JPWO2006134709A1 - Substrate transfer device - Google Patents

Substrate transfer device Download PDF

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JPWO2006134709A1
JPWO2006134709A1 JP2007521175A JP2007521175A JPWO2006134709A1 JP WO2006134709 A1 JPWO2006134709 A1 JP WO2006134709A1 JP 2007521175 A JP2007521175 A JP 2007521175A JP 2007521175 A JP2007521175 A JP 2007521175A JP WO2006134709 A1 JPWO2006134709 A1 JP WO2006134709A1
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handling device
glass substrate
substrate
taking
buffer
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吉澤　武徳
武徳 吉澤
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Sharp Corp
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • B65G49/069—Means for avoiding damage to stacked plate glass, e.g. by interposing paper or powder spacers in the stack
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0294—Vehicle bodies

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Specific Conveyance Elements (AREA)
  • Wrapping Of Specific Fragile Articles (AREA)

Abstract

設置面積の増大を抑えることができる基板搬送装置を提供すること。 複数のガラス基板３が収納された一のガラス基板梱包箱２から該ガラス基板３を取り出す第１のハンドリング装置６及び第２のハンドリング装置７と、第１のハンドリング装置６により取り出されたガラス基板３を搬送する第１のコンベア９及び第２のハンドリング装置７により取り出されたガラス基板３を搬送する第２のコンベア１０とを備えると共に、第１のハンドリング装置６と第２のハンドリング装置７が一のガラス基板梱包箱２の両側近傍に各々配置されてガラス基板３を交互に取り出す。To provide a substrate transfer device capable of suppressing an increase in installation area. A first handling device 6 and a second handling device 7 for taking out the glass substrate 3 from one glass substrate packaging box 2 in which a plurality of glass substrates 3 are stored, and a glass substrate taken out by the first handling device 6 3 and a second conveyor 10 for transporting the glass substrate 3 taken out by the second handling device 7, and a first handling device 6 and a second handling device 7 are provided. The glass substrates 3 are alternately taken out in the vicinity of both sides of one glass substrate packaging box 2.

Description

本発明は、液晶パネル用のガラス基板などが複数枚収納された基板梱包箱から基板を搬送する装置に関する。  The present invention relates to an apparatus for transporting a substrate from a substrate packaging box in which a plurality of glass substrates for a liquid crystal panel and the like are stored.

近年、液晶パネルなどの平面型の表示装置に用いられるガラス基板は大型化してきていることから、トラック輸送等する際のガラス基板梱包箱として、図４に示すような、複数のガラス基板３及び該ガラス基板３に挟んだ緩衝材としての合紙４とを傾斜させて積み重ねた状態で積載する斜め積みパレット２を使用して、運搬コストを下げるようにしている。そして、このパレット２から、ガラス基板３を１枚１枚取り出して加工ライン等に搬送する装置として、一般的には、図５に示すようなガラス基板搬送装置２０が用いられている。  In recent years, since glass substrates used in flat display devices such as liquid crystal panels have become larger, a plurality of glass substrates 3 as shown in FIG. The slant stacking pallet 2 loaded in a state where the interleaving paper 4 as a buffer material sandwiched between the glass substrates 3 is tilted and stacked is used to reduce the transportation cost. As a device for taking out the glass substrates 3 one by one from the pallet 2 and transporting them to a processing line or the like, a glass substrate transporting device 20 as shown in FIG. 5 is generally used.

図示されるようにガラス基板搬送装置２０には、パレット２が載置されるターンテーブル２１と、ガラス基板３を取り出すハンドリング装置２２と、合紙４を除去する合紙除去装置２３と、取り出したガラス基板３を洗浄装置などへ搬送するコンベア２４が備えられている。  As shown in the figure, the glass substrate transport device 20 has a turntable 21 on which the pallet 2 is placed, a handling device 22 for taking out the glass substrate 3, an interleaf removal device 23 for removing the interleaf 4, and a takeout. A conveyor 24 for conveying the glass substrate 3 to a cleaning device or the like is provided.

