JPS648675A - Formation of schottky gate - Google Patents
Formation of schottky gateInfo
- Publication number
- JPS648675A JPS648675A JP16430887A JP16430887A JPS648675A JP S648675 A JPS648675 A JP S648675A JP 16430887 A JP16430887 A JP 16430887A JP 16430887 A JP16430887 A JP 16430887A JP S648675 A JPS648675 A JP S648675A
- Authority
- JP
- Japan
- Prior art keywords
- gate
- layer
- metal
- diameter
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To compose a gate structure in a trapezoidal shape, to prevent a gate metal of a second layer and succeeding layers from getting into contact with a substrate, and to form a Schottky gate having high reliability by sequentially reducing the diameter of an evaporation source of the gate metal according to the sequence of depositing the metal. CONSTITUTION:After a gate forming photoresist pattern 3 is formed by a photocomposing technique on an S.I.GaAs substrate 1 having an active layer 2, the thickness of the layer 2 is regulated by etching the exposed GaAs section to form an etching face 4. Then, when a first layer gate metal 5 is deposited, a depositing flow 9 is formed by a deposition source 11 having a maximum diameter. Thereafter, a second layer gate metal 6 is deposited by a deposition source 12 in which the irradiation region of an electron beam is narrowed as compared with the metal 5. Subsequently, the electron beam diameter is sequentially narrowed to narrow the width of the deposition flow, and a gate of trapezoidal shape which is sequentially increased in its diameter from the substrate 1 is formed.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16430887A JPS648675A (en) | 1987-06-30 | 1987-06-30 | Formation of schottky gate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16430887A JPS648675A (en) | 1987-06-30 | 1987-06-30 | Formation of schottky gate |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS648675A true JPS648675A (en) | 1989-01-12 |
Family
ID=15790662
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16430887A Pending JPS648675A (en) | 1987-06-30 | 1987-06-30 | Formation of schottky gate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS648675A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9629831B2 (en) | 2000-02-29 | 2017-04-25 | Millennium Pharmaceuticals, Inc. | Benzamides and related inhibitors of factor XA |
-
1987
- 1987-06-30 JP JP16430887A patent/JPS648675A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9629831B2 (en) | 2000-02-29 | 2017-04-25 | Millennium Pharmaceuticals, Inc. | Benzamides and related inhibitors of factor XA |
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