JPWO2018012323A1 - ペリクル枠及びペリクル - Google Patents
ペリクル枠及びペリクル Download PDFInfo
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- JPWO2018012323A1 JPWO2018012323A1 JP2017562366A JP2017562366A JPWO2018012323A1 JP WO2018012323 A1 JPWO2018012323 A1 JP WO2018012323A1 JP 2017562366 A JP2017562366 A JP 2017562366A JP 2017562366 A JP2017562366 A JP 2017562366A JP WO2018012323 A1 JPWO2018012323 A1 JP WO2018012323A1
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- pellicle frame
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- aluminum alloy
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- 229910000838 Al alloy Inorganic materials 0.000 claims abstract description 46
- 238000000034 method Methods 0.000 claims abstract description 32
- 239000013078 crystal Substances 0.000 claims abstract description 17
- 238000004519 manufacturing process Methods 0.000 claims abstract description 17
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 13
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 10
- 239000012535 impurity Substances 0.000 claims abstract description 7
- 238000007743 anodising Methods 0.000 claims description 15
- 239000008207 working material Substances 0.000 claims description 14
- 238000010438 heat treatment Methods 0.000 claims description 12
- 239000003792 electrolyte Substances 0.000 claims description 11
- FEWJPZIEWOKRBE-UHFFFAOYSA-N Tartaric acid Natural products [H+].[H+].[O-]C(=O)C(O)C(O)C([O-])=O FEWJPZIEWOKRBE-UHFFFAOYSA-N 0.000 claims description 7
- 238000012545 processing Methods 0.000 claims description 7
- 235000002906 tartaric acid Nutrition 0.000 claims description 7
- 239000011975 tartaric acid Substances 0.000 claims description 7
- 229920005989 resin Polymers 0.000 claims description 5
- 239000011347 resin Substances 0.000 claims description 5
- 230000007547 defect Effects 0.000 abstract description 16
- 239000010407 anodic oxide Substances 0.000 abstract description 4
- 238000007689 inspection Methods 0.000 abstract description 3
- 239000011575 calcium Substances 0.000 description 55
- 239000000956 alloy Substances 0.000 description 48
- RGKMZNDDOBAZGW-UHFFFAOYSA-N aluminum calcium Chemical compound [Al].[Ca] RGKMZNDDOBAZGW-UHFFFAOYSA-N 0.000 description 48
- 229910045601 alloy Inorganic materials 0.000 description 43
- 239000000463 material Substances 0.000 description 43
- 239000000843 powder Substances 0.000 description 22
- 230000000694 effects Effects 0.000 description 11
- 239000000428 dust Substances 0.000 description 10
- 230000005496 eutectics Effects 0.000 description 10
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 9
- 230000000052 comparative effect Effects 0.000 description 9
- 230000015572 biosynthetic process Effects 0.000 description 8
- 238000001192 hot extrusion Methods 0.000 description 8
- 238000004043 dyeing Methods 0.000 description 6
- 241000519995 Stachys sylvatica Species 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 5
- 238000004512 die casting Methods 0.000 description 5
- 230000001771 impaired effect Effects 0.000 description 5
- 238000001459 lithography Methods 0.000 description 5
- 238000002441 X-ray diffraction Methods 0.000 description 4
- 239000012790 adhesive layer Substances 0.000 description 4
- 238000002048 anodisation reaction Methods 0.000 description 4
- 229910052791 calcium Inorganic materials 0.000 description 4
- 238000005266 casting Methods 0.000 description 4
- 238000005097 cold rolling Methods 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 4
- 239000004973 liquid crystal related substance Substances 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000010191 image analysis Methods 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 2
- 206010027146 Melanoderma Diseases 0.000 description 2
- 239000004820 Pressure-sensitive adhesive Substances 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- RKTYLMNFRDHKIL-UHFFFAOYSA-N copper;5,10,15,20-tetraphenylporphyrin-22,24-diide Chemical compound [Cu+2].C1=CC(C(=C2C=CC([N-]2)=C(C=2C=CC=CC=2)C=2C=CC(N=2)=C(C=2C=CC=CC=2)C2=CC=C3[N-]2)C=2C=CC=CC=2)=NC1=C3C1=CC=CC=C1 RKTYLMNFRDHKIL-UHFFFAOYSA-N 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000005868 electrolysis reaction Methods 0.000 description 2
- 238000005242 forging Methods 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 239000011777 magnesium Substances 0.000 description 2
- 229910052749 magnesium Inorganic materials 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000004663 powder metallurgy Methods 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 229920003002 synthetic resin Polymers 0.000 description 2
- 239000000057 synthetic resin Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 229910052720 vanadium Inorganic materials 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 229910000882 Ca alloy Inorganic materials 0.000 description 1
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical group [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 238000004040 coloring Methods 0.000 description 1
- 238000009749 continuous casting Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- FGJLAJMGHXGFDE-UHFFFAOYSA-L disodium;2,3-dihydroxybutanedioate;dihydrate Chemical compound O.O.[Na+].[Na+].[O-]C(=O)C(O)C(O)C([O-])=O FGJLAJMGHXGFDE-UHFFFAOYSA-L 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 238000005098 hot rolling Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000005551 mechanical alloying Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 238000000879 optical micrograph Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000007712 rapid solidification Methods 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 230000000452 restraining effect Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 229940092162 sodium tartrate dihydrate Drugs 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 238000009864 tensile test Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
- C22C1/04—Making non-ferrous alloys by powder metallurgy
- C22C1/0408—Light metal alloys
- C22C1/0416—Aluminium-based alloys
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
- G03F1/64—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof characterised by the frames, e.g. structure or material, including bonding means therefor
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C21/00—Alloys based on aluminium
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
- C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
- C22F1/04—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of aluminium or alloys based thereon
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
- C25D11/02—Anodisation
- C25D11/04—Anodisation of aluminium or alloys based thereon
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
- C25D11/02—Anodisation
- C25D11/04—Anodisation of aluminium or alloys based thereon
- C25D11/14—Producing integrally coloured layers
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
- C25D11/02—Anodisation
- C25D11/04—Anodisation of aluminium or alloys based thereon
- C25D11/18—After-treatment, e.g. pore-sealing
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
- G03F1/82—Auxiliary processes, e.g. cleaning or inspecting
- G03F1/84—Inspecting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/20—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces by extruding
- B22F2003/208—Warm or hot extruding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
- B22F2998/10—Processes characterised by the sequence of their steps
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
- C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Electrochemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Thermal Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Health & Medical Sciences (AREA)
- Environmental & Geological Engineering (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
Abstract
Description
アルミニウム合金製フレーム枠の表面に陽極酸化皮膜を備えたペリクル枠であって、
前記アルミニウム合金製フレーム枠は、
カルシウム(Ca):5.0 〜 10.0質量%、残部がアルミニウムと不可避的不純物を有し、
分散相であるAl4Ca相の面積(体積)率が25%以上であり、
前記Al4Ca相の一部の結晶構造が単斜晶であるアルミニウム合金からなり、
前記陽極酸化皮膜に分散する前記Al4Ca相が陽極酸化されており、
前記陽極酸化皮膜が黒色染料で染色されていること、
を特徴とするペリクル枠、を提供する。
5.0〜10.0質量%のCaを含み、残部がアルミニウムと不可避的不純物を有し、分散相であるAl4Ca相の体積率が25%以上であるアルミニウム合金鋳塊に塑性加工を施して、アルミニウム合金製塑性加工材を得る第一工程と、
前記アルミニウム合金製塑性加工材に対して、100〜300℃の温度範囲で熱処理を施す第二工程と、
前記熱処理を施した前記アルミニウム合金製塑性加工材に対して、酒石酸を電解質として含んだアルカリ性の電解液で陽極酸化処理を施す第三工程と、を有すること、
を特徴とするペリクル枠の製造方法、も提供する。
上記本発明のペリクル枠と、
前記ペリクル枠に支持されたペリクル膜と、
を有するペリクル、も提供する。
本発明のペリクル枠は、Al−Ca合金からなること、を特徴とするペリクル枠であり、一端面にペリクル膜接着剤を介してペリクル膜を張設することで、リソグラフィ用のペリクルとして使用することができる。
本発明のペリクル枠の製造方法は、5.0〜10.0質量%のCaを含み、残部がアルミニウムと不可避的不純物を有し、分散相であるAl4Ca相の体積率が25%以上であるアルミニウム合金鋳塊に塑性加工を施して、アルミニウム合金製塑性加工材を得る第一工程と、アルミニウム合金製塑性加工材に対して、100〜300℃の温度範囲で熱処理を施す第二工程と、熱処理を施したアルミニウム合金製塑性加工材に対して、酒石酸を電解質として含んだアルカリ性の電解液で陽極酸化処理を施す第三工程と、を有すること、を特徴とするものである。
表1の試料1に示す組成(質量%)を有するアルミニウム合金をDC鋳造法により、φ8インチの鋳塊(ビレット)に鋳造した後、550℃×4時間の均質化処理後、押出温度500℃で横幅180mm×厚さ8mmの平板状に塑性加工した。
表1の試料2に示す組成(質量%)を使用したこと以外は実施例と同様にして、膜厚7.1μmの陽極酸化皮膜を有する比較ペリクル枠1を得た。また、実施例と同様にして、比較ペリクル枠1の引張強度、耐力、ヤング率及びL*値を測定し、得られた結果を表2に示した。
陽極酸化電解液を8g/Lの水酸化ナトリウムとし、電解後染色処理を実施せずに蒸気封孔したこと以外は実施例と同様にして、膜厚6.6μmの陽極酸化皮膜を有する比較ペリクル枠2を得た。また、実施例と同様にして、比較ペリクル枠1の引張強度、耐力、ヤング率及びL*値を測定し、得られた結果を表2に示した。
2・・・ペリクル枠、
4・・・ペリクル膜貼り付け用接着層、
6・・・ペリクル膜、
8・・・露光原版(マスク又はレチクル)、
10・・・接着用粘着層。
Claims (7)
- アルミニウム合金製フレーム枠の表面に陽極酸化皮膜を備えたペリクル枠であって、
前記アルミニウム合金製フレーム枠は、
Ca:5.0〜10.0質量%、残部がアルミニウムと不可避的不純物を有し、
分散相であるAl4Ca相の面積(体積)率が25%以上であり、
前記Al4Ca相の一部の結晶構造が単斜晶であるアルミニウム合金からなり、
前記陽極酸化皮膜に分散する前記Al4Ca相が陽極酸化されており、
