JPS6475678A - Hard carbon film containing nitrogen - Google Patents
Hard carbon film containing nitrogenInfo
- Publication number
- JPS6475678A JPS6475678A JP23118887A JP23118887A JPS6475678A JP S6475678 A JPS6475678 A JP S6475678A JP 23118887 A JP23118887 A JP 23118887A JP 23118887 A JP23118887 A JP 23118887A JP S6475678 A JPS6475678 A JP S6475678A
- Authority
- JP
- Japan
- Prior art keywords
- carbon film
- hard carbon
- amt
- base material
- nitrogen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE:To release the internal compressive stress of a hard carbon film when the surface of a base material is coated with the carbon film by deposition from a vapor phase, by incorporating a specified amt. of nitrogen into the carbon film. CONSTITUTION:A gaseous N source such as N2, NH3 or CH3CN is added to a gaseous hydrocarbon-hydrogen mixture as starting material and they are excited and decomposed by preheating to coat the surface of a base material heated and held at a prescribed temp. with a hard carbon film (diamond) contg. 10ppm-2% by atom. of nitrogen by deposition. The amt. of the N source added to the reaction system is regulated to about 0.1-10atom.% of the amt. of the hydrocarbon and the hydrogen is preferably used by about 50-99atom.% of the total amt. of the gases in the reaction system. A hot filament or plasma may be used as an exciting and decomposing means. The base material can be coated with a thicker hard carbon film than the conventional film without peeling.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62231188A JP2620252B2 (en) | 1987-09-17 | 1987-09-17 | Method for producing nitrogen-containing hard carbon film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62231188A JP2620252B2 (en) | 1987-09-17 | 1987-09-17 | Method for producing nitrogen-containing hard carbon film |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6475678A true JPS6475678A (en) | 1989-03-22 |
JP2620252B2 JP2620252B2 (en) | 1997-06-11 |
Family
ID=16919708
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62231188A Expired - Fee Related JP2620252B2 (en) | 1987-09-17 | 1987-09-17 | Method for producing nitrogen-containing hard carbon film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2620252B2 (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02217471A (en) * | 1989-02-16 | 1990-08-30 | Semiconductor Energy Lab Co Ltd | Manufacture of carbon-based film |
JPH03274269A (en) * | 1990-03-22 | 1991-12-05 | Matsushita Electric Ind Co Ltd | Method for synthesizing diamondlike thin film and diamondlike thin film |
EP0859355A1 (en) * | 1997-02-13 | 1998-08-19 | Sanyo Electric Co. Ltd | Thin film magnetic head |
JP2006076851A (en) * | 2004-09-10 | 2006-03-23 | National Institute For Materials Science | Diamond film, its producing method, electrochemical element, and its producing method |
JP2007531679A (en) * | 2003-07-14 | 2007-11-08 | カーネギー インスチチューション オブ ワシントン | Tough diamond and its manufacturing method |
WO2017014311A1 (en) * | 2015-07-22 | 2017-01-26 | 住友電気工業株式会社 | Single crystal diamond material, single crystal diamond tip, and drilling tool |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6241748A (en) * | 1985-08-13 | 1987-02-23 | 太平洋セメント株式会社 | Manufacture of incombustible inorganic construction material |
-
1987
- 1987-09-17 JP JP62231188A patent/JP2620252B2/en not_active Expired - Fee Related
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6241748A (en) * | 1985-08-13 | 1987-02-23 | 太平洋セメント株式会社 | Manufacture of incombustible inorganic construction material |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02217471A (en) * | 1989-02-16 | 1990-08-30 | Semiconductor Energy Lab Co Ltd | Manufacture of carbon-based film |
JPH03274269A (en) * | 1990-03-22 | 1991-12-05 | Matsushita Electric Ind Co Ltd | Method for synthesizing diamondlike thin film and diamondlike thin film |
EP0859355A1 (en) * | 1997-02-13 | 1998-08-19 | Sanyo Electric Co. Ltd | Thin film magnetic head |
US5986857A (en) * | 1997-02-13 | 1999-11-16 | Sanyo Electric Co., Ltd. | Thin film magnetic head including adhesion enhancing interlayers, and upper and lower gap insulative layers having different hydrogen contents and internal stress states |
JP2007531679A (en) * | 2003-07-14 | 2007-11-08 | カーネギー インスチチューション オブ ワシントン | Tough diamond and its manufacturing method |
JP2007531680A (en) * | 2003-07-14 | 2007-11-08 | カーネギー インスチチューション オブ ワシントン | Extremely hard diamond and its manufacturing method |
JP2006076851A (en) * | 2004-09-10 | 2006-03-23 | National Institute For Materials Science | Diamond film, its producing method, electrochemical element, and its producing method |
WO2017014311A1 (en) * | 2015-07-22 | 2017-01-26 | 住友電気工業株式会社 | Single crystal diamond material, single crystal diamond tip, and drilling tool |
JP6118954B1 (en) * | 2015-07-22 | 2017-04-19 | 住友電気工業株式会社 | Single crystal diamond material, single crystal diamond tips and drilling tools |
US10287708B2 (en) | 2015-07-22 | 2019-05-14 | Sumitomo Electric Industries, Ltd. | Single-crystal diamond material, single-crystal diamond chip, and perforated tool |
US10774442B2 (en) | 2015-07-22 | 2020-09-15 | Sumitomo Electric Industries, Ltd. | Single-crystal diamond material, single-crystal diamond chip, and perforated tool |
Also Published As
Publication number | Publication date |
---|---|
JP2620252B2 (en) | 1997-06-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |