JPWO2017164052A1 - 複合センサ - Google Patents
複合センサ Download PDFInfo
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- JPWO2017164052A1 JPWO2017164052A1 JP2018507273A JP2018507273A JPWO2017164052A1 JP WO2017164052 A1 JPWO2017164052 A1 JP WO2017164052A1 JP 2018507273 A JP2018507273 A JP 2018507273A JP 2018507273 A JP2018507273 A JP 2018507273A JP WO2017164052 A1 JPWO2017164052 A1 JP WO2017164052A1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/005—Measuring angular rate using gyroscopic effects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
- G01C19/5649—Signal processing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5776—Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
- G01P15/122—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by metal resistance strain gauges, e.g. wire resistance strain gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
- G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups
- G01P21/02—Testing or calibrating of apparatus or devices covered by the preceding groups of speedometers
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Signal Processing (AREA)
- Gyroscopes (AREA)
Abstract
Description
32 駆動電極
33 モニタ電極
34,35 センス電極
30 角速度検出素子
109 加速度検出回路
80 加速度検出素子
40 ドライブ回路
74 センス回路
43 タイミング制御回路
116,119a,119b バンドパスフィルター
117,120a,120b 振幅判定回路
118,121a,121b 安定性判定回路
1000,1000a,1000b 複合センサ
Claims (8)
- 振動体と、
駆動信号を受けて前記振動体を振動させる駆動電極と、
前記振動体が振動している状態で前記振動体に印加された角速度に応じてセンス信号を出力するセンス電極と、
前記振動体の振動に応じたモニタ信号を出力するモニタ電極と、
を有する角速度検出素子と、
前記モニタ信号に基づき前記角速度検出素子の前記駆動電極に前記駆動信号を入力するドライブ回路と、
前記センス信号に基づいて、前記角速度を示す角速度信号を出力するセンス回路と、
印加された加速度に応じた信号を出力する加速度検出素子と、
前記加速度検出素子から出力された前記信号に基づいて、前記加速度を示す加速度信号を出力する加速度検出回路と、
前記加速度信号が入力される第1のバンドパスフィルターと、
前記第1のバンドパスフィルターから出力された第1の信号の振幅に応じて前記角速度信号が無効か否かを判定する第1の振幅判定回路と、
前記角速度信号と前記加速度信号とを含むセンサ出力信号を出力するタイミング制御回路と、
を備えた複合センサ。 - 前記第1の振幅判定回路は、
前記第1の信号の前記振幅が所定の閾値以上であるときに前記角速度信号が無効であると判定し、
前記第1の信号の前記振幅が前記所定の閾値より小さいときに前記角速度信号が無効でないと判定する、
ように構成されている、請求項1に記載の複合センサ。 - 前記駆動電極は前記駆動信号を受けて駆動周波数で前記振動体を振動させ、
前記振動体は前記駆動周波数と異なる検出周波数の共振周波数を有し、
前記第1のバンドパスフィルターは前記加速度信号の第1の所定の通過周波数を有する成分のみを実質的に通過させて前記第1の信号として出力し、
前記第1のバンドパスフィルターの前記第1の所定の通過周波数は、前記駆動周波数と前記検出周波数との差である離調周波数である、請求項1または2に記載の複合センサ。 - 前記加速度信号が入力される第2のバンドパスフィルターと、
前記第2のバンドパスフィルターから出力された第2の信号の振幅に応じて前記角速度信号が無効か否かを判定する第2の振幅判定回路と、
をさらに備え、
前記第2のバンドパスフィルターは前記加速度信号の前記第1の所定の通過周波数と異なる第2の通過周波数を有する成分のみを実質的に通過させて前記第2の信号として出力する、請求項3に記載の複合センサ。 - 前記駆動電極は前記駆動信号を受けて駆動周波数で前記振動体を振動させ、
前記振動体は前記駆動周波数と異なる検出周波数の共振周波数を有し、
前記第1のバンドパスフィルターは前記加速度信号の第1の所定の通過周波数を有する成分のみを実質的に通過させて前記第1の信号として出力し、
前記第1のバンドパスフィルターの前記第1の所定の通過周波数は、前記検出周波数または前記駆動周波数である、請求項1または2に記載の複合センサ。 - 前記加速度信号が入力される第2のバンドパスフィルターと、
前記第2のバンドパスフィルターから出力された第2の信号の振幅に応じて前記角速度信号が無効か否かを判定する第2の振幅判定回路と、
をさらに備え、
前記第2のバンドパスフィルターは前記加速度信号の前記第1の所定の通過周波数と異なる第2の通過周波数を有する成分のみを実質的に通過させて前記第2の信号として出力する、請求項5に記載の複合センサ。 - 前記第1の振幅判定回路が前記角速度信号は無効であると判定すると、前記タイミング制御回路は前記角速度信号が無効であると判定した直前の前記角速度信号の値を維持し、
前記センサ出力信号は前記角速度信号の前記維持された値を含む、請求項1から6のいずれか一項に記載の複合センサ。 - 前記センサ出力信号は、前記角速度信号が無効か否かを示す自己診断信号をさらに含む、請求項1から7のいずれか一項に記載の複合センサ。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016059372 | 2016-03-24 | ||
JP2016059372 | 2016-03-24 | ||
JP2016172420 | 2016-09-05 | ||
JP2016172420 | 2016-09-05 | ||
PCT/JP2017/010570 WO2017164052A1 (ja) | 2016-03-24 | 2017-03-16 | 複合センサ |
Publications (1)
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JPWO2017164052A1 true JPWO2017164052A1 (ja) | 2019-02-07 |
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US (1) | US20190257655A1 (ja) |
JP (1) | JPWO2017164052A1 (ja) |
WO (1) | WO2017164052A1 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
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GB2586081B (en) * | 2019-08-02 | 2023-12-20 | Atlantic Inertial Systems Ltd | Signal processing |
US12039800B2 (en) * | 2021-03-31 | 2024-07-16 | Apple Inc. | Signal processing for segmented thin-film acoustic imaging systems for portable electronic devices |
US12000967B2 (en) * | 2021-03-31 | 2024-06-04 | Apple Inc. | Regional gain control for segmented thin-film acoustic imaging systems |
JP2023074208A (ja) * | 2021-11-17 | 2023-05-29 | 株式会社東芝 | センサ及び電子装置 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0592713A (ja) * | 1991-10-03 | 1993-04-16 | Nissan Motor Co Ltd | 車両用サスペンシヨン |
JP2004294335A (ja) * | 2003-03-27 | 2004-10-21 | Denso Corp | 振動型角速度センサの異常検出装置、異常検出方法、異常検出用プログラム並びに車両制御システム |
JP2006214813A (ja) * | 2005-02-02 | 2006-08-17 | Dkk Toa Corp | 環境測定装置 |
JP2008170294A (ja) * | 2007-01-12 | 2008-07-24 | Matsushita Electric Ind Co Ltd | 角速度センサ |
WO2014030346A1 (ja) * | 2012-08-22 | 2014-02-27 | パナソニック株式会社 | 物理量センサ |
JP2014149218A (ja) * | 2013-02-01 | 2014-08-21 | Hitachi Automotive Systems Ltd | 慣性力検出装置 |
JP2016197049A (ja) * | 2015-04-03 | 2016-11-24 | 株式会社デンソー | 角速度検出装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPWO2005080919A1 (ja) * | 2004-02-20 | 2007-10-25 | 松下電器産業株式会社 | 角速度センサ |
KR100972078B1 (ko) * | 2008-04-04 | 2010-07-22 | 파나소닉 주식회사 | 센서 장치 |
WO2015072090A1 (ja) * | 2013-11-14 | 2015-05-21 | パナソニックIpマネジメント株式会社 | 物理量検出回路、物理量センサ及び電子機器 |
-
2017
- 2017-03-16 JP JP2018507273A patent/JPWO2017164052A1/ja active Pending
- 2017-03-16 WO PCT/JP2017/010570 patent/WO2017164052A1/ja active Application Filing
- 2017-03-16 US US16/084,012 patent/US20190257655A1/en not_active Abandoned
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0592713A (ja) * | 1991-10-03 | 1993-04-16 | Nissan Motor Co Ltd | 車両用サスペンシヨン |
JP2004294335A (ja) * | 2003-03-27 | 2004-10-21 | Denso Corp | 振動型角速度センサの異常検出装置、異常検出方法、異常検出用プログラム並びに車両制御システム |
JP2006214813A (ja) * | 2005-02-02 | 2006-08-17 | Dkk Toa Corp | 環境測定装置 |
JP2008170294A (ja) * | 2007-01-12 | 2008-07-24 | Matsushita Electric Ind Co Ltd | 角速度センサ |
WO2014030346A1 (ja) * | 2012-08-22 | 2014-02-27 | パナソニック株式会社 | 物理量センサ |
JP2014149218A (ja) * | 2013-02-01 | 2014-08-21 | Hitachi Automotive Systems Ltd | 慣性力検出装置 |
JP2016197049A (ja) * | 2015-04-03 | 2016-11-24 | 株式会社デンソー | 角速度検出装置 |
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US20190257655A1 (en) | 2019-08-22 |
WO2017164052A1 (ja) | 2017-09-28 |
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