JPS6472309A - Manufacture of thin film magnetic head - Google Patents
Manufacture of thin film magnetic headInfo
- Publication number
- JPS6472309A JPS6472309A JP22850687A JP22850687A JPS6472309A JP S6472309 A JPS6472309 A JP S6472309A JP 22850687 A JP22850687 A JP 22850687A JP 22850687 A JP22850687 A JP 22850687A JP S6472309 A JPS6472309 A JP S6472309A
- Authority
- JP
- Japan
- Prior art keywords
- resist
- swell
- pattern
- exposure
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Magnetic Heads (AREA)
Abstract
PURPOSE:To prevent the pattern transfer accuracy from being deteriorated due to a swell-up of resist coating by performing an exposure for eliminating a resist swell-up part before an exposure transfer process of a thin film pattern. CONSTITUTION:When a resist 2 is brought to coating on a substrate 1, a swell-up part 2a is formed on the resist 2, in the peripheral edge part of the substrate. Subsequently, by exposing the resist 2 by using a mask 3 having a mask pattern 4 for eliminating this swell-up part 2a and executing a development, the swell-up part is eliminated from the resist 2 on the wafer 1. Next, by executing an exposure by using a mask 5 having a pattern 6 to be formed on the resist 2, and executing a development, a desired pattern 2b is formed on the resist. In such a way, since an exposure process for eliminating the resist swell-up part is contained, the surface of the resist 2 becomes a uniform flat surface and the mask pattern 6 adheres closely to the surface of the resist 2. In such a way, deterioration of the pattern transfer accuracy based on the swell-up of the resist can be prevented.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22850687A JPS6472309A (en) | 1987-09-14 | 1987-09-14 | Manufacture of thin film magnetic head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22850687A JPS6472309A (en) | 1987-09-14 | 1987-09-14 | Manufacture of thin film magnetic head |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6472309A true JPS6472309A (en) | 1989-03-17 |
Family
ID=16877510
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP22850687A Pending JPS6472309A (en) | 1987-09-14 | 1987-09-14 | Manufacture of thin film magnetic head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6472309A (en) |
-
1987
- 1987-09-14 JP JP22850687A patent/JPS6472309A/en active Pending
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