JPS5350794A - Analytical apparatus of secondary electron energy - Google Patents

Analytical apparatus of secondary electron energy

Info

Publication number
JPS5350794A
JPS5350794A JP12565176A JP12565176A JPS5350794A JP S5350794 A JPS5350794 A JP S5350794A JP 12565176 A JP12565176 A JP 12565176A JP 12565176 A JP12565176 A JP 12565176A JP S5350794 A JPS5350794 A JP S5350794A
Authority
JP
Japan
Prior art keywords
secondary electron
analytical apparatus
electron energy
isolated
noise
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12565176A
Other languages
Japanese (ja)
Inventor
Atsushi Shibata
Tadatetsu Hattori
Shinjiro Katagiri
Takashi Nagatani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12565176A priority Critical patent/JPS5350794A/en
Publication of JPS5350794A publication Critical patent/JPS5350794A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/025—Detectors specially adapted to particle spectrometers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

PURPOSE:To enable to obtain detecting signal of secondary electron, having a least noise and to improve the measuring sensitivity, by using charged particle detector, isolated from primary electron beam, at the analytical apparatus of secondary electron energy from minute area of solid surface.
JP12565176A 1976-10-19 1976-10-19 Analytical apparatus of secondary electron energy Pending JPS5350794A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12565176A JPS5350794A (en) 1976-10-19 1976-10-19 Analytical apparatus of secondary electron energy

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12565176A JPS5350794A (en) 1976-10-19 1976-10-19 Analytical apparatus of secondary electron energy

Publications (1)

Publication Number Publication Date
JPS5350794A true JPS5350794A (en) 1978-05-09

Family

ID=14915281

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12565176A Pending JPS5350794A (en) 1976-10-19 1976-10-19 Analytical apparatus of secondary electron energy

Country Status (1)

Country Link
JP (1) JPS5350794A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5535291A (en) * 1978-09-01 1980-03-12 Physical Electronics Ind Inc Electronic analyzer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5535291A (en) * 1978-09-01 1980-03-12 Physical Electronics Ind Inc Electronic analyzer
JPH0226183B2 (en) * 1978-09-01 1990-06-07 Perkin Elmer Corp

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