KR101269827B1 - Gate valve for atmosphere of fabricating semiconductor and a display - Google Patents

Gate valve for atmosphere of fabricating semiconductor and a display Download PDF

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Publication number
KR101269827B1
KR101269827B1 KR1020110130349A KR20110130349A KR101269827B1 KR 101269827 B1 KR101269827 B1 KR 101269827B1 KR 1020110130349 A KR1020110130349 A KR 1020110130349A KR 20110130349 A KR20110130349 A KR 20110130349A KR 101269827 B1 KR101269827 B1 KR 101269827B1
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KR
South Korea
Prior art keywords
rod
cylinder
gate valve
lifting
door
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KR1020110130349A
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Korean (ko)
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김양배
홍태호
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김양배
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Priority to KR1020110130349A priority Critical patent/KR101269827B1/en
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/04—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members
    • F16K3/06—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members in the form of closure plates arranged between supply and discharge passages
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K35/00—Means to prevent accidental or unauthorised actuation
    • F16K35/06—Means to prevent accidental or unauthorised actuation using a removable actuating or locking member, e.g. a key
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Details Of Valves (AREA)
  • Sliding Valves (AREA)

Abstract

PURPOSE: An atmospheric gate valve for semiconductor and display manufacturing processes is provided to prevent the generation of foreign materials in an operating part because the diameter of through-holes formed on a swing plate of a door locking unit is larger than support rods. CONSTITUTION: An atmospheric gate valve(100) for semiconductor and display manufacturing processes comprises a valve body(10), a lifting cylinder(20), a shaft support part(30), a door(40), a door locking unit, left and right gap preventing units(60), and front and rear gap preventing units. The valve body is installed in the side wall of a load-lock chamber which is a boundary between a vacuum side and an atmospheric side. The lifting cylinder is installed under the valve body to lift up and down a rod. The shaft support part is installed in the end of the rod. Support rods(31) are coupled to both sides of the shaft support part. The door opens and closes an opening through which substrates formed in the side wall of the load-lock chamber are entered and discharged according to the lifting of the lifting cylinder. The door locking unit comprises a swing plate, a locking cylinder(52), a locking bracket, and a rotary bar. The left and right gap preventing units prevent left and right gaps when the shaft support part lifts.

Description

반도체 및 디스플레이 제조공정의 대기용 게이트밸브{Gate valve for atmosphere of fabricating semiconductor and a display}Gate valve for atmosphere of fabricating semiconductor and a display

본 발명은 반도체 및 디스플레이 제조공정의 대기용 게이트밸브에 관한 것으로, 더욱 상세하게는, 대기용 게이트밸브의 승하강시 유격을 방지하면서도 작동부에 이물질 발생을 방지하도록 하는 반도체 및 디스플레이 제조공정의 대기용 게이트밸브에 관한 것이다.
The present invention relates to a gate valve for the atmosphere of the semiconductor and display manufacturing process, and more particularly, to the atmosphere of the semiconductor and display manufacturing process to prevent the generation of foreign matter in the operating part while preventing the clearance during the lifting and lowering of the standby gate valve. It relates to a gate valve.

일반적으로, 대기용 게이트 밸브는, 반도체 및 디스플레이를 제조하기 위해 사용되는 장치에 대기측과 진공측을 구분하도록 하는 부위에 설치되는 것이다.
In general, the atmospheric gate valve is provided at a portion that separates the atmospheric side from the vacuum side in a device used for manufacturing a semiconductor and a display.

도 1은 일반적인 반도체 및 디스플레이를 제조하기 위한 장치의 개요도이다.1 is a schematic diagram of a device for manufacturing a general semiconductor and display.

도 1을 참고하면, 반도체 및 디스플레이 제조공정에서, 웨이퍼(글라스) 표면에 가공하기 위해 사용되는 대부분의 장비는 대기측과 진공측으로 구분된다.Referring to FIG. 1, in the semiconductor and display manufacturing process, most of the equipment used to process the wafer (glass) surface is divided into an atmosphere side and a vacuum side.

상기 대기측에는 가공하기 전에 웨이퍼(글라스)를 공급하는 카셋트(1) 및 상기 카셋트(1)에서 공급받은 웨이퍼(글라스)를 파지하여 진공측의 로드락 챔버(4)로 이송시키는 대기측 로봇(2)으로 구성된다.The atmospheric side robot 2 which grips the cassette 1 for supplying the wafer (glass) and the wafer (glass) supplied from the cassette 1 and transfers the wafer to the load lock chamber 4 on the vacuum side before processing. It is composed of

상기 진공측에는 진공상태로 웨이퍼(글라스)가공 공정이 수행되는 복수의 프로세스 챔버(3), 가공을 위한 웨이퍼(글라스)를 로드 또는 언로드 하는 로드락 챔버(4), 프로세스 챔버(3)와 로드락 챔버(4) 사이에 설치되어 웨이퍼(글라스)를 이송시키는 트랜스퍼 챔버(5) 및 상기 트랜스퍼 챔버(5)에 설치되어 로드락 챔버(4)에 공급되는 웨이퍼(글라스)를 파지하여 프로세스 챔버(3)로 출입시키는 진공측 로봇(6)으로 구성되어 있다.The vacuum side includes a plurality of process chambers 3 in which a wafer (glass) processing process is performed in a vacuum state, a load lock chamber 4 for loading or unloading a wafer (glass) for processing, a process chamber 3 and a load lock A transfer chamber 5 installed between the chambers 4 to transfer wafers (glass), and a process chamber 3 by holding a wafer (glass) installed in the transfer chamber 5 and supplied to the load lock chamber 4. It consists of the vacuum side robot 6 which enters into and out of ().

