KR101170963B1 - 투과 조명용 테이블 - Google Patents

투과 조명용 테이블 Download PDF

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Publication number
KR101170963B1
KR101170963B1 KR20100029713A KR20100029713A KR101170963B1 KR 101170963 B1 KR101170963 B1 KR 101170963B1 KR 20100029713 A KR20100029713 A KR 20100029713A KR 20100029713 A KR20100029713 A KR 20100029713A KR 101170963 B1 KR101170963 B1 KR 101170963B1
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KR
South Korea
Prior art keywords
substrate
infrared light
top table
infrared
reflecting
Prior art date
Application number
KR20100029713A
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English (en)
Korean (ko)
Other versions
KR20100109876A (ko
Inventor
마사노부 소야마
Original Assignee
미쓰보시 다이야몬도 고교 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 미쓰보시 다이야몬도 고교 가부시키가이샤 filed Critical 미쓰보시 다이야몬도 고교 가부시키가이샤
Publication of KR20100109876A publication Critical patent/KR20100109876A/ko
Application granted granted Critical
Publication of KR101170963B1 publication Critical patent/KR101170963B1/ko

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  • Dicing (AREA)
  • Engineering & Computer Science (AREA)
  • Laser Beam Processing (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
KR20100029713A 2009-04-01 2010-04-01 투과 조명용 테이블 KR101170963B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2009-089462 2009-04-01
JP2009089462A JP2010245123A (ja) 2009-04-01 2009-04-01 透過照明付きテーブル

Publications (2)

Publication Number Publication Date
KR20100109876A KR20100109876A (ko) 2010-10-11
KR101170963B1 true KR101170963B1 (ko) 2012-08-03

Family

ID=42945522

Family Applications (1)

Application Number Title Priority Date Filing Date
KR20100029713A KR101170963B1 (ko) 2009-04-01 2010-04-01 투과 조명용 테이블

Country Status (4)

Country Link
JP (1) JP2010245123A (zh)
KR (1) KR101170963B1 (zh)
CN (1) CN101859724B (zh)
TW (1) TWI419254B (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101720299B1 (ko) * 2010-10-12 2017-04-10 엘지이노텍 주식회사 자외선 엘이디가 구비된 에어컨
JP7163577B2 (ja) * 2017-12-28 2022-11-01 富士電機株式会社 半導体装置の製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008038752A1 (fr) * 2006-09-29 2008-04-03 Nikon Corporation système à unité MOBILE, DISPOSITIF DE FORMATION DE MOTIF, DISPOSITIF D'EXPOSITION, PROCÉDÉ D'EXPOSITION, ET PROCÉDÉ DE FABRICATION DE DISPOSITIF

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3201233B2 (ja) * 1995-10-20 2001-08-20 ウシオ電機株式会社 裏面にアライメント・マークが設けられたワークの投影露光方法
JP4826146B2 (ja) * 2004-06-09 2011-11-30 株式会社ニコン 露光装置、デバイス製造方法
CN100490065C (zh) * 2004-07-16 2009-05-20 尼康股份有限公司 光学构件的支撑方法及支撑构造、光学装置、曝光装置、以及元件制造方法
US7251018B2 (en) * 2004-11-29 2007-07-31 Asml Netherlands B.V. Substrate table, method of measuring a position of a substrate and a lithographic apparatus
US8411271B2 (en) * 2005-12-28 2013-04-02 Nikon Corporation Pattern forming method, pattern forming apparatus, and device manufacturing method
JP2007322706A (ja) * 2006-05-31 2007-12-13 Nsk Ltd 露光装置及び露光方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008038752A1 (fr) * 2006-09-29 2008-04-03 Nikon Corporation système à unité MOBILE, DISPOSITIF DE FORMATION DE MOTIF, DISPOSITIF D'EXPOSITION, PROCÉDÉ D'EXPOSITION, ET PROCÉDÉ DE FABRICATION DE DISPOSITIF

Also Published As

Publication number Publication date
TW201106441A (en) 2011-02-16
JP2010245123A (ja) 2010-10-28
CN101859724A (zh) 2010-10-13
TWI419254B (zh) 2013-12-11
KR20100109876A (ko) 2010-10-11
CN101859724B (zh) 2012-10-10

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