KR100752002B1 - 고순도 암모니아 가스 공급 장치 및 방법 - Google Patents
고순도 암모니아 가스 공급 장치 및 방법 Download PDFInfo
- Publication number
- KR100752002B1 KR100752002B1 KR1020057020464A KR20057020464A KR100752002B1 KR 100752002 B1 KR100752002 B1 KR 100752002B1 KR 1020057020464 A KR1020057020464 A KR 1020057020464A KR 20057020464 A KR20057020464 A KR 20057020464A KR 100752002 B1 KR100752002 B1 KR 100752002B1
- Authority
- KR
- South Korea
- Prior art keywords
- ammonia gas
- high purity
- purity ammonia
- gas
- gas supply
- Prior art date
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- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 title claims abstract description 90
- 238000000034 method Methods 0.000 title claims abstract description 9
- 239000011347 resin Substances 0.000 claims abstract description 83
- 229920005989 resin Polymers 0.000 claims abstract description 83
- 238000005260 corrosion Methods 0.000 claims abstract description 31
- 230000007797 corrosion Effects 0.000 claims abstract description 31
- 239000000463 material Substances 0.000 claims description 28
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims description 18
- 238000007789 sealing Methods 0.000 claims description 18
- 239000004734 Polyphenylene sulfide Substances 0.000 claims description 16
- 229920000069 polyphenylene sulfide Polymers 0.000 claims description 16
- 229910001220 stainless steel Inorganic materials 0.000 claims description 15
- 239000010935 stainless steel Substances 0.000 claims description 14
- 239000004721 Polyphenylene oxide Substances 0.000 claims description 9
- 229920000570 polyether Polymers 0.000 claims description 9
- 239000000919 ceramic Substances 0.000 claims description 8
- 229910000990 Ni alloy Inorganic materials 0.000 claims description 5
- 229910000531 Co alloy Inorganic materials 0.000 claims description 4
- 229920001721 polyimide Polymers 0.000 claims description 4
- 239000009719 polyimide resin Substances 0.000 claims description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 3
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 3
- 230000000593 degrading effect Effects 0.000 claims description 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 3
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 abstract description 19
- 238000004519 manufacturing process Methods 0.000 abstract description 18
- 229910052736 halogen Inorganic materials 0.000 abstract description 9
- 150000002367 halogens Chemical class 0.000 abstract description 9
- 239000007795 chemical reaction product Substances 0.000 abstract description 7
- 229910021529 ammonia Inorganic materials 0.000 abstract description 5
- 239000002245 particle Substances 0.000 abstract description 4
- 230000015572 biosynthetic process Effects 0.000 abstract description 3
- 239000007789 gas Substances 0.000 description 69
- 230000000052 comparative effect Effects 0.000 description 27
- 229920002493 poly(chlorotrifluoroethylene) Polymers 0.000 description 17
- 239000005023 polychlorotrifluoroethylene (PCTFE) polymer Substances 0.000 description 17
- 239000000565 sealant Substances 0.000 description 16
- 238000002474 experimental method Methods 0.000 description 14
- 229910052751 metal Inorganic materials 0.000 description 14
- 239000002184 metal Substances 0.000 description 14
- 238000005695 dehalogenation reaction Methods 0.000 description 13
- -1 polychlorotrifluoroethylene Polymers 0.000 description 12
- 239000005011 phenolic resin Substances 0.000 description 7
- 239000000047 product Substances 0.000 description 7
- 239000000945 filler Substances 0.000 description 6
- 229910000856 hastalloy Inorganic materials 0.000 description 6
- 239000000470 constituent Substances 0.000 description 5
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 229910052731 fluorine Inorganic materials 0.000 description 4
- 239000011737 fluorine Substances 0.000 description 4
- 239000007769 metal material Substances 0.000 description 4
- 229920001568 phenolic resin Polymers 0.000 description 4
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 4
- 239000004810 polytetrafluoroethylene Substances 0.000 description 4
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 3
- 239000004696 Poly ether ether ketone Substances 0.000 description 3
- JUPQTSLXMOCDHR-UHFFFAOYSA-N benzene-1,4-diol;bis(4-fluorophenyl)methanone Chemical compound OC1=CC=C(O)C=C1.C1=CC(F)=CC=C1C(=O)C1=CC=C(F)C=C1 JUPQTSLXMOCDHR-UHFFFAOYSA-N 0.000 description 3
- 239000000460 chlorine Substances 0.000 description 3
- 238000011109 contamination Methods 0.000 description 3
- 238000000921 elemental analysis Methods 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 229920002530 polyetherether ketone Polymers 0.000 description 3
- 230000001105 regulatory effect Effects 0.000 description 3
- 239000007858 starting material Substances 0.000 description 3
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 2
- 239000002033 PVDF binder Substances 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 229910052801 chlorine Inorganic materials 0.000 description 2
- 229920001577 copolymer Polymers 0.000 description 2
- 238000000635 electron micrograph Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- 229920006122 polyamide resin Polymers 0.000 description 2
- 229920005672 polyolefin resin Polymers 0.000 description 2
- 229920002620 polyvinyl fluoride Polymers 0.000 description 2
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 2
- 239000008096 xylene Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 1
- 241001136616 Methone Species 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 229910001566 austenite Inorganic materials 0.000 description 1
- CXOWYMLTGOFURZ-UHFFFAOYSA-N azanylidynechromium Chemical compound [Cr]#N CXOWYMLTGOFURZ-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- UFGZSIPAQKLCGR-UHFFFAOYSA-N chromium carbide Chemical compound [Cr]#C[Cr]C#[Cr] UFGZSIPAQKLCGR-UHFFFAOYSA-N 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- QDOXWKRWXJOMAK-UHFFFAOYSA-N dichromium trioxide Chemical compound O=[Cr]O[Cr]=O QDOXWKRWXJOMAK-UHFFFAOYSA-N 0.000 description 1
- BADXJIPKFRBFOT-UHFFFAOYSA-N dimedone Chemical compound CC1(C)CC(=O)CC(=O)C1 BADXJIPKFRBFOT-UHFFFAOYSA-N 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 239000008393 encapsulating agent Substances 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 150000004679 hydroxides Chemical class 0.000 description 1
- 239000011256 inorganic filler Substances 0.000 description 1
- 229910003475 inorganic filler Inorganic materials 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000002932 luster Substances 0.000 description 1
- 239000006247 magnetic powder Substances 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 239000011572 manganese Substances 0.000 description 1
- 229910000734 martensite Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000012766 organic filler Substances 0.000 description 1
- XNGIFLGASWRNHJ-UHFFFAOYSA-L phthalate(2-) Chemical compound [O-]C(=O)C1=CC=CC=C1C([O-])=O XNGIFLGASWRNHJ-UHFFFAOYSA-L 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 238000004881 precipitation hardening Methods 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 150000004760 silicates Chemical class 0.000 description 1
- 150000003467 sulfuric acid derivatives Chemical class 0.000 description 1
- 229910003470 tongbaite Inorganic materials 0.000 description 1
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K25/00—Details relating to contact between valve members and seats
- F16K25/005—Particular materials for seats or closure elements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/10—Materials in mouldable or extrudable form for sealing or packing joints or covers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
- F16J15/12—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing with metal reinforcement or covering
- F16J15/121—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing with metal reinforcement or covering with metal reinforcement
- F16J15/122—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing with metal reinforcement or covering with metal reinforcement generally parallel to the surfaces
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C13/00—Details of vessels or of the filling or discharging of vessels
- F17C13/04—Arrangement or mounting of valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C5/00—Methods or apparatus for filling containers with liquefied, solidified, or compressed gases under pressures
- F17C5/06—Methods or apparatus for filling containers with liquefied, solidified, or compressed gases under pressures for filling with compressed gases
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C7/00—Methods or apparatus for discharging liquefied, solidified, or compressed gases from pressure vessels, not covered by another subclass
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K2200/00—Chemical nature of materials in mouldable or extrudable form for sealing or packing joints or covers
- C09K2200/06—Macromolecular organic compounds, e.g. prepolymers
- C09K2200/0615—Macromolecular organic compounds, e.g. prepolymers obtained by reactions only involving carbon-to-carbon unsaturated bonds
- C09K2200/0617—Polyalkenes