또한, 상기 대기측과 진공측의 경계부위에는 대기용 게이트밸브(7)가 설치되고, 프로세스 챔버(3)와 트랜스퍼 챔버(5) 사이에는 진공용 게이트밸브(8)가 설치되어진다.
In addition, an atmospheric gate valve 7 is provided at the boundary between the atmospheric side and the vacuum side, and a vacuum gate valve 8 is provided between the process chamber 3 and the transfer chamber 5.

도 2는 종래에 따른 대기용 게이트밸브를 나타낸 도면이다.2 is a view showing a conventional gate valve according to the prior art.

도 2를 참고하면, 대기용 게이트밸브(7)는, 진공측과 대기측의 경계부위의 로드락 챔버(4)의 챔버 측벽에 설치된 밸브몸체(7a)와, 상기 밸브몸체(7a)의 내부에 설치되고, 로드(7b-1)가 승하강하는 승하강실린더(7b)와, 상기 승하강실린더(7b)의 로드(7b-1) 단부에 고정되어 상기 로드락 챔버(4)의 측벽에 형성된 기판의 반입 및 반출되는 개방구(4a)를 개폐시키는 도어(7c)와, 상기 밸브몸체(7a)의 상부에 설치되어 상기 승하강실린더(7b)를 지지함과 아울러 양측에 힌지축(7d-1)이 연결되어진 스윙플레이트(7d)와, 상기 승하강실린더(7b)가 상승되어 상기 개방구(4a)를 폐쇄하는 경우 상기 스윙플레이트(7d)의 힌지축(7d-1)을 중심으로 원호운동시켜 상기 개방구(4a)를 밀폐시키도록 상기 승하강실린더(7b)의 하부에 설치되어진 로드(7e-1)가 전후진되는 잠금실린더(7e)와, 상기 승하강실린더(7b)의 양측에 설치됨과 아울러 상기 스윙플레이트(7d)에 관통되어 상기 도어(7c)의 하단부에 결합되어진 지지봉(7f)을 포함한다.
Referring to FIG. 2, the atmospheric gate valve 7 includes a valve body 7a provided on the side wall of the chamber of the load lock chamber 4 at the boundary between the vacuum side and the atmosphere side, and the inside of the valve body 7a. A lowering cylinder 7b on which the rod 7b-1 moves up and down, and fixed to an end portion of the rod 7b-1 of the lifting cylinder 7b, and mounted on a sidewall of the load lock chamber 4. A door 7c for opening and closing the formed opening and closing opening 4a of the formed substrate, and the upper portion of the valve body 7a to support the lifting cylinder 7b, and hinge shafts 7d on both sides. The swing plate 7d to which -1) is connected and the lifting cylinder 7b are lifted to close the opening 4a, and are centered on the hinge shaft 7d-1 of the swing plate 7d. A locking cylinder 7e to which the rod 7e-1 provided at the lower portion of the elevating cylinder 7b forwards and backwards to arcuate and seal the opening 4a; It is installed on both sides of the lowering cylinder (7b) and includes a support rod (7f) penetrated through the swing plate (7d) coupled to the lower end of the door (7c).

상기와 같이 구성된 종래의 대기용 게이트밸브(7)는, 로드락 챔버(4)의 챔버 측벽에 설치되고, 상기 챔버 측벽에 형성된 기판의 반입 및 반출되는 개방구(4a)를 승하강실린더(7b)의 승하강으로 도어(7c)를 이용하여 상기 개방구(4a)를 개방 또는 폐쇄하는 것이다.The conventional atmospheric gate valve 7 configured as described above is provided on the chamber sidewall of the load lock chamber 4 and moves up and down the opening 4a for loading and unloading the substrate formed on the chamber sidewall. The opening and closing of the opening (4a) by using the door (7c) by raising and lowering.

이때 상기 승하강실린더(7b)가 상승되어 도어(7c)가 챔버 측면에 형성된 개방구(4a)를 폐쇄한 후 잠금실린더(7e)의 로드(7e-1)를 전진시켜 승하강실린더(7b)의 상부에 결합되어진 스윙플레이트(7d)를 힌지축(7d-1)을 중심으로 회동시켜 개방구(4a)에 도어(7c)를 완전밀착시키게 되는 것이다.At this time, the elevating cylinder (7b) is raised to close the opening (4a) formed on the side of the chamber (7c) and then advance the rod (7e-1) of the lock cylinder (7e) to raise and lower the cylinder (7b) The swing plate 7d coupled to the upper portion of the swing plate 7d is rotated about the hinge shaft 7d-1 to completely close the door 7c to the opening 4a.