図６は、このようなガラス基板搬送装置２０を用いて、ガラス基板３を取り出してコンベア２４に載せる手順とそれに要する時間を示したタイミングチャートである。先ず、ハンドリング装置２２の動作について説明する。ハンドリング装置２２の取る動作２２ａとは、ガラス基板３を取りに行く動作を開始してからガラス基板３をアーム２５に保持するまでをいい、この動作に１４秒かかる。ハンドリング装置２２の運ぶ動作２２ｂとは、保持したガラス基板３を取り出してコンベア２４にまで運ぶ動作をいい、この動作に８秒かかる。ハンドリング装置２２の置く動作２２ｃとは、ガラス基板３を放してコンベア２４に載置するまでをいい、この動作に１０秒かかる。ハンドリング装置２２の戻る動作２２ｄとは、コンベア２４にガラス基板３を載置してからアーム２５を取る動作２２ａの開始位置に戻すまでをいい、この動作に８秒かかる。従って、ハンドリング装置２２のガラス基板３を取りに行く動作を開始してから戻ってくるまでにかかる時間は４０秒である。  FIG. 6 is a timing chart showing a procedure for taking out the glass substrate 3 and placing it on the conveyor 24 using such a glass substrate transfer device 20 and the time required for the procedure. First, the operation of the handling device 22 will be described. The operation 22a taken by the handling device 22 refers to the time from the start of the operation for taking the glass substrate 3 to the holding of the glass substrate 3 on the arm 25, which takes 14 seconds. The operation 22b of the handling device 22 refers to an operation of taking out the held glass substrate 3 and transporting it to the conveyor 24, and this operation takes 8 seconds. The operation 22c of the handling device 22 means that the glass substrate 3 is released and placed on the conveyor 24, and this operation takes 10 seconds. The returning operation 22d of the handling device 22 refers to the time from placing the glass substrate 3 on the conveyor 24 to returning to the start position of the operation 22a for taking the arm 25, and this operation takes 8 seconds. Therefore, it takes 40 seconds from the start of the operation for taking the glass substrate 3 of the handling device 22 to the return.

次に、合紙除去装置２３の動作について説明する。合紙除去装置２３の取る動作２３ａとは、合紙４を取りに行く動作を開始してから合紙４をアーム２６に保持するまでをいい、この動作に３秒かかる。具体的には、この合紙除去装置２３の取る動作２３ａは、ハンドリング装置２２の取る動作２２ａが終了してから開始されるようになっている（矢印Ｅ）。合紙除去装置２３の運ぶ動作２３ｂとは、取り出した合紙４を合紙投入ケース２７まで運ぶ動作をいい、この動作に５秒かかる。合紙除去装置２３の置く動作２３ｃとは、合紙投入ケース２７に合紙４を放して合紙投入ケース２７に投入するまでをいい、この動作に７秒かかる。合紙除去装置２３の戻る動作２３ｄとは、合紙４を合紙投入ケース２７に投入してからアーム２６を取る動作２３ａの開始位置に戻すまでをいい、この動作に５秒かかる。従って、合紙除去装置２３の合紙４を取りに行く動作を開始してから戻ってくるまでにかかる時間は２０秒である。  Next, the operation of the slip sheet removing device 23 will be described. The operation 23a taken by the slip sheet removing device 23 refers to the period from the start of the operation for taking the slip sheet 4 to the holding of the slip sheet 4 on the arm 26, and this operation takes 3 seconds. Specifically, the operation 23a taken by the slip sheet removing device 23 is started after the operation 22a taken by the handling device 22 is completed (arrow E). The operation 23b of the slip sheet removing device 23 refers to an operation of transporting the extracted slip sheet 4 to the slip sheet input case 27, and this operation takes 5 seconds. The operation 23c of the slip-sheet removing device 23 refers to the period from the time when the slip-sheet 4 is released to the slip-sheet feeding case 27 and the time when the slip-sheet feeding case 27 is loaded. The return operation 23d of the slip sheet removing device 23 refers to the period from when the slip sheet 4 is loaded into the slip sheet feeding case 27 to when the arm 26 is returned to the start position of the motion 23a, and this operation takes 5 seconds. Therefore, it takes 20 seconds from the start of the operation of taking the slip sheet 4 of the slip sheet removing device 23 to the return.

なお、本発明に関連する先行技術文献として、特開２０００−３５１４４９号公報が挙げられる。  In addition, JP-A-2000-351449 is cited as a prior art document related to the present invention.

このガラス基板搬送装置２０を用いてガラス基板３を取り出す枚数を増加させるには、通常、図７に示すようにガラス基板搬送装置２０をもう１台増設した、ガラス基板搬送装置２８として構成することが行われている。図８は、このようなガラス基板搬送装置２０の２台分のガラス基板搬送装置２８を用いて、ガラス基板３を取り出してコンベア２４，２４に載せる手順とそれに要する時間を示したタイミングチャートである。  In order to increase the number of glass substrates 3 to be taken out using this glass substrate transfer device 20, it is usually configured as a glass substrate transfer device 28 with an additional glass substrate transfer device 20 as shown in FIG. Has been done. FIG. 8 is a timing chart showing a procedure for taking out the glass substrate 3 and placing it on the conveyors 24 and 24 using the glass substrate transfer devices 28 for the two glass substrate transfer devices 20 as described above, and the time required for the steps. .

