KR100525544B1 - 열식 유량 검출 장치 - Google Patents
열식 유량 검출 장치 Download PDFInfo
- Publication number
- KR100525544B1 KR100525544B1 KR10-2003-0034660A KR20030034660A KR100525544B1 KR 100525544 B1 KR100525544 B1 KR 100525544B1 KR 20030034660 A KR20030034660 A KR 20030034660A KR 100525544 B1 KR100525544 B1 KR 100525544B1
- Authority
- KR
- South Korea
- Prior art keywords
- temperature
- flow rate
- upstream
- power supply
- heat generating
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/696—Circuits therefor, e.g. constant-current flow meters
- G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
- G01F1/699—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters by control of a separate heating or cooling element
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6845—Micromachined devices
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Volume Flow (AREA)
- Combined Controls Of Internal Combustion Engines (AREA)
Abstract
Description
Claims (3)
- 상류측으로부터 하류측으로 흐르는 유체의 온도를 검출하는 제1 및 제2의 온도 검출 소자, 및 제1 및 제2의 고정 저항으로 구성된 브리지 회로와,상기 제1 및 제2의 온도 검출 소자의 온도차가 소정치가 되도록, 제1 및 제2의 발열 소자에 연속적으로 전력을 공급하는 온도차 제어 회로를 구비하고,상기 온도차 제어 회로는,상기 브리지 회로에 접속된 차동 증폭기와,제1의 정전압 전원과,상기 제1의 정전압 전원보다 낮은 제2의 정전압 전원과,상기 제1 및 제2의 발열 소자를 가지며,상기 제1의 발열 소자는 상기 차동 증폭기의 출력측과 상기 제2의 정전압 전원 사이에 접속되고, 상기 제2의 발열 소자는 상기 차동 증폭기의 출력측과 상기 제1의 정전압 전원 사이에 접속되는 것을 특징으로 하는 열식 유량 검출 장치.
- 제1항에 있어서,상기 온도차 제어 회로는 상기 제1 또는 제2의 발열 소자에 직렬로 접속된 제3의 고정 저항을 또한 갖는 것을 특징으로 하는 열식 유량 검출 장치.
- 제1항에 있어서,상기 브리지 회로는 상기 제1 또는 제2의 온도 검출 소자에 병렬 또는 직렬로 접속된 제 4의 고정 저항을 또한 갖는 것을 특징으로 하는 열식 유량 검출 장치.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002251188A JP3650384B2 (ja) | 2002-08-29 | 2002-08-29 | 熱式流量検出装置 |
JPJP-P-2002-00251188 | 2002-08-29 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20040019867A KR20040019867A (ko) | 2004-03-06 |
KR100525544B1 true KR100525544B1 (ko) | 2005-10-31 |
Family
ID=31884692
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR10-2003-0034660A KR100525544B1 (ko) | 2002-08-29 | 2003-05-30 | 열식 유량 검출 장치 |
Country Status (4)
Country | Link |
---|---|
US (1) | US6889544B2 (ko) |
JP (1) | JP3650384B2 (ko) |
KR (1) | KR100525544B1 (ko) |
DE (1) | DE10330776B4 (ko) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3817497B2 (ja) * | 2002-06-10 | 2006-09-06 | 株式会社日立製作所 | 熱式流量計測装置 |
JP2005140689A (ja) * | 2003-11-07 | 2005-06-02 | Mitsubishi Electric Corp | 感熱式流量計および燃料制御装置 |
DE102004033049B4 (de) * | 2004-07-08 | 2016-05-04 | Robert Bosch Gmbh | Messeinrichtung für einen Durchflusssensor, insbesondere einen Luftmassensensor für Brennkraftmaschinen und Verfahren zum Messen von Luftströmen |
US7333899B2 (en) * | 2004-10-13 | 2008-02-19 | Therm-O-Disc, Incorporated | Fluid flow rate sensor and method of operation |
US7205781B2 (en) * | 2005-01-12 | 2007-04-17 | Visteon Global Technologies, Inc. | Mass air flow circuit having pulse width modulation feedback control |
JP2006258676A (ja) * | 2005-03-18 | 2006-09-28 | Hitachi Ltd | 熱式流量計 |