그러나, 종래에 대기용 게이트 밸브는, 승하강실린더(7b)의 승하강시 스윙플레이트(7d)에 관통됨과 아울러 상기 도어(7c)의 하단에 결합되어진 지지봉(7f)의 의해서 좌,우 및 전,후의 유격이 방지하게 되는데, 지지봉(7f)과 스윙플레이트(7d)의 사이의 면접촉에 의해 이물질이 발생되는 문제점이 있다.However, in the related art, the gate valve for waiting is left, right, front, front, and bottom by a support rod 7f which is penetrated through the swing plate 7d when the elevating cylinder 7b is raised and lowered and coupled to the lower end of the door 7c. After the clearance is prevented, there is a problem that foreign matter is generated by the surface contact between the support bar (7f) and the swing plate (7d).

또한, 승하강실린더(7b)의 패킹 등의 마모로 인한 에어 리크 발생시에 외부로부터 이물질이 비산되고, 이에 의해 지지봉(7f)의 표면에 도포된 윤활유에 이물질에 혼합되면 원활히 동작이 이루어지지 않고 마모 등이 발생되는 문제점이 있다.
In addition, foreign matters are scattered from the outside when air leakage occurs due to wear of the packing and the like of the lifting and lowering cylinder 7b, and when mixed with foreign matters in the lubricant applied to the surface of the supporting rod 7f, the operation is not performed smoothly. Etc. There is a problem that occurs.

본 발명의 목적은 이와 같은 문제점을 해결하기 위한 것으로, 그 목적은, 대기용 게이트밸브의 승하강시 유격을 방지하면서도 작동부에 이물질 발생을 방지하도록 하는 반도체 및 디스플레이 제조공정의 대기용 게이트밸브를 제공함에 있다.
SUMMARY OF THE INVENTION An object of the present invention is to solve such a problem, and an object thereof is to provide a standby gate valve for a semiconductor and display manufacturing process that prevents foreign matters from being generated in the operating part while preventing a clearance when the atmospheric gate valve descends. Is in.

본 발명을 달성하기 위한 기술적 사상으로 본 발명에 따른 반도체 및 디스플레이 제조공정의 대기용 게이트밸브는, 진공측과 대기측의 경계부위의 로드락 챔버의 챔버 측벽에 설치된 밸브몸체와; 상기 밸브몸체의 하부에 설치되고, 로드가 승하강되는 승하강실린더와; 상기 승하강실린더의 로드 단부에 설치되고, 상부 양측에 지지봉이 결합되어진 축지지부와; 상기 지지봉의 단부에 결합되어 상기 승하강실린더의 승하강에 따라 상기 로드락 챔버의 측벽에 형성된 기판의 반입 및 반출되는 개방구를 개폐시키는 도어와; 상기 밸브몸체의 상부에 양측이 힌지축으로 연결되고, 상기 지지봉보다 직경이 크게 이루어진 관통공이 형성된 스윙플레이트, 상기 승하강실린더의 상부 일측에 설치되고, 전,후진되는 로드가 형성된 잠금실린더, 상기 잠금실린더의 로드에 연결되어 상기 로드의 전,후진에 의해 수평이동하는 락킹브라켓트 및 상기 스윙플레이트의 힌지축에 일측이 고정되고, 타측은 상기 락킹브라켓트에 의해 동작되는 회동바를 포함하는 도어잠금수단과; 상기 스윙플레이트와 락킹브라켓트의 사이에 설치되어지고, 상기 승하강실린더의 로드가 연결된 축지지부의 승하강시 좌,우 유격을 방지하도록 하는 좌,우 유격방지수단과; 상기 회동바 상에 결합되어 상기 승하강실린더의 승하강시 전,후 유격을 방지하도록 하는 전,후 유격방지수단; 을 포함하는 것이다.According to the spirit of the present invention, a gate valve for a semiconductor and display manufacturing process according to the present invention includes: a valve body installed at a chamber sidewall of a load lock chamber at a boundary between a vacuum side and an atmosphere side; A lifting cylinder which is installed at a lower portion of the valve body and whose rod is lifted; An axial support part installed at the rod end of the elevating cylinder and having support rods coupled to both upper sides thereof; A door coupled to an end of the support rod to open and close the opening and exit opening and exiting of the substrate formed on the sidewall of the load lock chamber according to the lifting and lowering of the lifting cylinder; Both sides are connected to the hinge shaft on the upper portion of the valve body, the swing plate is formed with a through hole made larger in diameter than the support rod, installed on the upper one side of the elevating cylinder, lock cylinder formed with a rod forward, backward, the lock A door locking means connected to a rod of a cylinder and fixed to one side of a locking bracket that moves horizontally by the forward and backward of the rod and a hinge shaft of the swing plate, and the other side of which comprises a pivoting bar operated by the locking bracket; Left and right clearance prevention means installed between the swing plate and the locking bracket and preventing left and right clearances during the ascent and descend of the shaft support portion to which the rod of the elevating cylinder is connected; Before and after play prevention means coupled to the rotating bar to prevent the play before and after the lifting of the lifting cylinder; .

또한, 상기 좌,우 유격방지수단은, 한쌍의 가이드봉으로 이루어져 상기 승하강 실린더의 좌,우측에 각각 설치되어진 것이다.In addition, the left and right play prevention means is made of a pair of guide rods are respectively installed on the left and right sides of the lifting cylinder.

