KR100373803B1 - 반도체 처리용 로드록 장치 및 방법 - Google Patents
반도체 처리용 로드록 장치 및 방법 Download PDFInfo
- Publication number
- KR100373803B1 KR100373803B1 KR10-1999-0004326A KR19990004326A KR100373803B1 KR 100373803 B1 KR100373803 B1 KR 100373803B1 KR 19990004326 A KR19990004326 A KR 19990004326A KR 100373803 B1 KR100373803 B1 KR 100373803B1
- Authority
- KR
- South Korea
- Prior art keywords
- chamber
- holding means
- flange
- conveying mechanism
- processed
- Prior art date
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67748—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a single workpiece
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67751—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber vertical transfer of a single workpiece
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/137—Associated with semiconductor wafer handling including means for charging or discharging wafer cassette
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/139—Associated with semiconductor wafer handling including wafer charging or discharging means for vacuum chamber
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/141—Associated with semiconductor wafer handling includes means for gripping wafer
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
Claims (9)
- 처리실에 피처리체를 차례로 반송하는 반송 기구와 협동하도록 상기 피처리체를 적재하여 대기하는 로드록 장치로서,챔버 수단과,복수의 상기 피처리체를 장전하기 위한 보유 지지 수단으로서, 상기 챔버 내를 상하로 이동 가능한 보유 지지 수단과,상기 보유 지지 수단을 상하 이동하기 위한 하나의 승강 수단과,상기 보유 지지 수단의 측면에 설치된 하나의 플랜지 수단으로서, 상기 챔버 내벽의 일부와 접촉 결합함으로써, 상기 챔버 내부 공간을 격절된 2개의 방으로 분리하는 플랜지 수단과,상기 플랜지 수단의 주연부 및/또는 챔버 내벽과 상기 플랜지 수단의 접촉부에 설치된 시일 수단으로 이루어지는 것을 특징으로 하는 장치.
- 제1항에 있어서, 상기 반송 기구는 챔버 수단의 측면 대략 중앙부에 접속되어 있는 것을 특징으로 하는 장치.
- 제2항에 있어서, 상기 플랜지 수단은 보유 지지 수단 측면의 실질적으로 중앙에 결합되어 있으며, 그것이 상기 챔버 내벽의 일부와 결합된 때 상기 보유 지지 수단의 일부가 상기 반송 기구로부터 완전히 격리되고, 상기 보유 지지 수단의 나머지 부분이 반송 기구에 노출되는 것을 특징으로 하는 장치.
- 제1항 내지 제3항 중 어느 한 항에 있어서, 상기 챔버는 피처리체를 상기 보유 지지 수단에 반입 및 반출하기 위한 적어도 하나의 도어 밸브를 갖는 것을 특징으로 하는 장치.
- 삭제
- 삭제
- 로드록 장치의 내부에 적재 대기된 피처리체를 차례로 소정의 처리실에 반입 및 반출하는 방법으로서,상기 로드록 장치가,챔버 수단과,복수의 상기 피처리체를 장전하기 위한 보유 지지 수단으로서, 상기 챔버 내를 상하로 이동 가능한 보유 지지 수단과,상기 보유 지지 수단의 측면에 설치된 플랜지 수단으로서, 상기 챔버 내벽의 일부와 결합함으로써, 상기 챔버 내부 공간을 격절된 2개의 방으로 분리하는 플랜지 수단으로 이루어지는 방법으로서,상기 플랜지 수단을 제1 위치에서 결합 접촉시킨 상태에서, 상기 보유 지지 수단의 제1 부분에 상기 피처리체를 장전하고, 그 사이에 처리 완료된 피처리체를상기 처리실로부터 반출하고 상기 보유 지지 수단의 제2 부분으로 복귀시키는 공정과,상기 보유 지지 수단을 이동시키고, 상기 플랜지 수단을 제2 위치에서 결합 접촉시킨 상태에서, 상기 보유 지지 수단의 제1 부분으로부터 상기 피처리체를 취출하여 상기 처리실로 반송하고, 그 사이에 상기 보유 지지 수단의 제2 부분으로부터 상기 처리 완료된 피처리체를 챔버 외부로 반출하는 공정과,상기 플랜지 수단을 제2 위치에서 결합 접촉시킨 상태에서, 상기 보유 지지 수단의 제2 부분에 상기 피처리체를 장전하고, 그 사이에 처리 완료된 피처리체를 다른 처리실로부터 반출하고 상기 보유 지지 수단의 제1 부분에 복귀시키는 공정과,상기 보유 지지 수단을 이동시키고, 다시 상기 플랜지 수단을 제1 위치에서 결합 접촉시킨 상태에서, 상기 보유 지지 수단의 제2 부분으로부터 상기 피처리체를 취출하여 다른 처리실로 반송하고, 그 사이에 상기 보유 지지 수단의 제1 부분으로부터 상기 처리 완료된 피처리체를 챔버 외부로 반출하는 공정과,상기 공정을 반복하는 공정으로 이루어지는 것을 특징으로 하는 방법.