しかしながら、ガラス基板の大型化が進むに中、このようなガラス基板搬送装置を構成するハンドリング装置、合紙除去装置、コンベア等も大型化しており、増設による設置面積の増大を抑えることが望まれている。  However, as the size of glass substrates increases, handling devices, slip sheet removing devices, conveyors, and the like that constitute such glass substrate transfer devices are also increasing in size, and it is desirable to suppress an increase in installation area due to the addition. ing.

そこで、本発明が解決しようとする課題は、設置面積の増大を抑えることができる基板搬送装置を提供することである。  Therefore, a problem to be solved by the present invention is to provide a substrate transfer apparatus that can suppress an increase in installation area.

上記課題を解決するため、本発明に係る基板搬送装置は、複数の基板が収納された一の基板梱包箱から該基板を取り出す第１のハンドリング装置及び第２のハンドリング装置と、前記第１のハンドリング装置により取り出された基板を搬送する第１のコンベア及び前記第２のハンドリング装置により取り出された基板を搬送する第２のコンベアとを備えると共に、前記第１のハンドリング装置と前記第２のハンドリング装置が前記一の基板梱包箱の両側近傍に各々配置されて前記基板を交互に取り出すことを要旨とするものである。  In order to solve the above-described problems, a substrate transport apparatus according to the present invention includes a first handling device and a second handling device that take out a substrate from a substrate packaging box in which a plurality of substrates are stored, and the first handling device. A first conveyor for transporting the substrate taken out by the handling device and a second conveyor for transporting the substrate taken out by the second handling device; and the first handling device and the second handling The gist is that the apparatus is arranged near both sides of the one substrate packaging box to alternately take out the substrates.

この場合、前記基板梱包箱は、複数の基板及び該基板に挟んだ緩衝材とを積み重ねた状態で積載するパレットであり、更に、前記緩衝材を取り去る一の緩衝材除去装置を備えると共に、この緩衝材除去装置が前記第１のハンドリング装置と前記第２のハンドリング装置の間の近傍に配置されている構成にすると良い。  In this case, the substrate packaging box is a pallet on which a plurality of substrates and a buffer material sandwiched between the substrates are stacked, and further includes a buffer material removing device for removing the buffer material, It is preferable that the cushioning material removing device is disposed in the vicinity between the first handling device and the second handling device.

更に、前記第１のハンドリング装置が基板を取る動作を終了すると、前記緩衝剤除去装置が緩衝剤を取る動作を開始し、該緩衝剤除去装置が該緩衝剤を運ぶ動作を終了すると、前記第２のハンドリング装置が次の基板を取る動作を開始し、該第２のハンドリング装置７が該基板を取る動作を終了すると、前記緩衝剤除去装置が次の緩衝剤を取る動作を開始し、該緩衝剤除去装置が該緩衝剤を運ぶ動作を終了すると、前記第１のハンドリング装置が更に次の基板を取る動作を開始するという手順を繰り返し行う構成にすると良い。  Further, when the operation of taking the substrate is finished by the first handling device, the buffer removing device starts the operation of taking the buffer, and when the buffer removing device is finished carrying the buffer, When the second handling device starts the operation of taking the next substrate and the second handling device 7 finishes the operation of taking the substrate, the buffer removal device starts the operation of taking the next buffer, When the buffer removal device finishes the operation of transporting the buffer, the first handling device may further repeat the procedure of starting the operation of taking the next substrate.

上記構成を有する基板搬送装置によれば、一の基板梱包箱から該基板を取り出す第１のハンドリング装置及び第２のハンドリング装置と、第１のハンドリング装置により取り出された基板を搬送する第１のコンベア及び第２のハンドリング装置により取り出された基板を搬送する第２のコンベアとを備えると共に、第１のハンドリング装置と第２のハンドリング装置が一の基板梱包箱の両側近傍に各々配置されて基板を交互に取り出すという構成なので、従来技術の増設と比べて基板梱包箱１つ分の設置面積が縮小され、増設による基板搬送装置の設置面積の増大を抑えることができる。  According to the substrate transport apparatus having the above configuration, the first handling device and the second handling device that take out the substrate from one substrate packaging box, and the first handling device that transports the substrate taken out by the first handling device. And a second conveyor for transporting the substrate taken out by the conveyor and the second handling device, and the first handling device and the second handling device are arranged in the vicinity of both sides of one substrate packaging box, respectively. Therefore, the installation area for one board packaging box is reduced as compared with the expansion of the prior art, and the increase in the installation area of the board transfer device due to the expansion can be suppressed.

