KR100916933B1 - Noncontact conveying plate - Google Patents

Noncontact conveying plate Download PDF

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Publication number
KR100916933B1
KR100916933B1 KR1020090024199A KR20090024199A KR100916933B1 KR 100916933 B1 KR100916933 B1 KR 100916933B1 KR 1020090024199 A KR1020090024199 A KR 1020090024199A KR 20090024199 A KR20090024199 A KR 20090024199A KR 100916933 B1 KR100916933 B1 KR 100916933B1
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South Korea
Prior art keywords
air
conveying plate
compressed air
inclined surface
injection block
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KR1020090024199A
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Korean (ko)
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이재성
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이재성
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

A noncontact conveying plate is provided to reduce costs for maintenance and apparatus since a substrate is lifted and returned by air. In a noncontact conveying plate, a plurality of first inclined planes(121) are formed on the upper side. An air nozzle hole receives a compressed air from the outside while being extended to inside of a spray block. A second incline(131) corresponding to the first inclined plane is formed on the lower surface. A cover(130) sprays the compressed air between the inclined planes, and an air path is formed inside the spray block and it is connected with the air nozzle hole and receives the compressed air from the outside.

Description

에어에 의해 부상과 반송을 시키는 비접촉식 반송플레이트{Noncontact conveying plate}Non-contact conveying plate which floats and conveys by air

본 발명은 비접촉식 반송플레이트에 관한 것으로, 더욱 상세하게는 에어에 의해 피반송물을 부상시키면서 이송까지 시킬 수 있는 반송플레이트에 관한 것이다.The present invention relates to a non-contact conveying plate, and more particularly to a conveying plate that can be transported while floating the conveyed object by air.

일반적으로, 인라인 검사장비(In-Line FPD Automatic Optical Inspection)는 TFT LCD 패널이나 PDP, 컬러필터 등의 디스플레이 패널(display panel) 등을 안내하면서 광학렌즈와 CCD 카메라를 사용하여 검사 대상물의 이미지를 캡쳐한 후 이미지 프로세싱 알고리즘을 적용하여 사용자가 찾아내고자 하는 각종 결함을 검출해 내는 장비이다.In general, in-line FPD automatic optical inspection captures an image of an inspection object using an optical lens and a CCD camera while guiding a display panel such as a TFT LCD panel, a PDP, a color filter, etc. It is a device that detects various defects that a user wants to find by applying an image processing algorithm.

이러한 인라인 검사장비는 크게 불량을 검출하는 스캔섹션(scan section), 리뷰섹션(review section) 및 언로딩 섹션(unlaod section)으로 분할된다. 이러한 검사장비는 검사시스템으로서의 역할을 다하기 위해서는 검출한 결함의 위치와 크기를 정확하게 알아내는 것도 중요하지만, 스캔섹션(scan section)에서부터 언로딩 섹션(unlaod section)까지 피 운반체(검사대상물)를 안내하는 반송수단의 역할 또 한 중요한 요소로 작용한다.The inline inspection equipment is largely divided into a scan section, a review section and an unlaod section for detecting a defect. It is important for these inspection equipment to accurately identify the location and size of the detected defects in order to function as an inspection system, but it guides the carrier (test object) from the scan section to the unlaod section. The role of the conveying means is also an important factor.

종래 반송수단으로는 롤러(roller)의 회전력에 의해서 피 운반체를 반송하는 접촉식 반송수단이 개시된 바 있으나, 이는 롤러의 회전력에 의해서 반송이 이루어지므로 피 운반체에 스크래치 및 롤러 회전으로 인한 얼룩이 발생할 뿐만 아니라 마찰력이 작거나 회전력이 약하면 피 운반체가 미끄러지기 때문에 원활한 반송이 어려운 문제점이 있었다.Conventionally, the conveying means has been disclosed a contact conveying means for conveying the carrier by the rotational force of the roller (roller), which is carried out by the rotational force of the roller, not only does not cause stains due to scratches and roller rotation in the carrier If the friction force is small or the rotational force is weak, there is a problem that smooth conveyance is difficult because the carrier is slipped.

