JPS6445180A - Manufacture of superconductive thin film using composite target - Google Patents
Manufacture of superconductive thin film using composite targetInfo
- Publication number
- JPS6445180A JPS6445180A JP62200787A JP20078787A JPS6445180A JP S6445180 A JPS6445180 A JP S6445180A JP 62200787 A JP62200787 A JP 62200787A JP 20078787 A JP20078787 A JP 20078787A JP S6445180 A JPS6445180 A JP S6445180A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- composite target
- composition
- manufacture
- alloys
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 title abstract 8
- 239000002131 composite material Substances 0.000 title abstract 4
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000000203 mixture Substances 0.000 abstract 3
- 229910052784 alkaline earth metal Inorganic materials 0.000 abstract 2
- 229910045601 alloy Inorganic materials 0.000 abstract 2
- 239000000956 alloy Substances 0.000 abstract 2
- 239000010949 copper Substances 0.000 abstract 2
- 229910052761 rare earth metal Inorganic materials 0.000 abstract 2
- 238000004544 sputter deposition Methods 0.000 abstract 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract 1
- 229910052802 copper Inorganic materials 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0268—Manufacture or treatment of devices comprising copper oxide
- H10N60/0296—Processes for depositing or forming copper oxide superconductor layers
- H10N60/0408—Processes for depositing or forming copper oxide superconductor layers by sputtering
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physical Vapour Deposition (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE:To obtain a uniform superconducting thin film with good reproducibility and to make it possible to use the thin film as a superconductive material by a method wherein a composite target is used and the thin film is manufactured by a sputtering method. CONSTITUTION:A multicomponent superconducting thin film consisting of a rare earth element, an alkali earth metal and copper is manufactured by a sputtering method wherein a composite target is used. That is, the rare earth element and the alkali earth metal or these alloys or these oxides are sputtered on a Cu target substrate in a surface area ratio to correspond to the composition of the thin film, which is targeted to each of the above element, metal, alloys and oxides, and moreover, using the composite target arranged in some form of a sector, the form of a concentric circle and the form of a pinhole. Thereby, a control of the composition of the thin film can be easily performed and the thin film, whose composition and thickness are uniform and which has a superior superconductivity, can be easily obtained with good reproducibility.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62200787A JPS6445180A (en) | 1987-08-13 | 1987-08-13 | Manufacture of superconductive thin film using composite target |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62200787A JPS6445180A (en) | 1987-08-13 | 1987-08-13 | Manufacture of superconductive thin film using composite target |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6445180A true JPS6445180A (en) | 1989-02-17 |
Family
ID=16430183
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62200787A Pending JPS6445180A (en) | 1987-08-13 | 1987-08-13 | Manufacture of superconductive thin film using composite target |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6445180A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6476619A (en) * | 1987-09-16 | 1989-03-22 | Sumitomo Electric Industries | Manufacture of composite oxide superconductive thin film |
JPH03260063A (en) * | 1990-03-09 | 1991-11-20 | Kokusai Chodendo Sangyo Gijutsu Kenkyu Center | Formation of oxide thin film |
-
1987
- 1987-08-13 JP JP62200787A patent/JPS6445180A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6476619A (en) * | 1987-09-16 | 1989-03-22 | Sumitomo Electric Industries | Manufacture of composite oxide superconductive thin film |
JPH03260063A (en) * | 1990-03-09 | 1991-11-20 | Kokusai Chodendo Sangyo Gijutsu Kenkyu Center | Formation of oxide thin film |
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