JPS6433840A - Surface analyzer - Google Patents

Surface analyzer

Info

Publication number
JPS6433840A
JPS6433840A JP18829587A JP18829587A JPS6433840A JP S6433840 A JPS6433840 A JP S6433840A JP 18829587 A JP18829587 A JP 18829587A JP 18829587 A JP18829587 A JP 18829587A JP S6433840 A JPS6433840 A JP S6433840A
Authority
JP
Japan
Prior art keywords
sample
secondary electrons
strength
proton beam
incident point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18829587A
Other languages
Japanese (ja)
Inventor
Masahiko Aoki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP18829587A priority Critical patent/JPS6433840A/en
Publication of JPS6433840A publication Critical patent/JPS6433840A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To determine the correct position of a proton beam irradiated to a sample by providing four or more secondary electron detectors around the sample in a ultrahigh-vacuum chamber. CONSTITUTION:Four or more secondary electron detectors 11 are installed around a sample. The secondary electron detector 11 counts the number of secondary electrons generated when protons hit the surface of the sample 4. Secondary electrons are isotropically emitted, the strength of the secondary electrons is large near the incident point of the proton beam. The strength of the secondary electrons is small apart from the incident point. When the strength of the secondary electrons radially emitted from the sample 4 is measured by four or more secondary electron detectors 11, the incident point of the proton beam can be detected.
JP18829587A 1987-07-28 1987-07-28 Surface analyzer Pending JPS6433840A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18829587A JPS6433840A (en) 1987-07-28 1987-07-28 Surface analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18829587A JPS6433840A (en) 1987-07-28 1987-07-28 Surface analyzer

Publications (1)

Publication Number Publication Date
JPS6433840A true JPS6433840A (en) 1989-02-03

Family

ID=16221117

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18829587A Pending JPS6433840A (en) 1987-07-28 1987-07-28 Surface analyzer

Country Status (1)

Country Link
JP (1) JPS6433840A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5439207A (en) * 1993-02-23 1995-08-08 Hermann Schleicher Gmbh & Co. Conveyor system for metallic plates and strips
JP2003082829A (en) * 2001-09-04 2003-03-19 Asahi Kasei Corp Solar-cell roofing material
WO2007037147A1 (en) 2005-09-29 2007-04-05 Nikon Corporation Content data reproduction system and program for realizing the content data reproduction system

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5439207A (en) * 1993-02-23 1995-08-08 Hermann Schleicher Gmbh & Co. Conveyor system for metallic plates and strips
JP2003082829A (en) * 2001-09-04 2003-03-19 Asahi Kasei Corp Solar-cell roofing material
WO2007037147A1 (en) 2005-09-29 2007-04-05 Nikon Corporation Content data reproduction system and program for realizing the content data reproduction system

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