전술한 문제점을 해결하고자 최근에는 미세한 다수의 에어홀에 압축에어를 공급하고 에어홀에서 분출되는 에어로 피반송물을 부상 반송하는 비접촉식 반송수단이 이용되고 있다.In order to solve the above-mentioned problems, non-contact conveying means for supplying compressed air to a plurality of fine air holes and floatingly conveying the air conveyed object ejected from the air holes has been recently used.

이러한 비접촉식 반송플레이트는 압축공기에 의해 피반송물을 부상시키게 되고, 별도의 이동수단에 의해 피반송물이 이송되게 된다.The non-contact conveying plate causes the object to be conveyed by the compressed air, and the object to be conveyed by the separate moving means.

이와 같은 반송플레이트는 계속된 발전에 힘입어 놀라운 부상력을 갖게 되었지만, 이송수단은 제자리 걸음에 불과한 실정이다.Such conveying plate has a remarkable flotation force due to continued development, but the conveying means is only in place.

본 발명은 상기와 같은 현실정을 감안하여 안출된 것으로, 별도의 이송수단이 필요 없이 에어에 의해서만 부상과 반송을 수행할 수 있는 반송플레이트를 제공하는데 있다.The present invention has been made in view of the above-described reality, to provide a conveying plate that can perform the injury and conveying only by air without the need for a separate conveying means.

상기와 같은 과제를 해결하기 위해 본 발명은,The present invention to solve the above problems,

상부면상에 다수개의 제1경사면이 형성되고, 각각의 제1경사면상에는 내부로 연장되어 외부의 압축공기를 인가받는 에어분출공이 형성되는 분사블록; 그리고A plurality of first inclined surfaces are formed on the upper surface, and each of the first inclined surfaces has an injection block extending therein to form an air ejection hole for receiving external compressed air; And

하부면상에 제1경사면과 대응되는 제2경사면이 형성되어 서로 밀착 결합시켜 경사면의 사이로 압축공기를 분사시키는 커버;를 포함하는 것을 특징으로 하는 에어에 의해 부상과 반송을 시키는 비접촉식 반송플레이트를 제공한다.Provides a non-contact conveying plate to the floating and conveyed by the air, characterized in that it comprises a; the second inclined surface corresponding to the first inclined surface is formed on the lower surface close to each other to inject compressed air between the inclined surface; .

이때, 분사블록의 내부에는 각각의 에어분출공과 연통되면서 외부의 압축공기를 인가받는 에어연결로가 형성됨이 바람직하다.At this time, it is preferable that an air connection path is formed in the injection block to receive compressed air from the outside while communicating with each air blowing hole.

또는, 분사블록의 하부를 등분하여 분사블록과 결합되는 베이스를 더 포함하며, 베이스의 내부에는 그 길이방향으로 연장되어 외부의 압축공기가 유입되는 에어연결로가 형성되고, 베이스의 상부면상에는 에어연결로내의 압축공기를 에어분출공으로 연통시키는 에어공급공이 형성될 수도 있다.Or, the base further comprises a base coupled to the injection block by dividing the lower portion of the injection block, an air connection path is formed in the interior of the base extending in the longitudinal direction to the outside compressed air, the air connection path on the upper surface of the base An air supply hole for communicating the compressed air therein to the air blowing hole may be formed.

또한, 분사블록은 각각의 제1경사면을 기준으로 하나씩 분리되도록 낱개로 형성될 수도 있다.In addition, the injection blocks may be formed individually so as to be separated one by one based on each first inclined surface.

이때, 각각의 제1경사면상에는 압축공기가 안내되는 미세틈이 적어도 한줄이상 형성되어 압축공기의 분사를 촉진시킬 수도 있다.At this time, at least one or more fine gaps through which compressed air is guided may be formed on each of the first inclined surfaces to promote the injection of the compressed air.

그리고 각각의 제1경사면상에는 에어분출공에서 분출되는 압축공기를 양옆으로 분기시켜 미세틈과 연결시키는 오목한 분기홈이 형성됨이 바람직하다.On each of the first inclined surfaces, it is preferable that concave branch grooves are formed to branch the compressed air ejected from the air ejecting holes to both sides to connect with the microcavity.

