JPS6475678A - Hard carbon film containing nitrogen - Google Patents

Hard carbon film containing nitrogen

Info

Publication number
JPS6475678A
JPS6475678A JP23118887A JP23118887A JPS6475678A JP S6475678 A JPS6475678 A JP S6475678A JP 23118887 A JP23118887 A JP 23118887A JP 23118887 A JP23118887 A JP 23118887A JP S6475678 A JPS6475678 A JP S6475678A
Authority
JP
Japan
Prior art keywords
carbon film
hard carbon
amt
base material
nitrogen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP23118887A
Other languages
Japanese (ja)
Other versions
JP2620252B2 (en
Inventor
Masaaki Tobioka
Akihiko Ikegaya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP62231188A priority Critical patent/JP2620252B2/en
Publication of JPS6475678A publication Critical patent/JPS6475678A/en
Application granted granted Critical
Publication of JP2620252B2 publication Critical patent/JP2620252B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PURPOSE:To release the internal compressive stress of a hard carbon film when the surface of a base material is coated with the carbon film by deposition from a vapor phase, by incorporating a specified amt. of nitrogen into the carbon film. CONSTITUTION:A gaseous N source such as N2, NH3 or CH3CN is added to a gaseous hydrocarbon-hydrogen mixture as starting material and they are excited and decomposed by preheating to coat the surface of a base material heated and held at a prescribed temp. with a hard carbon film (diamond) contg. 10ppm-2% by atom. of nitrogen by deposition. The amt. of the N source added to the reaction system is regulated to about 0.1-10atom.% of the amt. of the hydrocarbon and the hydrogen is preferably used by about 50-99atom.% of the total amt. of the gases in the reaction system. A hot filament or plasma may be used as an exciting and decomposing means. The base material can be coated with a thicker hard carbon film than the conventional film without peeling.
JP62231188A 1987-09-17 1987-09-17 Method for producing nitrogen-containing hard carbon film Expired - Fee Related JP2620252B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62231188A JP2620252B2 (en) 1987-09-17 1987-09-17 Method for producing nitrogen-containing hard carbon film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62231188A JP2620252B2 (en) 1987-09-17 1987-09-17 Method for producing nitrogen-containing hard carbon film

Publications (2)

Publication Number Publication Date
JPS6475678A true JPS6475678A (en) 1989-03-22
JP2620252B2 JP2620252B2 (en) 1997-06-11

Family

ID=16919708

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62231188A Expired - Fee Related JP2620252B2 (en) 1987-09-17 1987-09-17 Method for producing nitrogen-containing hard carbon film

Country Status (1)

Country Link
JP (1) JP2620252B2 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02217471A (en) * 1989-02-16 1990-08-30 Semiconductor Energy Lab Co Ltd Manufacture of carbon-based film
JPH03274269A (en) * 1990-03-22 1991-12-05 Matsushita Electric Ind Co Ltd Method for synthesizing diamondlike thin film and diamondlike thin film
EP0859355A1 (en) * 1997-02-13 1998-08-19 Sanyo Electric Co. Ltd Thin film magnetic head
JP2006076851A (en) * 2004-09-10 2006-03-23 National Institute For Materials Science Diamond film, its producing method, electrochemical element, and its producing method
JP2007531679A (en) * 2003-07-14 2007-11-08 カーネギー インスチチューション オブ ワシントン Tough diamond and its manufacturing method
WO2017014311A1 (en) * 2015-07-22 2017-01-26 住友電気工業株式会社 Single crystal diamond material, single crystal diamond tip, and drilling tool

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6241748A (en) * 1985-08-13 1987-02-23 太平洋セメント株式会社 Manufacture of incombustible inorganic construction material

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6241748A (en) * 1985-08-13 1987-02-23 太平洋セメント株式会社 Manufacture of incombustible inorganic construction material

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02217471A (en) * 1989-02-16 1990-08-30 Semiconductor Energy Lab Co Ltd Manufacture of carbon-based film
JPH03274269A (en) * 1990-03-22 1991-12-05 Matsushita Electric Ind Co Ltd Method for synthesizing diamondlike thin film and diamondlike thin film
EP0859355A1 (en) * 1997-02-13 1998-08-19 Sanyo Electric Co. Ltd Thin film magnetic head
US5986857A (en) * 1997-02-13 1999-11-16 Sanyo Electric Co., Ltd. Thin film magnetic head including adhesion enhancing interlayers, and upper and lower gap insulative layers having different hydrogen contents and internal stress states
JP2007531679A (en) * 2003-07-14 2007-11-08 カーネギー インスチチューション オブ ワシントン Tough diamond and its manufacturing method
JP2007531680A (en) * 2003-07-14 2007-11-08 カーネギー インスチチューション オブ ワシントン Extremely hard diamond and its manufacturing method
JP2006076851A (en) * 2004-09-10 2006-03-23 National Institute For Materials Science Diamond film, its producing method, electrochemical element, and its producing method
WO2017014311A1 (en) * 2015-07-22 2017-01-26 住友電気工業株式会社 Single crystal diamond material, single crystal diamond tip, and drilling tool
JP6118954B1 (en) * 2015-07-22 2017-04-19 住友電気工業株式会社 Single crystal diamond material, single crystal diamond tips and drilling tools
US10287708B2 (en) 2015-07-22 2019-05-14 Sumitomo Electric Industries, Ltd. Single-crystal diamond material, single-crystal diamond chip, and perforated tool
US10774442B2 (en) 2015-07-22 2020-09-15 Sumitomo Electric Industries, Ltd. Single-crystal diamond material, single-crystal diamond chip, and perforated tool

Also Published As

Publication number Publication date
JP2620252B2 (en) 1997-06-11

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees