KR100821603B1 - 배향막을 제조하는 제조 장치, 액정 장치, 및 전자 기기 - Google Patents
배향막을 제조하는 제조 장치, 액정 장치, 및 전자 기기 Download PDFInfo
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- KR100821603B1 KR100821603B1 KR1020060064690A KR20060064690A KR100821603B1 KR 100821603 B1 KR100821603 B1 KR 100821603B1 KR 1020060064690 A KR1020060064690 A KR 1020060064690A KR 20060064690 A KR20060064690 A KR 20060064690A KR 100821603 B1 KR100821603 B1 KR 100821603B1
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- alignment film
- liquid crystal
- shielding plate
- substrate
- crystal device
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/133734—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by obliquely evaporated films, e.g. Si or SiO2 films
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
- C23C14/044—Coating on selected surface areas, e.g. using masks using masks using masks to redistribute rather than totally prevent coating, e.g. producing thickness gradient
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
- C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1316—Methods for cleaning the liquid crystal cells, or components thereof, during manufacture: Materials therefor
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- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Nonlinear Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Mathematical Physics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Liquid Crystal (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (7)
- 대향하는 한 쌍의 기판 사이에 액정을 삽입하여 이루어지는 액정 장치의 배향막을 제조하는 제조 장치로서,성막실과,상기 성막실 내에서 상기 기판에 배향막 재료를 물리적 증착법으로 증착하여, 배향막을 형성하기 위한 증착부와,상기 증착부와 상기 기판 사이에 형성되어, 배향막 재료를 선택적으로 증착시키기 위한 슬릿 모양의 개구부를 갖고, 상기 기판에서의 배향막이 형성되지 않은 영역을 덮는 차폐판과,상기 차폐판에 부착된 상기 배향막 재료를 제거하기 위한 클리닝 매체를, 상기 차폐판의 상기 증착부측에서의 상기 개구부를 향하여 공급하는 클리닝부를 구비하는 것을 특징으로 하는 배향막을 제조하는 제조 장치.
- 제 1 항에 있어서,상기 클리닝 매체는 상기 배향막 재료와 상기 클리닝 매체가 화학 반응함으로써, 상기 배향막 재료를 상기 차폐판으로부터 제거하는 반응성 가스인 것을 특징으로 하는 배향막을 제조하는 제조 장치.
- 제 1 항에 있어서,상기 클리닝 매체는 상기 배향막 재료를 물리적으로 제거함으로써, 상기 배향막 재료를 상기 차폐판으로부터 제거하는 고체 미립자인 것을 특징으로 하는 배향막을 제조하는 제조 장치.
- 제 1 항에 있어서,상기 클리닝부는 상기 개구부에 상대적으로 진퇴 가능한 것을 특징으로 하는 배향막을 제조하는 제조 장치.
- 제 1 항에 있어서,상기 차폐판에 부착된 상기 배향막 재료의 제거가 종료했을 때의 종점(終點)을 검지하는 종점 검지부를 구비하는 것을 특징으로 하는 배향막을 제조하는 제조 장치.
- 제 1 항에 기재된 제조 장치에 의해 제조된 배향막을 구비하는 것을 특징으로 하는 액정 장치.
- 제 6 항에 기재된 액정 장치를 구비하는 것을 특징으로 하는 전자 기기.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPJP-P-2005-00205468 | 2005-07-14 | ||
JP2005205468A JP2007025117A (ja) | 2005-07-14 | 2005-07-14 | 配向膜の製造装置、液晶装置、及び電子機器 |
Publications (2)
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KR20070009407A KR20070009407A (ko) | 2007-01-18 |
KR100821603B1 true KR100821603B1 (ko) | 2008-04-15 |
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KR1020060064690A KR100821603B1 (ko) | 2005-07-14 | 2006-07-11 | 배향막을 제조하는 제조 장치, 액정 장치, 및 전자 기기 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7518681B2 (ko) |
JP (1) | JP2007025117A (ko) |
KR (1) | KR100821603B1 (ko) |
CN (1) | CN100442126C (ko) |
TW (1) | TW200707033A (ko) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100930426B1 (ko) * | 2008-02-19 | 2009-12-08 | 하이디스 테크놀로지 주식회사 | 배향패턴 형성을 위한 이온빔 조사장치 |
JP4670947B2 (ja) * | 2008-12-05 | 2011-04-13 | ソニー株式会社 | 情報処理装置および方法 |
JP4626707B2 (ja) * | 2008-12-08 | 2011-02-09 | ソニー株式会社 | 情報処理装置および方法 |
JP6461544B2 (ja) * | 2014-10-08 | 2019-01-30 | 株式会社ジャパンディスプレイ | 液晶表示装置およびその製造方法 |
CN106094351B (zh) * | 2016-08-11 | 2019-05-14 | 昆山龙腾光电有限公司 | 配向工作台 |
CN109107997A (zh) * | 2018-09-30 | 2019-01-01 | 上海钥熠电子科技有限公司 | Oled蒸镀用挡板的干冰清洗装置及其工艺 |
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2005
- 2005-07-14 JP JP2005205468A patent/JP2007025117A/ja not_active Withdrawn
-
2006
- 2006-07-06 CN CNB200610105431XA patent/CN100442126C/zh not_active Expired - Fee Related
- 2006-07-11 US US11/484,490 patent/US7518681B2/en not_active Expired - Fee Related
- 2006-07-11 KR KR1020060064690A patent/KR100821603B1/ko active IP Right Grant
- 2006-07-12 TW TW095125521A patent/TW200707033A/zh unknown
Patent Citations (3)
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JP2002365639A (ja) * | 2001-04-06 | 2002-12-18 | Victor Co Of Japan Ltd | 液晶表示素子の配向膜製造装置及び液晶表示素子の配向膜製造方法 |
JP2003186018A (ja) * | 2001-12-17 | 2003-07-03 | Seiko Epson Corp | 液晶装置の製造方法、及び蒸着基板の製造装置 |
JP2007009916A (ja) * | 2005-06-29 | 2007-01-18 | General Electric Co <Ge> | ガスタービンエンジン及びそれを動作させる方法 |
Also Published As
Publication number | Publication date |
---|---|
US20070013845A1 (en) | 2007-01-18 |
CN1896847A (zh) | 2007-01-17 |
US7518681B2 (en) | 2009-04-14 |
JP2007025117A (ja) | 2007-02-01 |
KR20070009407A (ko) | 2007-01-18 |
CN100442126C (zh) | 2008-12-10 |
TW200707033A (en) | 2007-02-16 |
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