또한, 상기 전,후 유격방지수단은, 상기 회동바의 길이방향에 형성된 가이드홈에 구름운동하도록 하는 캠플로워이며, 상기 캠플로워는 상기 축지지부의 하측에 연장되어진 연장부에 설치되어진 것이다.
In addition, the front and rear clearance prevention means is a cam follower for rolling movement in the guide groove formed in the longitudinal direction of the pivoting bar, the cam follower is provided in the extension portion extended to the lower side of the shaft support.

본 발명에 따른 반도체 및 디스플레이 제조공정의 대기용 게이트밸브는, 로드락 챔버의 개방구를 개폐시키는 도어를 승하강시키는 승하강실린더를 밸브몸체의 하측에 배치하고, 승하강실린더의 로드의 단부에 지지봉이 결합되는 축지지부를 결합하며, 도어를 밀폐시키는 도어잠금수단의 스윙플레이트에 형성된 관통공을 지지봉보다 직경이 크게 이루어지도록 함으로서, 대기용 게이트밸브의 승하강시 유격을 방지하면서도 작동부에 이물질 발생을 방지하도록 할 수 있다.
The atmospheric gate valve of the semiconductor and display manufacturing process according to the present invention, the elevating cylinder for raising and lowering the door for opening and closing the opening of the load lock chamber in the lower side of the valve body, and at the end of the rod of the elevating cylinder The support rod is coupled to the shaft support portion coupled to the through-hole formed in the swing plate of the door locking means for sealing the door to have a larger diameter than the support rod, foreign matter generated in the operating part while preventing the clearance during the lifting and lowering of the atmospheric gate valve Can be prevented.

도 1은 일반적인 반도체 및 디스플레이를 제조하기 위한 장치의 개요도.
도 2a는 종래에 따른 대기용 게이트밸브의 사시도.
도 2b는 종래에 따른 대기용 게이트밸브의 정면도.
도 2c는 종래에 따른 대기용 게이트밸브의 측단면도로서, 승하강실린더가 승강된 상태의 도면.
도 2d는 종래에 따른 대기용 게이트밸브의 측단면도로서, 잠금실린더가 전진되어 로드락 챔버의 개방구가 밀폐된 상태의 도면.
도 3은 본 발명에 따른 대기용 게이트밸브의 정면사시도.
도 4는 본 발명에 따른 대기용 게이트밸브의 배면사시도.
도 5는 본 발명에 따른 대기용 게이트 밸브의 정면도로서, 승강실린더가 하강된 상태의 도면.
도 6은 본 발명에 따른 대기용 게이트 밸브의 정면도로서, 승강실린더가 상승된 상태의 도면.
도 7은 본 발명에 따른 대기용 게이트 밸브의 측단면도로서, 승강실린더가 하강된 상태의 도면.
도 8은 본 발명에 따른 대기용 게이트 밸브의 측단면도로서, 승강실린더가 상승된 상태의 도면.
도 9는 본 발명에 따른 대기용 게이트 밸브의 측단면도로서, 잠금실린더가 전진된 상태의 도면.
도 10은 본 발명에 따른 대기용 게이트 밸브의 축지지부와 회동바의 관계를 설명하기 위한 사시도.1 is a schematic diagram of a device for manufacturing a general semiconductor and display.
Figure 2a is a perspective view of a conventional gate valve.
Figure 2b is a front view of the conventional gate valve.
Figure 2c is a side cross-sectional view of a conventional gate valve, the lifting cylinder is a view of the lifted state.
Figure 2d is a side cross-sectional view of the conventional gate valve, the state in which the lock cylinder is advanced, the opening of the load lock chamber is closed.
Figure 3 is a front perspective view of the gate valve for waiting according to the present invention.
Figure 4 is a rear perspective view of the gate valve for standby according to the present invention.
5 is a front view of the gate valve for waiting according to the present invention, the lifting cylinder lowered.
6 is a front view of the gate valve for waiting according to the present invention, the lift cylinder is raised.
Figure 7 is a side cross-sectional view of the gate valve for waiting according to the present invention, the lifting cylinder lowered.
8 is a side cross-sectional view of the gate valve for waiting according to the present invention, the lifting cylinder is raised.
9 is a side cross-sectional view of the gate valve for waiting according to the present invention, the lock cylinder is advanced.
10 is a perspective view for explaining the relationship between the shaft support portion and the rotation bar of the gate valve for waiting according to the present invention.

이하, 본 발명이 속하는 기술 분야에서 통상의 지식을 가진 자가 용이하게 실시할 수 있도록 본 발명의 실시예에 대하여 첨부한 도면을 참고로 하여 상세히 설명한다. 그러나 본 발명은 여러 가지 상이한 형태로 구현될 수 있으며 여기에서 설명하는 실시예에 한정되지 않는다.
Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art can easily carry out the present invention. The present invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein.

