KR101216604B1

KR101216604B1 - Gate Valve

Info

Publication number: KR101216604B1
Application number: KR1020100047549A
Authority: KR
Inventors: 김경수; 설상호; 박정훈
Original assignee: 주식회사 에이티에스엔지니어링
Priority date: 2010-05-20
Filing date: 2010-05-20
Publication date: 2012-12-31
Also published as: KR20110127987A

Abstract

The present invention relates to a gate valve having a rod seal that seals the grease from moving inside the housing while maintaining the airtight inside the housing when the cylinder rod is driven up and down. A housing fixed to the sidewall of the chamber so as to correspond to the gate, the housing having a sealing hole opened in the gate direction and a lower hole opened in the lower direction; A module block installed in the housing, the module plate sealing the gate by moving the sealing plate forward and backward in the gate direction; An elevating cylinder installed below the housing and coupled with the module block to elevate the module block; A lower plate coupled to a lower portion of the housing to close the lower hole and having a through hole through which the cylinder rod of the lifting cylinder passes; And a rod sealing part installed in the through hole of the lower plate to seal the cylinder rod in a liftable manner.

Description

Gate valve {GATE VALVE}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gate valve, and more particularly, to a gate valve having a rod seal that seals the grease from moving inside the housing while maintaining the airtight inside the housing when the cylinder rod is driven up and down.

In general, most of the processes for manufacturing LCD substrates or semiconductor devices proceed in a vacuum. Therefore, most of the equipment for performing a process for manufacturing an LCD substrate or a semiconductor device is a vacuum equipment, a vacuum pump is used in such a vacuum equipment to maintain a high vacuum inside the vacuum equipment. And a gate valve is provided to isolate the vacuum equipment from the outside of the vacuum equipment or other vacuum equipment.

The gate valve includes a housing installed between the vacuum equipment and the external or other vacuum equipment, a sealing plate for opening and closing the gate formed in the vacuum equipment while moving up and down in the housing, and the sealing plate. It includes a forward and backward drive unit for advancing, a lift drive unit for raising and lowering the sealing plate and the forward and backward drive unit in the vertical direction.

Among these, the lifting driving unit is generally composed of a cylinder, and has a structure coupled to a lower portion of the sealing plate through the lower surface of the housing. Therefore, in order to maintain the airtightness inside the housing, a complicated structure is formed on the lifting drive unit and the lower surface of the housing. In addition, when the forward and backward driving unit advances the sealing plate using air, a separate air shaft should be further provided below the sealing plate.

Thus, in order to maintain the airtightness inside the housing despite the vertical drive of the lifting drive part, a sealing member for maintaining the sealing during driving is provided between the cylinder rod of the lifting drive part and the lower plate through hole of the housing. However, since the conventional sealing member must perform the sealing function with the lower plate in addition to the sealing with the cylinder rod, the sealing problem often occurs during the driving process, and the grease on the cylinder rod is transferred to the inside of the housing. There was also a problem occurring.

The technical problem to be solved by the present invention is to provide a gate valve having a rod seal for sealing the grease does not move into the housing while maintaining the airtight inside the housing during the vertical drive of the cylinder rod.

The gate valve according to the present invention for achieving the above technical problem is fixed to the chamber side wall to correspond to the gate formed on the chamber side wall, the sealing hole opened in the gate direction and the lower hole opened in the lower direction A housing having a; A module block installed in the housing, the module plate sealing the gate by moving the sealing plate forward and backward in the gate direction; An elevating cylinder installed below the housing and coupled with the module block to elevate the module block; A lower plate coupled to a lower portion of the housing to close the lower hole and having a through hole through which the cylinder rod of the lifting cylinder passes; And a rod sealing part installed in the through hole of the lower plate to seal the cylinder rod in a liftable manner.

In the present invention, the rod sealing portion, the outer sealing member is inserted into the through hole of the lower plate is installed, the rod through hole through which the cylinder rod passes in the vertical direction is formed; An inner sealing member inserted into the outer sealing member to form a part of the rod through hole and having inner sealing member seating grooves and outer sealing member seating grooves formed on inner and outer surfaces, respectively; An inner sealing member installed in the inner sealing member seating groove to be in contact with and seal the cylinder rod passing through the rod through hole; And an outer sealing member installed in the outer sealing member seating groove to seal a coupling surface of the outer sealing member and the inner sealing member.

