JPWO2004019411A1 - フォトダイオードアレイ、その製造方法、及び放射線検出器 - Google Patents
フォトダイオードアレイ、その製造方法、及び放射線検出器 Download PDFInfo
- Publication number
- JPWO2004019411A1 JPWO2004019411A1 JP2004530546A JP2004530546A JPWO2004019411A1 JP WO2004019411 A1 JPWO2004019411 A1 JP WO2004019411A1 JP 2004530546 A JP2004530546 A JP 2004530546A JP 2004530546 A JP2004530546 A JP 2004530546A JP WO2004019411 A1 JPWO2004019411 A1 JP WO2004019411A1
- Authority
- JP
- Japan
- Prior art keywords
- photodiode array
- surface side
- incident surface
- light
- semiconductor substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 47
- 230000005855 radiation Effects 0.000 title claims description 43
- 239000000758 substrate Substances 0.000 claims description 178
- 239000012535 impurity Substances 0.000 claims description 119
- 239000004065 semiconductor Substances 0.000 claims description 115
- 238000005530 etching Methods 0.000 claims description 52
- 238000000034 method Methods 0.000 claims description 38
- 239000013078 crystal Substances 0.000 claims description 21
- 238000001514 detection method Methods 0.000 claims description 14
- 238000000638 solvent extraction Methods 0.000 claims description 3
- 238000005192 partition Methods 0.000 claims 1
- 238000009792 diffusion process Methods 0.000 description 59
- 239000010408 film Substances 0.000 description 42
- 239000000969 carrier Substances 0.000 description 35
- 229910052782 aluminium Inorganic materials 0.000 description 24
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 24
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 22
- 229910052710 silicon Inorganic materials 0.000 description 22
- 239000010703 silicon Substances 0.000 description 22
- 238000009825 accumulation Methods 0.000 description 19
- 229910000679 solder Inorganic materials 0.000 description 19
- 229910052581 Si3N4 Inorganic materials 0.000 description 16
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 16
- 238000000926 separation method Methods 0.000 description 15
- 229910004298 SiO 2 Inorganic materials 0.000 description 13
- 230000008569 process Effects 0.000 description 12
- 238000010586 diagram Methods 0.000 description 11
- 239000010931 gold Substances 0.000 description 9
- 230000003647 oxidation Effects 0.000 description 9
- 238000007254 oxidation reaction Methods 0.000 description 9
- 238000002161 passivation Methods 0.000 description 9
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 239000011347 resin Substances 0.000 description 8
- 229920005989 resin Polymers 0.000 description 8
- 239000003513 alkali Substances 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 6
- 230000008901 benefit Effects 0.000 description 5
- 230000007547 defect Effects 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 4
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 239000002131 composite material Substances 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- 239000011159 matrix material Substances 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 229910052698 phosphorus Inorganic materials 0.000 description 4
- 239000011574 phosphorus Substances 0.000 description 4
