JPWO2019207690A1 - 基板収納容器 - Google Patents
基板収納容器 Download PDFInfo
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- JPWO2019207690A1 JPWO2019207690A1 JP2020515376A JP2020515376A JPWO2019207690A1 JP WO2019207690 A1 JPWO2019207690 A1 JP WO2019207690A1 JP 2020515376 A JP2020515376 A JP 2020515376A JP 2020515376 A JP2020515376 A JP 2020515376A JP WO2019207690 A1 JPWO2019207690 A1 JP WO2019207690A1
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- container body
- substrate storage
- ventilation path
- container
- forming component
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67389—Closed carriers characterised by atmosphere control
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67379—Closed carriers characterised by coupling elements, kinematic members, handles or elements to be externally gripped
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67383—Closed carriers characterised by substrate supports
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67389—Closed carriers characterised by atmosphere control
- H01L21/67393—Closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Packaging Frangible Articles (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
図5は、基板収納容器1の容器本体2を示す拡大側方断面図である。図6は、基板収納容器1の容器本体2を示す拡大後方断面図である。図7は、基板収納容器1の容器本体2を示す上方断面図である。図8は、本発明の一実施形態に係る基板収納容器1の容器本体2、通気路形成部品245、及び、給気用フィルタ部90を示す分解斜視図である。図9は、基板収納容器1の容器本体2を示す底面図である。図10は、基板収納容器1の容器本体2、通気路形成部品245、及び、給気用フィルタ部90を示す拡大断面図である。図11は、基板収納容器1の通気路形成部品245、及び、給気用フィルタ部90を示す分解斜視図である。
前述のように、基板収納容器1は、一端部に容器本体開口部21が形成された開口周縁部28を有し、他端部が閉塞された筒状の壁部20を備え、壁部20の内面によって、複数の基板Wを収納可能であり容器本体開口部21に連通する基板収納空間27が形成された容器本体2と、容器本体開口部21に対して着脱可能であり、容器本体開口部21を閉塞可能な蓋体3と、基板収納空間27と容器本体2の外部の空間とを連通可能な通気路Pと、を備えている。通気路Pは、容器本体2にインサート成形された通気路形成部品245に形成されている。
2 容器本体
3 蓋体
8 気体噴出ノズル部
20 壁部
21 容器本体開口部
22 奥壁
90 給気用フィルタ部
245 通気路形成部品
2451 容器本体被接続部(部品、第1部品部)
2461 天板部(部品、第2部品部)
A 通気路
W 基板
Claims (5)
- 一端部に容器本体開口部が形成された開口周縁部を有し、他端部が閉塞された筒状の壁部を備え、前記壁部の内面によって、複数の基板を収納可能であり前記容器本体開口部に連通する基板収納空間が形成された容器本体と、
前記容器本体開口部に対して着脱可能であり、前記容器本体開口部を閉塞可能な蓋体と、
前記基板収納空間と前記容器本体の外部の空間とを連通可能な通気路と、を備え、
前記通気路は、前記容器本体にインサート成形された通気路形成部品に形成されている基板収納容器。 - 前記通気路形成部品には、少なくとも1つの通気路が形成されている請求項1に記載の基板収納容器。
- 前記通気路形成部品は、複数の部品が組合わされて構成される請求項1又は請求項2に記載の基板収納容器。
- 前記通気路形成部品は、
前記通気路形成部品の通気路に気体が流入する部分を形成する第1部品部と、
前記通気路形成部品の通気路に流入した気体が前記通気路において衝突して気体の流れる方向が変えられる部分を形成する第2部品部と、を備える請求項3に記載の基板収納容器。 - 前記通気路形成部品には、付加部品を着脱可能に装着可能である請求項1〜請求項4のいずれかに記載の基板収納容器。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2018/016821 WO2019207690A1 (ja) | 2018-04-25 | 2018-04-25 | 基板収納容器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2019207690A1 true JPWO2019207690A1 (ja) | 2021-05-13 |
JP7032521B2 JP7032521B2 (ja) | 2022-03-08 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020515376A Active JP7032521B2 (ja) | 2018-04-25 | 2018-04-25 | 基板収納容器 |
Country Status (6)
Country | Link |
---|---|
US (1) | US11948821B2 (ja) |
JP (1) | JP7032521B2 (ja) |
KR (1) | KR102520475B1 (ja) |
CN (1) | CN112074944B (ja) |
TW (1) | TWI804609B (ja) |
WO (1) | WO2019207690A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11104496B2 (en) * | 2019-08-16 | 2021-08-31 | Gudeng Precision Industrial Co., Ltd. | Non-sealed reticle storage device |
WO2021181742A1 (ja) * | 2020-10-23 | 2021-09-16 | ミライアル株式会社 | 基板収納容器及びその製造方法並びにフィルタ部 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010135387A (ja) * | 2008-12-02 | 2010-06-17 | Miraial Kk | ウエハ収納容器 |
