JPS6439534A - Pressure distribution measurement sensor - Google Patents

Pressure distribution measurement sensor

Info

Publication number
JPS6439534A
JPS6439534A JP19756587A JP19756587A JPS6439534A JP S6439534 A JPS6439534 A JP S6439534A JP 19756587 A JP19756587 A JP 19756587A JP 19756587 A JP19756587 A JP 19756587A JP S6439534 A JPS6439534 A JP S6439534A
Authority
JP
Japan
Prior art keywords
film
substrate
voltage
pressure
pressure distribution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19756587A
Other languages
English (en)
Other versions
JPH0684914B2 (ja
Inventor
Masanori Kuroda
Michiro Araki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP62197565A priority Critical patent/JPH0684914B2/ja
Publication of JPS6439534A publication Critical patent/JPS6439534A/ja
Publication of JPH0684914B2 publication Critical patent/JPH0684914B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Force Measurement Appropriate To Specific Purposes (AREA)
JP62197565A 1987-08-06 1987-08-06 圧力分布測定センサ− Expired - Lifetime JPH0684914B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62197565A JPH0684914B2 (ja) 1987-08-06 1987-08-06 圧力分布測定センサ−

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62197565A JPH0684914B2 (ja) 1987-08-06 1987-08-06 圧力分布測定センサ−

Publications (2)

Publication Number Publication Date
JPS6439534A true JPS6439534A (en) 1989-02-09
JPH0684914B2 JPH0684914B2 (ja) 1994-10-26

Family

ID=16376616

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62197565A Expired - Lifetime JPH0684914B2 (ja) 1987-08-06 1987-08-06 圧力分布測定センサ−

Country Status (1)

Country Link
JP (1) JPH0684914B2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007510913A (ja) * 2003-11-05 2007-04-26 イノヴェイティブ サイエンティフィック ソリューションズ，インコーポレイテッド 表面接触力を判定するための方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007510913A (ja) * 2003-11-05 2007-04-26 イノヴェイティブ サイエンティフィック ソリューションズ，インコーポレイテッド 表面接触力を判定するための方法

Also Published As

Publication number Publication date
JPH0684914B2 (ja) 1994-10-26

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term