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 4
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 4
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 229920001721 polyimide Polymers 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 2
- 229910018885 Pt—Au Inorganic materials 0.000 description 2
- 229910052785 arsenic Inorganic materials 0.000 description 2
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 2
- 230000002238 attenuated effect Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 238000007772 electroless plating Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 239000011259 mixed solution Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910017604 nitric acid Inorganic materials 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- 101100081884 Oryza sativa subsp. japonica OSA15 gene Proteins 0.000 description 1
- 101150082245 PSAG gene Proteins 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000005380 borophosphosilicate glass Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 230000001404 mediated effect Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier
- H01L31/103—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier being of the PN homojunction type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/1446—Devices controlled by radiation in a repetitive configuration
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1464—Back illuminated imager structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0236—Special surface textures
- H01L31/02363—Special surface textures of the semiconductor body itself, e.g. textured active layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0352—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
- H01L31/035272—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions characterised by at least one potential jump barrier or surface barrier
- H01L31/035281—Shape of the body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/11—Manufacturing methods
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14634—Assemblies, i.e. Hybrid structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14643—Photodiode arrays; MOS imagers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Light Receiving Elements (AREA)
- Measurement Of Radiation (AREA)
- Solid State Image Pick-Up Elements (AREA)
Abstract
Description
(第1実施形態)
(第3実施形態)
(第4実施形態)
(第5実施形態)
Claims (22)
- 光入射面側に複数の入射面側凹部を有すると共に前記光入射面とは逆側に前記入射面側凹部のそれぞれに対応して複数の反対面側凹部を有する半導体基板を備え、前記半導体基板の前記反対面側凹部の底部にpn接合を備えたことを特徴とするフォトダイオードアレイ。
- 前記pn接合は、前記反対面側凹部の底部から当該反対面側凹部を囲む反対面側枠部にまで延びていることを特徴とする請求の範囲第1項に記載のフォトダイオードアレイ。
- 前記入射面側凹部の底面の面積は、前記反対面側凹部の底面の面積よりも大きいことを特徴とする請求の範囲第1項に記載のフォトダイオードアレイ。
- 前記入射面側凹部を囲む入射面側枠部には高不純物濃度領域が形成されていることを特徴とする請求の範囲第1項に記載のフォトダイオードアレイ。
- 前記入射面側凹部を囲む入射面側枠部の形状は、被検出光の入射方向から見て格子状であることを特徴とする請求の範囲第1項に記載のフォトダイオードアレイ。
- 前記反対面側凹部を囲む反対面側枠部上に前記pn接合からなるフォトダイオードの出力を取り出す電極パッドを備えたことを特徴とする請求の範囲第1項に記載のフォトダイオードアレイ。
- 当該反対面側凹部の側面部を通り前記フォトダイオードと前記電極パッドとを電気的に接続する配線電極を備えたことを特徴とする請求の範囲第6項に記載のフォトダイオードアレイ。
- 請求の範囲第1〜7項の何れか1項に記載のフォトダイオードアレイと、前記フォトダイオードアレイへの被検出光の入射面前方に配設されたシンチレータとを備えることを特徴とする放射線検出器。
- 被検出光の入射面と反対面側に、pn接合型の複数のフォトダイオードがアレイ状に形成された半導体基板を備え、