JP4732046B2 (ja) * | 2005-07-20 | 2011-07-27 | 東京応化工業株式会社 | レジスト組成物およびレジストパターン形成方法 |
JP4161078B2 (ja) | 2005-11-22 | 2008-10-08 | 三菱電機株式会社 | 熱式流量センサ |
JP2007154841A (ja) * | 2005-12-08 | 2007-06-21 | Toyota Motor Corp | 内燃機関の吸入空気量検出装置 |
US7653503B2 (en) * | 2006-04-20 | 2010-01-26 | Tao Of Systems Integration, Inc. | Temperature-compensating sensor system |
US7874208B2 (en) * | 2007-10-10 | 2011-01-25 | Brooks Instrument, Llc | System for and method of providing a wide-range flow controller |
KR200453489Y1 (ko) * | 2008-09-29 | 2011-05-06 | 안중경 | 입체간판 |
KR101031916B1 (ko) * | 2009-01-09 | 2011-05-02 | 이송근 | 조립식 채널간판 |
CN201440221U (zh) * | 2009-05-21 | 2010-04-21 | 鸿富锦精密工业(深圳)有限公司 | 双路温控电路 |
JP2012078228A (ja) * | 2010-10-01 | 2012-04-19 | Denso Corp | 空気流量測定装置 |
US20140130591A1 (en) | 2011-06-13 | 2014-05-15 | Schlumberger Technology Corporation | Methods and Apparatus for Determining Downhole Parameters |
DE102011052305A1 (de) * | 2011-07-29 | 2013-01-31 | Pierburg Gmbh | Verbrennungsmotorabgas-Massenstromsensor mit einem Heißfilm-Anemometer |
JP5523528B2 (ja) * | 2012-09-20 | 2014-06-18 | 三菱電機株式会社 | 熱式流量センサおよび熱式流量センサによる流量検出信号生成方法 |
US9612146B2 (en) | 2014-02-07 | 2017-04-04 | Honeywell International, Inc. | Airflow sensor with dust reduction |
JP6532810B2 (ja) * | 2015-11-18 | 2019-06-19 | 日立オートモティブシステムズ株式会社 | 流量センサ |
US10620022B2 (en) | 2018-03-09 | 2020-04-14 | Baker Hughes, A Ge Company, Llc | Flow meter and method for measuring fluid flow |
CN111323090B (zh) * | 2020-03-02 | 2021-12-14 | 深圳大学 | 基于热反馈的微型流量传感器、气流测量***及测量方法 |
CN115406492B (zh) * | 2022-09-30 | 2024-06-11 | 重庆川仪自动化股份有限公司 | 一种带有保护电路的热扩散式开关 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5750893A (en) * | 1994-06-21 | 1998-05-12 | Ricoh Co., Ltd. | Thermally sensing type flowing velocity measuring apparatus |
DE19509555B4 (de) | 1995-03-16 | 2006-01-19 | Robert Bosch Gmbh | Durchflußsensor |
NL1008665C1 (nl) * | 1998-03-20 | 1999-09-21 | Berkin Bv | Mediumstroommeter. |
US5965813A (en) * | 1998-07-23 | 1999-10-12 | Industry Technology Research Institute | Integrated flow sensor |
JP3433124B2 (ja) * | 1998-12-15 | 2003-08-04 | 株式会社日立製作所 | 熱式空気流量センサ |
NL1014797C2 (nl) * | 2000-03-30 | 2001-10-02 | Berkin Bv | Massadebietmeter. |
US6470741B1 (en) * | 2000-06-23 | 2002-10-29 | Instrumentarium, Inc. | Hot wire anemometer gas flow sensor having improved operation and compensation |
-
2002
- 2002-08-29 JP JP2002251188A patent/JP3650384B2/ja not_active Expired - Fee Related
-
2003
- 2003-05-20 US US10/441,054 patent/US6889544B2/en not_active Expired - Lifetime
- 2003-05-30 KR KR10-2003-0034660A patent/KR100525544B1/ko active IP Right Grant
- 2003-07-08 DE DE10330776A patent/DE10330776B4/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP3650384B2 (ja) | 2005-05-18 |
KR20040019867A (ko) | 2004-03-06 |
JP2004093189A (ja) | 2004-03-25 |
DE10330776A1 (de) | 2004-03-18 |
DE10330776B4 (de) | 2010-09-23 |
US20040040377A1 (en) | 2004-03-04 |
US6889544B2 (en) | 2005-05-10 |
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