KR100532906B1 - 표시 장치용 어레이 기판 및 그 제조 방법 - Google Patents
표시 장치용 어레이 기판 및 그 제조 방법 Download PDFInfo
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- KR100532906B1 KR100532906B1 KR10-2003-0037805A KR20030037805A KR100532906B1 KR 100532906 B1 KR100532906 B1 KR 100532906B1 KR 20030037805 A KR20030037805 A KR 20030037805A KR 100532906 B1 KR100532906 B1 KR 100532906B1
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- 238000002834 transmittance Methods 0.000 claims description 5
- 229920002120 photoresistant polymer Polymers 0.000 claims 1
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- 238000005530 etching Methods 0.000 abstract description 5
- 239000010408 film Substances 0.000 description 124
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- 239000004973 liquid crystal related substance Substances 0.000 description 19
- 229910021417 amorphous silicon Inorganic materials 0.000 description 16
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- 239000011521 glass Substances 0.000 description 4
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- 239000010409 thin film Substances 0.000 description 4
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- 238000005063 solubilization Methods 0.000 description 3
- 230000007928 solubilization Effects 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 239000004925 Acrylic resin Substances 0.000 description 2
- 229920000178 Acrylic resin Polymers 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 229910004205 SiNX Inorganic materials 0.000 description 2
- 238000000149 argon plasma sintering Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
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- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000000638 solvent extraction Methods 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910001080 W alloy Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
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- 210000002858 crystal cell Anatomy 0.000 description 1
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- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- MGRWKWACZDFZJT-UHFFFAOYSA-N molybdenum tungsten Chemical compound [Mo].[W] MGRWKWACZDFZJT-UHFFFAOYSA-N 0.000 description 1
- 238000001579 optical reflectometry Methods 0.000 description 1
- 235000006408 oxalic acid Nutrition 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 238000011112 process operation Methods 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- OFIYHXOOOISSDN-UHFFFAOYSA-N tellanylidenegallium Chemical compound [Te]=[Ga] OFIYHXOOOISSDN-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1345—Conductors connecting electrodes to cell terminals
- G02F1/13458—Terminal pads
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1345—Conductors connecting electrodes to cell terminals
- G02F1/13452—Conductors connecting driver circuitry and terminals of panels
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/36—Assembling printed circuits with other printed circuits
- H05K3/361—Assembling flexible printed circuits with other printed circuits
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
- H05K2201/09372—Pads and lands
- H05K2201/09472—Recessed pad for surface mounting; Recessed electrode of component
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09818—Shape or layout details not covered by a single group of H05K2201/09009 - H05K2201/09809
- H05K2201/09909—Special local insulating pattern, e.g. as dam around component
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Liquid Crystal (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
Description
Claims (6)
- 절연 기판상에 배열되는 배선 패턴과, 상기 배선 패턴의 일단부에 접속함과 함께, 외부 단자가 접하는 접속 패드와,상기 배선 패턴을 덮고, 상기 접속 패드를 노출시키는 제외부를 형성한 두께 1μm 이상의 절연막과,이 절연막 위에 배치되는 도전층의 패턴으로 이루어지며 화소 영역에 매트릭스 형상으로 배열되는 화소 전극을 포함하는 표시 장치용 어레이 기판으로서,상기 외부 단자와 중복 배치되는 측의 상기 제외부 단부면에는 견부(肩部)를 갖는 단차가 포함되는 것을 특징으로 하는 어레이 기판.
- 제1항에 있어서,상기 단부면은, 평면도 상에서, 기판 안쪽을 향해 요철 형상의 파형을 이루며, 이 파형의 피치는 상기 접속 패드의 배열 피치와 동등한 것을 특징으로 하는 어레이 기판.
- 절연 기판상에, 절연 기판상에 배열되는 배선 패턴과, 상기 배선 패턴의 일단부에 접속하는 접속 패드를 형성하는 일련의 공정과,상기 배선 패턴을 덮는 두께 1μm 이상의 절연막, 및 상기 접속 패드를 노출시키는 제외부를, 포토레지스트의 도포, 노광 및 현상을 거쳐 작성하는 공정과,이 절연막 위에 배치되는 도전층의 패턴으로 이루어지며 화소 영역에 매트릭스 형상으로 배열되는 화소 전극을 작성하는 공정을 포함하는 표시 장치용 어레이 기판의 제조 방법으로서,상기 절연막의 패턴을 형성하기 위한 노광 시, 비 노광 영역과, 상기 제외부를 형성하기 위한 전(全) 노광 영역과, 적산 노광 강도가 이들 영역 사이의 값이 되도록 설정되는 중간 노광 영역으로 구분하고, 이에 의해, 외부 단자와 중복 배치되는 측의 상기 제외부의 내연 단부면에 견부를 갖는 단차를 형성하는 것을 특징으로 하는 어레이 기판의 제조 방법.