前記半導体基板は、前記複数のフォトダイオードの形成された領域が前記被検出光の入射面側から薄化されることにより、当該複数のフォトダイオードの形成された領域に挟まれた領域が前記被検出光の入射面側に向かって断面凸形状の凸部とされ、
前記凸部には、前記フォトダイオードの前記被検出光の入射面側と同一導電型の高濃度不純物領域が形成されている
ことを特徴とするフォトダイオードアレイ。 - 少なくとも被検出光の入射面と反対面側が第1導電型にされた半導体基板と、
この半導体基板の前記反対面側の第1導電型領域内部にアレイ状に配列して形成された第2導電型の複数の光検出層と、
を備え、
前記半導体基板の前記被検出光の入射面側には、前記光検出層に対応する領域が当該入射面側より薄化されることによりアレイ状に配列された複数の凹部が形成され、
前記複数の凹部を仕切る凸部には、第1導電型の不純物が高濃度に添加されている
ことを特徴とするフォトダイオードアレイ。 - 第1導電型の不純物が高濃度に添加されている半導体基板と、
この半導体基板の被検出光の入射面と反対面側に接して設けられた第1導電型の半導体層と、
この第1導電型の半導体層の内部にアレイ状に配列して形成された第2導電型の複数の光検出層と、
を備え、
前記半導体基板は、前記光検出層に対応する領域が除去されることにより格子状に成形されていることを特徴とするフォトダイオードアレイ。 - 前記半導体基板と前記半導体層との間には、エッチングストップ層が介在されていることを特徴とする請求の範囲第11項に記載のフォトダイオードアレイ。
- 前記半導体基板と前記半導体層との間には、絶縁層が介在されていることを特徴とする請求の範囲第11項に記載のフォトダイオードアレイ。
- 前記半導体基板と前記半導体層は、互いに接する界面において結晶方位が交差することを特徴とする請求の範囲第11項に記載のフォトダイオードアレイ。
- 少なくとも被検出光の入射面側とその反対面側が第1導電型の半導体で形成され、前記入射面側には第1導電型の不純物が高濃度に添加されている基板を準備する第1工程と、
前記基板の前記反対面側の第1導電型領域の内部に第2導電型の複数の光検出層をアレイ状に配列させて形成する第2工程と、
前記基板の前記光検出層に対応する領域を前記入射面側よりエッチングして薄化することにより、アレイ状に配列された複数の凹部と、これらを仕切る格子状の第1導電型の不純物が高濃度に添加された凸部を形成する第3工程と
を備えることを特徴とするフォトダイオードアレイの製造方法。 - 前記第1工程は、
第1導電型の半導体基板を準備する工程と、
前記半導体基板の前記被検出光の入射面側に第1導電型の不純物を高濃度に添加させる工程と、
を有することを特徴とする請求の範囲第15項に記載のフォトダイオードアレイの製造方法。 - 前記第1工程は、
第1導電型の不純物が高濃度に添加されている半導体基板を準備する工程と、
前記半導体基板の前記被検出光の入射面と反対面側に第1導電型の半導体層を結晶成長させる工程と、
を有することを特徴とする請求の範囲第15項に記載のフォトダイオードアレイの製造方法。 - 前記第1工程は、
第1導電型の不純物が高濃度に添加されている半導体基板を準備する工程と、
前記半導体基板の前記被検出光の入射面と反対面側に第1導電型の半導体薄板を貼り合わせる工程と、
を有し、
前記半導体基板と前記半導体薄板は、貼り合せ界面において結晶方位が交差するようにしたことを特徴とする請求の範囲第15項に記載のフォトダイオードアレイの製造方法。 - 前記第1工程は、
第1導電型の不純物が高濃度に添加されている半導体基板を準備する工程と、
前記半導体基板の前記被検出光の入射面と反対面側に、エッチングストップ層を介在させて第1導電型の半導体薄板を貼り合わせる工程と、
を有することを特徴とする請求の範囲第15項に記載のフォトダイオードアレイの製造方法。 - 前記第1工程は、
第1導電型の不純物が高濃度に添加されている半導体基板を準備する工程と、
前記半導体基板の前記被検出光の入射面と反対面側に、絶縁層を介在させて第1導電型の半導体薄板を貼り合わせる工程と、
を有することを特徴とする請求の範囲第15項に記載のフォトダイオードアレイの製造方法。 - 請求の範囲第9〜14項のいずれか1項に記載のフォトダイオードアレイと、
このフォトダイオードアレイの前記被検出光の入射面側に取り付けられ、放射線の入射により発光するシンチレータパネルと、
を備えることを特徴とする放射線検出器。 - 請求の範囲第15〜20項のいずれか1項に記載の製造方法で製造されたフォトダイオードアレイと、
このフォトダイオードアレイの前記被検出光の入射面側に取り付けられ、放射線の入射により発光するシンチレータパネルと、
を備えることを特徴とする放射線検出器。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002233562 | 2002-08-09 | ||
JP2002233562 | 2002-08-09 | ||
JP2003015318 | 2003-01-23 | ||
JP2003015318 | 2003-01-23 | ||
PCT/JP2003/010093 WO2004019411A1 (ja) | 2002-08-09 | 2003-08-07 | フォトダイオードアレイ、その製造方法、及び放射線検出器 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010000199A Division JP2010098329A (ja) | 2002-08-09 | 2010-01-04 | フォトダイオードアレイ、その製造方法、及び放射線検出器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2004019411A1 true JPWO2004019411A1 (ja) | 2005-12-15 |
JP4455996B2 JP4455996B2 (ja) | 2010-04-21 |
Family
ID=31949533
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004530546A Expired - Fee Related JP4455996B2 (ja) | 2002-08-09 | 2003-08-07 | フォトダイオードアレイ、その製造方法、及び放射線検出器 |
JP2010000199A Pending JP2010098329A (ja) | 2002-08-09 | 2010-01-04 | フォトダイオードアレイ、その製造方法、及び放射線検出器 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010000199A Pending JP2010098329A (ja) | 2002-08-09 | 2010-01-04 | フォトダイオードアレイ、その製造方法、及び放射線検出器 |
Country Status (9)
Country | Link |
---|---|
US (1) | US7148464B2 (ja) |
EP (2) | EP1548836B1 (ja) |
JP (2) | JP4455996B2 (ja) |