Here, the inner sealing member is preferably provided with two or more sealing members spaced apart from each other in parallel to each other, and in particular, consisting of two or more sealing members having different diameters is preferable because it can prevent the grease from moving inside the housing.

In the present invention, the inner sealing member seating groove is preferably formed on the upper side of the inner sealing member.

In addition, the inner peripheral surface of the inner sealing member, the grease groove is further formed in the lower side of the inner sealing member seating groove, it is preferable to contain a sufficient amount of grease.

On the other hand, in the gate valve of the present invention, the Teflon coating film is formed on the contact surface of the outer sealing member and the lower plate, the third sealing member is further provided to prevent the metal contact between the outer sealing member and the lower plate to prevent the sealing member It is preferable to be able to reliably seal the space between and the lower plate.

According to the present invention, since the sealing function with the cylinder rod is made by the inner sealing member and the sealing function with the outer sealing member is made by the outer sealing member, respectively, it is possible to reliably seal work despite the vertical movement of the cylinder rod. There is. In addition, the inner sealing member has a different diameter between the upper sealing member and the lower sealing member to reliably prevent the movement of the grease to the housing, and a grease groove is formed to always contain a sufficient amount of grease so that the cylinder rod can be smoothly There is also an advantage to ensure the vertical drive.

1 is an exploded perspective view showing the structure of a gate valve according to an embodiment of the present invention.
2 is a cross-sectional view showing the structure of a rod seal according to an embodiment of the present invention.

Hereinafter, a specific embodiment of the present invention will be described in detail with reference to the accompanying drawings.

The gate valve according to the present embodiment includes a housing 10, a module block 20, a lifting cylinder 60, a lower plate 30, a cylinder support 70, and a rod seal 90.

First, the housing 10 is a component installed interposed in a chamber side wall or a space between the chamber and the chamber in which the gate valve according to the present embodiment is installed, and may have various shapes, for example, as shown in FIG. 1. It may have a hexahedral shape in which a predetermined space is formed therein. The housing 10 is fixed to the side wall of the chamber so as to correspond to the gate formed on the side wall of the chamber to enter and exit the substrate, and as shown in FIGS. 1 and 2, the sealing hole 12 opened in the gate direction. And a lower hole (not shown) opened in the downward direction. In some cases, as shown in FIG. 1, an upper hole 14 is formed at an upper portion for ease of maintenance, and an upper plate 80 may be further provided to seal the upper hole 14.

The sealing hole 12 is formed on at least one surface of the front or rear of the housing 10. When the gate valve is installed between the chamber and the chamber 10, the sealing hole 12 is formed on both sides of the housing 10, the module block 20 also has a sealing plate 22 on both sides. The sealing hole 12 is sealed by the sealing plate 22.

The lower hole provides a passage through which the module block 20 passes when the module block 20 is assembled, and is also a space through which the air shaft 28 passes after the module block 20 is assembled. This lower hole is sealed by a lower plate 30 which will be described later.

In the gate valve according to the present embodiment, due to the structure including a lower hole formed on the lower surface of the housing 10, and the lower plate 30 for sealing by coupling the lower hole from the lower side inside the housing 10 If a failure occurs in the module block 20 to be installed in, there is an advantage that can be separated only the module block 20 to the lower housing 10 without separating the housing 10 itself from the chamber.

Removing the entire gate valve including the housing 10 from the chamber while performing the maintenance of the gate valve is a very difficult task in itself, and moreover, due to interference problems with other auxiliary equipment installed in the chamber. This is a difficult task. However, the gate valve according to the present embodiment is very advantageous because the maintenance work can be performed without removing the housing 10 itself from the chamber in any case.

Next, the module block 20 is installed in the housing 10, and the sealing plate 22 is a component for advancing toward the sealing hole 12 to seal the sealing hole. To this end, the module block 20 according to the present embodiment includes a middle plate 24, a sealing plate 22, and a moving unit 26, as shown in FIGS. 1 and 3. First, the middle plate 24 is composed of a rectangular plate and forms the center of the module block 20. The air shaft 28 is coupled to the lower portion of the middle plate 24. In addition, a flow path (not shown) for supplying air supplied from the air shaft 28 to the moving means 26 is formed inside the central plate 24. The middle plate 24 remains stationary at its position without moving even when the sealing plate 22 moves forward to intercept the gate.

