JPS64726A - Forming method of deposit film - Google Patents
Forming method of deposit filmInfo
- Publication number
- JPS64726A JPS64726A JP62073615A JP7361587A JPS64726A JP S64726 A JPS64726 A JP S64726A JP 62073615 A JP62073615 A JP 62073615A JP 7361587 A JP7361587 A JP 7361587A JP S64726 A JPS64726 A JP S64726A
- Authority
- JP
- Japan
- Prior art keywords
- film
- active species
- chamber
- gas
- period
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62073615A JPS64726A (en) | 1987-03-23 | 1987-03-27 | Forming method of deposit film |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62-65829 | 1987-03-23 | ||
JP6582987 | 1987-03-23 | ||
JP62073615A JPS64726A (en) | 1987-03-23 | 1987-03-27 | Forming method of deposit film |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01726A JPH01726A (ja) | 1989-01-05 |
JPS64726A true JPS64726A (en) | 1989-01-05 |
Family
ID=26406977
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62073615A Pending JPS64726A (en) | 1987-03-23 | 1987-03-27 | Forming method of deposit film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS64726A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109292498A (zh) * | 2018-09-28 | 2019-02-01 | 南安市罗兴工业设计有限公司 | 一种具有滤碳处理的薄膜粗化膜卷一体机 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9216253B2 (en) | 2010-08-16 | 2015-12-22 | Becton, Dickinson And Company | Needle dispensing and storing apparatus for medicament delivery device |
-
1987
- 1987-03-27 JP JP62073615A patent/JPS64726A/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109292498A (zh) * | 2018-09-28 | 2019-02-01 | 南安市罗兴工业设计有限公司 | 一种具有滤碳处理的薄膜粗化膜卷一体机 |
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