한편, 제1경사면의 하단과 제2경사면의 하단에는 서로 끼움결합되는 돌기와 홈이 형성될 수도 있다.On the other hand, the lower end of the first inclined surface and the lower end of the second inclined surface may be formed projections and grooves that are fitted to each other.

전술한 바와 같이 본 발명에 따른 반송플레이트는 에어에 의해서만 부상과 반송이 모두 가능하게 되어 별도의 이송수단을 구비하지 않기 때문에 설비비를 절감할 수 있다.As described above, the conveying plate according to the present invention is capable of both floating and conveying only by air, and thus does not include a separate conveying means, thereby reducing equipment costs.

또한, 이송수단을 작동시키기 위한 유지비용도 필요치 않아 제조코스트가 낮아지게 되는 잇점도 있다.In addition, the maintenance cost for operating the transport means is also not necessary, the manufacturing cost is lowered.

이하, 첨부된 도면들을 참조하여 본 발명의 바람직한 실시예에 따른 반송플레이트를 설명한다.Hereinafter, with reference to the accompanying drawings will be described a transport plate according to a preferred embodiment of the present invention.

도 1은 본 발명에 따른 반송플레이트를 나타낸 분해 사시도이고, 도 2는 본 발명에 따른 반송플레이트를 측면에서 바라본 결합도이다.1 is an exploded perspective view showing a conveying plate according to the present invention, Figure 2 is a side view of the conveying plate according to the present invention.

도 1 및 도 2를 참고하면, 본 발명에 따른 반송플레이트(100)는 베이스(110)와, 베이스(110)위에 장착되는 다수의 분사블록(120)과, 각각의 분사블록(120)위에 장착되는 커버(130)를 포함하는 구성을 갖는다.1 and 2, the conveying plate 100 according to the present invention is mounted on a base 110, a plurality of spray blocks 120 mounted on the base 110, and on each spray block 120. It has a configuration including a cover 130.

먼저, 베이스(110)는 외부의 압축공기를 인가받도록 하부면상에서부터 중간부위까지 연통되는 에어공급포트(111)가 형성된다. 그리고 베이스(110)의 길이방향 중심부에는 에어공급포트(111)와 연통되면서 양단으로 관통되는 에어연결로(112)가 형성된다. 에어연결로(112)는 굳이 베이스(110)의 양단으로 관통되지 않아도 되나, 에어연결로(112)를 가공하기 위해서 뚫게 되는 것이다. 따라서 에어연결로(112)의 양단 개방부는 도면에 도시되지는 않았으나, 마감캡 등으로 밀폐시킴이 바람직하다.First, the base 110 is formed with an air supply port 111 that communicates from the lower surface to the middle portion to receive the external compressed air. In addition, an air connection path 112 is formed at the central portion in the longitudinal direction of the base 110 in communication with the air supply port 111 and penetrates at both ends. The air connection path 112 does not necessarily have to penetrate both ends of the base 110, but is to be drilled to process the air connection path 112. Therefore, although openings at both ends of the air connection path 112 are not shown in the drawing, it is preferable to seal the end caps.

또한, 베이스(110)의 상부면상에는 에어연결로(112)와 연통되는 에어공급공(113)이 형성된다. 이때, 에어공급공(113)은 베이스(110)의 일측에서부터 타측까지 등간격으로 연속해서 형성된다. 즉, 에어공급공(113)은 에어공급포트(111)에서 인가된 압축공기가 에어연결로(112)를 통해 분기되고, 다시 다수의 에어공급공(113)으로 각각 분출시키게 되는 것이다.In addition, an air supply hole 113 is formed on the upper surface of the base 110 in communication with the air connection path 112. At this time, the air supply hole 113 is continuously formed at equal intervals from one side to the other side of the base 110. That is, the air supply hole 113 is a branch of the compressed air applied from the air supply port 111 is branched through the air connection path 112, it is ejected to each of the plurality of air supply hole 113 again.

또한, 에어공급공(113)의 출구에는 에어의 누수를 방지하기 위해 오링(115)이 장착되고, 이 오링(115)은 에어공급공(113)의 상단 주변에 움푹패인 오링안착부(114)에 장착된다.In addition, the O-ring 115 is mounted at the outlet of the air supply hole 113 to prevent leakage of air, and the O-ring 115 is recessed around the upper end of the air supply hole 113. Is mounted on.

다음은 분사블록(120)을 설명한다.Next, the injection block 120 will be described.

분사블록(120)은 베이스(110)의 상부면상에 장착되는 것으로, 다수의 에어공급공(113)위에 각각 장착된다. 따라서 에어공급공(113)의 양측과 분사블록(120)의 하부면상에는 볼트공(B1)이 형성되어 볼트에 의해 결합된다. 또한, 분사블록(120)이 베이스(110)의 위에서 제위치에 설치되기 위해 또는, 조립의 편의상 베이 스(110)의 상부면상에는 분사블록(120)이 놓여지는 착지부가 낮게 패이도록 형성됨이 바람직할 것이다.The injection block 120 is mounted on the upper surface of the base 110, and is mounted on the plurality of air supply holes 113, respectively. Therefore, the bolt hole (B1) is formed on both sides of the air supply hole 113 and the lower surface of the injection block 120 is coupled by the bolt. In addition, it is preferable that the injection block 120 is formed to be installed in place on the base 110 or on the upper surface of the base 110 for ease of assembly so that the landing portion in which the injection block 120 is placed is lowered. something to do.

도 3은 분사블록을 상세히 보여주기 위한 사시도이다.3 is a perspective view for showing the injection block in detail.

분사블록(120)은 도 3에서 보는 바와 같이 에어공급공(113)과 연통되는 에어분출공(125)이 상하로 관통되도록 형성된다. 이때, 에어분출공(125)으로 통해 분출되는 에어가 피반송물을 부상시키면서 반송까지 시키기 위해 분사블록(120)의 상부가 경사진 형태를 갖는다. 즉, 분사블록(120)의 상부는 피반송물의 반송방향쪽이 더 높도록 제1경사면(121)이 형성된다.As shown in FIG. 3, the injection block 120 is formed such that the air jet hole 125 communicating with the air supply hole 113 penetrates up and down. At this time, the air ejected through the air ejection hole 125 has an inclined upper portion of the injection block 120 in order to transport the object to be transported up to the conveyance. That is, the first inclined surface 121 is formed in the upper portion of the injection block 120 so that the conveying direction of the conveyed object is higher.

따라서 에어분출공(125)은 제1경사면(121)으로 관통되게 되고, 제1경사면(121)상에는 에어분출공(125)에서 분출되는 에어가 다시 양옆으로 퍼지도록 움푹패인 분기홈(126)이 형성된다. 분기홈(126)은 에어가 밀폐되어야 하기 때문에 분사블록(120)의 양단으로 관통되지 않도록 형성됨이 바람직할 것이다.Therefore, the air ejection hole 125 penetrates to the first inclined surface 121, and the recessed branch groove 126 is formed on the first inclined surface 121 so that the air ejected from the air ejection hole 125 is spread to both sides again. Is formed. Branch groove 126 may be formed so as not to penetrate both ends of the injection block 120 because the air should be sealed.

또한, 분기홈(126)에서 제1경사면(121)의 상단까지 적어도 한줄 이상의 미세틈(127)이 형성된다. 미세틈(127)은 수십에서 수백 ㎛의 깊이로 가공되는 것으로, 이 미세틈(127)이 최종적으로 에어가 분사되는 통로가 되는 것이다.In addition, at least one fine gap 127 is formed from the branch groove 126 to the upper end of the first inclined surface 121. The microcavity 127 is processed to a depth of several tens to hundreds of micrometers, and the microcavity 127 is a passage through which air is finally injected.

한편, 커버(130)는 분사블록(120)의 상부면상에 장착되어 밀폐시키는 것으로, 미세틈(127)을 제외한 분사블록(120)의 상부를 밀폐시키게 된다.On the other hand, the cover 130 is mounted on the upper surface of the injection block 120 to seal, it is to seal the upper portion of the injection block 120 except for the fine gap 127.

따라서 커버(130)는 하부가 제1경사면(121)에 대응되는 기울기를 갖도록 제2경사면(131)이 형성된다.Therefore, the cover 130 has a second slope 131 is formed so that the lower portion has an inclination corresponding to the first slope (121).

