic heater according to the present invention may further include a finishing insulating tube (23). Finishing insulating tube 23 is provided with the same width and size as the two-row insulating tube 22, but unlike the two-row insulating tube 22 is open only one end, the two-row insulating tube 22 to the hot wire portion After fitting all from the bent portion 12 of (10) serves to finally cover. The bending part 12 of the heating wire part 10 may be referred to as the structurally weakest part due to the characteristics of the heating wire 11, as shown in FIG. 2 to close the insulating tube 23 for covering the corresponding part carefully. By installing it, the stability of a ceramic heater can be improved.

On the other hand, when the heat wire portion 10 is accommodated by the insulating plate of the general flat plate shape, rather than the insulating tube 20, the metal case 30 containing the insulating plate shows a bending phenomenon due to thermal expansion, There is a possibility that minute peeling occurs due to stress in the insulating plate. Since the heat transfer characteristics change in the part where peeling occurs and the part that does not peel, the temperature uniformity of the insulating plate is inhibited, so that a correct result cannot be expected in the manufacturing process of the display device. Further, when the peeling proceeds further and cracks occur, when the ceramic insulating plate is aluminum nitride, moisture in the air reacts with the aluminum nitride sintered body to generate ammonia gas or an amine gas, so that this gas is applied to the semiconductor wafer. It may adversely affect the photosensitive resin. Therefore, the ceramic heater according to the present invention does not have a problem of damage to the insulating plate resulting from the bending of the case 30 due to thermal expansion, and even if the case 30 is bent, the stress load applied to the insulating structure is dispersed. The likelihood of breakage is greatly reduced. Due to such a configuration, it is possible to easily apply to a large-capacity and large-area ceramic heater and to maintain a high temperature uniformity as a whole. In addition, since the insulating tube 20 is a structure that is overwhelmingly smaller than a general insulating plate, the insulating tube 20 can be processed by a compression mold forming method, thereby improving the mechanical strength and brittleness from the insulating structure.

3 is an exploded perspective view of a ceramic heater using an insulating tube 20 according to an embodiment of the present invention.

Referring to FIG. 3, the ceramic heater for a display device manufacturing process according to the present invention includes a case 30 in which an upper plate 31 and a lower plate 32, each of which has a curved surface vertically formed therein, are coupled to each other. After fixing the hot wire portion 10 to which the insulating tube 20 is coupled to the hot wire portion holder 34 provided in the lower plate 32, the upper plate 31 is covered and joined. At this time, the space between the hot wire portion 10 and the upper plate 31 is spaced apart so that an air layer is formed, it is possible to naturally induce a uniform temperature during heating of the heater. In addition, in order to reduce the frequency of the case 30 is bent in the longitudinal direction due to thermal expansion due to high temperature, and to easily combine the upper plate 31 and the lower plate 32, the upper plate 31 and the lower plate 32 It is preferable that the bent surface is formed at the edge of each vertically. As the bent surface is formed, the upper plate 31 and the lower plate 32 have the same shape as the rectangular parallelepiped with one surface open. When the width of the upper plate 31 is formed to be slightly longer than both widths of the lower plate 32, the upper and lower plates are combined and bent so that the bent surface of the upper plate 31 naturally covers the bent surface of the lower plate 32. It is easy to bolt the side portion of the overlapping surface.

Apart from this, in the structure of the ceramic heater according to another embodiment of the present invention, the upper and lower spacing portions 33 are vertically formed therein so that the upper plate 31 and the lower plate 32 are deformed even if the case 30 is deformed. ) Can be maintained. The upper and lower space maintaining portion 33 of the metal material is manufactured in the shape of a column having the same length and length as that of the upper and lower plates of the case 30, and thus, any one of the lower plate 32 and the upper plate 31 of the case 30. By welding a plurality of pieces on the side surface, the gap between the upper and lower plates can be maintained without large deviation from the beginning even when the case 30 is warped due to the high temperature. The user may perform bolt coupling from the corresponding position on the upper or lower surface of the case 30 so as to penetrate the center of the upper and lower space maintaining part 33 after the case 30 is coupled. In addition, since the upper and lower space maintaining portion 33 is formed of a metal, there is a possibility of causing electrical interference with the heating wire 11 in the case 30, further comprising an insulating tube 24 for space maintenance for insulation. It is preferable to combine the case 30 after installing so as to surround the upper and lower space maintaining portion 33. For ease of manufacture, the insulating tube 24 for the gap maintaining part may also be manufactured in a form similar to the preceding single row insulating tube 21.