- 제7항에 있어서, 상기 보유 지지 수단으로 피처리체를 장전하거나 또는 챔버 외부로 반출할 때, 반송 기구로부터 격절된 쪽의 방을 미리 대기압으로 복귀시키는 공정과,상기 보유 지지 수단으로의 피처리체의 장전 또는 반출이 종료된 후, 상기 반송 기구로부터 격절된 쪽의 방을 진공 배기하는 공정을 포함하는 것을 특징으로 하는 방법.
- 제8항에 있어서, 반송 기구로부터 격절된 쪽의 방을 대기압으로 복귀시키는 공정에서, 상기 플랜지 수단과 챔버 내벽 일부와의 결합이 보유 지지되는 것을 특징으로 하는 방법.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP04101198A JP3286240B2 (ja) | 1998-02-09 | 1998-02-09 | 半導体処理用ロードロック装置及び方法 |
JP1998-041011 | 1998-02-09 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR19990072493A KR19990072493A (ko) | 1999-09-27 |
KR100373803B1 true KR100373803B1 (ko) | 2003-02-26 |
Family
ID=12596465
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR10-1999-0004326A KR100373803B1 (ko) | 1998-02-09 | 1999-02-08 | 반도체 처리용 로드록 장치 및 방법 |
Country Status (5)
Country | Link |
---|---|
US (1) | US6053686A (ko) |
EP (1) | EP0935279A3 (ko) |
JP (1) | JP3286240B2 (ko) |
KR (1) | KR100373803B1 (ko) |
TW (1) | TW410409B (ko) |
Families Citing this family (38)
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DE59611078D1 (de) | 1995-03-28 | 2004-10-14 | Brooks Automation Gmbh | Be- und Entladestation für Halbleiterbearbeitungsanlagen |
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US6350097B1 (en) * | 1999-04-19 | 2002-02-26 | Applied Materials, Inc. | Method and apparatus for processing wafers |
US6318945B1 (en) * | 1999-07-28 | 2001-11-20 | Brooks Automation, Inc. | Substrate processing apparatus with vertically stacked load lock and substrate transport robot |
JP3273560B2 (ja) * | 1999-08-30 | 2002-04-08 | 日本エー・エス・エム株式会社 | マルチチャンバロードロック装置のシール機構 |
KR100315459B1 (ko) * | 1999-12-31 | 2001-11-28 | 황인길 | 듀얼 공정챔버를 갖는 급속열처리장치의 냉각챔버 |
JP2001358191A (ja) * | 2000-06-09 | 2001-12-26 | Asm Japan Kk | 半導体製造装置用の基板支持板 |
US7018504B1 (en) | 2000-09-11 | 2006-03-28 | Asm America, Inc. | Loadlock with integrated pre-clean chamber |
TW512421B (en) * | 2000-09-15 | 2002-12-01 | Applied Materials Inc | Double dual slot load lock for process equipment |
FR2817154B1 (fr) | 2000-11-27 | 2003-06-06 | Ela Medical Sa | Dispositif medical actif du type defibrillateur/ cardioverteur implantable a discrimination perfectionnee des fibrillations auriculaires |
US6609869B2 (en) * | 2001-01-04 | 2003-08-26 | Asm America | Transfer chamber with integral loadlock and staging station |
US20040096300A1 (en) * | 2001-06-30 | 2004-05-20 | Ilya Perlov | Loadlock chamber |
US7316966B2 (en) | 2001-09-21 | 2008-01-08 | Applied Materials, Inc. | Method for transferring substrates in a load lock chamber |
US20040221811A1 (en) * | 2001-11-30 | 2004-11-11 | Robert Mitchell | Method and apparatus for processing wafers |
US6899507B2 (en) * | 2002-02-08 | 2005-05-31 | Asm Japan K.K. | Semiconductor processing apparatus comprising chamber partitioned into reaction and transfer sections |
JP4040499B2 (ja) * | 2003-03-06 | 2008-01-30 | キヤノン株式会社 | ロードロック室、処理システム及び処理方法 |
US20050194096A1 (en) * | 2003-08-29 | 2005-09-08 | Crossing Automation, Inc. | Method and apparatus for semiconductor processing |
US7207766B2 (en) | 2003-10-20 | 2007-04-24 | Applied Materials, Inc. | Load lock chamber for large area substrate processing system |
