JPS6463219A - Manufacture of superconductive thin film - Google Patents

Manufacture of superconductive thin film

Info

Publication number
JPS6463219A
JPS6463219A JP62219752A JP21975287A JPS6463219A JP S6463219 A JPS6463219 A JP S6463219A JP 62219752 A JP62219752 A JP 62219752A JP 21975287 A JP21975287 A JP 21975287A JP S6463219 A JPS6463219 A JP S6463219A
Authority
JP
Japan
Prior art keywords
oxygen
copper
thin film
sputtering
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62219752A
Other languages
Japanese (ja)
Inventor
Shinichi Takano
Shuichi Nogawa
Eiji Kamijo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP62219752A priority Critical patent/JPS6463219A/en
Publication of JPS6463219A publication Critical patent/JPS6463219A/en
Pending legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
    • Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)

Abstract

PURPOSE:To obtain a superconductive thin film having superconductive characteristic stable at high temperatures by making adhesion of group IIIa metallic sum and/or its oxide, group IIa metal and/or its oxide, and copper and/or its oxide to a substrate under the existence of oxygen and fluorine. CONSTITUTION:For instance, an alloy of group IIIa metal-group IIa metal- copper-oxygen of Y-Ba-Cu-O etc., is used as a target 3. At that time, the atomic number ratio of group IIIa metal: group IIa metal: copper is made to about 0.5-2:2-10:3-10. Sputtering occurs with an ion beam a drawn from an ion source 2 for sputtering striked to the target 3 when forming film to a substrate 8. Forming film is made with sputtering particles b emissioned from the target 3 by the sputtering adhered to the substrate 8 surface. During such forming film, a thin film composed of IIIa-IIa-copper-oxygen-fluoring is formed on the substrate 8 with oxygen gas and fluoring gas introduced from gas introduction pipes 6 and 7 and reacted to the particles b. Crystallization of rhombic system is made to prompt with the thin film heat treated under an oxygen gas atmosphere after forming film.
JP62219752A 1987-09-01 1987-09-01 Manufacture of superconductive thin film Pending JPS6463219A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62219752A JPS6463219A (en) 1987-09-01 1987-09-01 Manufacture of superconductive thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62219752A JPS6463219A (en) 1987-09-01 1987-09-01 Manufacture of superconductive thin film

Publications (1)

Publication Number Publication Date
JPS6463219A true JPS6463219A (en) 1989-03-09

Family

ID=16740444

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62219752A Pending JPS6463219A (en) 1987-09-01 1987-09-01 Manufacture of superconductive thin film

Country Status (1)

Country Link
JP (1) JPS6463219A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013071255A1 (en) * 2011-11-11 2013-05-16 Veeco Instruments, Inc. Ion beam deposition of fluorine-based optical films

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013071255A1 (en) * 2011-11-11 2013-05-16 Veeco Instruments, Inc. Ion beam deposition of fluorine-based optical films

Similar Documents

Publication Publication Date Title
EP0269111A3 (en) Method of forming a thin aluminium film
EP0662724A3 (en)
Hallak et al. Synthesis and stability of Nb3Ge made by electron‐beam codeposition
Echlin Recent advances in specimen coating techniques.
JPS5727079A (en) Manufacture of josephson element of oxide superconductor
JPS6463219A (en) Manufacture of superconductive thin film
EP0269112A3 (en) Method of forming a thin crystalline metal film
JPS6486577A (en) Preparation of superconductive oxide film
GB2156387A (en) Cutting tool and method of manufacture thereof
EP0298933B1 (en) Method for the manufacture of copper oxide superconducting films
JPS5772307A (en) Alloy film material for magneticstorage and manufacture of the same
JPS5578235A (en) Sensor and its manufacture
JPS56156760A (en) Method and apparatus for forming coat
JPS57121219A (en) Manufacture of semiconductor device
JPS5671831A (en) Manufacture for magnetic recording medium
JPS52151555A (en) Manufacture of luminous screen
JPS6411380A (en) Manufacture of josephson element
JPS5641636A (en) Directly heated type oxide cathode
RU93049159A (en) METHOD OF MAKING A THIN-FILM CARBON TARGET
JPS6417314A (en) Thin film superconductor
JPS6414820A (en) Manufacture of superconductor thin film
CA2016028A1 (en) Method of fabricating oxide superconducting film
JPS56135927A (en) Forming method for electrode of semiconductor device
Buhl Technology of Thermal Evaporators and Sputtering Equipment for Physical Vapor Deposition.(Retroactive Coverage)
JPS5698469A (en) Forming method for thin film of fluoro-resin