JPS64726A - Forming method of deposit film - Google Patents
Forming method of deposit filmInfo
- Publication number
- JPS64726A JPS64726A JP62073615A JP7361587A JPS64726A JP S64726 A JPS64726 A JP S64726A JP 62073615 A JP62073615 A JP 62073615A JP 7361587 A JP7361587 A JP 7361587A JP S64726 A JPS64726 A JP S64726A
- Authority
- JP
- Japan
- Prior art keywords
- film
- active species
- chamber
- gas
- period
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To form a deposit film, to lower even a substrate temperature at the time of the formation of the deposit film further and to manufacture the deposit film having the stable quality of the film industrially at low cost in a large quantity by separately introducing active species formed from a compound containing carbon and halogen and active species formed from a film-formation raw material into film formation space and working and reacting a catalyst consisting of a specific metal or metallic compound heated to these active species.
CONSTITUTION: Honeycomb molybdenum 112 as a catalyst composed of a metal or a metallic compound selected from the element groups of the fourth period, the fifth period and the sixth period of the periodic table is supplied with electric power through a conductor 113, and brought to a red heat state. H2 gas mixed from a gas supply tube 107 is introduced into an activating chamber 119, microwaves as an activation energy source 120 are applied, and plasma is generated in an silica glass tube and a gas, etc., are decomposed, and induced into a film formation chamber. An activating chamber 108 is filled with solid C grains, the solid C grains are heated by an electric furnace as an activation energy source 109, and C is brought to a red heat state, and CF4 gas is blown into the chamber 108 through the introducing tube 107, thus forming active species, then inducing the active species into a film formation chamber 101.
COPYRIGHT: (C)1989,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62073615A JPS64726A (en) | 1987-03-23 | 1987-03-27 | Forming method of deposit film |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62-65829 | 1987-03-23 | ||
| JP6582987 | 1987-03-23 | ||
| JP62073615A JPS64726A (en) | 1987-03-23 | 1987-03-27 | Forming method of deposit film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01726A JPH01726A (en) | 1989-01-05 |
| JPS64726A true JPS64726A (en) | 1989-01-05 |
Family
ID=26406977
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62073615A Pending JPS64726A (en) | 1987-03-23 | 1987-03-27 | Forming method of deposit film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS64726A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109292498A (en) * | 2018-09-28 | 2019-02-01 | 南安市罗兴工业设计有限公司 | A kind of film roughening film roll all-in-one machine with filter carbon processing |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9216253B2 (en) | 2010-08-16 | 2015-12-22 | Becton, Dickinson And Company | Needle dispensing and storing apparatus for medicament delivery device |
-
1987
- 1987-03-27 JP JP62073615A patent/JPS64726A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109292498A (en) * | 2018-09-28 | 2019-02-01 | 南安市罗兴工业设计有限公司 | A kind of film roughening film roll all-in-one machine with filter carbon processing |
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