この場合、基板梱包箱は、複数の基板及び該基板に挟んだ緩衝材とを積み重ねた状態で積載するパレットであり、更に、緩衝材を取り去る一の緩衝材除去装置を備えると共に、この緩衝材除去装置が第１のハンドリング装置と第２のハンドリング装置の間の近傍に配置されている構成にすれば、従来技術の増設と比べて緩衝材である合紙を除去する装置１台分の設置面積も縮小でき、増設による基板搬送装置の設置面積の増大を抑えることができる。  In this case, the substrate packaging box is a pallet on which a plurality of substrates and a buffer material sandwiched between the substrates are stacked, and further includes one buffer material removing device for removing the buffer material, and the buffer material. If the removing device is arranged in the vicinity between the first handling device and the second handling device, the installation for one device that removes the interleaving paper, which is a buffer material, compared to the expansion of the prior art The area can also be reduced, and an increase in the installation area of the substrate transfer apparatus due to the expansion can be suppressed.

更に、前記第１のハンドリング装置が基板を取る動作を終了すると、前記緩衝剤除去装置が緩衝剤を取る動作を開始し、該緩衝剤除去装置が該緩衝剤を運ぶ動作を終了すると、前記第２のハンドリング装置が次の基板を取る動作を開始し、該第２のハンドリング装置７が該基板を取る動作を終了すると、前記緩衝剤除去装置が次の緩衝剤を取る動作を開始し、該緩衝剤除去装置が該緩衝剤を運ぶ動作を終了すると、前記第１のハンドリング装置が更に次の基板を取る動作を開始するという手順を繰り返し行う構成にすれば、緩衝剤除去装置の可動率を向上させることができる。  Further, when the operation of taking the substrate is finished by the first handling device, the buffer removing device starts the operation of taking the buffer, and when the buffer removing device is finished carrying the buffer, When the second handling device starts the operation of taking the next substrate and the second handling device 7 finishes the operation of taking the substrate, the buffer removal device starts the operation of taking the next buffer, When the buffer removal device finishes the operation of transporting the buffer, the first handling device further repeats the procedure of starting the operation of taking the next substrate. Can be improved.

本発明の一実施形態に係るガラス基板搬送装置の概略構成を示した図である。It is the figure which showed schematic structure of the glass substrate conveying apparatus which concerns on one Embodiment of this invention. 図１のガラス基板搬送装置の動作の手順とそれに要する時間を示したタイミングチャートである。It is a timing chart which showed the procedure of the operation | movement of the glass substrate conveying apparatus of FIG. 1, and the time which it requires. 図１に示したターンテーブルの変形例を示した図である。It is the figure which showed the modification of the turntable shown in FIG. 従来用いられてきた複数のガラス基板及び該ガラス基板に挟んだ合紙とを傾斜させて積み重ねた状態で積載する斜め積みパレットの概略構成を示した図である。It is the figure which showed schematic structure of the diagonal pallet loaded in the state which inclined and stacked the several glass substrate used conventionally and the slip sheet pinched | interposed between this glass substrate. 従来用いられてきたガラス基板搬送装置の概略構成を示した図である。It is the figure which showed schematic structure of the glass substrate conveying apparatus used conventionally. 図５のガラス基板搬送装置の動作の手順とそれに要する時間を示したタイミングチャートである。FIG. 6 is a timing chart showing an operation procedure of the glass substrate transfer apparatus of FIG. 5 and a time required for the operation procedure. 図５のガラス基板搬送装置が２台に増設されたガラス基板搬送装置を示した図である。It is the figure which showed the glass substrate conveying apparatus with which the glass substrate conveying apparatus of FIG. 図７のガラス基板搬送装置の動作の手順とそれに要する時間を示したタイミングチャートである。It is the timing chart which showed the procedure of operation | movement of the glass substrate conveying apparatus of FIG. 7, and the time which it requires.

