JPS6441977A - Flaw detecting method - Google Patents
Flaw detecting methodInfo
- Publication number
- JPS6441977A JPS6441977A JP62197349A JP19734987A JPS6441977A JP S6441977 A JPS6441977 A JP S6441977A JP 62197349 A JP62197349 A JP 62197349A JP 19734987 A JP19734987 A JP 19734987A JP S6441977 A JPS6441977 A JP S6441977A
- Authority
- JP
- Japan
- Prior art keywords
- image
- memory
- flaw
- detecting method
- white
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Image Processing (AREA)
- Image Analysis (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62197349A JPS6441977A (en) | 1987-08-07 | 1987-08-07 | Flaw detecting method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62197349A JPS6441977A (en) | 1987-08-07 | 1987-08-07 | Flaw detecting method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6441977A true JPS6441977A (en) | 1989-02-14 |
Family
ID=16373004
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62197349A Pending JPS6441977A (en) | 1987-08-07 | 1987-08-07 | Flaw detecting method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6441977A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11216936B2 (en) | 2016-02-19 | 2022-01-04 | SCREEN Holdings Co., Ltd. | Defect detection device, defect detection method, and program |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62259184A (ja) * | 1986-05-06 | 1987-11-11 | Hitachi Ltd | パタ−ンの傷検出装置 |
-
1987
- 1987-08-07 JP JP62197349A patent/JPS6441977A/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62259184A (ja) * | 1986-05-06 | 1987-11-11 | Hitachi Ltd | パタ−ンの傷検出装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11216936B2 (en) | 2016-02-19 | 2022-01-04 | SCREEN Holdings Co., Ltd. | Defect detection device, defect detection method, and program |
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