Next, the sealing plate 22 is provided in a state coupled to the middle plate 24, and is a component that controls the gate while moving forward and backward in the gate direction. An o-ring (not shown) is further provided on the front surface of the sealing plate 22 to maintain airtightness when sealing the gate.

The sealing plate 22 is coupled to the middle plate 24 by the moving means 26. The moving means 26 is a component that moves the sealing plate 22 back and forth from the middle plate 24 in the gate direction. In this embodiment, the moving means 26 has a structure in which the sealing plate 22 is moved back and forth by the high pressure air supplied through the air shaft 28. Specifically, in the present embodiment, a plurality of moving means 26 are arranged side by side to stably support a plurality of points of the sealing plate 22.

Next, the lifting cylinder 60 is a component that supports the module block 20 in combination with the module block 20 at the bottom of the housing 10. In this embodiment, it is preferable that two lifting cylinders 60 are installed side by side, so that the module block 20 can be stably supported. To this end, an upper end of the elevating cylinder 60 is coupled to a lower surface of the middle plate 24 of the module block 20, and a lower end of the elevating cylinder 60 is coupled to a fixed plate provided separately.

Next, the lower plate 30 has a seal installation hole 32 in which the air shaft 28 and the rod seal 90 are installed, and is coupled to the lower portion of the housing 10 to seal the lower hole. Component. That is, the lower plate 30 may also be viewed as a detailed component of a part of the housing 10, and seals the lower hole, which is an open portion of the housing 10 to the lower side, and the lower plate ( 30 is coupled to the housing 10 in a removable structure.

In addition, the coupling surface of the lower plate 30 and the housing 10 may be further provided with an O-ring to maintain the airtight inside the housing (10). As described above, in the gate valve according to the present exemplary embodiment, since the lower portion of the housing 10 is opened, the gate valve is installed on the sidewall of the chamber, and thus the housing 10 is not separated for maintenance during use. The separation of the lower plate 30 has the advantage of maintaining the module block 20 inside the housing 10.

Next, the cylinder support part 70 extends from the sealing part installation hole 32 to the lower surface of the lower plate 30, and is a component that supports the lifting cylinder 60 to be movable in a horizontal direction. In this embodiment, as shown in FIG. 3, the cylinder support part 60 may include a cylinder coupling part 72, a lower plate coupling part 74, and a support bush.

First, the cylinder coupling portion 72 is coupled to the shaft 62 of the lifting cylinder and is a component having a through hole formed in the horizontal direction. The through hole penetrates the cylinder coupling portion 72 in the width direction and is formed in parallel to both sides of the edge portion of the cylinder coupling portion 72.

Next, the lower plate coupling portion 74 is coupled to the lower surface of the lower plate 30 so as to be spaced apart from the cylinder coupling portion 72 by a predetermined interval. In this case, the lower plate coupling portion 74 is provided on both sides of the cylinder coupling portion 72, respectively, and is a component having an insertion groove at a position corresponding to the through hole.

The lower plate coupling portion 74 and the cylinder coupling portion 72 are coupled to each other by a support bush. The central portion of the support bush is inserted through the through hole, and both ends are inserted into the insertion grooves. do. The support bush supports the lifting cylinder 60 to be movable in the horizontal direction. That is, the cylinder coupling portion 72 to which the lifting cylinder 60 is coupled is supported so as to be relatively horizontally movable with respect to the lower plate coupling portion 74 coupled to the lower plate 30.

Next, the rod seal 90 is installed in the seal installation hole 32 of the lower plate, and is a component that seals the cylinder rod in a liftable manner. To this end, in the present embodiment, as shown in FIG. 2, the rod sealing part 90 is specifically illustrated in FIG. 2, the outer sealing member 92, the inner sealing member 94, the inner sealing member 93, and the outer sealing member 95. ), Including

First, the outer sealing member 92 is inserted into and installed in the sealing part mounting hole 32 of the lower plate 30, and a rod through hole 99 through which the cylinder rod 62 passes in the vertical direction is formed. Component. As shown in FIG. 2, the outer sealing member 92 has a rod passage hole 99 formed in a center portion thereof in a vertical direction, and is coupled to a portion fixed to the lower plate 30 or the lower plate on the outside. Part is formed.

