JPS64726A - Forming method of deposit film - Google Patents

Forming method of deposit film

Info

Publication number
JPS64726A
JPS64726A JP62073615A JP7361587A JPS64726A JP S64726 A JPS64726 A JP S64726A JP 62073615 A JP62073615 A JP 62073615A JP 7361587 A JP7361587 A JP 7361587A JP S64726 A JPS64726 A JP S64726A
Authority
JP
Japan
Prior art keywords
film
active species
chamber
gas
period
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62073615A
Other languages
English (en)
Other versions
JPH01726A (ja
Inventor
Shunichi Ishihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP62073615A priority Critical patent/JPS64726A/ja
Publication of JPH01726A publication Critical patent/JPH01726A/ja
Publication of JPS64726A publication Critical patent/JPS64726A/ja
Pending legal-status Critical Current

Links

JP62073615A 1987-03-23 1987-03-27 Forming method of deposit film Pending JPS64726A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62073615A JPS64726A (en) 1987-03-23 1987-03-27 Forming method of deposit film

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP62-65829 1987-03-23
JP6582987 1987-03-23
JP62073615A JPS64726A (en) 1987-03-23 1987-03-27 Forming method of deposit film

Publications (2)

Publication Number Publication Date
JPH01726A JPH01726A (ja) 1989-01-05
JPS64726A true JPS64726A (en) 1989-01-05

Family

ID=26406977

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62073615A Pending JPS64726A (en) 1987-03-23 1987-03-27 Forming method of deposit film

Country Status (1)

Country Link
JP (1) JPS64726A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109292498A (zh) * 2018-09-28 2019-02-01 南安市罗兴工业设计有限公司 一种具有滤碳处理的薄膜粗化膜卷一体机

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9216253B2 (en) 2010-08-16 2015-12-22 Becton, Dickinson And Company Needle dispensing and storing apparatus for medicament delivery device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109292498A (zh) * 2018-09-28 2019-02-01 南安市罗兴工业设计有限公司 一种具有滤碳处理的薄膜粗化膜卷一体机

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