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- C—CHEMISTRY; METALLURGY
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- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K2200/00—Chemical nature of materials in mouldable or extrudable form for sealing or packing joints or covers
- C09K2200/06—Macromolecular organic compounds, e.g. prepolymers
- C09K2200/0645—Macromolecular organic compounds, e.g. prepolymers obtained otherwise than by reactions involving carbon-to-carbon unsaturated bonds
- C09K2200/0655—Polyesters
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K2200/00—Chemical nature of materials in mouldable or extrudable form for sealing or packing joints or covers
- C09K2200/06—Macromolecular organic compounds, e.g. prepolymers
- C09K2200/0645—Macromolecular organic compounds, e.g. prepolymers obtained otherwise than by reactions involving carbon-to-carbon unsaturated bonds
- C09K2200/0667—Polyamides, polyimides
-
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- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K2200/00—Chemical nature of materials in mouldable or extrudable form for sealing or packing joints or covers
- C09K2200/06—Macromolecular organic compounds, e.g. prepolymers
- C09K2200/0645—Macromolecular organic compounds, e.g. prepolymers obtained otherwise than by reactions involving carbon-to-carbon unsaturated bonds
- C09K2200/067—Condensation polymers of aldehydes or ketones
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K2200/00—Chemical nature of materials in mouldable or extrudable form for sealing or packing joints or covers
- C09K2200/06—Macromolecular organic compounds, e.g. prepolymers
- C09K2200/068—Containing also other elements than carbon, oxygen or nitrogen in the polymer main chain
- C09K2200/0682—Containing sulfur
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/08—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with exclusively metal packing
- F16J15/0818—Flat gaskets
- F16J2015/0856—Flat gaskets with a non-metallic coating or strip
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
- F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
- F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
- F17C2205/0323—Valves
- F17C2205/0329—Valves manually actuated
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
- F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
- F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
- F17C2205/0338—Pressure regulators
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
- F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
- F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
- F17C2205/0341—Filters
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2221/00—Handled fluid, in particular type of fluid
- F17C2221/03—Mixtures
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2221/00—Handled fluid, in particular type of fluid
- F17C2221/05—Ultrapure fluid
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
- F17C2250/04—Indicating or measuring of parameters as input values
- F17C2250/0404—Parameters indicated or measured
- F17C2250/0443—Flow or movement of content
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
- F17C2250/06—Controlling or regulating of parameters as output values
- F17C2250/0605—Parameters
- F17C2250/0626—Pressure
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2260/00—Purposes of gas storage and gas handling
- F17C2260/05—Improving chemical properties
- F17C2260/053—Reducing corrosion
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2270/00—Applications
- F17C2270/05—Applications for industrial use
- F17C2270/0518—Semiconductors
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Valve Housings (AREA)
Abstract
Description
수지 시트(8) | 조절 밸브 본체(11) | |
예1 | 페놀 수지 | SUS316L |
예2 | 폴리페닐렌 황화물 수지(PPS) | 하스텔로이 C-22 |
예3 | 폴리페닐렌 황화물 수지(PPS) | SUS316L |
예4 | 폴리에테르 에테르 켑톤 수지(PEEK) | SUS316L |
비교예1 | 폴리클로로트리플루오로에틸렌 수지(PCTFE) | SUS316L |
비교예2 | 폴리클로로트리플루오로에틸렌 수지(PCTFE) | 하스텔로이 C-22 |
압력게이지(3)(MPa) | 압력게이지(4)(MPa) | 배기 유동 현상의 판정 | 수지의 상태(외형) | |
예1 | 1.0 | 0.0 | 없음 | 변화 없음 |
예2 | 1.0 | 0.0 | 없음 | 변화 없음 |
예3 | 1.0 | 0.0 | 없음 | 변화 없음 |
예4 | 1.0 | 0.0 | 없음 | 변화 없음 |
비교예1 | 0.4 | 0.48 | 존재 | 브라운으로 변화 |
비교예2 | 0.9 | 0.08 | 약간 존재 | 브라운으로 변화 |
수지 시트(8) | 중량 변화(mg/mm2) | |
예1 | 페놀 수지 | +6.1 |
예2 | 폴리페닐렌 황화물 수지(PPS) | 0.0 |
예3 | 폴리페닐렌 황화물 수지(PPS) | 0.0 |
예4 | 폴리에테르 에테르 켑톤 수지(PEEK) | 0.0 |
비교예1 | 폴리클로로트리플루오로에틸렌 수지(PCTFE) | -12 |
비교예2 | 폴리클로로트리플루오로에틸렌 수지(PCTFE) | -26 |
Claims (10)
- 폴리페닐렌 황화물 수지, 폴리에테르 에테르 켑톤 수지 및 폴리이미드 수지로 구성된 군으로부터 선택되는 무할로겐 수지를 포함하는 가스 접촉부 또는 밀봉부를 구비하는 고순도 암모니아 가스 공급 장치.
