KR100556679B1 - 구리 기판의 선택적 침착방법 - Google Patents
구리 기판의 선택적 침착방법 Download PDFInfo
- Publication number
- KR100556679B1 KR100556679B1 KR1020027002389A KR20027002389A KR100556679B1 KR 100556679 B1 KR100556679 B1 KR 100556679B1 KR 1020027002389 A KR1020027002389 A KR 1020027002389A KR 20027002389 A KR20027002389 A KR 20027002389A KR 100556679 B1 KR100556679 B1 KR 100556679B1
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- Prior art keywords
- copper
- osp
- solution
- coating
- gold
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- 0 *c(c(*)c(c([n]1)c2nc1I)I)c2[N+] Chemical compound *c(c(*)c(c([n]1)c2nc1I)I)c2[N+] 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C22/00—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C22/05—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using aqueous solutions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/20—Preliminary treatment of work or areas to be soldered, e.g. in respect of a galvanic coating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
- B23K35/36—Selection of non-metallic compositions, e.g. coatings, fluxes; Selection of soldering or welding materials, conjoint with selection of non-metallic compositions, both selections being of interest
- B23K35/3612—Selection of non-metallic compositions, e.g. coatings, fluxes; Selection of soldering or welding materials, conjoint with selection of non-metallic compositions, both selections being of interest with organic compounds as principal constituents
- B23K35/3615—N-compounds
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F11/00—Inhibiting corrosion of metallic material by applying inhibitors to the surface in danger of corrosion or adding them to the corrosive agent
- C23F11/08—Inhibiting corrosion of metallic material by applying inhibitors to the surface in danger of corrosion or adding them to the corrosive agent in other liquids
- C23F11/10—Inhibiting corrosion of metallic material by applying inhibitors to the surface in danger of corrosion or adding them to the corrosive agent in other liquids using organic inhibitors
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F11/00—Inhibiting corrosion of metallic material by applying inhibitors to the surface in danger of corrosion or adding them to the corrosive agent
- C23F11/08—Inhibiting corrosion of metallic material by applying inhibitors to the surface in danger of corrosion or adding them to the corrosive agent in other liquids
- C23F11/10—Inhibiting corrosion of metallic material by applying inhibitors to the surface in danger of corrosion or adding them to the corrosive agent in other liquids using organic inhibitors
- C23F11/14—Nitrogen-containing compounds
- C23F11/149—Heterocyclic compounds containing nitrogen as hetero atom
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/28—Applying non-metallic protective coatings
- H05K3/282—Applying non-metallic protective coatings for inhibiting the corrosion of the circuit, e.g. for preserving the solderability