또한, 커버(130)의 원활한 조립성 및 결합력 증진 또는 공차를 극복하기 위 해 제1경사면(121)의 하단과 제2경사면(131)의 하단에는 서로 끼움결합되기 위해 돌기(122)와 홈(132)이 형성된다.In addition, the protrusion 122 and the groove (to be fitted to each other at the lower end of the first inclined surface 121 and the lower end of the second inclined surface 131 in order to overcome the smooth assembly and increase the coupling force or tolerance of the cover 130) 132 is formed.

이렇게 형성된 커버(130)와 분사블록(120)은 볼트에 의해 체결되는데, 커버(130)의 상부면상에서부터 하부면상으로, 그리고 제1경사면(121)에서부터 분사블록(120)의 내부로 볼트공(B2)이 형성된다. 이때, 볼트공(B2)은 제1경사면(121) 및 제2경사면(131)의 기울기에 대해 직각방향으로 형성됨이 바람직할 것이다.The cover 130 and the injection block 120 formed as described above are fastened by bolts, from the upper surface of the cover 130 to the lower surface, and from the first inclined surface 121 to the inside of the injection block 120 (bolt holes ( B2) is formed. In this case, the bolt hole B2 may be formed in a direction perpendicular to the inclination of the first inclined surface 121 and the second inclined surface 131.

상기에서는 미세틈(127)에 의해서 압축공기가 분출되는 구조를 갖게 되는데, 굳이 미세틈(127)이 없어도 제1경사면(121)과 제2경사면(131)에 틈이 생기도록 제작하여 사용될 수도 있다.In the above structure, the compressed air is ejected by the fine gaps 127, but may be manufactured so as to have a gap in the first slope 121 and the second slope 131 without the fine gap 127. .

전술한 바와 같은 본 발명의 반송플레이트는 분사블록(120)을 다수개로 조립하는 개별식으로 설계하였으나, 분사블록(120)을 하나로 제작하여도 무방하다.Although the conveying plate of the present invention as described above is designed individually to assemble a plurality of injection block 120, the injection block 120 may be manufactured as one.

도 4는 분사블록이 하나로 제작되는 경우의 실시예를 나타낸 도면이다.Figure 4 is a view showing an embodiment when the injection block is made of one.

즉, 도 4에서 보는 바와 같이 하나의 분사블록(120)에 제1경사면(121)을 연속해서 형성하고, 그 위에 개별 커버(130)를 결합시키는 구조가 될 수도 있다.That is, as shown in FIG. 4, the first inclined surface 121 may be continuously formed on one injection block 120, and the individual cover 130 may be coupled thereon.

또는, 분사블록(120)과 베이스(110)를 하나로 제작할 수도 있다.Alternatively, the injection block 120 and the base 110 may be manufactured as one.

도 5는 분사블록과 베이스가 하나로 제작되는 경우의 실시예를 나타낸 도면이다.5 is a view showing an embodiment when the injection block and the base is made of one.

즉, 도 5에서 보는 바와 같이 하나의 분사블록(120) 하부에 에어공급포트(111)를 형성하고, 분사블록(120)의 길이방향 중심부에 에어연결로(112)를 형성하고, 에어연결로(112)와 연통되도록 제1경사면(121)쪽으로 에어분출공(125)을 뚫 어 제작될 수도 있는 것이다.That is, as shown in FIG. 5, the air supply port 111 is formed at the bottom of one injection block 120, the air connection path 112 is formed at the central portion in the longitudinal direction of the injection block 120, and the air connection path. It may be manufactured by drilling the air ejection hole 125 toward the first inclined surface 121 to communicate with (112).

하기에는 전술한 바와 같이 형성된 반송플레이트의 작용에 대해 간략하게 설명한다.Hereinafter, the operation of the conveying plate formed as described above will be briefly described.

먼저, 에어공급포트(111)로 유입된 압축공기는 에어연결로(112)로 연통되어 베이스(110)의 일측부터 타측까지 차이게 되고, 에어연결로(112)와 연통된 각각의 에어공급공(113)으로 통해 베이스(110)의 상측으로 공급된다.First, the compressed air introduced into the air supply port 111 is communicated to the air connection path 112 is different from one side of the base 110 to the other side, each air supply hole communicated with the air connection path 112 It is supplied to the upper side of the base 110 through 113.