以下に、本発明に係る基板搬送装置の実施の形態ついて、図面を参照して詳細に説明する。図１は本発明の一実施形態に係るガラス基板搬送装置の概略構成、図２はガラス基板搬送装置の動作の手順とそれに要する時間を示したタイミングチャートを示している。尚、本実施例で用いられるガラス基板梱包箱は、従来技術で説明した図４の斜め積みパレット２である。  Hereinafter, embodiments of a substrate transfer apparatus according to the present invention will be described in detail with reference to the drawings. FIG. 1 is a schematic configuration of a glass substrate transfer apparatus according to an embodiment of the present invention, and FIG. 2 is a timing chart showing the operation procedure of the glass substrate transfer apparatus and the time required for it. In addition, the glass substrate packaging box used in the present embodiment is the oblique stacking pallet 2 of FIG. 4 described in the prior art.

図示されるガラス基板搬送装置１には、パレット２が載置される１台のターンテーブル５と、ガラス基板３を取り出す２台の第１ハンドリング装置６及び第２ハンドリング装置７と、合紙４を除去する１台の合紙除去装置８と、取り出したガラス基板３を次工程へ搬送する２台の第１コンベア９及び第２コンベア１０とが備えられている。  The illustrated glass substrate transfer device 1 includes a turntable 5 on which a pallet 2 is placed, two first handling devices 6 and a second handling device 7 for taking out the glass substrate 3, and a slip sheet 4. Are provided with one interleaf removal device 8 and two first conveyors 9 and a second conveyor 10 that convey the taken-out glass substrate 3 to the next process.

ターンテーブル５は、上側に次にガラス基板３を取り出すパレット２を載置しておき、下側のパレット２が空になったら、ターンテーブル５を回転させて上側と下側のパレット２を切り替える装置である。尚、ターンテーブル５の代わりに、図３に示すような、パレット搬送装置１１を用いても良い。このパレット搬送装置１１には、コの字状のコンベアからなる第１パレット搬送コンベア１２と、この第１パレット搬送コンベア１２の中間部とハンドリング装置６，７と合紙除去装置８が配置された取り出し作業場１４とを往復搬送する第２パレット搬送コンベア１３とが備えられている。  The turntable 5 is placed on the upper side with a pallet 2 for taking out the glass substrate 3 next, and when the lower pallet 2 becomes empty, the turntable 5 is rotated to switch between the upper and lower pallets 2. Device. Instead of the turntable 5, a pallet transport device 11 as shown in FIG. The pallet transport device 11 is provided with a first pallet transport conveyor 12 composed of a U-shaped conveyor, an intermediate portion of the first pallet transport conveyor 12, handling devices 6 and 7, and a slip sheet removing device 8. A second pallet transfer conveyor 13 that reciprocates with the take-out work place 14 is provided.

図１に示される第１ハンドリング装置６及び第２ハンドリング装置７は、例えば多関節産業用ロボットからなり、３本のアーム１５の表面には、図示しない複数の吸着パットがそれぞれ設けられている。パレット２からのガラス基板３の取り出しは、このアーム１５によって吸着パットをガラス基板３に押し付けてガラス基板３を１枚ずつ支持し、アーム１５を回動させて行われる。取り出したガラス基板３は、下流に設けられたコンベア９，１０に載置され、コンベア９，１０によりそれぞれ例えば洗浄装置などに搬送されるようになっている。  The first handling device 6 and the second handling device 7 shown in FIG. 1 are made of, for example, an articulated industrial robot, and a plurality of suction pads (not shown) are provided on the surfaces of the three arms 15, respectively. The glass substrate 3 is taken out from the pallet 2 by pressing the suction pad against the glass substrate 3 by the arm 15 to support the glass substrates 3 one by one and rotating the arm 15. The glass substrate 3 taken out is placed on conveyors 9 and 10 provided downstream, and is conveyed by the conveyors 9 and 10 to, for example, a cleaning device.

合紙除去装置８も、例えば多関節産業用ロボットからなり、１本のアーム１６の表面には、図示しない吸着パットが設けられている。パレット２からの合紙４の除去は、アーム１６によって吸着パットを合紙４に押し付けて合紙４を１枚ずつ支持し、アーム１６を回動させて行われる。除去された合紙４は、近傍に設けられた合紙投入ケース１７に投入することで回収されるようになっている。  The slip sheet removing device 8 is also composed of, for example, an articulated industrial robot, and a suction pad (not shown) is provided on the surface of one arm 16. The removal of the slip sheet 4 from the pallet 2 is performed by pressing the suction pad against the slip sheet 4 by the arm 16 to support the slip sheets 4 one by one and rotating the arm 16. The removed interleaving paper 4 is collected by being placed in an interleaving paper placing case 17 provided in the vicinity.