도 3은 본 발명에 따른 대기용 게이트밸브의 정면사시도이고, 도 4는 본 발명에 따른 대기용 게이트밸브의 배면사시도이며, 도 5는 본 발명에 따른 대기용 게이트 밸브의 정면도로서, 승강실린더가 하강된 상태의 도면이고, 도 6은 본 발명에 따른 대기용 게이트 밸브의 정면도로서, 승강실린더가 상승된 상태의 도면이며, 도 7은 본 발명에 따른 대기용 게이트 밸브의 측단면도로서, 승강실린더가 하강된 상태의 도면이고, 도 8은 본 발명에 따른 대기용 게이트 밸브의 측단면도로서, 승강실린더가 상승된 상태의 도면이며, 도 9는 본 발명에 따른 대기용 게이트 밸브의 측단면도로서, 잠금실린더가 전진된 상태의 도면이고, 도 10은 본 발명에 따른 대기용 게이트 밸브의 축지지부와 회동바의 관계를 설명하기 위한 사시도이다.Figure 3 is a front perspective view of the standby gate valve according to the present invention, Figure 4 is a rear perspective view of the standby gate valve according to the present invention, Figure 5 is a front view of the standby gate valve according to the present invention, the lifting cylinder Figure 6 is a view of the lowered state, Figure 6 is a front view of the standby gate valve according to the present invention, the lifting cylinder is a view of the elevated state, Figure 7 is a side cross-sectional view of the waiting gate valve according to the present invention, the lifting cylinder Is a view of the lowered state, Figure 8 is a side cross-sectional view of the standby gate valve according to the present invention, the lifting cylinder is a view of the elevated state, Figure 9 is a side cross-sectional view of the standby gate valve according to the present invention, 10 is a view of a state in which the lock cylinder is advanced, and FIG. 10 is a perspective view for explaining a relationship between the shaft support portion and the rotation bar of the standby gate valve according to the present invention.

도 3 내지 도 10을 참고하면, 본 발명의 반도체 및 디스플레이 제조공정의 대기용 게이트밸브(100)는, 밸브몸체(10), 승하강실린더(20), 축지지부(30), 도어(40), 잠금수단(50), 좌,우 유격방지수단(60) 및 전,후 유격방지수단(70)을 포함한다.3 to 10, the gate valve 100 for the atmosphere of the semiconductor and display manufacturing process of the present invention, the valve body 10, the lifting cylinder 20, the shaft support 30, the door 40 , The locking means 50, the left and right clearance prevention means 60 and the front and rear clearance prevention means 70.

상기 밸브몸체(10)는, 진공측과 대기측의 경계부위의 로드락 챔버(200)의 챔버 측벽에 설치된다.The valve body 10 is provided on the chamber sidewall of the load lock chamber 200 at the boundary between the vacuum side and the atmosphere side.

또한, 상기 밸브몸체(10)는, 양측에 측면커버(11)가 설치되고, 상부에 측면커버(11)를 연결하는 보닛(12)이 설치되며, 하부에 후술하는 잠금실린더(52)를 설치하는 실린더 블럭(13)이 설치되는 것이다.In addition, the valve body 10, the side cover 11 is provided on both sides, the bonnet 12 for connecting the side cover 11 is installed on the upper side, the locking cylinder 52 to be described later is installed in the lower portion The cylinder block 13 is installed.

상기 승하강실린더(20)는, 상기 밸브몸체(10)의 하부에 설치되고, 로드(21)가 승하강된다.The lifting cylinder 20 is installed below the valve body 10, and the rod 21 is raised and lowered.

또한, 상기 승하강실린더(20)를 밸브몸체(10)의 하부에 설치함으로서, 패킹 등의 마모로 인한 에어 리크인 경우 이물질 비산을 방지할 수 있게 되는 것이다.In addition, by installing the lifting cylinder 20 in the lower portion of the valve body 10, it is possible to prevent the scattering of foreign matters in the case of air leak due to wear of the packing or the like.

상기 축지지부(30)는, 상기 승하강실린더(20)의 로드(21) 단부에 설치되고, 상부 양측에 지지봉(31)이 결합되어진다.The shaft support part 30 is installed at an end of the rod 21 of the lifting cylinder 20, and the support rods 31 are coupled to both upper sides thereof.

상기 도어(40)는, 상기 지지봉(31)의 단부에 결합되어 상기 승하강실린더(20)의 승하강에 따라 상기 로드락 챔버(200)의 측벽에 형성된 기판의 반입 및 반출되는 개방구(210)를 개폐시키는 것이다.The door 40 is coupled to the end of the support rod 31, opening and exit 210 of the substrate formed on the side wall of the load lock chamber 200 in accordance with the lifting and lowering of the lifting cylinder 20 ) Is to open and close.

상기 도어잠금수단(50)은, 승하강실린더(20)에 의해 상승된 도어(40)를 로드락 챔버(200)의 개방구(210)에 밀착되도록 하는 것으로, 스윙플레이트(51), 잠금실린더(52), 락킹브라켓트(53) 및 회동바(54)를 포함한다.The door locking means 50, the door 40 is raised by the lifting cylinder 20 to be in close contact with the opening 210 of the load lock chamber 200, swing plate 51, lock cylinder 52, the locking bracket 53 and the rotation bar (54).

상기 스윙플레이트(51)는, 상기 밸브몸체(10)의 상부에 양측이 힌지축(51a)으로 연결되고, 상기 지지봉(31)보다 직경이 크게 이루어진 관통공(51b)이 형성된 것이다.The swing plate 51 is connected to the hinge shaft 51a at both sides of the valve body 10, and has a through hole 51b having a larger diameter than the support rod 31.

