JPS6421962A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS6421962A JPS6421962A JP17934387A JP17934387A JPS6421962A JP S6421962 A JPS6421962 A JP S6421962A JP 17934387 A JP17934387 A JP 17934387A JP 17934387 A JP17934387 A JP 17934387A JP S6421962 A JPS6421962 A JP S6421962A
- Authority
- JP
- Japan
- Prior art keywords
- region
- semiconductor layer
- undoped
- emitter
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Bipolar Transistors (AREA)
Abstract
PURPOSE:To make the contraction of emitter size and the reduction of the homojunction capacity between emitter and base feasible for making a semiconductor device advantageous to be integration-circuited by a method wherein an undoped semiconductor layer and an undoped emitter layer are held between the first implanted region and the second implanted region whereon base electrodes and an emitter electrode are respectively formed. CONSTITUTION:A semiconductor layer 4 in the first conductivity type collector region, another semiconductor layer 3 in the second conductivity type base region formed on the layer 4, the other semiconductor layer 2 in an undoped emitter region formed on the layer 3 and other undoped semiconductor layer 1 formed on the semiconductor layer 2 are provided. Furthermore, the second conductivity type the first implanted region 9 formed on the part from said undoped semiconductor layer 1 to the semiconductor layer 3 in the base region holding a partial region, base electrodes 7 formed on the first undoped region 9, the first conductivity type the second implanted region 10 isolated from the region 9 to be formed on the part from the undoped semiconductor layer 1 held by the first implanted region 9 to the part reaching the semiconductor layer 3 in the base region and an emitter electrode 6 formed on the second implanted region 10 are provided.
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62179343A JPH07120664B2 (en) | 1987-07-16 | 1987-07-16 | Method for manufacturing semiconductor device |
US07/217,292 US4967254A (en) | 1987-07-16 | 1988-07-11 | Semiconductor device |
US07/573,698 US5063167A (en) | 1987-07-16 | 1990-08-28 | Method of producing a bipolar transistor with spacers |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62179343A JPH07120664B2 (en) | 1987-07-16 | 1987-07-16 | Method for manufacturing semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6421962A true JPS6421962A (en) | 1989-01-25 |
JPH07120664B2 JPH07120664B2 (en) | 1995-12-20 |
Family
ID=16064181
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62179343A Expired - Lifetime JPH07120664B2 (en) | 1987-07-16 | 1987-07-16 | Method for manufacturing semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH07120664B2 (en) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61198770A (en) * | 1985-02-28 | 1986-09-03 | Sony Corp | Manufacture of compound semiconductor device |
JPS61276261A (en) * | 1985-05-30 | 1986-12-06 | Fujitsu Ltd | Manufacture of high-speed bipolar transistor |
JPS6246565A (en) * | 1985-08-26 | 1987-02-28 | Hitachi Denshi Ltd | Manufacture of semiconductor device |
JPS6265462A (en) * | 1985-09-18 | 1987-03-24 | Fujitsu Ltd | Manufacture of hetero-junction bipolar semiconductor device |
JPS6276555A (en) * | 1985-06-28 | 1987-04-08 | テキサス インスツルメンツ インコ−ポレイテツド | Planar hetero junction bipolar device and manufacturing thereof |
-
1987
- 1987-07-16 JP JP62179343A patent/JPH07120664B2/en not_active Expired - Lifetime
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61198770A (en) * | 1985-02-28 | 1986-09-03 | Sony Corp | Manufacture of compound semiconductor device |
JPS61276261A (en) * | 1985-05-30 | 1986-12-06 | Fujitsu Ltd | Manufacture of high-speed bipolar transistor |
JPS6276555A (en) * | 1985-06-28 | 1987-04-08 | テキサス インスツルメンツ インコ−ポレイテツド | Planar hetero junction bipolar device and manufacturing thereof |
JPS6246565A (en) * | 1985-08-26 | 1987-02-28 | Hitachi Denshi Ltd | Manufacture of semiconductor device |
JPS6265462A (en) * | 1985-09-18 | 1987-03-24 | Fujitsu Ltd | Manufacture of hetero-junction bipolar semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
JPH07120664B2 (en) | 1995-12-20 |
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