US20070269297A1 (en) * | 2003-11-10 | 2007-11-22 | Meulen Peter V D | Semiconductor wafer handling and transport |
US8403613B2 (en) * | 2003-11-10 | 2013-03-26 | Brooks Automation, Inc. | Bypass thermal adjuster for vacuum semiconductor processing |
US10086511B2 (en) | 2003-11-10 | 2018-10-02 | Brooks Automation, Inc. | Semiconductor manufacturing systems |
WO2005086207A1 (de) * | 2004-03-02 | 2005-09-15 | Asys Automatic Systems Gmbh & Co. Kg | Übergabeeinrichtung in handhabungs- und/oder bearbeitungszentren |
US7845891B2 (en) | 2006-01-13 | 2010-12-07 | Applied Materials, Inc. | Decoupled chamber body |
US7665951B2 (en) * | 2006-06-02 | 2010-02-23 | Applied Materials, Inc. | Multiple slot load lock chamber and method of operation |
US7845618B2 (en) | 2006-06-28 | 2010-12-07 | Applied Materials, Inc. | Valve door with ball coupling |
JP4635972B2 (ja) * | 2006-06-29 | 2011-02-23 | 株式会社ニコン | ロードロック装置、それを使用した方法及びウエハ接合システム |
KR100790789B1 (ko) | 2006-07-03 | 2008-01-02 | 코닉시스템 주식회사 | 반도체 공정장치 |
US8440048B2 (en) | 2009-01-28 | 2013-05-14 | Asm America, Inc. | Load lock having secondary isolation chamber |
DE102010048043A1 (de) | 2010-10-15 | 2012-04-19 | Ev Group Gmbh | Vorrichtung und Verfahren zur Prozessierung von Wafern |
JP2012134370A (ja) * | 2010-12-22 | 2012-07-12 | Canon Anelva Corp | チャンバ、真空処理装置、基板移載方法 |
JP6122256B2 (ja) * | 2011-08-12 | 2017-04-26 | 芝浦メカトロニクス株式会社 | 処理システムおよび処理方法 |
KR101311616B1 (ko) * | 2011-08-12 | 2013-09-26 | 시바우라 메카트로닉스 가부시끼가이샤 | 처리 시스템 및 처리 방법 |
JP2014093489A (ja) * | 2012-11-06 | 2014-05-19 | Tokyo Electron Ltd | 基板処理装置 |
JP6016584B2 (ja) * | 2012-11-08 | 2016-10-26 | 東京エレクトロン株式会社 | ロードロック装置 |
WO2014150260A1 (en) * | 2013-03-15 | 2014-09-25 | Applied Materials, Inc | Process load lock apparatus, lift assemblies, electronic device processing systems, and methods of processing substrates in load lock locations |
JP6454201B2 (ja) | 2015-03-26 | 2019-01-16 | 東京エレクトロン株式会社 | 基板搬送方法及び基板処理装置 |
CN109273392A (zh) * | 2018-09-08 | 2019-01-25 | 浙江求是半导体设备有限公司 | 一种晶片传送装置 |
TW202126856A (zh) * | 2019-09-22 | 2021-07-16 | 美商應用材料股份有限公司 | 多晶圓體積單移送腔室刻面 |
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-
1998
- 1998-02-09 JP JP04101198A patent/JP3286240B2/ja not_active Expired - Fee Related
-
1999
- 1999-02-03 TW TW088101651A patent/TW410409B/zh not_active IP Right Cessation
- 1999-02-08 KR KR10-1999-0004326A patent/KR100373803B1/ko not_active IP Right Cessation
- 1999-02-09 US US09/246,921 patent/US6053686A/en not_active Expired - Lifetime
- 1999-02-09 EP EP99200381A patent/EP0935279A3/en not_active Withdrawn
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06275699A (ja) * | 1993-03-24 | 1994-09-30 | Ebara Corp | 真空処理装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH11233583A (ja) | 1999-08-27 |
EP0935279A2 (en) | 1999-08-11 |
EP0935279A3 (en) | 2003-11-26 |
KR19990072493A (ko) | 1999-09-27 |
US6053686A (en) | 2000-04-25 |
TW410409B (en) | 2000-11-01 |
JP3286240B2 (ja) | 2002-05-27 |
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