JPS6441977A - Flaw detecting method - Google Patents

Flaw detecting method

Info

Publication number
JPS6441977A
JPS6441977A JP62197349A JP19734987A JPS6441977A JP S6441977 A JPS6441977 A JP S6441977A JP 62197349 A JP62197349 A JP 62197349A JP 19734987 A JP19734987 A JP 19734987A JP S6441977 A JPS6441977 A JP S6441977A
Authority
JP
Japan
Prior art keywords
image
memory
flaw
detecting method
white
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62197349A
Other languages
Japanese (ja)
Inventor
Yoshihiro Mizuniwa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Engineering Co Ltd
Hitachi Ltd
Original Assignee
Hitachi Engineering Co Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Engineering Co Ltd, Hitachi Ltd filed Critical Hitachi Engineering Co Ltd
Priority to JP62197349A priority Critical patent/JPS6441977A/en
Publication of JPS6441977A publication Critical patent/JPS6441977A/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To prevent erroneous detection at a boundary part and to easily detect the size of a flaw by increasing the number of the times of contraction more than the number of the times of expansion by only one time, inverting them and obtaining the AND of an original image. CONSTITUTION:An analog signal fetched from a camera 10 is converted into a binary image by a binarization means 21, recorded into a first image memory 22 and next, copied into a second image memory 23. Successively, by a image processing means 24, the image stored in the first memory 22 is expanded N times and after that, contracted N+1 times. Further, the image is black/white- inverted and the contents of the second memory 23 and the AND are operated. This result is detected as the flaw and transmitted from an output means 25 to an external part. By this detecting method, a white point is not generated at the boundary part and an accurate flaw detecting image can be obtained only by eliminating one image element along a boundary line.
JP62197349A 1987-08-07 1987-08-07 Flaw detecting method Pending JPS6441977A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62197349A JPS6441977A (en) 1987-08-07 1987-08-07 Flaw detecting method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62197349A JPS6441977A (en) 1987-08-07 1987-08-07 Flaw detecting method

Publications (1)

Publication Number Publication Date
JPS6441977A true JPS6441977A (en) 1989-02-14

Family

ID=16373004

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62197349A Pending JPS6441977A (en) 1987-08-07 1987-08-07 Flaw detecting method

Country Status (1)

Country Link
JP (1) JPS6441977A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11216936B2 (en) 2016-02-19 2022-01-04 SCREEN Holdings Co., Ltd. Defect detection device, defect detection method, and program

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62259184A (en) * 1986-05-06 1987-11-11 Hitachi Ltd Detecting device for pattern crack

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62259184A (en) * 1986-05-06 1987-11-11 Hitachi Ltd Detecting device for pattern crack

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11216936B2 (en) 2016-02-19 2022-01-04 SCREEN Holdings Co., Ltd. Defect detection device, defect detection method, and program

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