KR (1) | KR101019807B1 (ja) |
CN (3) | CN100477239C (ja) |
AU (1) | AU2003254876A1 (ja) |
DE (1) | DE60321694D1 (ja) |
IL (1) | IL166777A (ja) |
WO (1) | WO2004019411A1 (ja) |
Families Citing this family (80)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU2003280857A1 (en) * | 2002-11-18 | 2004-06-15 | Hamamatsu Photonics K.K. | Backside-illuminated photodiode array, method for manufacturing same, and semiconductor device |
US7810740B2 (en) | 2002-11-18 | 2010-10-12 | Hamamatsu Photonics K.K. | Back illuminated photodiode array, manufacturing method and semiconductor device thereof |
JP4220819B2 (ja) * | 2003-03-27 | 2009-02-04 | 浜松ホトニクス株式会社 | 放射線検出器 |
JP4220818B2 (ja) | 2003-03-27 | 2009-02-04 | 浜松ホトニクス株式会社 | ホトダイオードアレイおよびその製造方法並びに放射線検出器 |
JP4220817B2 (ja) * | 2003-03-27 | 2009-02-04 | 浜松ホトニクス株式会社 | ホトダイオードアレイおよびその製造方法並びに放射線検出器 |
US8686529B2 (en) | 2010-01-19 | 2014-04-01 | Osi Optoelectronics, Inc. | Wavelength sensitive sensor photodiodes |
US7279731B1 (en) * | 2006-05-15 | 2007-10-09 | Udt Sensors, Inc. | Edge illuminated photodiodes |
US8519503B2 (en) | 2006-06-05 | 2013-08-27 | Osi Optoelectronics, Inc. | High speed backside illuminated, front side contact photodiode array |
US7576369B2 (en) * | 2005-10-25 | 2009-08-18 | Udt Sensors, Inc. | Deep diffused thin photodiodes |
US8035183B2 (en) * | 2003-05-05 | 2011-10-11 | Udt Sensors, Inc. | Photodiodes with PN junction on both front and back sides |
US7256470B2 (en) * | 2005-03-16 | 2007-08-14 | Udt Sensors, Inc. | Photodiode with controlled current leakage |
US7656001B2 (en) * | 2006-11-01 | 2010-02-02 | Udt Sensors, Inc. | Front-side illuminated, back-side contact double-sided PN-junction photodiode arrays |
US7057254B2 (en) | 2003-05-05 | 2006-06-06 | Udt Sensors, Inc. | Front illuminated back side contact thin wafer detectors |
US8120023B2 (en) * | 2006-06-05 | 2012-02-21 | Udt Sensors, Inc. | Low crosstalk, front-side illuminated, back-side contact photodiode array |
US7242069B2 (en) * | 2003-05-05 | 2007-07-10 | Udt Sensors, Inc. | Thin wafer detectors with improved radiation damage and crosstalk characteristics |
US7655999B2 (en) | 2006-09-15 | 2010-02-02 | Udt Sensors, Inc. | High density photodiodes |
US7709921B2 (en) * | 2008-08-27 | 2010-05-04 | Udt Sensors, Inc. | Photodiode and photodiode array with improved performance characteristics |
US7880258B2 (en) * | 2003-05-05 | 2011-02-01 | Udt Sensors, Inc. | Thin wafer detectors with improved radiation damage and crosstalk characteristics |
US6762473B1 (en) * | 2003-06-25 | 2004-07-13 | Semicoa Semiconductors | Ultra thin back-illuminated photodiode array structures and fabrication methods |
US7462553B2 (en) * | 2003-06-25 | 2008-12-09 | Semicoa | Ultra thin back-illuminated photodiode array fabrication methods |
JP2005045073A (ja) | 2003-07-23 | 2005-02-17 | Hamamatsu Photonics Kk | 裏面入射型光検出素子 |
JP4499386B2 (ja) | 2003-07-29 | 2010-07-07 | 浜松ホトニクス株式会社 | 裏面入射型光検出素子の製造方法 |
JP4499385B2 (ja) * | 2003-07-29 | 2010-07-07 | 浜松ホトニクス株式会社 | 裏面入射型光検出素子及び裏面入射型光検出素子の製造方法 |
JP2006013462A (ja) * | 2004-05-21 | 2006-01-12 | Semiconductor Energy Lab Co Ltd | 半導体装置及びその作製方法 |