図２は、このようなガラス基板搬送装置１を用いて、パレット２からガラス基板３を取り出してコンベア９，１０に載せる手順とそれに要する時間を示したタイミングチャートである。先ず、第１ハンドリング装置６の動作について説明する。第１ハンドリング装置６の取る動作６ａとは、ガラス基板３を取りに行く動作を開始してからガラス基板３をアーム１５に保持するまでをいい、この動作に１４秒かかる。第１ハンドリング装置６の運ぶ動作６ｂとは、保持したガラス基板３を取り出して第１コンベア９まで運ぶ動作をいい、この動作に８秒かかる。第１ハンドリング装置６の置く動作６ｃとは、ガラス基板３を放して第１コンベア９に載置するまでをいい、この動作に１０秒かかる。  FIG. 2 is a timing chart showing a procedure for taking out the glass substrate 3 from the pallet 2 and placing it on the conveyors 9 and 10 using such a glass substrate transport apparatus 1 and the time required for the procedure. First, the operation of the first handling device 6 will be described. The operation 6a taken by the first handling device 6 refers to the period from the start of the operation for taking the glass substrate 3 to the holding of the glass substrate 3 on the arm 15, and this operation takes 14 seconds. The operation 6b carried by the first handling device 6 refers to an operation of taking out the held glass substrate 3 and carrying it to the first conveyor 9, and this operation takes 8 seconds. The operation 6c of the first handling device 6 refers to the time until the glass substrate 3 is released and placed on the first conveyor 9, and this operation takes 10 seconds.

また、第１ハンドリング装置６の戻る動作６ｄとは、第１コンベア９にガラス基板３を載置してからアーム１５を取る動作６ａの開始位置に戻すまでをいい、この動作に８秒かかる。従って、第１ハンドリング装置６のガラス基板３を取りに行く動作を開始してから戻ってくるまでにかかる時間は４０秒である。もう一方の第２ハンドリング装置７と第２コンベア１０を用いて行われる取る動作７ａ、運ぶ動作７ｂ、置く動作７ｃ、戻る動作７ｄについても同様である。  The return operation 6d of the first handling device 6 refers to the time from placing the glass substrate 3 on the first conveyor 9 to returning to the start position of the operation 6a for taking the arm 15, and this operation takes 8 seconds. Accordingly, it takes 40 seconds from the start of the operation for taking the glass substrate 3 of the first handling device 6 to the return. The same applies to the operation 7a to be performed, the operation 7b to carry, the operation 7c to put, and the operation 7d to return performed using the other second handling device 7 and the second conveyor 10.

次に、合紙除去装置８の動作について説明する。合紙除去装置８の取る動作８ａとは、合紙４を取りに行く動作を開始してから合紙４をアーム１６に保持するまでをいい、この動作に２秒かかる。合紙除去装置８の運ぶ動作８ｂとは、取り出した合紙４を合紙投入ケース１７にまで運ぶ動作をいい、この動作に４秒かかる。合紙除去装置８の置く動作８ｃとは、合紙投入ケース１７に合紙４を放して合紙投入ケース１７に投入するまでをいい、この動作に１０秒かかる。合紙除去装置８の戻る動作８ｄとは、合紙４を合紙投入ケース１７に投入してからアーム１６を取る動作８ａの開始位置に戻すまでをいい、この動作に４秒かかる。従って、合紙除去装置８の合紙４を取りに行く動作を開始してから戻ってくるまでにかかる時間は２０秒である。  Next, the operation of the slip sheet removing device 8 will be described. The operation 8a taken by the slip sheet removing device 8 refers to a period from the start of the operation for taking the slip sheet 4 to the holding of the slip sheet 4 on the arm 16, and this operation takes 2 seconds. The operation 8b of the slip sheet removing device 8 refers to an operation of transporting the extracted slip sheet 4 to the slip sheet input case 17, and this operation takes 4 seconds. The operation 8c of the slip-sheet removing device 8 refers to the period from when the slip-sheet 4 is released into the slip-sheet feeding case 17 to be loaded into the slip-sheet feeding case 17, and this operation takes 10 seconds. The returning operation 8d of the slip sheet removing device 8 refers to the period from the time when the slip sheet 4 is loaded into the slip sheet feeding case 17 until the return to the start position of the motion 8a that takes the arm 16, and this operation takes 4 seconds. Therefore, it takes 20 seconds from the start of the operation of taking the slip sheet 4 of the slip sheet removing device 8 to the return.

