JPS573358A - Detector for electron beam device - Google Patents

Detector for electron beam device

Info

Publication number
JPS573358A
JPS573358A JP7562680A JP7562680A JPS573358A JP S573358 A JPS573358 A JP S573358A JP 7562680 A JP7562680 A JP 7562680A JP 7562680 A JP7562680 A JP 7562680A JP S573358 A JPS573358 A JP S573358A
Authority
JP
Japan
Prior art keywords
detector
sample
electron detector
sample chamber
signals
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7562680A
Other languages
Japanese (ja)
Inventor
Yoshihisa Namikawa
Yoshimasa Unno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7562680A priority Critical patent/JPS573358A/en
Publication of JPS573358A publication Critical patent/JPS573358A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To minimize an area which is occupied by detectors in the wall surface of a sample chamber and simultaneously detect a number of signals by installing each detector on a linear conical member. CONSTITUTION:The electron beam 2 emitted from a mirror cone 1 is irradiated on the sample 5 on its bench 4 which is fixed in a sample chamber 3. The sample 5 is cooled by a coolant 10 which is provided on the wall section of the sample chamber. The signals from this sample are detected by a secondary electron detector 14 which is supported on a flange 11 and mounted in a cone 13 that is fixed by a lock nut 12, a low sensitivity reflection electron detector 15, a CL detector 16 which detects cathode luminescence, a high sensitivity reflection electron detector 17, etc. The secondary electrons are pulled by the high voltage which is supplied from a terminal 18 and incident on the secondary electron detector 14. Light is converted and removed from a cable 19. Another detection signal is removed from a terminal 18A.
JP7562680A 1980-06-06 1980-06-06 Detector for electron beam device Pending JPS573358A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7562680A JPS573358A (en) 1980-06-06 1980-06-06 Detector for electron beam device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7562680A JPS573358A (en) 1980-06-06 1980-06-06 Detector for electron beam device

Publications (1)

Publication Number Publication Date
JPS573358A true JPS573358A (en) 1982-01-08

Family

ID=13581619

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7562680A Pending JPS573358A (en) 1980-06-06 1980-06-06 Detector for electron beam device

Country Status (1)

Country Link
JP (1) JPS573358A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4818874A (en) * 1987-04-17 1989-04-04 Jeol Ltd. Scanning electron microscope
JPH06183387A (en) * 1992-09-29 1994-07-05 Chuichi Suzuki Linear drive bicycle
CN108267430A (en) * 2016-12-30 2018-07-10 北京大学 A kind of a wide range of electron-beam excitation fluorescence imaging and spectral measurement device and its method
CN108279247A (en) * 2016-12-30 2018-07-13 北京大学 A kind of a wide range of direct detection imaging device of electron-beam excitation fluorescence and its method

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4818874A (en) * 1987-04-17 1989-04-04 Jeol Ltd. Scanning electron microscope
JPH06183387A (en) * 1992-09-29 1994-07-05 Chuichi Suzuki Linear drive bicycle
CN108267430A (en) * 2016-12-30 2018-07-10 北京大学 A kind of a wide range of electron-beam excitation fluorescence imaging and spectral measurement device and its method
CN108279247A (en) * 2016-12-30 2018-07-13 北京大学 A kind of a wide range of direct detection imaging device of electron-beam excitation fluorescence and its method
CN108279247B (en) * 2016-12-30 2019-07-26 北京金竟科技有限责任公司 A kind of a wide range of direct detection imaging device of electron-beam excitation fluorescence and its method

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