JPS6428297A - Vapor phase synthesis of diamond - Google Patents
Vapor phase synthesis of diamondInfo
- Publication number
- JPS6428297A JPS6428297A JP62250598A JP25059887A JPS6428297A JP S6428297 A JPS6428297 A JP S6428297A JP 62250598 A JP62250598 A JP 62250598A JP 25059887 A JP25059887 A JP 25059887A JP S6428297 A JPS6428297 A JP S6428297A
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- substrate
- hot plasma
- electrodes
- chemical vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE:To enable chemical vapor growth of a diamond film having a large area on a substrate at high speed in high productivity, by applying a DC voltage between an inner wall of a nozzle attached to an encircling anode member and a cathode oppositely placed in the nozzle, generating arc discharge between the electrodes and ejecting the generated hot plasma. CONSTITUTION:A hot plasma jet generation apparatus is composed of plural nozzles 6 opened on an encircling member 1 acting as an anode and a cathode 2 placed in the nozzle opposite to the inner wall of the nozzle. The generation apparatus is placed in a vacuum chamber 12 and a water-cooled substrate holder 11 supporting a substrate 10 is placed opposite to the apparatus. The chamber 12 is evacuated, a gaseous carbon compound such as CH4 is introduced into the nozzle 6 through a raw material gas feeding pipe 4, H2 gas is supplied through a discharging gas feeding pipe 3 and a DC voltage is applied between the electrodes 1 and 2 to generate arc discharge and activate the introduced gas. The generated hot plasma jet 8 is ejected through the nozzle 6 and made to collide and quenched with the cooled substrate 10 to effect the chemical vapor growth of a diamond film 9.
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62250598A JPS6428297A (en) | 1987-04-03 | 1987-10-06 | Vapor phase synthesis of diamond |
EP88302836A EP0286306B1 (en) | 1987-04-03 | 1988-03-30 | Method and apparatus for vapor deposition of diamond |
DE88302836T DE3884653T2 (en) | 1987-04-03 | 1988-03-30 | Method and device for the vapor deposition of diamond. |
SU884355493A RU2032765C1 (en) | 1987-04-03 | 1988-04-01 | Method of diamond coating application from vapor phase and a device for it realization |
KR1019880003737A KR910006784B1 (en) | 1987-04-03 | 1988-04-02 | Method and apparatus for vapor deposition of diamond |
US07/177,504 US5368897A (en) | 1987-04-03 | 1988-04-04 | Method for arc discharge plasma vapor deposition of diamond |
US07/905,226 US5403399A (en) | 1987-04-03 | 1992-06-29 | Method and apparatus for vapor deposition of diamond |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8331887 | 1987-04-03 | ||
JP62250598A JPS6428297A (en) | 1987-04-03 | 1987-10-06 | Vapor phase synthesis of diamond |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6428297A true JPS6428297A (en) | 1989-01-30 |
JPH0449517B2 JPH0449517B2 (en) | 1992-08-11 |
Family
ID=26424366
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62250598A Granted JPS6428297A (en) | 1987-04-03 | 1987-10-06 | Vapor phase synthesis of diamond |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6428297A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02196583A (en) * | 1989-01-26 | 1990-08-03 | Nec Home Electron Ltd | Display device for muse video signal |
EP0388861A2 (en) * | 1989-03-20 | 1990-09-26 | Onoda Cement Company, Ltd. | Method for making diamond and apparatus therefor |
JP2006509907A (en) * | 2002-12-12 | 2006-03-23 | オーテーベー、グループ、ベスローテン、フェンノートシャップ | Method and apparatus for processing a substrate |
-
1987
- 1987-10-06 JP JP62250598A patent/JPS6428297A/en active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02196583A (en) * | 1989-01-26 | 1990-08-03 | Nec Home Electron Ltd | Display device for muse video signal |
EP0388861A2 (en) * | 1989-03-20 | 1990-09-26 | Onoda Cement Company, Ltd. | Method for making diamond and apparatus therefor |
JP2006509907A (en) * | 2002-12-12 | 2006-03-23 | オーテーベー、グループ、ベスローテン、フェンノートシャップ | Method and apparatus for processing a substrate |
Also Published As
Publication number | Publication date |
---|---|
JPH0449517B2 (en) | 1992-08-11 |
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