KR100795510B1 - 페이스트 도포장치의 도포 위치 검사방법 - Google Patents
페이스트 도포장치의 도포 위치 검사방법 Download PDFInfo
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- KR100795510B1 KR100795510B1 KR1020060030545A KR20060030545A KR100795510B1 KR 100795510 B1 KR100795510 B1 KR 100795510B1 KR 1020060030545 A KR1020060030545 A KR 1020060030545A KR 20060030545 A KR20060030545 A KR 20060030545A KR 100795510 B1 KR100795510 B1 KR 100795510B1
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/402—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for positioning, e.g. centring a tool relative to a hole in the workpiece, additional detection means to correct position
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/842—Containers
- H10K50/8426—Peripheral sealing arrangements, e.g. adhesives, sealants
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136254—Checking; Testing
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- Coating Apparatus (AREA)
- Nonlinear Science (AREA)
- Optics & Photonics (AREA)
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- Manufacturing & Machinery (AREA)
- Human Computer Interaction (AREA)
- Automation & Control Theory (AREA)
- Health & Medical Sciences (AREA)
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- Immunology (AREA)
- Pathology (AREA)
- Crystallography & Structural Chemistry (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
Claims (4)
- 삭제
- 기판에 표시된 마크의 위치를 검출하는 단계;기판에 도포된 페이스트의 위치를 검출하는 단계;기판의 마크와 페이스트 간의 상대 위치에 의해 페이스트의 도포 위치의 정확성을 판단하는 단계를 포함하며,상기 마크의 위치와 페이스트의 위치를 검출하는 것은 비전카메라에 의해 이루어지는 것을 특징으로 하는 페이스트 도포장치의 도포 위치 검사방법.
- 제 2항에 있어서, 상기 페이스트의 도포 위치의 정확성을 판단하는 단계 후, 디스펜서 헤드의 노즐 위치를 보정하는 단계를 더 포함하는 것을 특징으로 하는 페이스트 도포장치의 도포 위치 검사방법.
- 비전카메라의 영상 중심(0, 0)으로부터 기판에 표시된 마크의 위치 좌표(X0, Y0)를 검출하는 단계;비전카메라를 제어장치에 미리 설정된 디스펜스 헤드의 도포 위치 좌표로 이동시키는 단계;비전카메라의 영상 중심(0, 0)으로부터 각 페이스트의 중심 간의 거리 좌표(Dx, Dy)를 검출하는 단계;상기 검출된 마크의 위치를 기준으로 각 페이스트의 중심 위치의 좌표(X, Y)를 구하는 단계;상기 좌표(X, Y)를 제어장치에 미리 설정된 디스펜스 헤드의 도포 위치 좌표와 비교하고, 각 좌표값의 차이에 의해 도포 위치의 정확도를 판단하는 단계를 포함하여 구성된 페이스트 도포장치의 도포 위치 검사방법.
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KR1020060030545A KR100795510B1 (ko) | 2006-04-04 | 2006-04-04 | 페이스트 도포장치의 도포 위치 검사방법 |
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KR1020060030545A KR100795510B1 (ko) | 2006-04-04 | 2006-04-04 | 페이스트 도포장치의 도포 위치 검사방법 |
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KR20070099286A KR20070099286A (ko) | 2007-10-09 |
KR100795510B1 true KR100795510B1 (ko) | 2008-01-16 |
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KR1020060030545A KR100795510B1 (ko) | 2006-04-04 | 2006-04-04 | 페이스트 도포장치의 도포 위치 검사방법 |
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08115954A (ja) * | 1994-10-14 | 1996-05-07 | Tokyo Electron Ltd | 検査装置 |
KR20000066610A (ko) * | 1999-04-19 | 2000-11-15 | 김영환 | 액정표시소자의 배향막 위치 정확도 측정방법 |
JP2003215528A (ja) | 2002-10-30 | 2003-07-30 | Tokyo Electron Ind Co Ltd | Lcd検査プローブの位置合わせ方法及び装置 |
KR20040049517A (ko) * | 2002-12-06 | 2004-06-12 | 삼성전기주식회사 | 광 도파로의 정렬 위치 검사방법 |
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- 2006-04-04 KR KR1020060030545A patent/KR100795510B1/ko active IP Right Grant
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08115954A (ja) * | 1994-10-14 | 1996-05-07 | Tokyo Electron Ltd | 検査装置 |
KR20000066610A (ko) * | 1999-04-19 | 2000-11-15 | 김영환 | 액정표시소자의 배향막 위치 정확도 측정방법 |
JP2003215528A (ja) | 2002-10-30 | 2003-07-30 | Tokyo Electron Ind Co Ltd | Lcd検査プローブの位置合わせ方法及び装置 |
KR20040049517A (ko) * | 2002-12-06 | 2004-06-12 | 삼성전기주식회사 | 광 도파로의 정렬 위치 검사방법 |
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