JPS6463904A - Production of glass waveguide - Google Patents
Production of glass waveguideInfo
- Publication number
- JPS6463904A JPS6463904A JP62220910A JP22091087A JPS6463904A JP S6463904 A JPS6463904 A JP S6463904A JP 62220910 A JP62220910 A JP 62220910A JP 22091087 A JP22091087 A JP 22091087A JP S6463904 A JPS6463904 A JP S6463904A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- substrate
- glass layer
- glass
- atmosphere
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To prevent generation of loss in a waveguide by forming a layer of glass comprising SiO2 and TiO2 on a substrate and heating the layer with beams in inert gas atmosphere after treating the glass layer in H2-contg. atmosphere. CONSTITUTION:A glass layer 2 comprising SiO2 and TiO2 is formed on a substrate 1 by sputtering or chemical vapor deposition. Then, the glass layer 2 is beam-heated in inert gas atmosphere successively after treating the layer 2 in H2-contg. atmosphere. Thus, a glass layer 2 is formed directly on the substrate in place of a layer of oxide. By this method, generation of cracks in the substrate 1 or the glass layer 2 due to difference of coeffts. of expansion between the substrate 1 and the glass layer 2 during cooling can be prevented since occurrence of stoichiometric difference is avoided and local heating is possible.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62220910A JPS6463904A (en) | 1987-09-03 | 1987-09-03 | Production of glass waveguide |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62220910A JPS6463904A (en) | 1987-09-03 | 1987-09-03 | Production of glass waveguide |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6463904A true JPS6463904A (en) | 1989-03-09 |
Family
ID=16758449
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62220910A Pending JPS6463904A (en) | 1987-09-03 | 1987-09-03 | Production of glass waveguide |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6463904A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0967008A2 (en) * | 1998-06-24 | 1999-12-29 | Agency Of Industrial Science And Technology | Film of titanium dioxide containing silicon dioxide and a method of forming the same |
GB2370043A (en) * | 2000-12-12 | 2002-06-19 | Mitel Corp | Chemical treatment of silica films |
-
1987
- 1987-09-03 JP JP62220910A patent/JPS6463904A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0967008A2 (en) * | 1998-06-24 | 1999-12-29 | Agency Of Industrial Science And Technology | Film of titanium dioxide containing silicon dioxide and a method of forming the same |
EP0967008A3 (en) * | 1998-06-24 | 2000-07-19 | Agency Of Industrial Science And Technology | Film of titanium dioxide containing silicon dioxide and a method of forming the same |
GB2370043A (en) * | 2000-12-12 | 2002-06-19 | Mitel Corp | Chemical treatment of silica films |
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