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
- B23K2101/40—Semiconductor devices
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/05—Patterning and lithography; Masks; Details of resist
- H05K2203/0562—Details of resist
- H05K2203/0591—Organic non-polymeric coating, e.g. for inhibiting corrosion thereby preserving solderability
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/12—Using specific substances
- H05K2203/122—Organic non-polymeric compounds, e.g. oil, wax, thiol
- H05K2203/124—Heterocyclic organic compounds, e.g. azole, furan
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Chemical & Material Sciences (AREA)
- Preventing Corrosion Or Incrustation Of Metals (AREA)
- Chemical Treatment Of Metals (AREA)
- Non-Metallic Protective Coatings For Printed Circuits (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
Description
용액 컨베이어 딥 탱크 온도 |
1. 클리너 15초 2분 100℉ |
2. 세정 15초 1분 75℉ |
3. 에칭 15초 1분 80℉ |
4. 세정 15초 1분 75℉ |
5. 예비코팅a 15초 1분 75℉ |
6. 세정 15초 1분 75℉ |
7. OSP 용액b 1분 1분 85-110℉ |
8. 세정 15초 1분 120℉ |
9. 건조, 강제 통풍 15초 1분 120℉ |
a 예비코팅 사용액의 조성: 수용액 중, 벤즈이미다졸 1 g/ℓ; 트리이소프로판올아민 0.7 g/ℓ; 암모늄 아세테이트 0.39 g/ℓ. 이소프로판올을 사용하여 벤즈이미다졸을 가용화시키며 본질적으로 사용액으로부터 휘발된다. b 2 위치 치환 벤즈이미다졸 화합물과 용액에 포함된 금속으로서 구리 25 ppm 미만을 함유하는 시판 OSP 용액 |
용액 컨베이어 딥 탱크 온도 |
1. 클리너 15초 2분 100℉ |
2. 세정 15초 1분 75℉ |
3. 에칭 15초 1분 80℉ |
4. 세정 15초 1분 75℉ |
5. 5% 황산 15초 1분 75℉ |
6. 세정 15초 1분 75℉ |
7. OSP 용액c 1분 1분 110℉ |
8. 세정 15초 1분 75℉ |
9. 건조, 강제 통풍 15초 1분 120℉ |
c 용액에 포함된 금속으로서 구리가 25 ppm 을 초과함을 제외하고는 실시예 1의 OSP 용액과 동일 |
용액 컨베이어 딥 탱크 온도 |
1. 클리너 15초 2분 100℉ |
2. 세정 15초 1분 75℉ |
3. 에칭 15초 1분 80℉ |
4. 세정 15초 1분 75℉ |
5. 5% 황산 15초 1분 75℉ |
6. 세정 15초 1분 75℉ |
7. OSP 용액d 1분 1분 110℉ |
8. 세정 15초 1분 75℉ |
9. 건조, 강제 통풍 15초 1분 120℉ |
d 실시예 1의 OSP 용액과 동일 |
Claims (22)
- 구리회로와 금회로를 가지는 전자부품에, 납땜전 예비단계로서, 유기 납땜성 보존제(OSP) 용액을 이용하여 부식 보호막을 부가하는 방법으로서,상기 전자부품을, OSP에 대해 금회로보다 높은 선택성을 구리회로에 부여하며, 하기 화학식의 벤즈이미다졸 화합물을 함유하는 예비처리 용액과 접촉시키는 단계:화학식상기식에서, R1, R2, R3, 및 R4는 수소 원자, 탄소수 1 내지 10의 치환 또는 비치환 알킬 그룹, 치환 또는 비치환 아릴 그룹, 할로겐 원자, 탄소수 1 내지 10의 알콕시 그룹, 시아노 그룹, 니트로 그룹 및 이들의 혼합물로 이루어진 그룹 중에서 독립적으로 선택된다; 및상기 전자부품을, 금회로상에 OSP의 침착을 실질적으로 배제하여 OSP에 의해 금회로가 얼룩지고 금회로의 전도성이 저해되는 것을 회피하면서 구리회로 상에 선택적으로 OSP가 침착되도록 유기 납땜성 보존제(OSP)와 접촉시키는 단계를 포함하는 방법.
- 제 1 항에 있어서, R1, R2, R3 및 R4이 모두 수소인 방법.
- 제 1 항에 있어서, 예비처리 용액이 부식 억제제를 추가로 함유하는 방법.
- 제 3 항에 있어서, 부식 억제제가 C1-C4 알칸올아민인 방법.
- 제 4 항에 있어서, 알칸올아민이 트리이소프로판올아민인 방법.
- 제 3 항에 있어서, 예비처리 용액이 용액의 pH 안정화를 위한 완충제를 추가로 함유하는 방법.
- 제 6 항에 있어서, 완충제가 암모늄 염인 방법.
- 제 7 항에 있어서, 암모늄 염이 암모늄 아세테이트인 방법.
- 제 1 항에 있어서, 예비처리 용액이 21 내지 49℃의 온도에서 사용되는 방법.
- 제 9 항에 있어서, 예비처리 용액의 pH가 1 내지 11인 방법.
- 제 10 항에 있어서, 예비처리 용액의 pH가 7 내지 10인 방법.
- 제 1 항에 있어서, 유기 납땜성 보존제가 트리아졸, 이미다졸 또는 벤즈이미다졸 또는 이들의 유도체 용액인 방법.
- 제 12 항에 있어서, 유기 납땜성 보존제가 2-치환 벤즈이미다졸 화합물인 방법.
- 제 13 항에 있어서, 용액이 50 ppm 미만의 중금속을 함유하는 방법.
- 제 14 항에 있어서, 중금속이 구리인 방법.
- 삭제
- 삭제
- 삭제
- 삭제
- 삭제
- 제1항에 있어서, R1, R2, R3 및 R4는 수소원자, 탄소수 1 내지 3의 치환 또는 비치환 알킬 그룹, 치환 또는 비치환 아릴 그룹, 할로겐 원자, 탄소수 1 내지 4의 알콕시 그룹, 시아노 그룹, 니트로 그룹 및 이들의 혼합물로 이루어진 그룹 중에서 독립적으로 선택되는 방법.
