JPS6465885A - Manufacture of superconducting thin film - Google Patents

Manufacture of superconducting thin film

Info

Publication number
JPS6465885A
JPS6465885A JP62223378A JP22337887A JPS6465885A JP S6465885 A JPS6465885 A JP S6465885A JP 62223378 A JP62223378 A JP 62223378A JP 22337887 A JP22337887 A JP 22337887A JP S6465885 A JPS6465885 A JP S6465885A
Authority
JP
Japan
Prior art keywords
gas
hcl
single crystal
thin film
superconducting thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62223378A
Other languages
Japanese (ja)
Inventor
Eiji Taguchi
Keita Kawahara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP62223378A priority Critical patent/JPS6465885A/en
Publication of JPS6465885A publication Critical patent/JPS6465885A/en
Pending legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
    • Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To easily produce a superconducting thin film having a large area and one having an excellent response speed by growing a single crystal of magnesian spinel on an Si single crystal plate and depositing superconductive substances on the grown single crystal. CONSTITUTION:In an Al-HCl-MgCl2-CO2-H2 phase epitaxial growth equipment by CVD method, H2 gas and H2+HCl gas are introduced from gas introduction ports 1 and 2 respectively, then MgCl2 source gas 3 and AlCl3 source gas 4 which is generated by the reaction of Al and HCl are carried onto an Si substrate 5. Then the source gases and CO gas introduced through the gas introduction port 6 are reacted for epitaxial growth of magnesian spinel monocrystal on the Si substrate. Y-Ba-Cu-O superconductive film is deposited on the monocrystal by sputtering process.
JP62223378A 1987-09-07 1987-09-07 Manufacture of superconducting thin film Pending JPS6465885A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62223378A JPS6465885A (en) 1987-09-07 1987-09-07 Manufacture of superconducting thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62223378A JPS6465885A (en) 1987-09-07 1987-09-07 Manufacture of superconducting thin film

Publications (1)

Publication Number Publication Date
JPS6465885A true JPS6465885A (en) 1989-03-13

Family

ID=16797208

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62223378A Pending JPS6465885A (en) 1987-09-07 1987-09-07 Manufacture of superconducting thin film

Country Status (1)

Country Link
JP (1) JPS6465885A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH029795A (en) * 1988-03-06 1990-01-12 Internatl Business Mach Corp <Ibm> Method for producing a superconductive material

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6228446A (en) * 1985-07-27 1987-02-06 株式会社豊田自動織機製作所 Mistake yarn removing apparatus in jet loom
JPS6246676B2 (en) * 1978-08-03 1987-10-03 Nippon Steel Corp

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6246676B2 (en) * 1978-08-03 1987-10-03 Nippon Steel Corp
JPS6228446A (en) * 1985-07-27 1987-02-06 株式会社豊田自動織機製作所 Mistake yarn removing apparatus in jet loom

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH029795A (en) * 1988-03-06 1990-01-12 Internatl Business Mach Corp <Ibm> Method for producing a superconductive material

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