JPS6436764A - Manufacture of thin multicomponent system film by sputtering - Google Patents
Manufacture of thin multicomponent system film by sputteringInfo
- Publication number
- JPS6436764A JPS6436764A JP19013787A JP19013787A JPS6436764A JP S6436764 A JPS6436764 A JP S6436764A JP 19013787 A JP19013787 A JP 19013787A JP 19013787 A JP19013787 A JP 19013787A JP S6436764 A JPS6436764 A JP S6436764A
- Authority
- JP
- Japan
- Prior art keywords
- thin
- multicomponent system
- sputtering
- manufacture
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
Abstract
PURPOSE:To manufacture a thin multicomponent system film free from dislocation of composition ratio, by using a composite target in which thin film-forming materials are vapor-deposited on a plate in an area ratio so that the required composition ratio is reached. CONSTITUTION:Cu, etc., are used for a plate to be a target. Y1, Ba2, Cu3 etc., as thin film-forming elements, are vapor-deposited onto this Cu substrate 10 by a PVD method into sectorial or other patterns, by which a composite target is prepared. At this time, vapor deposition is carried out in an area ratio in which respective metals as component materials are formed into a composition ratio capable of showing the desired superconducting phenomenon when formed into a thin film. By using this composite target, the thin multicomponent system superconducting film of Y-Ba-Cu-O or other types can be manufactured by means of sputtering.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19013787A JPS6436764A (en) | 1987-07-31 | 1987-07-31 | Manufacture of thin multicomponent system film by sputtering |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19013787A JPS6436764A (en) | 1987-07-31 | 1987-07-31 | Manufacture of thin multicomponent system film by sputtering |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6436764A true JPS6436764A (en) | 1989-02-07 |
Family
ID=16253012
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19013787A Pending JPS6436764A (en) | 1987-07-31 | 1987-07-31 | Manufacture of thin multicomponent system film by sputtering |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6436764A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0561289A1 (en) * | 1992-03-19 | 1993-09-22 | MERCK PATENT GmbH | Material for vapour deposition for the production of high refractive optical layers |
-
1987
- 1987-07-31 JP JP19013787A patent/JPS6436764A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0561289A1 (en) * | 1992-03-19 | 1993-09-22 | MERCK PATENT GmbH | Material for vapour deposition for the production of high refractive optical layers |
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