베이스(110)의 상측으로 공급된 에어는 오링(115)에 의해 밀폐되고 연통된 각각의 에어분출공(125)으로 안내된다.The air supplied to the upper side of the base 110 is guided to each air blowing hole 125 which is sealed and communicated by the O-ring 115.

에어분출공(125)으로 유입된 에어는 다시 분기홈(125)으로 퍼져 차이게 되고, 분기홈(125)에서 서로 맞닿은 제1경사면(121)과 제2경사면(131)사이의 미세틈(127)을 통해 외부로 분사된다.The air introduced into the air ejection hole 125 spreads to the branch groove 125 again and is different from each other, and the fine gap 127 between the first slope 121 and the second slope 131 contacted with each other in the branch groove 125. Sprayed to outside through).

이때, 미세틈(127)이 제1경사면(121)상에 형성되어 있기 때문에 이 경사면을 통과하는 에어는 사선방향으로 분사되고, 커버(130)위에 놓여진 피반송물이 분사되는 에어에 의해 부상되면서 에어분출방향으로 이송하게 된다.At this time, since the minute gap 127 is formed on the first inclined surface 121, the air passing through the inclined surface is injected in an oblique direction, and the air is lifted by the air in which the conveyed object placed on the cover 130 is injected. It is transferred in the ejecting direction.

상기에서는 본 발명의 바람직한 실시예를 참조하여 설명하였지만, 해당기술분야의 숙련된 당업자는 특허청구범위에 기재된 본 발명의 사상 및 영역으로부터 벗어나지 않는 범위내에서 본 발명을 다양하게 수정 및 변경시킬 수 있음을 이해할 수 있을 것이다.Although described above with reference to a preferred embodiment of the present invention, those skilled in the art can be variously modified and changed within the scope of the invention without departing from the spirit and scope of the invention described in the claims You will understand.

도 1은 본 발명에 따른 반송플레이트를 나타낸 분해 사시도이고,1 is an exploded perspective view showing a transport plate according to the present invention,

도 2는 본 발명에 따른 반송플레이트를 나타낸 측면도이고,2 is a side view showing a conveying plate according to the present invention;

도 3은 도 1에 도시된 분사블록 및 커버를 상세히 보인 확대사시도이고,Figure 3 is an enlarged perspective view showing in detail the injection block and the cover shown in Figure 1,

도 4는 본 발명의 다른 실시예에 따른 반송플레이트를 나타낸 도면이며,4 is a view showing a transport plate according to another embodiment of the present invention,

도 5는 본 발명의 또 다른 실시예에 따른 반송플레이트를 나타낸 도면이다.5 is a view showing a transport plate according to another embodiment of the present invention.

Claims (7)