CN100594619C (zh) | 2004-05-21 | 2010-03-17 | 株式会社半导体能源研究所 | 半导体器件及其制造方法 |
JP4841834B2 (ja) * | 2004-12-24 | 2011-12-21 | 浜松ホトニクス株式会社 | ホトダイオードアレイ |
DE102005010077B4 (de) * | 2005-03-04 | 2007-09-20 | Siemens Ag | Detektor mit einem Szintillator und bildgebendes Gerät, aufweisend einen derartigen Detektor |
US20070001100A1 (en) * | 2005-06-30 | 2007-01-04 | Taiwan Semiconductor Manufacturing Company, Ltd. | Light reflection for backside illuminated sensor |
JP4915107B2 (ja) * | 2006-02-28 | 2012-04-11 | ソニー株式会社 | 固体撮像装置および固体撮像装置の製造方法 |
US7576371B1 (en) | 2006-03-03 | 2009-08-18 | Array Optronix, Inc. | Structures and methods to improve the crosstalk between adjacent pixels of back-illuminated photodiode arrays |
US7638852B2 (en) * | 2006-05-09 | 2009-12-29 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method of making wafer structure for backside illuminated color image sensor |
US8704277B2 (en) * | 2006-05-09 | 2014-04-22 | Taiwan Semiconductor Manufacturing Company, Ltd. | Spectrally efficient photodiode for backside illuminated sensor |
US7791170B2 (en) | 2006-07-10 | 2010-09-07 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method of making a deep junction for electrical crosstalk reduction of an image sensor |
US9178092B2 (en) | 2006-11-01 | 2015-11-03 | Osi Optoelectronics, Inc. | Front-side illuminated, back-side contact double-sided PN-junction photodiode arrays |
US7608837B2 (en) * | 2006-11-24 | 2009-10-27 | Tower Semiconductor Ltd. | High resolution integrated X-ray CMOS image sensor |
JP2008140942A (ja) * | 2006-11-30 | 2008-06-19 | Sharp Corp | 固体撮像装置およびその製造方法、電子情報機器 |
CN101861650A (zh) * | 2007-08-10 | 2010-10-13 | 阿雷光电公司 | 具有沟道隔离的背照式薄型光电二极管阵列 |
US7999342B2 (en) | 2007-09-24 | 2011-08-16 | Taiwan Semiconductor Manufacturing Company, Ltd | Image sensor element for backside-illuminated sensor |
US20100053802A1 (en) * | 2008-08-27 | 2010-03-04 | Masaki Yamashita | Low Power Disk-Drive Motor Driver |
US20090250692A1 (en) * | 2008-04-07 | 2009-10-08 | Ev Products, Inc. | Radiation Detector With Asymmetric Contacts |
US7759755B2 (en) | 2008-05-14 | 2010-07-20 | International Business Machines Corporation | Anti-reflection structures for CMOS image sensors |
US8003425B2 (en) | 2008-05-14 | 2011-08-23 | International Business Machines Corporation | Methods for forming anti-reflection structures for CMOS image sensors |
JP2012503314A (ja) | 2008-09-15 | 2012-02-02 | オーエスアイ.オプトエレクトロニクス.インコーポレイテッド | 浅いn+層を有する薄い能動層フィッシュボーン・フォトダイオードとその製造方法 |
FR2938701A1 (fr) * | 2008-11-20 | 2010-05-21 | Commissariat Energie Atomique | Procede d'amincissement d'un bloc reporte sur un substrat |
KR100996669B1 (ko) * | 2008-12-11 | 2010-11-25 | 한국기초과학지원연구원 | 마이크로 렌즈 어레이를 포함하는 이미지 센서 및 그 제조방법 |
JP5185208B2 (ja) | 2009-02-24 | 2013-04-17 | 浜松ホトニクス株式会社 | フォトダイオード及びフォトダイオードアレイ |
JP5185205B2 (ja) | 2009-02-24 | 2013-04-17 | 浜松ホトニクス株式会社 | 半導体光検出素子 |
US8399909B2 (en) | 2009-05-12 | 2013-03-19 | Osi Optoelectronics, Inc. | Tetra-lateral position sensing detector |
JP5546222B2 (ja) * | 2009-12-04 | 2014-07-09 | キヤノン株式会社 | 固体撮像装置及び製造方法 |
JP5500007B2 (ja) * | 2010-09-03 | 2014-05-21 | ソニー株式会社 | 固体撮像素子およびカメラシステム |