JP2010270823A (ja) * | 2009-05-21 | 2010-12-02 | Shin Etsu Polymer Co Ltd | パージバルブ及び基板収納容器 |
JP2012114133A (ja) * | 2010-11-22 | 2012-06-14 | Shin Etsu Polymer Co Ltd | 基板収納容器 |
JP2016015421A (ja) * | 2014-07-02 | 2016-01-28 | ミライアル株式会社 | 基板収納容器 |
JP2016119327A (ja) * | 2014-12-18 | 2016-06-30 | ミライアル株式会社 | 基板収納容器 |
WO2016135952A1 (ja) * | 2015-02-27 | 2016-09-01 | ミライアル株式会社 | 基板収納容器 |
JP2017050494A (ja) * | 2015-09-04 | 2017-03-09 | 信越ポリマー株式会社 | 基板収納容器及びその製造方法 |
JP2018505546A (ja) * | 2014-12-01 | 2018-02-22 | インテグリス・インコーポレーテッド | 基板収納容器の弁アセンブリ |
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JPS6057716B2 (ja) | 1978-12-25 | 1985-12-16 | 工業技術院長 | 半導体光位置検出器 |
JPS5524093B1 (ja) | 1979-08-07 | 1980-06-26 | ||
JP4006042B2 (ja) * | 1996-12-27 | 2007-11-14 | 株式会社ヴァンテック | ガスケットと同ガスケットによる容器の密閉構造 |
CN102017119B (zh) | 2008-03-13 | 2014-01-01 | 安格斯公司 | 具有管状环境控制部件的晶圆容器 |
CN102812545B (zh) | 2009-12-10 | 2016-08-03 | 恩特格里公司 | 用于微环境中均匀分布吹扫气体的多孔隔板 |
JP5715898B2 (ja) * | 2011-07-06 | 2015-05-13 | ミライアル株式会社 | 基板収納容器 |
KR102113139B1 (ko) * | 2013-09-11 | 2020-05-20 | 미라이얼 가부시키가이샤 | 기판수납용기 |
WO2015057739A1 (en) | 2013-10-14 | 2015-04-23 | Entegris, Inc. | Towers for substrate carriers |
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JP6271354B2 (ja) | 2014-06-30 | 2018-01-31 | 信越ポリマー株式会社 | 基板収納容器及びその製造方法 |
WO2016002005A1 (ja) * | 2014-07-01 | 2016-01-07 | ミライアル株式会社 | 基板収納容器 |
JP6450156B2 (ja) * | 2014-11-12 | 2019-01-09 | ミライアル株式会社 | ガスパージ用フィルタ |
KR101637498B1 (ko) * | 2015-03-24 | 2016-07-07 | 피코앤테라(주) | 웨이퍼 수납용기 |
US10672637B2 (en) * | 2015-09-04 | 2020-06-02 | Entegris, Inc. | Internal purge diffuser with offset manifold |
KR102461290B1 (ko) * | 2017-03-27 | 2022-11-01 | 신에츠 폴리머 가부시키가이샤 | 기판 수납 용기 |
WO2018203384A1 (ja) * | 2017-05-02 | 2018-11-08 | ミライアル株式会社 | 基板収納容器 |
TWI690771B (zh) * | 2018-01-11 | 2020-04-11 | 家登精密工業股份有限公司 | 光罩壓抵單元及應用其之極紫外光光罩容器 |
-
2018
- 2018-04-25 US US17/050,374 patent/US11948821B2/en active Active
- 2018-04-25 JP JP2020515376A patent/JP7032521B2/ja active Active
- 2018-04-25 KR KR1020207027383A patent/KR102520475B1/ko active IP Right Grant
- 2018-04-25 WO PCT/JP2018/016821 patent/WO2019207690A1/ja active Application Filing
- 2018-04-25 CN CN201880091729.0A patent/CN112074944B/zh active Active
-
2019
- 2019-04-23 TW TW108114099A patent/TWI804609B/zh active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010135387A (ja) * | 2008-12-02 | 2010-06-17 | Miraial Kk | ウエハ収納容器 |
JP2010270823A (ja) * | 2009-05-21 | 2010-12-02 | Shin Etsu Polymer Co Ltd | パージバルブ及び基板収納容器 |
JP2012114133A (ja) * | 2010-11-22 | 2012-06-14 | Shin Etsu Polymer Co Ltd | 基板収納容器 |
JP2016015421A (ja) * | 2014-07-02 | 2016-01-28 | ミライアル株式会社 | 基板収納容器 |
JP2018505546A (ja) * | 2014-12-01 | 2018-02-22 | インテグリス・インコーポレーテッド | 基板収納容器の弁アセンブリ |
JP2016119327A (ja) * | 2014-12-18 | 2016-06-30 | ミライアル株式会社 | 基板収納容器 |
WO2016135952A1 (ja) * | 2015-02-27 | 2016-09-01 | ミライアル株式会社 | 基板収納容器 |
JP2017050494A (ja) * | 2015-09-04 | 2017-03-09 | 信越ポリマー株式会社 | 基板収納容器及びその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
US11948821B2 (en) | 2024-04-02 |
WO2019207690A1 (ja) | 2019-10-31 |
TW201946196A (zh) | 2019-12-01 |
KR102520475B1 (ko) | 2023-04-12 |
US20210118713A1 (en) | 2021-04-22 |
CN112074944B (zh) | 2024-07-05 |
KR20210003732A (ko) | 2021-01-12 |
JP7032521B2 (ja) | 2022-03-08 |
TWI804609B (zh) | 2023-06-11 |
CN112074944A (zh) | 2020-12-11 |
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