JPS6433840A - Surface analyzer - Google Patents
Surface analyzerInfo
- Publication number
- JPS6433840A JPS6433840A JP18829587A JP18829587A JPS6433840A JP S6433840 A JPS6433840 A JP S6433840A JP 18829587 A JP18829587 A JP 18829587A JP 18829587 A JP18829587 A JP 18829587A JP S6433840 A JPS6433840 A JP S6433840A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- secondary electrons
- strength
- proton beam
- incident point
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To determine the correct position of a proton beam irradiated to a sample by providing four or more secondary electron detectors around the sample in a ultrahigh-vacuum chamber. CONSTITUTION:Four or more secondary electron detectors 11 are installed around a sample. The secondary electron detector 11 counts the number of secondary electrons generated when protons hit the surface of the sample 4. Secondary electrons are isotropically emitted, the strength of the secondary electrons is large near the incident point of the proton beam. The strength of the secondary electrons is small apart from the incident point. When the strength of the secondary electrons radially emitted from the sample 4 is measured by four or more secondary electron detectors 11, the incident point of the proton beam can be detected.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18829587A JPS6433840A (en) | 1987-07-28 | 1987-07-28 | Surface analyzer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18829587A JPS6433840A (en) | 1987-07-28 | 1987-07-28 | Surface analyzer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6433840A true JPS6433840A (en) | 1989-02-03 |
Family
ID=16221117
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18829587A Pending JPS6433840A (en) | 1987-07-28 | 1987-07-28 | Surface analyzer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6433840A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5439207A (en) * | 1993-02-23 | 1995-08-08 | Hermann Schleicher Gmbh & Co. | Conveyor system for metallic plates and strips |
JP2003082829A (en) * | 2001-09-04 | 2003-03-19 | Asahi Kasei Corp | Solar-cell roofing material |
WO2007037147A1 (en) | 2005-09-29 | 2007-04-05 | Nikon Corporation | Content data reproduction system and program for realizing the content data reproduction system |
-
1987
- 1987-07-28 JP JP18829587A patent/JPS6433840A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5439207A (en) * | 1993-02-23 | 1995-08-08 | Hermann Schleicher Gmbh & Co. | Conveyor system for metallic plates and strips |
JP2003082829A (en) * | 2001-09-04 | 2003-03-19 | Asahi Kasei Corp | Solar-cell roofing material |
WO2007037147A1 (en) | 2005-09-29 | 2007-04-05 | Nikon Corporation | Content data reproduction system and program for realizing the content data reproduction system |
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