- 밀봉부 본체 및 상기 밀봉부 본체에 대해 접합됨으로써 밀봉성을 부여할 수 있는 접합 물질을 포함하는 밀봉부를 구비하는 고순도 암모니아 가스 공급 장치이며,상기 밀봉부 본체는 폴리페닐렌 황화물 수지, 폴리에테르 에테르 켑톤 수지 및 폴리이미드 수지로 구성된 군으로부터 선택되는 무할로겐 수지를 포함하고,상기 접합 물질의 상기 밀봉부 본체에 대한 접합부는 스테인리스 스틸, 코발트 합금, 높은 내식성 니켈 합금, 또는 세라믹을 포함하며, 상기 세라믹은 알루미나, 알루미늄 질화물 및 실리콘 탄화물로 구성된 군으로부터 선택되는 고순도 암모니아 가스 공급 장치.
- 삭제
- 제1항 또는 제2항에 있어서, 상기 무할로겐 수지는 R30 내지 R150의 로크웰 표면 경도를 갖는 고순도 암모니아 가스 공급 장치.
- 제1항 또는 제2항에 있어서, 상기 장치는 실린더 밸브인 고순도 암모니아 가스 공급 장치.
- 제1항 또는 제2항에 있어서, 상기 장치는 압력 조절기인 고순도 암모니아 가스 공급 장치.
- 제1항 또는 제2항에 있어서, 상기 장치는 유동 제어기인 고순도 암모니아 가스 공급 장치.
- 제1항 또는 제2항에 있어서, 상기 장치는 라인 필터인 고순도 암모니아 가스 공급 장치.
- 제1항 또는 제2항에 있어서, 상기 장치는 라인 밸브인 고순도 암모니아 가스 공급 장치.
- 제5항의 고순도 암모니아 가스 공급 장치를 사용하여 고순도 암모니아 가스를 공급하는 가스 유동 통로를 구성하는 단계와, 가스 순도를 저하시키지 않고 고순도 암모니아 가스를 공급하는 단계를 포함하는 고순도 암모니아 가스를 공급하는 방법.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003125508 | 2003-04-30 | ||
JPJP-P-2003-00125508 | 2003-04-30 | ||
PCT/JP2004/006043 WO2004097287A2 (en) | 2003-04-30 | 2004-04-27 | Apparatus and method for feeding high-purity ammonia gas |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20060007404A KR20060007404A (ko) | 2006-01-24 |
KR100752002B1 true KR100752002B1 (ko) | 2007-08-28 |
Family
ID=35529857
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020057020464A KR100752002B1 (ko) | 2003-04-30 | 2004-04-27 | 고순도 암모니아 가스 공급 장치 및 방법 |
Country Status (8)
Country | Link |
---|---|
US (1) | US20070018018A1 (ko) |
EP (1) | EP1620666B1 (ko) |
JP (1) | JP4823488B2 (ko) |
KR (1) | KR100752002B1 (ko) |
CN (1) | CN100414150C (ko) |
DE (1) | DE602004011045T2 (ko) |
TW (1) | TWI345258B (ko) |
WO (1) | WO2004097287A2 (ko) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20230158990A (ko) | 2022-05-13 | 2023-11-21 | (주)원익머트리얼즈 | 암모니아 분해반응 공정에서 배관의 부식 제어방법 |
KR20240092644A (ko) | 2022-12-14 | 2024-06-24 | (주)원익머트리얼즈 | 암모니아 분해공정 장치의 질화 제어방법 |
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---|---|---|---|---|
JP5239179B2 (ja) * | 2007-03-13 | 2013-07-17 | 独立行政法人産業技術総合研究所 | 背圧弁 |
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Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05149105A (ja) * | 1991-11-29 | 1993-06-15 | Mitsubishi Heavy Ind Ltd | 蒸気タービンの圧力制御装置 |
Family Cites Families (38)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2295774A (en) * | 1941-02-26 | 1942-09-15 | Corydon Jeff | Pump valve |
US2853097A (en) * | 1955-08-11 | 1958-09-23 | Herbert B Davis | Anti-corrosive valve structure |
US2951721A (en) * | 1956-02-23 | 1960-09-06 | Halogen Insulator And Seal Cor | Composite seal |
US2953345A (en) * | 1956-10-08 | 1960-09-20 | Gen Tire & Rubber Co | Reactor dump valve |