And before operation of the heater, in order to reduce the frequency of the case 30 is bent in the longitudinal direction occurs it is preferable that the bent surface is formed in each of the vertical edge of the upper plate 31 and the lower plate 32 In order to further enhance this effect, it is possible to insert the side support bar 35 in the longitudinal direction between the bent surface of the upper plate 31 and the lower plate 32. The side support bar 35 is preferably formed in a flat rectangular pillar shape, so that the side support bar 35 having a predetermined thickness can be inserted between the bent surface of the upper plate 31 and the bent surface of the lower plate 32. The case 30 is manufactured so that the widths of the upper plate 31 and the lower plate 32 are different from each other, and both the bent surface of the upper plate 31 and the side surfaces of the side support bar 35 and the lower plate 32 are fixed. Combine it. Due to the additional configuration of the upper and lower spacing portion 33 and the side support bar 35, the ceramic flat heater of the present invention can maintain a high level of flatness.

Although the present invention has been described in connection with the above-mentioned preferred embodiments, it is possible to make various modifications and variations without departing from the spirit and scope of the invention. Accordingly, the scope of the appended claims should include all such modifications and changes as fall within the scope of the present invention.

10: heating wire portion 11: heating wire
12: bend 20: insulated tube
21: 1 row insulation tube 22: 2 row insulation tube
23: Insulation tube for finishing 24: Insulation tube for spacing
30: case 31: top plate
32: lower plate 33: vertical space maintenance
34: heating wire fixture 35: side support bar

Claims (3)

In the structure of a ceramic heater for a display device manufacturing process,
A metal case having an accommodation space therein;
A hot wire portion in which the hot wire is zigzag;
A first row insulating tube having both ends open to lead the front end and the end of the hot wire part;
The insulating tube is wider than the single-row insulating tube and open at both ends, and includes a second-row insulating tube for simultaneously introducing two adjacent heating wires from the discontinuity portion of the heating wire portion in which the first-row insulating tube is not inserted. Ceramic heater used.
The method of claim 1,
One end of the ceramic heater using an insulating tube further comprises a finishing insulating tube for introducing the bent portion of the hot wire portion.
The method of claim 1,
The case is installed by combining the upper plate and the lower plate,
Ceramic heater using an insulating tube further comprises an insulating tube for the gap holding portion for introducing the vertical gap holding portion vertically formed in the case.
KR1020120052445A 2012-05-17 2012-05-17 Ceramic heater using insulating tube KR20130128612A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020120052445A KR20130128612A (en) 2012-05-17 2012-05-17 Ceramic heater using insulating tube

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020120052445A KR20130128612A (en) 2012-05-17 2012-05-17 Ceramic heater using insulating tube

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KR20130128612A true KR20130128612A (en) 2013-11-27

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KR1020120052445A KR20130128612A (en) 2012-05-17 2012-05-17 Ceramic heater using insulating tube

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160053755A (en) * 2014-11-05 2016-05-13 (주)에스아이 Heater for chemical vapor deposition and chemical vapor deposition apparatus using the same
KR20160134337A (en) 2015-05-15 2016-11-23 동서대학교산학협력단 System for treating wastewater with high concentrations of phosphorus and suspended solid
KR20170021274A (en) 2017-02-16 2017-02-27 동서대학교산학협력단 Slow mixing precipitation tank for wastewater treatment system
KR20190028031A (en) * 2017-09-08 2019-03-18 주식회사 오르테크 Conveyor powder coating drying device using high-efficiency explosion-proof far-infrared sheath heater and drying method using the same
KR20200085182A (en) * 2019-01-04 2020-07-14 주식회사 비아트론 Planar Heater for Thermal Process of Substrate
KR20210126459A (en) * 2020-04-12 2021-10-20 주식회사 비아트론 Planar Heater for Thermal Process of Substrate

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160053755A (en) * 2014-11-05 2016-05-13 (주)에스아이 Heater for chemical vapor deposition and chemical vapor deposition apparatus using the same
KR20160134337A (en) 2015-05-15 2016-11-23 동서대학교산학협력단 System for treating wastewater with high concentrations of phosphorus and suspended solid
KR20170021274A (en) 2017-02-16 2017-02-27 동서대학교산학협력단 Slow mixing precipitation tank for wastewater treatment system
KR20190028031A (en) * 2017-09-08 2019-03-18 주식회사 오르테크 Conveyor powder coating drying device using high-efficiency explosion-proof far-infrared sheath heater and drying method using the same
KR20200085182A (en) * 2019-01-04 2020-07-14 주식회사 비아트론 Planar Heater for Thermal Process of Substrate
KR20210126459A (en) * 2020-04-12 2021-10-20 주식회사 비아트론 Planar Heater for Thermal Process of Substrate

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