JP5486542B2 (ja) * | 2011-03-31 | 2014-05-07 | 浜松ホトニクス株式会社 | フォトダイオードアレイモジュール及びその製造方法 |
US9917118B2 (en) * | 2011-09-09 | 2018-03-13 | Zecotek Imaging Systems Pte. Ltd. | Photodetector array and method of manufacture |
JP5832852B2 (ja) * | 2011-10-21 | 2015-12-16 | 浜松ホトニクス株式会社 | 光検出装置 |
JP5926921B2 (ja) | 2011-10-21 | 2016-05-25 | 浜松ホトニクス株式会社 | 光検出装置 |
JP5791461B2 (ja) | 2011-10-21 | 2015-10-07 | 浜松ホトニクス株式会社 | 光検出装置 |
DE102012217759A1 (de) * | 2012-09-28 | 2014-04-03 | Siemens Ag | Röntgendetektorsystem für einen Computertomographen und Computertomographiegerät |
US8912615B2 (en) | 2013-01-24 | 2014-12-16 | Osi Optoelectronics, Inc. | Shallow junction photodiode for detecting short wavelength light |
JP6500442B2 (ja) * | 2014-02-28 | 2019-04-17 | 住友電気工業株式会社 | アレイ型受光素子 |
US10347687B2 (en) | 2014-06-30 | 2019-07-09 | Sharp Kabushiki Kaisha | Imaging panel and X-ray imaging system provided with said imaging panel |
US10386500B2 (en) | 2014-06-30 | 2019-08-20 | Sharp Kabushiki Kaisha | Imaging panel and x-ray imaging device provided therewith |
WO2016002562A1 (ja) | 2014-06-30 | 2016-01-07 | シャープ株式会社 | 撮像パネル及びx線撮像装置 |
US10411059B2 (en) | 2014-06-30 | 2019-09-10 | Sharp Kabushiki Kaisha | Imaging panel and X-ray imaging system provided with said imaging panel |
WO2016002625A1 (ja) * | 2014-06-30 | 2016-01-07 | シャープ株式会社 | 撮像パネル、及びそれを備えたx線撮像装置 |
US10353082B2 (en) | 2014-06-30 | 2019-07-16 | Sharp Kabushiki Kaisha | Imaging panel and X-ray imaging device |
US10304897B2 (en) | 2014-06-30 | 2019-05-28 | Sharp Kabushiki Kaisha | Imaging panel and X-ray imaging device provided therewith |
US9466754B2 (en) * | 2014-07-30 | 2016-10-11 | Sunpower Corporation | Grain growth for solar cells |
JP6570619B2 (ja) * | 2015-03-31 | 2019-09-04 | Jx金属株式会社 | 放射線検出器用ubm電極構造体、放射線検出器及びそれらの製造方法 |
US10267928B2 (en) * | 2015-11-26 | 2019-04-23 | Koninklijke Philips N.V. | Dark current compensation |
US20170212253A1 (en) * | 2016-01-22 | 2017-07-27 | General Electric Company | Adaptive ct detector having integrated readout electronics |
JP6318190B2 (ja) * | 2016-04-25 | 2018-04-25 | 浜松ホトニクス株式会社 | 光検出装置 |
JP6140868B2 (ja) * | 2016-06-17 | 2017-05-31 | 浜松ホトニクス株式会社 | 半導体光検出素子 |
JP2018148183A (ja) * | 2017-03-09 | 2018-09-20 | 株式会社東芝 | 光検出器および放射線検出器 |
JP6282368B2 (ja) * | 2017-04-25 | 2018-02-21 | 浜松ホトニクス株式会社 | 光検出装置 |
JP7204319B2 (ja) | 2017-11-07 | 2023-01-16 | キヤノン株式会社 | エネルギー線の検出器、検出装置、機器 |
CN107992128A (zh) * | 2018-01-09 | 2018-05-04 | 京东方科技集团股份有限公司 | 控温加热面板及制备方法、加热方法 |
DE102018106970A1 (de) * | 2018-03-23 | 2019-09-26 | Osram Opto Semiconductors Gmbh | Optoelektronisches Halbleiterbauelement und Verfahren zur Herstellung eines optoelektronischen Halbleiterbauelements |
JP7089930B2 (ja) * | 2018-04-16 | 2022-06-23 | 浜松ホトニクス株式会社 | 半導体光検出素子 |
JP7148261B2 (ja) * | 2018-04-16 | 2022-10-05 | 浜松ホトニクス株式会社 | 裏面入射型半導体光検出素子 |
WO2021039921A1 (ja) * | 2019-08-30 | 2021-03-04 | キヤノン・コンポーネンツ株式会社 | 電磁波検出器、電磁波検出装置、検査装置および配線板 |
JPWO2022138050A1 (ja) * | 2020-12-24 | 2022-06-30 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04241458A (ja) * | 1991-01-14 | 1992-08-28 | Nippon Telegr & Teleph Corp <Ntt> | 半導体光検出装置 |
JPH05150049A (ja) * | 1991-11-30 | 1993-06-18 | Shimadzu Corp | 放射線検出器 |
