JPS6428297A - Vapor phase synthesis of diamond - Google Patents

Vapor phase synthesis of diamond

Info

Publication number
JPS6428297A
JPS6428297A JP62250598A JP25059887A JPS6428297A JP S6428297 A JPS6428297 A JP S6428297A JP 62250598 A JP62250598 A JP 62250598A JP 25059887 A JP25059887 A JP 25059887A JP S6428297 A JPS6428297 A JP S6428297A
Authority
JP
Japan
Prior art keywords
nozzle
substrate
hot plasma
electrodes
chemical vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62250598A
Other languages
Japanese (ja)
Other versions
JPH0449517B2 (en
Inventor
Kenichi Sasaki
Kazuaki Kurihara
Motonobu Kawarada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP62250598A priority Critical patent/JPS6428297A/en
Priority to EP88302836A priority patent/EP0286306B1/en
Priority to DE88302836T priority patent/DE3884653T2/en
Priority to SU884355493A priority patent/RU2032765C1/en
Priority to KR1019880003737A priority patent/KR910006784B1/en
Priority to US07/177,504 priority patent/US5368897A/en
Publication of JPS6428297A publication Critical patent/JPS6428297A/en
Priority to US07/905,226 priority patent/US5403399A/en
Publication of JPH0449517B2 publication Critical patent/JPH0449517B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE:To enable chemical vapor growth of a diamond film having a large area on a substrate at high speed in high productivity, by applying a DC voltage between an inner wall of a nozzle attached to an encircling anode member and a cathode oppositely placed in the nozzle, generating arc discharge between the electrodes and ejecting the generated hot plasma. CONSTITUTION:A hot plasma jet generation apparatus is composed of plural nozzles 6 opened on an encircling member 1 acting as an anode and a cathode 2 placed in the nozzle opposite to the inner wall of the nozzle. The generation apparatus is placed in a vacuum chamber 12 and a water-cooled substrate holder 11 supporting a substrate 10 is placed opposite to the apparatus. The chamber 12 is evacuated, a gaseous carbon compound such as CH4 is introduced into the nozzle 6 through a raw material gas feeding pipe 4, H2 gas is supplied through a discharging gas feeding pipe 3 and a DC voltage is applied between the electrodes 1 and 2 to generate arc discharge and activate the introduced gas. The generated hot plasma jet 8 is ejected through the nozzle 6 and made to collide and quenched with the cooled substrate 10 to effect the chemical vapor growth of a diamond film 9.
JP62250598A 1987-04-03 1987-10-06 Vapor phase synthesis of diamond Granted JPS6428297A (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP62250598A JPS6428297A (en) 1987-04-03 1987-10-06 Vapor phase synthesis of diamond
EP88302836A EP0286306B1 (en) 1987-04-03 1988-03-30 Method and apparatus for vapor deposition of diamond
DE88302836T DE3884653T2 (en) 1987-04-03 1988-03-30 Method and device for the vapor deposition of diamond.
SU884355493A RU2032765C1 (en) 1987-04-03 1988-04-01 Method of diamond coating application from vapor phase and a device for it realization
KR1019880003737A KR910006784B1 (en) 1987-04-03 1988-04-02 Method and apparatus for vapor deposition of diamond
US07/177,504 US5368897A (en) 1987-04-03 1988-04-04 Method for arc discharge plasma vapor deposition of diamond
US07/905,226 US5403399A (en) 1987-04-03 1992-06-29 Method and apparatus for vapor deposition of diamond

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP8331887 1987-04-03
JP62250598A JPS6428297A (en) 1987-04-03 1987-10-06 Vapor phase synthesis of diamond

Publications (2)

Publication Number Publication Date
JPS6428297A true JPS6428297A (en) 1989-01-30
JPH0449517B2 JPH0449517B2 (en) 1992-08-11

Family

ID=26424366

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62250598A Granted JPS6428297A (en) 1987-04-03 1987-10-06 Vapor phase synthesis of diamond

Country Status (1)

Country Link
JP (1) JPS6428297A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02196583A (en) * 1989-01-26 1990-08-03 Nec Home Electron Ltd Display device for muse video signal
EP0388861A2 (en) * 1989-03-20 1990-09-26 Onoda Cement Company, Ltd. Method for making diamond and apparatus therefor
JP2006509907A (en) * 2002-12-12 2006-03-23 オーテーベー、グループ、ベスローテン、フェンノートシャップ Method and apparatus for processing a substrate

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02196583A (en) * 1989-01-26 1990-08-03 Nec Home Electron Ltd Display device for muse video signal
EP0388861A2 (en) * 1989-03-20 1990-09-26 Onoda Cement Company, Ltd. Method for making diamond and apparatus therefor
JP2006509907A (en) * 2002-12-12 2006-03-23 オーテーベー、グループ、ベスローテン、フェンノートシャップ Method and apparatus for processing a substrate

Also Published As

Publication number Publication date
JPH0449517B2 (en) 1992-08-11

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