즉, 상기 스윙플레이트(51)는, 힌지축(51a)을 기준으로 하여 회동되어 도어(40)를 개방구(210)에 밀폐시키는 것이고, 상기 스윙플레이트(51)의 형성된 관통공(51b)은 지지봉(31)보다 직경이 더 크게 이루어져 마찰이 이루어지지 않게 되어 종래와 같이 이물질이 발생되지 않는 것이다.That is, the swing plate 51 is rotated based on the hinge shaft 51a to seal the door 40 to the opening 210, and the through hole 51b formed in the swing plate 51 is The diameter is larger than the support rod 31, so that friction is not made so that foreign matter does not occur as in the prior art.

상기 잠금실린더(52)는, 상기 승하강실린더(20)의 상부 일측에 설치되고, 전,후진되는 로드(52a)가 형성된다.The lock cylinder 52 is installed on one side of the upper and lower cylinders of the lifting cylinder 20, the rod 52a which is moved forward and backward is formed.

즉, 상기 밸브몸체(10)의 실린더 블럭(13)에 잠금실린더(52)가 설치되는 것이다.That is, the lock cylinder 52 is installed in the cylinder block 13 of the valve body 10.

상기 락킹브라켓트(53)는, 상기 잠금실린더(52)의 로드(52a)에 연결되어 상기 로드(52a)의 전,후진에 의해 수평이동하는 것이다.The locking bracket 53 is connected to the rod 52a of the lock cylinder 52 to move horizontally by the forward and backward of the rod 52a.

상기 회동바(54)는, 상기 스윙플레이트(51)의 힌지축(51a)에 일측이 고정되고, 타측은 상기 락킹브라켓트(53)에 의해 동작되는 것이다.
The pivoting bar 54 is fixed to one side of the hinge shaft 51a of the swing plate 51 and the other side is operated by the locking bracket 53.

즉, 상기 잠금실린더(52)가 전진됨에 따라 이에 연결된 락킹브라켓트(53)가 전진되어 회동바(54)를 가압하게 되면 회동바(54)의 상부의 결합된 스윙플레이트(51)가 힌지축(51a)을 중심으로 회전되어 도어(40)를 개방구(210)에 밀폐시키게 되는 것이다.
That is, when the locking cylinder 52 is advanced, the locking bracket 53 connected thereto is advanced to press the pivot bar 54 so that the swing plate 51 coupled to the upper portion of the pivot bar 54 is hinged. It is rotated about 51a) to seal the door 40 to the opening 210.

상기 좌,우 유격방지수단(60)은, 상기 스윙플레이트(51)와 락킹브라켓트(53)의 사이에 설치되어지고, 상기 승하강실린더(20)의 로드(21)가 연결된 축지지부(30)의 승하강시 좌,우 유격을 방지하도록 것으로, 한쌍의 가이드봉(61)으로 이루어져 상기 승하강실린더(20)의 좌,우측에 각각 설치되어진 것이다.The left and right clearance preventing means 60 is installed between the swing plate 51 and the locking bracket 53, and the shaft support portion 30 to which the rod 21 of the elevating cylinder 20 is connected. It is to prevent the left and right clearance during the ascent, descent made of a pair of guide rods 61 is installed on the left and right sides of the elevating cylinder 20, respectively.

상기 전,후 유격방지수단(70)은, 상기 회동바(54) 상에 결합되어 상기 승하강실린더(20)의 승하강시 전,후 유격을 방지하도록 하는 것으로, 상기 회동바(54)의 길이방향에 형성된 가이드홈(54a)에 구름운동하도록 하는 캠플로워(71)이며, 상기 캠플로워(71)는 상기 축지지부(30)의 하측에 연장되어진 연장부(32)에 설치되어진 것이다.
The front and rear clearance preventing means 70 is coupled to the pivoting bar 54 to prevent clearance before and after the lifting of the lifting cylinder 20, and the length of the pivoting bar 54. Cam follower 71 for rolling in the guide groove (54a) formed in the direction, the cam follower 71 is provided in the extension portion 32 which is extended to the lower side of the shaft support (30).

상기와 같이 구성된 반도체 및 디스플레이 제조공정의 대기용 게이트밸브(100)는, 반도체 및 디스플레이를 제조하기 위한 진공장비의 로드락 챔버(200)의 챔버 측벽에 설치되고, 상기 챔버 측벽에 형성된 기판의 반입 및 반출되는 개방구(210)를 승하강실린더(20)의 승하강으로 도어(40)를 이용하여 상기 개방구(210)를 개방 또는 폐쇄하는 것이다.The atmospheric gate valve 100 of the semiconductor and display manufacturing process configured as described above is installed on the side wall of the chamber of the load lock chamber 200 of the vacuum equipment for manufacturing the semiconductor and display, and the loading of the substrate formed on the side wall of the chamber And opening and closing the opening 210 to the opening and closing the opening 210 using the door 40 to the lifting and lowering of the lifting cylinder 20.

이를 좀더 살펴보면, 밸브몸체(10)의 하부에 설치되어진 승하강실린더(20)의 로드(21)가 상승하게 되면 로드(21) 단부에 설치되어진 축지지부(30) 및 지지봉(31)이 도어(40)를 상승시키게 되고, 상기 도어(40)는 개방구(210)를 폐쇄하게 된다.Looking in more detail, when the rod 21 of the lifting cylinder 20 installed in the lower portion of the valve body 10 is raised, the shaft support 30 and the support rod 31 installed at the end of the rod 21 is a door ( 40 is raised, and the door 40 closes the opening 210.

이때 스윙플레이트(51)와 락킹브라켓트(53)의 사이에 설치되어진 좌,우 유격방지수단(60)인 한쌍의 가이드봉(61)에 의해 도어(40)의 좌,우 방향의 유격을 방지하게 되고, 축지지부(30)의 하측에 연장된 연장부(32)에 설치된 캠플로워(71)가 회동바(54)의 길이방향에 형성된 가이드홈(54a)에서 구름운동하면서 전,후 방향의 유격을 방지하게 된다.At this time, by the pair of guide rods 61, which are left and right clearance preventing means 60 installed between the swing plate 51 and the locking bracket 53, to prevent the clearance in the left and right directions of the door 40. And the cam follower 71 provided in the extension part 32 extending below the shaft support part 30 moves forward and backward while rolling in the guide grooves 54a formed in the longitudinal direction of the pivoting bar 54. Will be prevented.

여기서 상기 스윙플레이트(51)의 형성된 관통공(51b)은 지지봉(31)의 직경보다 크게 이루어져 마찰이 발생되지 않아 이물질 방지를 방지할 수 있으며, 승하강실린더(20)를 밸브몸체(10)의 하부에 설치하여 패킹 등의 마모로 인한 에어 리크인 경우 이물질 비산을 방지할 수 있게 되는 것이다.
Here, the through hole 51b formed of the swing plate 51 is larger than the diameter of the support bar 31 so that friction does not occur, thereby preventing foreign matters, and the lifting cylinder 20 of the valve body 10 If installed in the lower part of the air leak due to wear of the packing, etc. will be able to prevent the scattering of foreign matter.

또한, 개방구(210)가 폐쇄된 상태에서 잠금실린더(52)가 전진됨에 따라 락킹브라켓트(53)가 회동바(54)를 가압하여 회동바(54)가 연결되어진 스윙플레이트(51)를 힌지축(51a)을 중심으로 회동시키게 되면 도어(40)가 개방구(210)에 밀폐되는 것이다.
In addition, as the locking cylinder 52 is advanced in the state in which the opening 210 is closed, the locking bracket 53 presses the rotation bar 54 to hinge the swing plate 51 to which the rotation bar 54 is connected. When rotated about the axis 51a, the door 40 is sealed to the opening 210.

한편, 도어(40)를 개방구(210)에서 개방시키기 위해서는 잠금실린더(52)가 후진되고, 이에 따라 스윙플레이트(51)가 탄성부재 등에 의해 원상복귀되면서 회동바(54)도 원위치되어지고, 승하강실린더(20)가 하강하게 된다.
On the other hand, in order to open the door 40 from the opening 210, the lock cylinder 52 is retracted, and thus the swing bar 54 is also returned to its original position while the swing plate 51 is returned to its original position by an elastic member or the like, The lifting cylinder 20 is lowered.

본 발명은 첨부된 도면에 도시된 일 실시예를 참고로 설명한 것이나, 당해 기술 분야의 통상의 지식을 가진 자들에게는 다양한 변형 및 다른 실시예가 가능하다는 점이 이해될 것이다.Although the present invention has been described with reference to one embodiment shown in the accompanying drawings, it will be understood that various modifications and other embodiments are possible to those skilled in the art.

100: 반도체 및 디스플레이 제조공정의 대기용 게이트밸브
10: 밸브몸체 11: 측면커버
12: 보닛 13: 실린더 블럭
20: 승하강실린더 21: 로드
30: 축지지부 31: 지지봉
32: 연장부 40: 도어
50: 도어잠금수단 51: 스윙플레이트
51a: 힌지축 51b: 관통공
52: 잠금실린더 52a: 로드
53: 락킹브라켓트 54: 회동바
54a: 가이드홈 60: 좌,우 유격방지수단
61: 가이드봉 70: 전,후 유격방지수단
71: 캠플로워 200: 로드락 챔버
210: 개방구100: atmospheric gate valve for semiconductor and display manufacturing process
10: valve body 11: side cover
12: bonnet 13: cylinder block
20: lifting cylinder 21: rod
30: shaft support 31: support rod
32: extension part 40: door
50: door locking means 51: swing plate
51a: hinge shaft 51b: through hole
52: lock cylinder 52a: rod
53: locking bracket 54: rotation bar
54a: guide groove 60: left and right play prevention means
61: guide rod 70: before and after play prevention means
71: Cam Follower 200: Load Lock Chamber
210: opening

Claims (3)

