JPS6453479A - Formation of superconducting thin film - Google Patents

Formation of superconducting thin film

Info

Publication number
JPS6453479A
JPS6453479A JP62209929A JP20992987A JPS6453479A JP S6453479 A JPS6453479 A JP S6453479A JP 62209929 A JP62209929 A JP 62209929A JP 20992987 A JP20992987 A JP 20992987A JP S6453479 A JPS6453479 A JP S6453479A
Authority
JP
Japan
Prior art keywords
thin film
superconducting thin
face
aslant
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62209929A
Other languages
Japanese (ja)
Other versions
JP2582083B2 (en
Inventor
Noriyuki Yoshida
Satoru Takano
Takeshi Miyazaki
Noriki Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP62209929A priority Critical patent/JP2582083B2/en
Publication of JPS6453479A publication Critical patent/JPS6453479A/en
Application granted granted Critical
Publication of JP2582083B2 publication Critical patent/JP2582083B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
    • Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment

Landscapes

  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Containers, Films, And Cooling For Superconductive Devices (AREA)

Abstract

PURPOSE:To acquire a considerably large current density in the perpendicular direction to a desired face of a substrate to be formed by projecting a gas ion aslant to the desired face of the substrate in ion beam spattering. CONSTITUTION:In forming a superconducting thin film 21, which consists of oxide ceramics material, onto desired face 12 of a substrate 11, an irradiation angle theta of gas ion beam is set aslant. By doing this, 100 faces 24 in the crystal structure of the formed superconducting thin film are also oriented aslant to the desired face 12 and the formed current channel is also oriented aslant to the face 12. Accordingly, by setting the irradiation angle theta at 30-60 degrees, the critical current density both parallel and perpendicular to the face 12 can be on the approximately same level thus forming a superconducting thin film having little anisotropy.
JP62209929A 1987-08-24 1987-08-24 Method of forming superconducting thin film Expired - Lifetime JP2582083B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62209929A JP2582083B2 (en) 1987-08-24 1987-08-24 Method of forming superconducting thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62209929A JP2582083B2 (en) 1987-08-24 1987-08-24 Method of forming superconducting thin film

Publications (2)

Publication Number Publication Date
JPS6453479A true JPS6453479A (en) 1989-03-01
JP2582083B2 JP2582083B2 (en) 1997-02-19

Family

ID=16580995

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62209929A Expired - Lifetime JP2582083B2 (en) 1987-08-24 1987-08-24 Method of forming superconducting thin film

Country Status (1)

Country Link
JP (1) JP2582083B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01261204A (en) * 1988-04-11 1989-10-18 Fujikura Ltd Production of oxide based superconductor

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63261626A (en) * 1987-04-20 1988-10-28 Nissin Electric Co Ltd Manufacture of superconductive thin film

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63261626A (en) * 1987-04-20 1988-10-28 Nissin Electric Co Ltd Manufacture of superconductive thin film

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01261204A (en) * 1988-04-11 1989-10-18 Fujikura Ltd Production of oxide based superconductor

Also Published As

Publication number Publication date
JP2582083B2 (en) 1997-02-19

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