- 제3항에 있어서,상기 화소 전극은, 반사 화소 전극을 이루는 광 반사 금속층의 패턴을 포함하며, 하나의 마스크 패턴을 이용한 노광에 의해 상기 견부를 형성함과 동시에 상기 광 반사 금속층의 패턴의 배치 위치에 요철 패턴을 형성하는 것을 특징으로 하는 어레이 기판의 제조 방법.
- 제4항에 있어서,상기 마스크 패턴에서, 상기 요철 패턴을 형성하기 위한 개구부와 상기 견부를 형성하기 위한 개구부 사이에서 개구경에 차를 두고,이에 따라 상기 요철 패턴의 상기 절연막의 평탄면으로부터의 깊이가 상기 견부까지의 깊이의 1/2 또는 그 이하가 되는 것을 특징으로 하는 어레이 기판의 제조 방법.
- 제4항에 있어서,상기 마스크 패턴에서, 상기 요철 패턴을 형성하기 위한 반(半) 투과부와 상기 견부를 형성하기 위한 반 투과부 사이에서 투과율에 차를 두고,이에 따라 상기 요철 패턴의 상기 절연막의 평탄면으로부터의 깊이가 상기 견부까지의 깊이의 1/2 또는 그 이하가 되는 것을 특징으로 하는 어레이 기판의 제조 방법.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002173338 | 2002-06-13 | ||
JPJP-P-2002-00173338 | 2002-06-13 |
Publications (2)
Publication Number | Publication Date |
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KR20030096044A KR20030096044A (ko) | 2003-12-24 |
KR100532906B1 true KR100532906B1 (ko) | 2005-12-02 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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KR10-2003-0037805A KR100532906B1 (ko) | 2002-06-13 | 2003-06-12 | 표시 장치용 어레이 기판 및 그 제조 방법 |
Country Status (5)
Country | Link |
---|---|
US (2) | US7042149B2 (ko) |
JP (1) | JP4342217B2 (ko) |
KR (1) | KR100532906B1 (ko) |
CN (1) | CN1295555C (ko) |
TW (1) | TWI245155B (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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KR20160082804A (ko) * | 2014-12-29 | 2016-07-11 | 엘지디스플레이 주식회사 | 패드 구조 및 이를 포함하는 표시장치 |
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JP4702516B2 (ja) | 2003-05-07 | 2011-06-15 | エルジー エレクトロニクス インコーポレイティド | 有機el素子及びその製造方法 |
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US8350466B2 (en) | 2004-09-17 | 2013-01-08 | Semiconductor Energy Laboratory Co., Ltd. | Display device and manufacturing method thereof |
JP2006164737A (ja) * | 2004-12-07 | 2006-06-22 | Sharp Corp | 表示素子、若しくはそれを備えた表示パネル及び表示装置 |
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JP3305235B2 (ja) * | 1997-07-01 | 2002-07-22 | 松下電器産業株式会社 | アクティブ素子アレイ基板 |
JP2001264798A (ja) * | 2000-03-22 | 2001-09-26 | Hitachi Ltd | アクティブマトリックス基板及びそれを用いた光学変調素子 |
-
2003
- 2003-06-09 TW TW092115533A patent/TWI245155B/zh not_active IP Right Cessation
- 2003-06-09 US US10/456,584 patent/US7042149B2/en not_active Expired - Lifetime
- 2003-06-11 JP JP2003167105A patent/JP4342217B2/ja not_active Expired - Fee Related
- 2003-06-12 KR KR10-2003-0037805A patent/KR100532906B1/ko active IP Right Grant
- 2003-06-13 CN CNB03143035XA patent/CN1295555C/zh not_active Expired - Lifetime
-
2005
- 2005-09-15 US US11/226,233 patent/US7021983B2/en not_active Expired - Lifetime
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20160082804A (ko) * | 2014-12-29 | 2016-07-11 | 엘지디스플레이 주식회사 | 패드 구조 및 이를 포함하는 표시장치 |
KR102274701B1 (ko) * | 2014-12-29 | 2021-07-08 | 엘지디스플레이 주식회사 | 패드 구조 및 이를 포함하는 표시장치 |
Also Published As
Publication number | Publication date |
---|---|
JP4342217B2 (ja) | 2009-10-14 |
US20040008167A1 (en) | 2004-01-15 |
US7042149B2 (en) | 2006-05-09 |
CN1295555C (zh) | 2007-01-17 |
TWI245155B (en) | 2005-12-11 |
JP2004070308A (ja) | 2004-03-04 |
US7021983B2 (en) | 2006-04-04 |
KR20030096044A (ko) | 2003-12-24 |
US20060009108A1 (en) | 2006-01-12 |
CN1470923A (zh) | 2004-01-28 |
TW200406630A (en) | 2004-05-01 |
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