JPS6418801A - Mass flow controller - Google Patents

Mass flow controller

Info

Publication number
JPS6418801A
JPS6418801A JP17563887A JP17563887A JPS6418801A JP S6418801 A JPS6418801 A JP S6418801A JP 17563887 A JP17563887 A JP 17563887A JP 17563887 A JP17563887 A JP 17563887A JP S6418801 A JPS6418801 A JP S6418801A
Authority
JP
Japan
Prior art keywords
controller
flow rate
main body
controller main
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17563887A
Other languages
Japanese (ja)
Other versions
JP2729053B2 (en
Inventor
Satoru Okuyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Yamagata Ltd
Original Assignee
NEC Yamagata Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Yamagata Ltd filed Critical NEC Yamagata Ltd
Priority to JP62175638A priority Critical patent/JP2729053B2/en
Publication of JPS6418801A publication Critical patent/JPS6418801A/en
Application granted granted Critical
Publication of JP2729053B2 publication Critical patent/JP2729053B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electrically Driven Valve-Operating Means (AREA)
  • Control By Computers (AREA)

Abstract

PURPOSE:To prevent the accidents of a mass flow controller by adding a memory part to this controller main body to store the specifications of the controller. CONSTITUTION:A mass flow controller main body 4 consists of a flow rate control valve 5 set in a gas flow path G, a flow rate sensor part 6a, a bridge circuit 6b, an amplifying circuit 7, and a comparison control circuit 8 which drives the valve 5. Furthermore a real flow rate output part 10 which outputs the real flow rate value to a host controller 16 is added together with a set flow rate input part 11 and a power supply 12 for each circuit. A memory part 9 is added to the controller main body 4 to stored the type of the fluid, the maximum flow rate, etc. Then output circuits 1-3 output the data read out of the part 9 to the controller 16. The controller 16 always monitors whether the controller main body 4 is working properly or not. Thus it is not required to confirm visually the controller main body 4.
JP62175638A 1987-07-14 1987-07-14 Mass flow controller Expired - Lifetime JP2729053B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62175638A JP2729053B2 (en) 1987-07-14 1987-07-14 Mass flow controller

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62175638A JP2729053B2 (en) 1987-07-14 1987-07-14 Mass flow controller

Publications (2)

Publication Number Publication Date
JPS6418801A true JPS6418801A (en) 1989-01-23
JP2729053B2 JP2729053B2 (en) 1998-03-18

Family

ID=15999585

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62175638A Expired - Lifetime JP2729053B2 (en) 1987-07-14 1987-07-14 Mass flow controller

Country Status (1)

Country Link
JP (1) JP2729053B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105526400A (en) * 2014-09-29 2016-04-27 博西华电器（江苏）有限公司 Gas flow control device of gas stove, manufacturing method of gas flow control device and gas stove

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61128701U (en) * 1985-01-25 1986-08-12

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61128701U (en) * 1985-01-25 1986-08-12

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105526400A (en) * 2014-09-29 2016-04-27 博西华电器（江苏）有限公司 Gas flow control device of gas stove, manufacturing method of gas flow control device and gas stove
CN105526400B (en) * 2014-09-29 2019-11-19 博西华电器（江苏）有限公司 The gas flow control device and its manufacturing method and gas-cooker of gas-cooker

Also Published As

Publication number Publication date
JP2729053B2 (en) 1998-03-18

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