JPH06163968A (ja) * | 1992-11-26 | 1994-06-10 | Fujikura Ltd | 紫外線検知装置及びその製造方法 |
JPH10223873A (ja) * | 1997-02-10 | 1998-08-21 | Hamamatsu Photonics Kk | 半導体装置 |
JP2001291892A (ja) * | 2000-04-04 | 2001-10-19 | Hamamatsu Photonics Kk | 放射線検出器 |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3748546A (en) * | 1969-05-12 | 1973-07-24 | Signetics Corp | Photosensitive device and array |
US4021836A (en) * | 1976-04-12 | 1977-05-03 | The United States Of America As Represented By The Secretary Of The Air Force | Inverted heterojunction photodiode |
JPS56148875A (en) * | 1980-04-21 | 1981-11-18 | Shunpei Yamazaki | Photoelectric conversion semiconductor device and manufacture thereof |
JPS6218075A (ja) * | 1985-07-17 | 1987-01-27 | Agency Of Ind Science & Technol | 光電変換装置 |
JP2597550B2 (ja) * | 1986-06-19 | 1997-04-09 | キヤノン株式会社 | 光電子ビーム変換素子 |
US4814847A (en) * | 1986-11-21 | 1989-03-21 | Bell Communications Research, Inc. | Ingaas semiconductor structures |
NL8700370A (nl) * | 1987-02-16 | 1988-09-16 | Philips Nv | Stralingsgevoelige halfgeleiderinrichting. |
FR2656738B1 (fr) * | 1989-12-29 | 1995-03-17 | Telemecanique | Procede pour fabriquer un dispositif semiconducteur, dispositif et composant semiconducteur obtenus par le procede. |
DE4102285A1 (de) * | 1991-01-26 | 1992-08-06 | Messerschmitt Boelkow Blohm | Verfahren zur herstellung einer membrandiode |
JP2884929B2 (ja) | 1992-07-23 | 1999-04-19 | 日本電気株式会社 | 固体撮像素子 |
JPH07240534A (ja) * | 1993-03-16 | 1995-09-12 | Seiko Instr Inc | 光電変換半導体装置及びその製造方法 |
JPH07333348A (ja) | 1994-06-03 | 1995-12-22 | Toshiba Corp | 放射線検出器およびこれを用いたx線ct装置 |
US5600130A (en) * | 1994-06-17 | 1997-02-04 | The Regents Of The University Of Colorado | Two-dimensional optoelectronic array module |
DE59611314D1 (de) * | 1995-05-19 | 2006-01-26 | Heidenhain Gmbh Dr Johannes | Strahlungsempfindliches detektorelement |
US5616185A (en) * | 1995-10-10 | 1997-04-01 | Hughes Aircraft Company | Solar cell with integrated bypass diode and method |
JPH1012851A (ja) | 1996-06-18 | 1998-01-16 | Hamamatsu Photonics Kk | 放射線撮像装置 |
JP3836208B2 (ja) | 1997-04-09 | 2006-10-25 | 浜松ホトニクス株式会社 | 医療用小型x線画像検出装置 |
JPH1117589A (ja) | 1997-06-27 | 1999-01-22 | Kobe Steel Ltd | 反響信号除去装置 |
JP3595759B2 (ja) | 1999-07-02 | 2004-12-02 | キヤノン株式会社 | 撮像装置および撮像システム |
CA2355146A1 (en) * | 1999-10-18 | 2001-04-26 | Yasunori Arima | Light-receiving element array and light-receiving element array chip |
JP2001119010A (ja) | 1999-10-18 | 2001-04-27 | Nikon Corp | マルチ出力固体撮像装置 |
AU2001244586A1 (en) * | 2000-04-04 | 2001-10-15 | Hamamatsu Photonics K.K. | Semiconductor energy detector |
DE10037103A1 (de) * | 2000-07-27 | 2002-02-14 | Aeg Infrarot Module Gmbh | Multispektrale Photodiode |
-
2003
- 2003-08-07 EP EP03792659A patent/EP1548836B1/en not_active Expired - Fee Related
- 2003-08-07 CN CNB03819337XA patent/CN100477239C/zh not_active Expired - Fee Related
- 2003-08-07 CN CN2009100072437A patent/CN101488506B/zh not_active Expired - Fee Related
- 2003-08-07 KR KR1020057002030A patent/KR101019807B1/ko not_active IP Right Cessation
- 2003-08-07 AU AU2003254876A patent/AU2003254876A1/en not_active Abandoned
