JPS6455385A - Formation of thin film - Google Patents

Formation of thin film

Info

Publication number
JPS6455385A
JPS6455385A JP62210499A JP21049987A JPS6455385A JP S6455385 A JPS6455385 A JP S6455385A JP 62210499 A JP62210499 A JP 62210499A JP 21049987 A JP21049987 A JP 21049987A JP S6455385 A JPS6455385 A JP S6455385A
Authority
JP
Japan
Prior art keywords
substrate
compd
thin film
contg
irradiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62210499A
Other languages
Japanese (ja)
Inventor
Yasuto Isozaki
Kazuyuki Okano
Hiroshi Hasegawa
Munehiro Tabata
Chiharu Niki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP62210499A priority Critical patent/JPS6455385A/en
Publication of JPS6455385A publication Critical patent/JPS6455385A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/14—Decomposition by irradiation, e.g. photolysis, particle radiation or by mixed irradiation sources
    • C23C18/143—Radiation by light, e.g. photolysis or pyrolysis

Abstract

PURPOSE:To easily form a thin film on a substrate by providing a compd. contg. a metal in the structure to the surface of the substrate and by decomposing the compd. by irradiation with active radiation. CONSTITUTION:A compd. contg. a metal in the structure, e.g., indium 2- ethylhexanoate or cadmium mercaptide is provided to the surface of a substrate. In order to provide the compd., the compd. may be dissolved or dispersed in a solvent and applied or may be directly put on the substrate. The compd. on the substrate is then decomposed by irradiation with active radiation such as electric waves, IR, UV or X-rays to uniformly form a thin film of indium oxide, cadmium sulfide, etc., on the substrate. The metal-contg. thin film can be patterned by masking the substrate before the irradiation.
JP62210499A 1987-08-25 1987-08-25 Formation of thin film Pending JPS6455385A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62210499A JPS6455385A (en) 1987-08-25 1987-08-25 Formation of thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62210499A JPS6455385A (en) 1987-08-25 1987-08-25 Formation of thin film

Publications (1)

Publication Number Publication Date
JPS6455385A true JPS6455385A (en) 1989-03-02

Family

ID=16590373

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62210499A Pending JPS6455385A (en) 1987-08-25 1987-08-25 Formation of thin film

Country Status (1)

Country Link
JP (1) JPS6455385A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04362178A (en) * 1990-12-29 1992-12-15 Abb Patent Gmbh Manufacture of completely or patially coated gold layer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04362178A (en) * 1990-12-29 1992-12-15 Abb Patent Gmbh Manufacture of completely or patially coated gold layer

Similar Documents

Publication Publication Date Title
CA966663A (en) Method for the destructive decomposition of organic wastes without air pollution and with recovery of chemical byproducts
MY108386A (en) A surface-protection method during etching
JPS6455385A (en) Formation of thin film
JPS57160175A (en) Photoelectric converter
IL58441A (en) Surface treatment of semiconductors for photovoltaic and photoelectro chemical applications
JPS51142020A (en) Preparation of paprica pigments
JPS5385948A (en) Method of treating organic waste liquid
JPS51115066A (en) Organic filth treating method
GB2184857B (en) Improvements in or relating to radiation sensitive devices
JPS5760277A (en) Solar cell for wrist watch
EP0003155A3 (en) Method of manufacturing a device using a gold layer masking against a proton bombardment and device manufactured by means of the method
JPS5338716A (en) Surface treatment of inorganic fiber
JPS53129263A (en) Production of chemical plating substrate
JPS56142684A (en) Photoelectric converter
JPS525963A (en) Method of destroying abominability of organic waste liquid
JPS525959A (en) Method of destroying abominability of organic waste liquid
JPS525962A (en) Method of destroying abominability of organic waste liquid
JPS5321080A (en) Method of treating aqueous waste liquid containing dithiocarbamate and sulfurr organic matters
JPS5380165A (en) Manufacture of semiconductor
JPS6424396A (en) Organic dispersed el panel
JPS5567394A (en) Method of manufacturing organic matter decomposing gas and its device
JPS57198401A (en) Composite body having light scattering hardened film
JPS5412566A (en) Production of semiconductor device
GB2006176A (en) Coatings on metal carriers for fast neutron dosimeters
JPS5242389A (en) Semiconductor light emission device