KR101170963B1 - 투과 조명용 테이블 - Google Patents
투과 조명용 테이블 Download PDFInfo
- Publication number
- KR101170963B1 KR101170963B1 KR20100029713A KR20100029713A KR101170963B1 KR 101170963 B1 KR101170963 B1 KR 101170963B1 KR 20100029713 A KR20100029713 A KR 20100029713A KR 20100029713 A KR20100029713 A KR 20100029713A KR 101170963 B1 KR101170963 B1 KR 101170963B1
- Authority
- KR
- South Korea
- Prior art keywords
- substrate
- infrared light
- top table
- infrared
- reflecting
- Prior art date
Links
Images
Landscapes
- Dicing (AREA)
- Engineering & Computer Science (AREA)
- Laser Beam Processing (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPJP-P-2009-089462 | 2009-04-01 | ||
JP2009089462A JP2010245123A (ja) | 2009-04-01 | 2009-04-01 | 透過照明付きテーブル |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20100109876A KR20100109876A (ko) | 2010-10-11 |
KR101170963B1 true KR101170963B1 (ko) | 2012-08-03 |
Family
ID=42945522
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR20100029713A KR101170963B1 (ko) | 2009-04-01 | 2010-04-01 | 투과 조명용 테이블 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP2010245123A (zh) |
KR (1) | KR101170963B1 (zh) |
CN (1) | CN101859724B (zh) |
TW (1) | TWI419254B (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101720299B1 (ko) * | 2010-10-12 | 2017-04-10 | 엘지이노텍 주식회사 | 자외선 엘이디가 구비된 에어컨 |
JP7163577B2 (ja) * | 2017-12-28 | 2022-11-01 | 富士電機株式会社 | 半導体装置の製造方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2008038752A1 (fr) * | 2006-09-29 | 2008-04-03 | Nikon Corporation | système à unité MOBILE, DISPOSITIF DE FORMATION DE MOTIF, DISPOSITIF D'EXPOSITION, PROCÉDÉ D'EXPOSITION, ET PROCÉDÉ DE FABRICATION DE DISPOSITIF |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3201233B2 (ja) * | 1995-10-20 | 2001-08-20 | ウシオ電機株式会社 | 裏面にアライメント・マークが設けられたワークの投影露光方法 |
JP4826146B2 (ja) * | 2004-06-09 | 2011-11-30 | 株式会社ニコン | 露光装置、デバイス製造方法 |
CN100490065C (zh) * | 2004-07-16 | 2009-05-20 | 尼康股份有限公司 | 光学构件的支撑方法及支撑构造、光学装置、曝光装置、以及元件制造方法 |
US7251018B2 (en) * | 2004-11-29 | 2007-07-31 | Asml Netherlands B.V. | Substrate table, method of measuring a position of a substrate and a lithographic apparatus |
US8411271B2 (en) * | 2005-12-28 | 2013-04-02 | Nikon Corporation | Pattern forming method, pattern forming apparatus, and device manufacturing method |
JP2007322706A (ja) * | 2006-05-31 | 2007-12-13 | Nsk Ltd | 露光装置及び露光方法 |
-
2009
- 2009-04-01 JP JP2009089462A patent/JP2010245123A/ja active Pending
-
2010
- 2010-03-18 TW TW99108060A patent/TWI419254B/zh not_active IP Right Cessation
- 2010-03-26 CN CN2010101405295A patent/CN101859724B/zh not_active Expired - Fee Related
- 2010-04-01 KR KR20100029713A patent/KR101170963B1/ko not_active IP Right Cessation
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2008038752A1 (fr) * | 2006-09-29 | 2008-04-03 | Nikon Corporation | système à unité MOBILE, DISPOSITIF DE FORMATION DE MOTIF, DISPOSITIF D'EXPOSITION, PROCÉDÉ D'EXPOSITION, ET PROCÉDÉ DE FABRICATION DE DISPOSITIF |
Also Published As
Publication number | Publication date |
---|---|
TW201106441A (en) | 2011-02-16 |
JP2010245123A (ja) | 2010-10-28 |
CN101859724A (zh) | 2010-10-13 |
TWI419254B (zh) | 2013-12-11 |
KR20100109876A (ko) | 2010-10-11 |
CN101859724B (zh) | 2012-10-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
AMND | Amendment | ||
E601 | Decision to refuse application | ||
AMND | Amendment | ||
X701 | Decision to grant (after re-examination) | ||
GRNT | Written decision to grant | ||
LAPS | Lapse due to unpaid annual fee |