진공측과 대기측의 경계부위의 로드락 챔버(200)의 챔버 측벽에 설치된 밸브몸체(10)와,
상기 밸브몸체(10)의 하부에 설치되고, 로드(21)가 승하강되는 승하강실린더(20)와;
상기 승하강실린더(20)의 로드(21) 단부에 설치되고, 상부 양측에 지지봉(31)이 결합되어진 축지지부(30)와;
상기 지지봉(31)의 단부에 결합되어 상기 승하강실린더(20)의 승하강에 따라 상기 로드락 챔버(200)의 측벽에 형성된 기판의 반입 및 반출되는 개방구(210)를 개폐시키는 도어(40)와;
상기 밸브몸체(10)의 상부에 양측이 힌지축(51a)으로 연결되고, 상기 지지봉(31)보다 직경이 크게 이루어진 관통공(51b)이 형성된 스윙플레이트(51), 상기 승하강실린더(20)의 상부 일측에 설치되고, 전,후진되는 로드(52a)가 형성된 잠금실린더(52), 상기 잠금실린더(52)의 로드(52a)에 연결되어 상기 로드(52a)의 전,후진에 의해 수평이동하는 락킹브라켓트(53) 및 상기 스윙플레이트(51)의 힌지축(51a)에 일측이 고정되고, 타측은 상기 락킹브라켓트(53)에 의해 동작되는 회동바(54)를 포함하는 도어잠금수단(50)과;
상기 스윙플레이트(51)와 락킹브라켓트(53)의 사이에 설치되어지고, 상기 승하강실린더(20)의 로드(21)가 연결된 축지지부(30)의 승하강시 좌,우 유격을 방지하도록 하는 좌,우 유격방지수단(60)과;
상기 회동바(54) 상에 결합되어 상기 승하강실린더(20)의 승하강시 전,후 유격을 방지하도록 하는 전,후 유격방지수단(70); 을 포함하는 것을 특징으로 하는 반도체 및 디스플레이 제조공정의 대기용 게이트밸브.
A valve body 10 provided on the chamber sidewall of the load lock chamber 200 at the boundary between the vacuum side and the atmosphere side,
A lifting cylinder 20 installed at a lower portion of the valve body 10 and having a rod 21 lowered;
An axial support part 30 installed at an end of the rod 21 of the elevating cylinder 20 and having support bars 31 coupled to both upper sides thereof;
The door 40 is coupled to the end of the support rod 31 to open and close the opening and closing opening 210 of the substrate formed on the side wall of the load lock chamber 200 in accordance with the lifting and lowering of the lifting cylinder 20 )Wow;
Both sides of the valve body 10 is connected to the hinge shaft (51a), the swing plate 51 formed with a through hole (51b) having a larger diameter than the support rod 31, the elevating cylinder (20) It is installed on the upper side of the lock cylinder 52, the rod 52a is formed to move forward, backward, connected to the rod 52a of the lock cylinder 52 is moved horizontally by the forward and backward of the rod (52a) One side is fixed to the hinge bracket (51a) of the locking bracket 53 and the swing plate 51, the other side is a door locking means (50) comprising a rotation bar 54 is operated by the locking bracket (53) )and;
Left and right installed between the swing plate 51 and the locking bracket 53, the left and right to prevent the left and right play when the lifting and lowering of the shaft support portion 30 to which the rod 21 of the elevating cylinder 20 is connected , Right clearance means 60 and;
Before and after play prevention means 70 is coupled to the rotation bar 54 to prevent the play before and after the lifting of the lifting cylinder (20); Gate valve for the atmosphere of the semiconductor and display manufacturing process comprising a.
제1항에 있어서,
상기 좌,우 유격방지수단(60)은,
한쌍의 가이드봉(61)으로 이루어져 상기 승하강 실린더(20)의 좌,우측에 각각 설치되어진 것을 특징으로 하는 반도체 및 디스플레이 제조공정의 대기용 게이트밸브.
The method of claim 1,
The left and right play prevention means 60,
Gate valve for the atmosphere of the semiconductor and display manufacturing process, characterized in that the pair of guide rods 61 are installed on the left and right sides of the lifting cylinder 20, respectively.
제1항에 있어서,
상기 전,후 유격방지수단(70)은,
상기 회동바(54)의 길이방향에 형성된 가이드홈(54a)에 구름운동하도록 하는 캠플로워(71)이며, 상기 캠플로워(71)는 상기 축지지부(30)의 하측에 연장되어진 연장부(32)에 설치되어진 것을 특징으로 하는 반도체 및 디스플레이 제조공정의 대기용 게이트밸브.
The method of claim 1,
The before and after play prevention means 70,
Cam follower 71 for rolling in the guide groove (54a) formed in the longitudinal direction of the rotation bar 54, the cam follower 71 is an extension portion 32 extended to the lower side of the shaft support portion (30) The gate valve for the atmosphere of the semiconductor and display manufacturing process characterized in that installed in the).
KR1020110130349A 2011-12-07 2011-12-07 Gate valve for atmosphere of fabricating semiconductor and a display KR101269827B1 (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102000443B1 (en) 2019-03-05 2019-10-01 안현구 Gate valve
CN117847248A (en) * 2024-03-07 2024-04-09 沈阳富创精密设备股份有限公司 Rectangular valve with adjustable valve plate

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR200380587Y1 (en) 2004-12-28 2005-03-31 아이시스(주) Gate valve

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR200380587Y1 (en) 2004-12-28 2005-03-31 아이시스(주) Gate valve

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102000443B1 (en) 2019-03-05 2019-10-01 안현구 Gate valve
CN117847248A (en) * 2024-03-07 2024-04-09 沈阳富创精密设备股份有限公司 Rectangular valve with adjustable valve plate

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