- 제1항 내지 제15항 및 제21항 중 어느 한 항에 있어서, 전자부품을 예비처리 용액과 접촉시키는 단계와 전자부품을 유기 납땜성 보존제와 접촉시키는 단계를 연달아 수행하는 방법.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/383,718 | 1999-08-26 | ||
US09/383,718 US6524644B1 (en) | 1999-08-26 | 1999-08-26 | Process for selective deposition of OSP coating on copper, excluding deposition on gold |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20020040788A KR20020040788A (ko) | 2002-05-30 |
KR100556679B1 true KR100556679B1 (ko) | 2006-03-10 |
Family
ID=23514405
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020027002389A KR100556679B1 (ko) | 1999-08-26 | 2000-08-21 | 구리 기판의 선택적 침착방법 |
Country Status (8)
Country | Link |
---|---|
US (1) | US6524644B1 (ko) |
EP (1) | EP1224339B1 (ko) |
KR (1) | KR100556679B1 (ko) |
CN (1) | CN1240873C (ko) |
AT (1) | ATE391574T1 (ko) |
AU (1) | AU6891000A (ko) |
DE (1) | DE60038563T2 (ko) |
WO (1) | WO2001014612A1 (ko) |
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JP7336491B2 (ja) * | 2020-09-25 | 2023-08-31 | 株式会社タムラ製作所 | プリント配線基板の表面処理方法、およびプリント配線基板の製造方法 |
CN114453695A (zh) * | 2022-01-06 | 2022-05-10 | 深圳市虹喜科技发展有限公司 | 一种osp工艺及由该工艺制备的pcb |
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US4395294A (en) * | 1981-08-17 | 1983-07-26 | Bell Telephone Laboratories, Incorporated | Copper corrosion inhibitor |
US4731128A (en) * | 1987-05-21 | 1988-03-15 | International Business Machines Corporation | Protection of copper from corrosion |
US5173130A (en) | 1989-11-13 | 1992-12-22 | Shikoku Chemicals Corporation | Process for surface treatment of copper and copper alloy |
JP3074315B2 (ja) * | 1990-02-13 | 2000-08-07 | 株式会社三和研究所 | 銅スルーホールプリント配線板の製造方法 |
US5478607A (en) | 1991-05-17 | 1995-12-26 | Hitachi Telecon Technologies Ltd. | Method for use of preflux, printed wiring board, and method for production thereof |
TW217426B (ko) | 1992-01-08 | 1993-12-11 | Mekku Kk | |
JPH0681161A (ja) * | 1992-08-31 | 1994-03-22 | Hitachi Ltd | 銅及び銅合金の表面処理剤 |
JPH06287774A (ja) | 1993-04-05 | 1994-10-11 | Metsuku Kk | 銅および銅合金の表面処理剤 |
TW270944B (ko) | 1993-05-10 | 1996-02-21 | Shikoku Kakoki Co Ltd | |
TW263534B (ko) | 1993-08-11 | 1995-11-21 | Makkusu Kk | |
US5376189A (en) | 1993-11-08 | 1994-12-27 | Macdermid, Incorporated | Composition and process for treatment of metallic surfaces |
US5362334A (en) * | 1993-12-23 | 1994-11-08 | Macdermid, Incorporated | Composition and process for treatment of metallic surfaces |
JP2550915B2 (ja) | 1994-06-21 | 1996-11-06 | 日本電気株式会社 | 印刷配線板の表面保護剤および表面保護膜の形成方法 |
JP3547028B2 (ja) | 1996-02-26 | 2004-07-28 | 四国化成工業株式会社 | 銅及び銅合金の表面処理剤 |
AU5561696A (en) * | 1996-04-18 | 1997-11-07 | International Business Machines Corporation | Organic-metallic composite coating for copper surface protection |
-
1999
- 1999-08-26 US US09/383,718 patent/US6524644B1/en not_active Expired - Lifetime
-
2000
- 2000-08-21 AT AT00957263T patent/ATE391574T1/de not_active IP Right Cessation
- 2000-08-21 CN CNB008144400A patent/CN1240873C/zh not_active Expired - Lifetime
- 2000-08-21 DE DE60038563T patent/DE60038563T2/de not_active Expired - Lifetime
- 2000-08-21 AU AU68910/00A patent/AU6891000A/en not_active Abandoned
- 2000-08-21 KR KR1020027002389A patent/KR100556679B1/ko active IP Right Grant
- 2000-08-21 EP EP00957263A patent/EP1224339B1/en not_active Expired - Lifetime
- 2000-08-21 WO PCT/US2000/020787 patent/WO2001014612A1/en active IP Right Grant
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WO2001014612A1 (en) | 2001-03-01 |
AU6891000A (en) | 2001-03-19 |
DE60038563T2 (de) | 2009-06-10 |
CN1391618A (zh) | 2003-01-15 |
ATE391574T1 (de) | 2008-04-15 |
EP1224339A4 (en) | 2007-05-02 |
EP1224339A1 (en) | 2002-07-24 |
EP1224339B1 (en) | 2008-04-09 |
US6524644B1 (en) | 2003-02-25 |
KR20020040788A (ko) | 2002-05-30 |
DE60038563D1 (de) | 2008-05-21 |
CN1240873C (zh) | 2006-02-08 |
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