JPS6457143A - Humidity sensor comprising quartz resonator - Google Patents
Humidity sensor comprising quartz resonatorInfo
- Publication number
- JPS6457143A JPS6457143A JP21289187A JP21289187A JPS6457143A JP S6457143 A JPS6457143 A JP S6457143A JP 21289187 A JP21289187 A JP 21289187A JP 21289187 A JP21289187 A JP 21289187A JP S6457143 A JPS6457143 A JP S6457143A
- Authority
- JP
- Japan
- Prior art keywords
- plasma polymerization
- film
- quartz resonator
- polymerization film
- acrylonitrile
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
PURPOSE:To enhance sensitivity for humidity and to improve durability in a high humidity atmosphere, by forming a plasma polymerization film having an amino group on the surface of a quartz resonator. CONSTITUTION:The reduced film of an acrylonitrile plasma polymerization film is formed on the surface of a quartz resonator 24. The formation of the reduced film of the acrylonitrile plasma polymerization film is performed as follows: at first, the acrylonitrile plasma polymerization film is formed on the surface of the quartz resonator 24; thereafter, plasma projecting conditions are intactly continued; and hydrogen gas or steam is made to act on the plasma polymerization film. Thus, the nitrile group of the polyacrylonitrile is transformed into a hydrophilic amino group. As the quartz resonator 24, a material, which has AT cut and an oscillation frequency of about 6MHz or more, is desirable. A silver electrode 22 is attached to the true center of a crystal surface 21. Lead wires 23 and 23' are led out of the crystal surface 21 and the silver electrode 22. Since the humidity sensitive film is formed with the plasma polymerization film, adhesion is excellent.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21289187A JPS6457143A (en) | 1987-08-28 | 1987-08-28 | Humidity sensor comprising quartz resonator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21289187A JPS6457143A (en) | 1987-08-28 | 1987-08-28 | Humidity sensor comprising quartz resonator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6457143A true JPS6457143A (en) | 1989-03-03 |
Family
ID=16629976
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21289187A Pending JPS6457143A (en) | 1987-08-28 | 1987-08-28 | Humidity sensor comprising quartz resonator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6457143A (en) |
-
1987
- 1987-08-28 JP JP21289187A patent/JPS6457143A/en active Pending
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