このようなガラス基板搬送装置１は、図１に示されるように、第１ハンドリング装置６と第２ハンドリング装置７が一のパレット２の両側近傍に各々配置されてガラス基板３を交互に取り出すという構成になっている。具体的には、図２に示されるように、第１ハンドリング装置６がガラス基板３を取る動作６ａを終了すると、合紙除去装置８が合紙４を取る動作８ａを開始する（矢印Ａ）。合紙除去装置８がその合紙４を運ぶ動作８ｂを終了すると、第２ハンドリング装置７が次のガラス基板３を取る動作７ａを開始する（矢印Ｂ）。第２ハンドリング装置７がそのガラス基板３を取る動作７ａを終了すると、合紙除去装置８が次の合紙４を取る動作８ａを開始する（矢印Ｃ）。そして、合紙除去装置８がその合紙４を運ぶ動作８ｂを終了すると、第１ハンドリング装置６が次のガラス基板３を取る動作６ａを開始する（矢印Ｄ）。以下同様にして、第１ハンドリング装置６と第２ハンドリング装置７がガラス基板３を交互に取り出していく。  As shown in FIG. 1, such a glass substrate transfer device 1 has a first handling device 6 and a second handling device 7 arranged in the vicinity of both sides of one pallet 2 to alternately take out the glass substrates 3. It is configured. Specifically, as shown in FIG. 2, when the first handling device 6 finishes the operation 6a for taking the glass substrate 3, the slip sheet removing device 8 starts the operation 8a for taking the slip sheet 4 (arrow A). . When the slip sheet removing device 8 finishes the operation 8b for transporting the slip sheet 4, the second handling device 7 starts the operation 7a for taking the next glass substrate 3 (arrow B). When the second handling device 7 finishes the operation 7a for taking the glass substrate 3, the slip sheet removing device 8 starts the operation 8a for taking the next slip sheet 4 (arrow C). When the slip sheet removing device 8 finishes the operation 8b for transporting the slip sheet 4, the first handling device 6 starts the operation 6a for taking the next glass substrate 3 (arrow D). In the same manner, the first handling device 6 and the second handling device 7 take out the glass substrates 3 alternately.

この図２のタイミングチャートと、従来技術で説明した図６又は図８のタイミングチャートを比べると、合紙除去装置の稼働率が向上しているのがわかる。従来技術のガラス基板搬送装置の構成では、ハンドリング装置１台に対して合紙除去装置１台を備える構成であったものに対し、本発明に係るガラス基板搬送装置では、ハンドリング装置２台に対して合紙除去装置１台を備える構成であるため、合紙除去装置の稼働率を向上させて、その台数を減らすことが可能になっている。  When the timing chart of FIG. 2 is compared with the timing chart of FIG. 6 or FIG. 8 described in the prior art, it can be seen that the operating rate of the slip sheet removing apparatus is improved. In the configuration of the glass substrate transfer device of the prior art, the configuration in which one slip sheet removing device is provided for one handling device, whereas in the glass substrate transfer device according to the present invention, the two handling devices are provided. Therefore, it is possible to improve the operating rate of the slip sheet removing device and reduce the number of slip sheet removing devices.

また、図１のガラス基板搬送装置１の設置面積と、従来技術で説明した図７のガラス基板搬送装置２８の設置面積を比べると、ガラス基板を取り出す処理能力は同じであるにもかかわらず、設置面積が縮小されているのがわかる。これは、ターンテーブルと合紙除去装置が１台ずつ削減されたためである。また、この削減により、ガラス基板搬送装置のコストも安くなっている。  In addition, when the installation area of the glass substrate transfer apparatus 1 in FIG. 1 is compared with the installation area of the glass substrate transfer apparatus 28 in FIG. 7 described in the prior art, the processing ability to take out the glass substrate is the same. It can be seen that the installation area has been reduced. This is because the turntable and the slip sheet removing device are reduced one by one. This reduction also reduces the cost of the glass substrate transport device.

以上説明した本発明の一実施形態に係るガラス基板搬送装置によれば、第１のハンドリング装置と第２のハンドリング装置が一のガラス基板梱包箱の両側近傍に各々配置されてガラス基板を交互に取り出すという構成なので、従来技術のような単なる増設と比べてターンテーブルなどのパレット搬送装置の設置面積を縮小することができ、増設によるガラス基板搬送装置の設置面積の拡大化を抑えることができる。  According to the glass substrate transport device according to the embodiment of the present invention described above, the first handling device and the second handling device are arranged in the vicinity of both sides of the one glass substrate packaging box, and the glass substrates are alternately arranged. Since it is a structure of taking out, the installation area of a pallet transfer device such as a turntable can be reduced compared to a simple extension as in the prior art, and an increase in the installation area of the glass substrate transfer device due to the extension can be suppressed.