前記陽極酸化皮膜が黒色染料で染色されていること、
を特徴とするペリクル枠。 - 前記アルミニウム合金のV含有量及びFe含有量が、それぞれ0.0001〜0.005質量%及び0.05〜1.0質量%であること、
を特徴とする請求項1に記載のペリクル枠。 - 前記Al4Ca相の平均結晶粒径が1.5μm以下であること、
を特徴とする請求項1又は2に記載のペリクル枠。 - 前記陽極酸化皮膜上にさらに樹脂膜を有する、請求項1〜3のいずれかに記載のペリクル枠。
- 5.0〜10.0質量%のCaを含み、残部がアルミニウムと不可避的不純物を有し、分散相であるAl4Ca相の体積率が25%以上であるアルミニウム合金鋳塊に塑性加工を施して、アルミニウム合金製塑性加工材を得る第一工程と、
前記アルミニウム合金製塑性加工材に対して、100〜300℃の温度範囲で熱処理を施す第二工程と、
前記熱処理を施した前記アルミニウム合金製塑性加工材に対して、酒石酸を電解質として含んだアルカリ性の電解液で陽極酸化処理を施す第三工程と、を有すること、
を特徴とするペリクル枠の製造方法。 - 前記第一工程の前に、前記アルミニウム合金鋳塊を400℃以上の温度に保持する熱処理を施すこと、
を特徴とする請求項5に記載のペリクル枠の製造方法。 - 請求項1〜4のいずれかに記載のペリクル枠と、
前記ペリクル枠に支持されたペリクル膜と、を有すること、
を特徴とするペリクル。
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JP2016137647 | 2016-07-12 | ||
JP2016137647 | 2016-07-12 | ||
PCT/JP2017/024171 WO2018012323A1 (ja) | 2016-07-12 | 2017-06-30 | ペリクル枠及びペリクル |
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JP6288599B1 JP6288599B1 (ja) | 2018-03-07 |
JPWO2018012323A1 true JPWO2018012323A1 (ja) | 2018-07-12 |
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US (1) | US10955740B2 (ja) |
EP (1) | EP3486722A4 (ja) |
JP (1) | JP6288599B1 (ja) |
KR (1) | KR102337616B1 (ja) |
CN (1) | CN109416505B (ja) |
SG (1) | SG11201900286PA (ja) |
TW (1) | TWI724199B (ja) |
WO (1) | WO2018012323A1 (ja) |
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JP7139133B2 (ja) | 2018-04-03 | 2022-09-20 | 信越化学工業株式会社 | ペリクルフレーム、ペリクル、及びペリクルフレームの製造方法 |
JP2023137538A (ja) * | 2022-03-18 | 2023-09-29 | 東洋アルミニウム株式会社 | アルミニウム合金箔、及びその製造方法 |
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JP3777987B2 (ja) * | 2000-01-25 | 2006-05-24 | 日本軽金属株式会社 | ペリクル枠およびペリクル枠の製造方法 |
JP5481106B2 (ja) * | 2009-06-24 | 2014-04-23 | 信越化学工業株式会社 | ペリクルフレーム及びリソグラフィ用ペリクル |
JP4889778B2 (ja) * | 2009-10-02 | 2012-03-07 | 信越化学工業株式会社 | ペリクルの製造方法及びリソグラフィ用ペリクル |
JP2011105982A (ja) * | 2009-11-16 | 2011-06-02 | Nissan Motor Co Ltd | アルミニウム合金およびその製造方法 |
KR101199912B1 (ko) * | 2009-11-20 | 2012-11-09 | 한국생산기술연구원 | 알루미늄 합금의 제조 방법 |
CA2721761C (en) * | 2009-11-20 | 2016-04-19 | Korea Institute Of Industrial Technology | Aluminum alloy and manufacturing method thereof |
JP5741561B2 (ja) * | 2012-12-04 | 2015-07-01 | 日本軽金属株式会社 | ペリクル枠及びその製造方法 |
JP5962866B2 (ja) * | 2013-10-23 | 2016-08-03 | 日本軽金属株式会社 | ペリクル枠及びその製造方法 |
TWI592742B (zh) * | 2013-10-28 | 2017-07-21 | Nippon Light Metal Co | Film frame and method of making the same |
JP6446177B2 (ja) * | 2014-01-10 | 2018-12-26 | 旭化成株式会社 | ペリクル枠体及びペリクル |
CN104775062B (zh) * | 2015-04-21 | 2017-02-22 | 宝山钢铁股份有限公司 | 一种高强度铝合金材料、铝合金板及其制造方法 |
CN104775059B (zh) * | 2015-04-21 | 2017-03-22 | 宝山钢铁股份有限公司 | 具有长时间自然时效稳定性的Al‑Mg‑Si系铝合金材料、铝合金板及其制造方法 |
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EP3486722A1 (en) | 2019-05-22 |
JP6288599B1 (ja) | 2018-03-07 |
WO2018012323A1 (ja) | 2018-01-18 |
TWI724199B (zh) | 2021-04-11 |
TW201821626A (zh) | 2018-06-16 |
US10955740B2 (en) | 2021-03-23 |
CN109416505A (zh) | 2019-03-01 |
KR102337616B1 (ko) | 2021-12-08 |
SG11201900286PA (en) | 2019-02-27 |
KR20190028470A (ko) | 2019-03-18 |
EP3486722A4 (en) | 2020-03-11 |
US20190235377A1 (en) | 2019-08-01 |
CN109416505B (zh) | 2022-04-08 |
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