In addition, an insertion hole into which the inner sealing member 94 can be inserted is formed in the outer sealing member 92, and as shown in FIG. 2, an inner sealing member 94 is provided. The inner sealing member 94 is inserted into the insertion hole of the outer sealing member 92 and has an inner surface coinciding with the inner surface of the rod through hole 99, and inner sealing member seating grooves 91 on the inner and outer surfaces, respectively. ) And the outer sealing member seating groove is formed.

Here, as shown in FIG. 2, the inner sealing member seating recess 91 is formed in the upper side of the inner sealing member 94 so that the inner sealing member 93 itself is installed in a double cylinder rod. It is preferable because the sealing effect with (62) can be ensured.

At this time, the lower sealing member 93b of the inner sealing member 93 provided in double has a larger diameter than the upper sealing member 93a, and enlarges the contact area with the cylinder rod 62 to provide a sealing effect and grease. There is an advantage to maximize the removal effect.

In addition, it is preferable that a grease groove 96 is further formed below the inner sealing member seating groove 91 among the inner surfaces of the inner sealing member 94. The grease groove 96 is formed in the form of a spiral on the inner surface of the inner sealing member 94, and forms a clearance between the cylinder rod 62 and the inner sealing member 94. It has enough to play a role. This sufficiently maintained grease enables smooth lifting and lowering when the cylinder rod 62 is driven up and down, and prevents wear of the inner sealing member 94.

Next, as shown in FIG. 2, the outer sealing member 92 is installed in the outer sealing member seating groove to seal a coupling surface of the outer sealing member 92 and the inner sealing member 94.

Finally, as shown in FIG. 2, a Teflon coating film 97 is formed on the contact surface between the outer sealing member 92 and the lower plate 30, and a third sealing member 98 is further provided. Do. The Teflon coating layer 97 serves to prevent the metal contact from occurring between the outer sealing member 92 and the lower plate 30 while horizontally moving while being coupled to the cylinder rod 62. The third sealing member 98 serves to seal a space between the outer sealing member 92 and the lower plate 30.

10 housing 20 module block
60: lifting cylinder 30: lower plate
70 cylinder support 90 rod seal

Claims

A housing fixed to the sidewall of the chamber so as to correspond to a gate formed on the sidewall of the chamber, the housing having a sealing hole opened in the gate direction and a lower hole opened in the lower direction;
A module block installed in the housing, the module plate sealing the gate by moving the sealing plate forward and backward in the gate direction;
An elevating cylinder installed below the housing and coupled with the module block to elevate the module block;
A lower plate coupled to a lower portion of the housing to close the lower hole and having a through hole through which the cylinder rod of the lifting cylinder passes;
And a rod sealing part installed in the through hole of the lower plate and sealingly lifting the cylinder rod.
The rod seal,
An outer sealing member inserted into the through hole of the lower plate and having a rod through hole through which the cylinder rod passes in an up and down direction;
An inner sealing member inserted into the outer sealing member to form a part of the rod through hole and having inner sealing member seating grooves and outer sealing member seating grooves formed on inner and outer surfaces, respectively;
An inner sealing member installed in the inner sealing member seating groove and always in contact with and sealing the cylinder rod passing through the rod through hole;
And an outer sealing member installed in the outer sealing member seating groove to seal a coupling surface between the outer sealing member and the inner sealing member.

delete

The method of claim 1, wherein the inner sealing member,
Gate valve, characterized in that two or more are spaced apart from each other in parallel.

The method of claim 3, wherein the inner sealing member,
A gate valve comprising two or more sealing members having different diameters.

According to claim 3, The inner sealing member seating groove,
And a gate valve formed above the inner sealing member.

The inner peripheral surface of the inner sealing member,
A gate valve, characterized in that a grease groove is further formed below the inner sealing member seating groove.