- 2003-08-07 DE DE60321694T patent/DE60321694D1/de not_active Expired - Lifetime
- 2003-08-07 JP JP2004530546A patent/JP4455996B2/ja not_active Expired - Fee Related
- 2003-08-07 WO PCT/JP2003/010093 patent/WO2004019411A1/ja active IP Right Grant
- 2003-08-07 EP EP07013166A patent/EP1835539B1/en not_active Expired - Fee Related
- 2003-08-07 CN CN2009100072456A patent/CN101488507B/zh not_active Expired - Fee Related
- 2003-08-08 US US10/637,040 patent/US7148464B2/en not_active Expired - Fee Related
-
2005
- 2005-02-09 IL IL166777A patent/IL166777A/en not_active IP Right Cessation
-
2010
- 2010-01-04 JP JP2010000199A patent/JP2010098329A/ja active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04241458A (ja) * | 1991-01-14 | 1992-08-28 | Nippon Telegr & Teleph Corp <Ntt> | 半導体光検出装置 |
JPH05150049A (ja) * | 1991-11-30 | 1993-06-18 | Shimadzu Corp | 放射線検出器 |
JPH06163968A (ja) * | 1992-11-26 | 1994-06-10 | Fujikura Ltd | 紫外線検知装置及びその製造方法 |
JPH10223873A (ja) * | 1997-02-10 | 1998-08-21 | Hamamatsu Photonics Kk | 半導体装置 |
JP2001291892A (ja) * | 2000-04-04 | 2001-10-19 | Hamamatsu Photonics Kk | 放射線検出器 |
Also Published As
Publication number | Publication date |
---|---|
US7148464B2 (en) | 2006-12-12 |
DE60321694D1 (de) | 2008-07-31 |
CN101488506B (zh) | 2011-02-09 |
US20040104351A1 (en) | 2004-06-03 |
IL166777A (en) | 2010-04-15 |
JP2010098329A (ja) | 2010-04-30 |
CN101488507A (zh) | 2009-07-22 |
JP4455996B2 (ja) | 2010-04-21 |
CN1675771A (zh) | 2005-09-28 |
EP1548836A1 (en) | 2005-06-29 |
CN100477239C (zh) | 2009-04-08 |
CN101488506A (zh) | 2009-07-22 |
WO2004019411A1 (ja) | 2004-03-04 |
IL166777A0 (en) | 2006-01-15 |
EP1548836A4 (en) | 2006-10-18 |
EP1835539A3 (en) | 2007-09-26 |
EP1548836B1 (en) | 2008-06-18 |
EP1835539A2 (en) | 2007-09-19 |
AU2003254876A1 (en) | 2004-03-11 |
KR20050073442A (ko) | 2005-07-13 |
KR101019807B1 (ko) | 2011-03-04 |
CN101488507B (zh) | 2011-04-06 |
EP1835539B1 (en) | 2012-10-31 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4455996B2 (ja) | フォトダイオードアレイ、その製造方法、及び放射線検出器 | |
US7420257B2 (en) | Backside-illuminated photodetector | |
US7810740B2 (en) | Back illuminated photodiode array, manufacturing method and semiconductor device thereof | |
US7768086B2 (en) | Backside-illuminated photodetector | |
US20110057112A1 (en) | Photodiode array adn production method thereof, and radiation detector | |
US20090302410A1 (en) | Photodiode array and production method thereof, and radiation detector | |
JP4482455B2 (ja) | 裏面入射型ホトダイオードアレイ、その製造方法及び半導体装置 | |
US20070158708A1 (en) | Photodiode array, method for manufacturing same, and radiation detector | |
JP2004296825A (ja) | ホトダイオードアレイおよびその製造方法並びに放射線検出器 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20060725 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20091104 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20100104 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20100202 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20100204 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130212 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
LAPS | Cancellation because of no payment of annual fees |