また、ガラス基板梱包箱が合紙による斜め積みパレットである場合でも、使用する合紙除去装置の稼働率を高くすることができるので、従来技術の増設と比べて合紙除去装置の台数削減による設置面積の縮小化が可能である。尚、本発明はこうした実施形態に何ら限定されるものではなく、本発明の要旨を逸脱しない範囲において、種々なる態様で実施できることは勿論である。例えば、ガラス基板の他、樹脂製の基板の搬送にも適用できる。更に緩衝材としての合紙も、樹脂製や布製などのものでもよく合紙に限定されない、また、パレットへの基板の積載状態においても、斜め積みの他、平積みにも適用できることは言うまでもなく、上記実施の形態に限定されない。  In addition, even when the glass substrate packing box is an oblique stacking pallet made of interleaving paper, it is possible to increase the operating rate of the interleaving paper removing device to be used. The installation area can be reduced. In addition, this invention is not limited to such embodiment at all, Of course, it can implement with a various aspect in the range which does not deviate from the summary of this invention. For example, the present invention can be applied to transfer of a substrate made of resin in addition to a glass substrate. Furthermore, the interleaving paper as a cushioning material may be made of resin or cloth, and is not limited to interleaving paper. Needless to say, it can also be applied to flat stacking in addition to diagonal stacking even when the substrate is loaded on the pallet. The present invention is not limited to the above embodiment.

Claims (3)

複数の基板が収納された一の基板梱包箱から該基板を取り出す第１のハンドリング装置及び第２のハンドリング装置と、前記第１のハンドリング装置により取り出された基板を搬送する第１のコンベア及び前記第２のハンドリング装置により取り出された基板を搬送する第２のコンベアとを備えると共に、前記第１のハンドリング装置と前記第２のハンドリング装置が前記一の基板梱包箱の両側近傍に各々配置されて前記基板を交互に取り出すことを特徴とする基板搬送装置。  A first handling device and a second handling device for taking out the substrates from one substrate packaging box containing a plurality of substrates; a first conveyor for carrying the substrates taken out by the first handling device; and A second conveyor for transporting the substrate taken out by the second handling device, and the first handling device and the second handling device are respectively disposed in the vicinity of both sides of the one substrate packaging box. A substrate transfer apparatus, wherein the substrates are taken out alternately. 前記基板梱包箱は、複数の基板及び該基板に挟んだ緩衝材とを積み重ねた状態で積載するパレットであり、更に、前記緩衝材を取り去る一の緩衝材除去装置を備えると共に、この緩衝材除去装置が前記第１のハンドリング装置と前記第２のハンドリング装置の間の近傍に配置されていることを特徴とする請求項１に記載の基板搬送装置。  The substrate packing box is a pallet on which a plurality of substrates and a buffer material sandwiched between the substrates are stacked, and further includes a buffer material removing device for removing the buffer material, and the buffer material removal 2. The substrate transfer apparatus according to claim 1, wherein an apparatus is disposed in the vicinity between the first handling apparatus and the second handling apparatus. 前記第１のハンドリング装置が基板を取る動作を終了すると、前記緩衝剤除去装置が緩衝剤を取る動作を開始し、該緩衝剤除去装置が該緩衝剤を運ぶ動作を終了すると、前記第２のハンドリング装置が次の基板を取る動作を開始し、該第２のハンドリング装置７が該基板を取る動作を終了すると、前記緩衝剤除去装置が次の緩衝剤を取る動作を開始し、該緩衝剤除去装置が該緩衝剤を運ぶ動作を終了すると、前記第１のハンドリング装置が更に次の基板を取る動作を開始するという手順を繰り返し行うことを特徴とする請求項２に記載の基板搬送装置。  When the operation of taking the substrate is finished by the first handling device, the buffer removing device starts the operation of taking the buffer, and when the buffer removing device finishes the operation of carrying the buffer, When the handling device starts the operation of taking the next substrate and the second handling device 7 finishes the operation of taking the substrate, the buffering agent removing device starts the operation of taking the next buffering agent. 3. The substrate transfer apparatus according to claim 2, wherein when the removal device finishes the operation of transporting the buffer, the first handling device repeats the procedure of starting the operation of taking the next substrate.
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CN101193811B (en) 2011-11-23
WO2006134709A1 (en) 2006-12-21
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KR20080014779A (en) 2008-02-14
TWI318959B (en) 2010-01-01

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