US3438391A (en) * | 1964-01-13 | 1969-04-15 | Superior Valve & Fittings Co | Check valves having plastic sealing member |
US4303223A (en) * | 1977-02-14 | 1981-12-01 | Mueller Co. | Valve facing for sliding valve elements or the like |
JPH0232928A (ja) * | 1988-07-14 | 1990-02-02 | Nippon Furuuto Kk | 熱可塑性チューブの溶着溶断装置 |
US4887631A (en) * | 1989-01-26 | 1989-12-19 | Itt Corporation | Fire isolation device |
EP0440118A3 (en) * | 1990-01-31 | 1992-02-26 | Fujikura Ltd. | Electric insulated wire and cable using the same |
DE4019799A1 (de) * | 1990-06-21 | 1992-01-02 | Bayer Ag | Thermoplastische zusammensetzungen aus polyurethanen und partiell vernetzten alkylacrylatcopolymeren |
US5149105A (en) * | 1991-02-11 | 1992-09-22 | Ethyl Corporation | Method and apparatus for repairing vessels |
US5155471A (en) * | 1991-06-21 | 1992-10-13 | Bs&B Safety Systems, Inc. | Low pressure burst disk sensor with weakened conductive strips |
JP3023246B2 (ja) * | 1992-07-28 | 2000-03-21 | 株式会社日立製作所 | 超高真空用シール材ならびにこれを用いた超高真空装置および電子顕微鏡 |
DE19580519B3 (de) * | 1994-03-31 | 2014-03-06 | Ntn Corp. | Ventilanordnung |
US5474104A (en) * | 1995-01-17 | 1995-12-12 | Superior Valve Company | Refueling check valve for compressed natural gas powered vehicles |
JPH0932928A (ja) * | 1995-07-17 | 1997-02-07 | Nippon Valqua Ind Ltd | 金属ガスケット及び金属ガスケットの製造方法 |
JP3716026B2 (ja) * | 1996-02-07 | 2005-11-16 | アドバンスド エナジー ジャパン株式会社 | 腐食流体用制御弁 |
US6119455A (en) * | 1996-08-30 | 2000-09-19 | Siemens Aktiengesellschaft | Process and device for purifying exhaust gases containing nitrogen oxides |
US6007049A (en) * | 1996-09-19 | 1999-12-28 | Wass; Lloyd G. | High pressure gas valve having an inverted stem/seat design and a soft seated removable stem cartridge |
NL1006525C2 (nl) * | 1997-07-10 | 1999-01-12 | Dsm Nv | Halogeenvrije vlamdovende thermoplastische polyester samenstelling. |
JP4132184B2 (ja) * | 1998-02-20 | 2008-08-13 | 日本エア・リキード株式会社 | 化合物半導体デバイスに使用される高純度アンモニアの製造方法 |
JP2000046212A (ja) * | 1998-07-29 | 2000-02-18 | Nippon Sanso Kk | 容器弁 |
US20010051481A1 (en) * | 1998-08-04 | 2001-12-13 | Todd Robert Carroll | Composite chemical barrier fabric with enhanced durability |
US6531713B1 (en) * | 1999-03-19 | 2003-03-11 | Semiconductor Energy Laboratory Co., Ltd. | Electro-optical device and manufacturing method thereof |
US6111329A (en) * | 1999-03-29 | 2000-08-29 | Graham; Gregory S. | Armature for an electromotive device |
JP2001107866A (ja) * | 1999-10-07 | 2001-04-17 | Matsushita Refrig Co Ltd | 密閉型電動圧縮機 |
US6695285B1 (en) * | 1999-11-23 | 2004-02-24 | Swagelok Company | Ball valve seat seal |
JP4418571B2 (ja) * | 2000-04-11 | 2010-02-17 | シーケーディ株式会社 | 高温対応ガス制御バルブ |
