JPS6441977A - Flaw detecting method - Google Patents
Flaw detecting methodInfo
- Publication number
- JPS6441977A JPS6441977A JP62197349A JP19734987A JPS6441977A JP S6441977 A JPS6441977 A JP S6441977A JP 62197349 A JP62197349 A JP 62197349A JP 19734987 A JP19734987 A JP 19734987A JP S6441977 A JPS6441977 A JP S6441977A
- Authority
- JP
- Japan
- Prior art keywords
- image
- memory
- flaw
- detecting method
- white
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Image Processing (AREA)
- Image Analysis (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
PURPOSE:To prevent erroneous detection at a boundary part and to easily detect the size of a flaw by increasing the number of the times of contraction more than the number of the times of expansion by only one time, inverting them and obtaining the AND of an original image. CONSTITUTION:An analog signal fetched from a camera 10 is converted into a binary image by a binarization means 21, recorded into a first image memory 22 and next, copied into a second image memory 23. Successively, by a image processing means 24, the image stored in the first memory 22 is expanded N times and after that, contracted N+1 times. Further, the image is black/white- inverted and the contents of the second memory 23 and the AND are operated. This result is detected as the flaw and transmitted from an output means 25 to an external part. By this detecting method, a white point is not generated at the boundary part and an accurate flaw detecting image can be obtained only by eliminating one image element along a boundary line.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62197349A JPS6441977A (en) | 1987-08-07 | 1987-08-07 | Flaw detecting method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62197349A JPS6441977A (en) | 1987-08-07 | 1987-08-07 | Flaw detecting method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6441977A true JPS6441977A (en) | 1989-02-14 |
Family
ID=16373004
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62197349A Pending JPS6441977A (en) | 1987-08-07 | 1987-08-07 | Flaw detecting method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6441977A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11216936B2 (en) | 2016-02-19 | 2022-01-04 | SCREEN Holdings Co., Ltd. | Defect detection device, defect detection method, and program |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62259184A (en) * | 1986-05-06 | 1987-11-11 | Hitachi Ltd | Detecting device for pattern crack |
-
1987
- 1987-08-07 JP JP62197349A patent/JPS6441977A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62259184A (en) * | 1986-05-06 | 1987-11-11 | Hitachi Ltd | Detecting device for pattern crack |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11216936B2 (en) | 2016-02-19 | 2022-01-04 | SCREEN Holdings Co., Ltd. | Defect detection device, defect detection method, and program |
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