상부면상에 다수개의 제1경사면(121)이 형성되고, 상기 각각의 제1경사면(121)상에는 내부로 연장되어 외부의 압축공기를 인가받는 에어분출공(125)이 형성되는 분사블록(120); 그리고A plurality of first inclined surface 121 is formed on the upper surface, the injection block 120 is formed on each of the first inclined surface 121 is formed in the air blowing hole 125 is applied to the outside compressed air ; And 하부면상에 상기 제1경사면(121)과 대응되는 제2경사면(131)이 형성되어 서로 밀착 결합시켜 상기 경사면들(121, 131)의 사이로 압축공기를 분사시키는 커버(130);를 포함하는 것을 특징으로 하는 에어에 의해 부상과 반송을 시키는 비접촉식 반송플레이트.It includes; a cover 130 for injecting compressed air between the inclined surfaces (121, 131) by forming a second inclined surface 131 corresponding to the first inclined surface 121 on the lower surface in close contact with each other; A non-contact conveying plate for causing injury and conveyance by air. 제1항에 있어서, 상기 분사블록(120)의 내부에는 상기 각각의 에어분출공(125)과 연통되면서 외부의 압축공기를 인가받는 에어연결로(112)가 형성됨을 특징으로 하는 에어에 의해 부상과 반송을 시키는 비접촉식 반송플레이트.The air inlet of claim 1, wherein an air connection path 112 is formed in the injection block 120 to communicate with each of the air ejection holes 125 and receive compressed air from the outside. Non-contact conveying plate to convey and convey. 제1항에 있어서, 상기 분사블록(120)의 하부를 등분하여 상기 분사블록(120)과 결합되는 베이스(110)를 더 포함하며, 상기 베이스(110)의 내부에는 그 길이방향으로 연장되어 외부의 압축공기가 유입되는 에어연결로(112)가 형성되고, 상기 베이스(110)의 상부면상에는 상기 에어연결로(112)내의 압축공기를 상기 에어분출공(125)으로 연통시키는 에어공급공(113)이 형성됨을 특징으로 하는 에어에 의해 부상과 반송을 시키는 비접촉식 반송플레이트.According to claim 1, further comprising a base 110 coupled to the injection block 120 by dividing the lower portion of the injection block 120, the inside of the base 110 is extended in the longitudinal direction outside An air connection path 112 through which compressed air is introduced is formed, and an air supply hole for communicating compressed air in the air connection path 112 to the air ejection hole 125 is formed on an upper surface of the base 110. A non-contact conveying plate for causing injury and conveyance by air, characterized in that 113) is formed. 제 3 항에 있어서, 상기 분사블록(120)은 상기 각각의 제1경사면(121)을 기준으로 하나씩 분리되도록 낱개로 형성됨을 특징으로 하는 에어에 의해 부상과 반송을 시키는 비접촉식 반송플레이트.4. The non-contact conveying plate according to claim 3, wherein the spray blocks are individually formed so as to be separated one by one on the basis of each of the first inclined surfaces (121). 제1항 내지 제4항 중 어느 한 항에 있어서, 상기 각각의 제1경사면(121)상에는 압축공기가 안내되는 미세틈(127)이 적어도 한줄이상 형성됨을 특징으로 하는 에어에 의해 부상과 반송을 시키는 비접촉식 반송플레이트.The method according to any one of claims 1 to 4, wherein each of the fine slant 127 through which compressed air is guided is formed on each of the first inclined surfaces 121. Non-contact conveying plate. 제5항에 있어서, 상기 각각의 제1경사면(121)상에는 상기 에어분출공(125)에서 분출되는 압축공기를 양옆으로 분기시켜 상기 미세틈(127)과 연결시키는 오목한 분기홈(126)이 형성됨을 특징으로 하는 에어에 의해 부상과 반송을 시키는 비접촉식 반송플레이트.The concave branch groove 126 of claim 5, wherein the concave branch grooves 126 are formed on each of the first inclined surfaces 121 to branch the compressed air ejected from the air ejection holes 125 to both sides to connect the microcavities 127. A non-contact conveying plate for causing injury and conveyance by air. 제1항에 있어서, 상기 제1경사면(121)의 하단과 상기 제2경사면(131)의 하단에는 서로 끼움결합되는 돌기(122)와 홈(132)이 형성됨을 특징으로 하는 에어에 의해 부상과 반송을 시키는 비접촉식 반송플레이트.According to claim 1, the lower surface of the first inclined surface 121 and the lower surface of the second inclined surface 131 protrusions 122 and grooves 132 that are fitted to each other is formed by the air and Non-contact conveying plate to convey.
KR1020090024199A 2009-03-20 2009-03-20 Noncontact conveying plate KR100916933B1 (en)

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Publication number Priority date Publication date Assignee Title
CN103494293A (en) * 2013-09-24 2014-01-08 兰欣 Preparation method for marine shellfish beverage
CN113003178A (en) * 2019-12-20 2021-06-22 由田新技股份有限公司 Conveying device, vacuum conveying device, optical detection device and optical detection method

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JP2007247704A (en) 2006-03-14 2007-09-27 Nikon Corp Fluid bearing, fluid bearing, stage system and aligner
KR20070115805A (en) * 2006-06-02 2007-12-06 에스엠씨 가부시키 가이샤 Non-contact transport apparatus
KR100876337B1 (en) 2008-06-25 2008-12-29 이재성 Noncontact conveying plate having a suction

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103494293A (en) * 2013-09-24 2014-01-08 兰欣 Preparation method for marine shellfish beverage
CN113003178A (en) * 2019-12-20 2021-06-22 由田新技股份有限公司 Conveying device, vacuum conveying device, optical detection device and optical detection method

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