JP2002022207A (ja) * | 2000-07-06 | 2002-01-23 | Hideaki Sodeyama | 空気調和機の防食方法及び判定装置 |
EP1197699A3 (en) * | 2000-09-20 | 2003-05-21 | Tokai Rubber Industries, Ltd. | Hydrogen fuel hose |
JP2002217118A (ja) * | 2001-01-22 | 2002-08-02 | Japan Pionics Co Ltd | 窒化ガリウム膜半導体の製造装置、排ガス浄化装置、及び製造設備 |
JP2002228344A (ja) * | 2001-02-06 | 2002-08-14 | Sumitomo Bakelite Co Ltd | 冷蔵庫ガスケット |
JP2003192919A (ja) * | 2001-10-17 | 2003-07-09 | Asahi Denka Kogyo Kk | 難燃性合成樹脂組成物 |
US6848471B2 (en) * | 2002-09-09 | 2005-02-01 | Hercules Valve Inc. | In-line check valve |
CA2511766C (en) * | 2002-11-27 | 2009-01-06 | Kappler Inc | Transportable contaminated remains pouch |
US6904935B2 (en) * | 2002-12-18 | 2005-06-14 | Masco Corporation Of Indiana | Valve component with multiple surface layers |
JP4607117B2 (ja) * | 2003-06-05 | 2011-01-05 | ヘキソン スペシャルティ ケミカルズ インコーポレーテッド | リグノセルロース系製品用エマルジョン、その製造方法、改良リグノセルロース系製品、及びその製造方法 |
DE102004028865B4 (de) * | 2003-06-20 | 2007-06-06 | Danfoss A/S | Kälteanlage |
-
2004
- 2004-04-20 JP JP2004124163A patent/JP4823488B2/ja not_active Expired - Lifetime
- 2004-04-27 US US10/554,705 patent/US20070018018A1/en not_active Abandoned
- 2004-04-27 EP EP04729719A patent/EP1620666B1/en not_active Expired - Fee Related
- 2004-04-27 CN CNB2004800115279A patent/CN100414150C/zh not_active Expired - Fee Related
- 2004-04-27 WO PCT/JP2004/006043 patent/WO2004097287A2/en not_active Application Discontinuation
- 2004-04-27 DE DE602004011045T patent/DE602004011045T2/de not_active Expired - Lifetime
- 2004-04-27 KR KR1020057020464A patent/KR100752002B1/ko active IP Right Grant
- 2004-04-29 TW TW093112042A patent/TWI345258B/zh not_active IP Right Cessation
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05149105A (ja) * | 1991-11-29 | 1993-06-15 | Mitsubishi Heavy Ind Ltd | 蒸気タービンの圧力制御装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20230158990A (ko) | 2022-05-13 | 2023-11-21 | (주)원익머트리얼즈 | 암모니아 분해반응 공정에서 배관의 부식 제어방법 |
KR20240092644A (ko) | 2022-12-14 | 2024-06-24 | (주)원익머트리얼즈 | 암모니아 분해공정 장치의 질화 제어방법 |
Also Published As
Publication number | Publication date |
---|---|
JP4823488B2 (ja) | 2011-11-24 |
WO2004097287A2 (en) | 2004-11-11 |
CN100414150C (zh) | 2008-08-27 |
TWI345258B (en) | 2011-07-11 |
TW200507019A (en) | 2005-02-16 |
US20070018018A1 (en) | 2007-01-25 |
JP2004345941A (ja) | 2004-12-09 |
KR20060007404A (ko) | 2006-01-24 |
EP1620666B1 (en) | 2008-01-02 |
EP1620666A2 (en) | 2006-02-01 |
CN1780998A (zh) | 2006-05-31 |
DE602004011045T2 (de) | 2008-12-18 |
WO2004097287A3 (en) | 2004-12-16 |
DE602004011045D1 (de) | 2008-02-14 |
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